EP1311763B1 - Pressure seal for a vacuum pump - Google Patents

Pressure seal for a vacuum pump

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Publication number
EP1311763B1
EP1311763B1 EP01963081A EP01963081A EP1311763B1 EP 1311763 B1 EP1311763 B1 EP 1311763B1 EP 01963081 A EP01963081 A EP 01963081A EP 01963081 A EP01963081 A EP 01963081A EP 1311763 B1 EP1311763 B1 EP 1311763B1
Authority
EP
European Patent Office
Prior art keywords
seal
shells
vacuum pump
pump according
longitudinal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP01963081A
Other languages
German (de)
French (fr)
Other versions
EP1311763A1 (en
Inventor
Pascal Durand
Emmanuel Bourgeois
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel CIT SA
Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA, Alcatel SA filed Critical Alcatel CIT SA
Publication of EP1311763A1 publication Critical patent/EP1311763A1/en
Application granted granted Critical
Publication of EP1311763B1 publication Critical patent/EP1311763B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01CROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10Outer members for co-operation with rotary pistons; Casings
    • F01C21/104Stators; Members defining the outer boundaries of the working chamber
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082Details specially related to intermeshing engagement type pumps
    • F04C18/086Carter
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/70Use of multiplicity of similar components; Modular construction

Definitions

  • the present invention relates to multi-stage dry vacuum pumps such as multi-stage Roots type pumps, Claw type or mixed Roots-Claw type, as described in the preamble of claim 1.
  • multi-stage dry vacuum pumps such as multi-stage Roots type pumps, Claw type or mixed Roots-Claw type, as described in the preamble of claim 1.
  • Such a pump is known from EP-A-1,020,645.
  • Such multi-stage dry vacuum pumps are composed of several compression stages placed in series.
  • FIGS. 1 and 2 show a multi-stage Roots dry pump according to a known embodiment.
  • Figure 2 illustrates in perspective a longitudinal section of the stator of such a pump Roots.
  • the adjacent chambers are separated by a transverse wall respectively 9, 10, 11 and 12 each pierced with two holes such as the holes 13 and 14 of the transverse wall 12 for the passage of the shafts of two parallel rotors mechanically coupled to each other, not shown, and carrying compression lobes Roots or Claw type.
  • the adjacent chambers are connected to each other by a gas passage pipe such as the gas channel 15 connecting the discharge of the first compression chamber 4 to the suction of the second compression chamber 5.
  • the rotor lobes, penetrating into the compression chambers 4-8, have a greater diameter than the rotor shafts passing through the holes 13 and 14. It is therefore not possible to axially engage an entire rotor in the stator 1 by simple axial displacement. It is not possible, either, to consider machining a stator 1 monobloc to achieve the cavities constituting the compression chambers 4-8.
  • the stators of known dry vacuum pumps generally consist of the axial assembly of several stator elements, respectively 16, 17, 18, 19 and 20. , assembled according to their respective front walls, such as the front wall 21 of the stator element 16, with the interposition of respective annular seals 22, 23, 24, 25 and 26 compressed axially and insulating each compression chamber 4-8 with respect to the external atmosphere.
  • Roots or Claw dry pump structure requires each stator element 16-20 to be machined separately, and then to carry out a long and delicate assembly operation of adapting the two rotor shafts in a support frame. to adjust the positioning of the lobes of the last compression chamber 8, to position the last stator element 20 with the annular seal 26, to adapt the lobes of the penultimate compression chamber 7, to bring about the penultimate stator element 19 with the annular seal 25, and so on until the first stator element 16.
  • the difficulty is in fact that it is necessary to ensure on the one hand the circumferential radial sealing in the assembly surface longitudinally of the two half-shells, to prevent the passage of gas between the outer atmosphere and the inner cavities of the pump, and simultaneously provide the axial end seal between the half-shells and the end inserts.
  • the axial end seal is provided by annular seals such as those illustrated in FIGS. 1 and 2 in the known pump, and that the peripheral radial seal is provided by compressed longitudinal seals. between the half-shells.
  • the major disadvantage of this solution lies in the fact that there are creepage distances between the longitudinal seals ensuring the peripheral radial seal and the annular seals ensuring the axial end seal. The seal is therefore not satisfactory.
  • the problem proposed by the present invention is to design a new multi-stage dry vacuum pump structure, to reduce significantly the number of parts to assemble during assembly, facilitating assembly and reducing its duration, and while ensuring a satisfactory seal between the inner cavities of the vacuum pump and the outside atmosphere, in order to avoid any risk of pollution of the gases pumped by the external atmosphere, and all risks of pollution of the external atmosphere by the pumped gases.
  • the solution according to the invention consists in providing a continuous monobloc seal which ensures both types of sealing in a stator structure in two half-shells.
  • the seal comprises two annular end portions generally parallel to each other and connected by two longitudinal members which are generally perpendicular to them.
  • first end insert having an axial nose shaped to occupy a corresponding axial recess of the first end of the stator body constituted by the two half-shells assembled. In this way, the first annular end portion of the seal is compressed radially by the two half-shells on the axial nose.
  • the axial nose comprises a peripheral annular groove for receiving said first annular end portion of the seal.
  • At least one of the half-shells comprises in its longitudinal assembly surface two longitudinal grooves for receiving the longitudinal members of the seal.
  • the second annular end portion of the seal may simply be compressed axially by the second end insert against the end faces of the two half-shells.
  • the two half-shells comprise, on their end faces of the second end, grooves shaped to receive said second annular end portion of the seal.
  • the multi-stage dry vacuum pump according to the invention is a five-stage pump, in which the usual structural elements of a known pump of FIGS. 1 and 2 are found, marked with the same numerical references.
  • the entry of the pumped gases 2 an outlet of gas that is not visible in the figures, the successive compression chambers 4, 5, 6, 7 and 8, the transverse walls 9, 10, 11 and 12 of compression chamber separation, the holes 13 and 14 for passage of the rotor shafts, and the gas passage pipe 15 between two successive compression chambers.
  • the rotors 51 and 52 are also shown.
  • the stator is composed of two half-shells 101 and 102 respectively, which meet in a longitudinal assembly surface 30.
  • the longitudinal assembly surface 30 is flat and contains the respective axes II and II-II ( Figure 3) of the two coupled rotor shafts.
  • each compression stage of the pump for example the first compression stage consisting of the first compression chamber 4 and the rotor lobes it contains, is contained in two corresponding portions of each of the half-shells 101 and 102.
  • the two half-shells 101 and 102 enclose, once assembled, all the compression stages of the pump.
  • the main stator body thus constituted by the half-shells 101 and 102 assembled is sealed at its ends by two end inserts, respectively a first end piece 31 and a second end piece 32.
  • the seal between the external atmosphere and the internal cavities of the vacuum pump is achieved by a continuous monobloc seal 33.
  • the seal 33 comprises two parts annular end 34 and 35 generally parallel to each other and connected by two longitudinal members 36 and 37 which are generally perpendicular to them.
  • the longitudinal members 36 and 37 of the seal 33 are generally parallel to one another and are connected to the annular end portions 34 and 35 according to respective connection areas 38, 39, 40 and 41 diametrically opposite two by two.
  • the first annular end portion 34 is generally circular and of smaller diameter than the second annular end portion 35 which itself has an oblong shape to follow. the size of the coupled rotors offset vertically relative to each other.
  • the beams 36 and 37 are axially connected directly to the respective upper and lower regions of the second annular end portion 35, while they are radially connected by elbows 42 and 43 to the first annular end portion 34.
  • the seal 33 has a substantially circular cross section, visible on the section of the longitudinal members 36 and 37.
  • the seals may be of elastomer, or of any suitable material such as a copper, aluminum or indium type metal.
  • the first end insert 31 has an axial nose 44 shaped to occupy a corresponding axial recess 45 of the first end of the stator.
  • the axial nose 44 comprises a peripheral annular groove 46 for receiving the first annular end portion 34 of the seal 33.
  • the annular groove 46 may have a rectangular cross section, of a depth smaller than the diameter of the seal 33.
  • At least one of the half-shells 101 and 102 comprises in its longitudinal assembly surface 30 two longitudinal grooves 47 and 48 ( Figure 3) to receive the longitudinal members 36 and 37 respectively of the seal Sealing 33, as seen in Figures 4 to 6. In this way, the longitudinal members 36 and 37 of the seal 33 are compressed laterally between the two half-shells 101 and 102 in the longitudinal assembly surface 30.
  • the longitudinal grooves 47 and 48 may have a rectangular cross-section, with a depth less than the diameter of the seal 33.
  • the second end annular portion 35 of the seal 33 is compressed axially by the second end insert 32 of the stator against the two half-shells 101 and 102.
  • the two half-shells 101 and 102 comprise, on their end-end faces such as the end face 49 of the first half-shell 101 (FIG. 3), grooves such as the groove 50 in a conformed manner. to accommodate the second annular end portion 35 of the seal 33.
  • the grooves such as the groove 50 may have a rectangular section, of lesser depth than the diameter of the seal 33.
  • the grooves such as the groove 50 are connect to each other to form a continuous groove, and simultaneously connect at their point of connection with the longitudinal grooves 47 and 48 of the longitudinal joining surface 30.
  • the seal 33 is fitted by engaging its first annular end portion 34 in the annular groove 46 of the axial nose 44 of the first end insert 31, then the first half-shell 101 is applied laterally against the axial nose 44.
  • the longitudinal members 36 and 37 of the seal 33 are engaged in the longitudinal grooves 47 and 48, and a first half of the second annular end portion 35 of the seal 33 is engaged in the groove 50. It is then possible to mount the rotors, and easily position the lobes of the rotors in the chambers. Compression 4-8.
  • the second half-shell 102 can then be adapted both laterally against the axial nose 44 and against the longitudinal assembly surface 30, by inserting the second half of the second annular end portion 35 of the seal 33 into the corresponding front groove of second half-shell 102. Finally, it is possible to bring axially the second end insert 32 against the end faces such as the face 49 of the half-shells 101 and 102.
  • the invention applies in particular to the constitution of a multi-stage primary pump type Roots, or type Claw, or Roots-Claw type.

Abstract

The invention concerns a vacuum pump consisting in the assembly of two stator half-shells (101, 102) and two directly mounted end parts (31, 32) with an interposed single-piece continuous pressure seal (33). The pressure seal (33) comprises two annular end parts (34, 35) generally parallel to each other and connected by two side-members (36, 37) which are generally perpendicular thereto. Thus, the number of components to be assembled to produce an multistage dry vacuum pump is reduced, while providing satisfactory impermeability to outside atmosphere.

Description

DOMAINE TECHNIQUE DE L'INVENTIONTECHNICAL FIELD OF THE INVENTION

La présente invention concerne les pompes à vide sèches multi-étagées telles que les pompes multi-étagées de type Roots, de type Claw ou de type mixte Roots-Claw, comme décrit dans le préamblule de la revendication 1. Une telle pompe est connue du document EP-A-1 020 645.The present invention relates to multi-stage dry vacuum pumps such as multi-stage Roots type pumps, Claw type or mixed Roots-Claw type, as described in the preamble of claim 1. Such a pump is known from EP-A-1,020,645.

De telles pompes à vide sèches multi-étagées sont composées de plusieurs étages de compression placés en série.Such multi-stage dry vacuum pumps are composed of several compression stages placed in series.

On a représenté sur les figures 1 et 2 une pompe sèche de type Roots multi-étagée selon une réalisation connue. La figure 2 illustre en perspective une coupe longitudinale du stator d'une telle pompe Roots. On distingue dans le stator 1, entre une entrée de gaz pompés 2 et une sortie de gaz refoulés 3, cinq chambres de compression successives respectivement 4, 5, 6, 7 et 8. Les chambres adjacentes sont séparées par une paroi transversale respectivement 9, 10, 11 et 12 percées chacune de deux trous tels que les trous 13 et 14 de la paroi transversale 12 pour le passage des arbres de deux rotors parallèles mécaniquement couplés l'un à l'autre, non représentés, et portant des lobes de compression de type Roots ou Claw. Les chambres adjacentes sont reliées l'une à l'autre par une canalisation de passage de gaz telle que la canalisation de passage de gaz 15 reliant le refoulement de la première chambre de compression 4 à l'aspiration de la seconde chambre de compression 5.FIGS. 1 and 2 show a multi-stage Roots dry pump according to a known embodiment. Figure 2 illustrates in perspective a longitudinal section of the stator of such a pump Roots. One distinguishes in the stator 1, between a pumped gas inlet 2 and a discharge gas outlet 3, five successive compression chambers respectively 4, 5, 6, 7 and 8. The adjacent chambers are separated by a transverse wall respectively 9, 10, 11 and 12 each pierced with two holes such as the holes 13 and 14 of the transverse wall 12 for the passage of the shafts of two parallel rotors mechanically coupled to each other, not shown, and carrying compression lobes Roots or Claw type. The adjacent chambers are connected to each other by a gas passage pipe such as the gas channel 15 connecting the discharge of the first compression chamber 4 to the suction of the second compression chamber 5.

Les lobes de rotor, pénétrant dans les chambres de compression 4-8, ont un diamètre plus grand que les arbres de rotor traversant les trous 13 et 14. Il n'est donc pas possible d'engager axialement un rotor entier dans le stator 1 par simple déplacement axial. Il n'est pas possible, non plus, d'envisager l'usinage d'un stator 1 monobloc pour réaliser les cavités constituant les chambres de compression 4-8.The rotor lobes, penetrating into the compression chambers 4-8, have a greater diameter than the rotor shafts passing through the holes 13 and 14. It is therefore not possible to axially engage an entire rotor in the stator 1 by simple axial displacement. It is not possible, either, to consider machining a stator 1 monobloc to achieve the cavities constituting the compression chambers 4-8.

Pour permettre à la fois l'usinage et le montage, et assurer une bonne étanchéité, les stators de pompes à vide sèches connues sont généralement constitués de l'assemblage axial de plusieurs éléments de stator, respectivement 16, 17, 18, 19 et 20, assemblés selon leurs parois frontales respectives telles que la paroi frontale 21 de l'élément de stator 16, avec interposition de joints d'étanchéité annulaires respectifs 22, 23, 24, 25 et 26 comprimés axialement et isolant chaque chambre de compression 4-8 par rapport à l'atmosphère extérieure.In order to allow both machining and assembly, and to ensure a good seal, the stators of known dry vacuum pumps generally consist of the axial assembly of several stator elements, respectively 16, 17, 18, 19 and 20. , assembled according to their respective front walls, such as the front wall 21 of the stator element 16, with the interposition of respective annular seals 22, 23, 24, 25 and 26 compressed axially and insulating each compression chamber 4-8 with respect to the external atmosphere.

Une telle structure de pompe sèche de type Roots ou Claw nécessite d'usiner séparément chaque élément de stator 16-20, puis d'effectuer une opération d'assemblage longue et délicate consistant à adapter les deux arbres de rotor dans un bâti-support, de régler le positionnement des lobes de la dernière chambre de compression 8, de positionner le dernier élément de stator 20 avec le joint d'étanchéité annulaire 26, d'adapter les lobes de l'avant-dernière chambre de compression 7, d'amener l'avant-dernier élément de stator 19 avec le joint d'étanchéité annulaire 25, et ainsi de suite jusqu'au premier élément de stator 16. Sachant que les jeux entre les lobes de rotor et les parois de stator sont très réduits, pour assurer une étanchéité de chaque étage de compression de la pompe à vide, on comprend que cet assemblage est particulièrement long et délicat, et on estime qu'il faut plusieurs heures de main d'oeuvre pour cette opération effectuée sur une pompe à vide sèche à cinq étages.Such a Roots or Claw dry pump structure requires each stator element 16-20 to be machined separately, and then to carry out a long and delicate assembly operation of adapting the two rotor shafts in a support frame. to adjust the positioning of the lobes of the last compression chamber 8, to position the last stator element 20 with the annular seal 26, to adapt the lobes of the penultimate compression chamber 7, to bring about the penultimate stator element 19 with the annular seal 25, and so on until the first stator element 16. Knowing that the clearances between the rotor lobes and the stator walls are very small, for ensure a seal of each compression stage of the vacuum pump, it is understood that this assembly is particularly long and delicate, and it is estimated that it takes several hours of labor for this operation performed on a pump dry vacuum with five stages.

Un autre problème, dans ces pompes à vide sèches multi-étagées connues, est la difficulté d'alignement des éléments de stator les uns à la suite des autres, étant observé que les erreurs risquent de se cumuler entre le premier élément de stator 16 et le dernier élément de stator 20, de sorte qu'il est difficile de maîtriser les jeux entre les rotors et le stator dans une production en série.Another problem, in these known multi-stage dry vacuum pumps, is the difficulty of aligning the stator elements one after the other, being observed that the errors may accumulate between the first stator element 16 and the last stator element 20, so that it is difficult to control the games between the rotors and the stator in a series production.

Les documents EP 0 476 631 A et JP 03 145594 A décrivent des structures de pompe à vide ayant un stator en deux demi-coquilles assemblées radialement selon une surface d'assemblage longitudinale généralement parallèle aux axes des rotors, le stator étant fermé de façon étanche à ses extrémités par deux pièces rapportées d'extrémité engagées axialement. Ces documents ne mentionnent pas l'intérêt d'une telle structure de stator à deux demi-coquilles, et ne décrivent pas les moyens pour assurer une étanchéité entre stator et rotor.The documents EP 0 476 631 A and JP 03 145594 A describe vacuum pump structures having a stator in two half-shells assembled radially according to a longitudinal assembly surface generally parallel to the axes of the rotors, the stator being closed in a sealed manner. at its ends by two end pieces inserted axially. These documents do not mention the interest of such a stator structure with two half-shells, and do not describe the means for sealing between stator and rotor.

La difficulté est en effet qu'il faut assurer d'une part l'étanchéité radiale périphérique dans la surface d'assemblage longitudinale des deux demi-coquilles, pour empêcher le passage des gaz entre l'atmosphère extérieure et les cavités intérieures de la pompe, et assurer simultanément l'étanchéité axiale d'extrémité entre les demi-coquilles et les pièces rapportées d'extrémité.The difficulty is in fact that it is necessary to ensure on the one hand the circumferential radial sealing in the assembly surface longitudinally of the two half-shells, to prevent the passage of gas between the outer atmosphere and the inner cavities of the pump, and simultaneously provide the axial end seal between the half-shells and the end inserts.

De façon traditionnelle, on peut imaginer que l'étanchéité axiale d'extrémité soit assurée par des joints annulaires tels que ceux illustrés sur les figures 1 et 2 dans la pompe connue, et que l'étanchéité radiale périphérique soit assurée par des joints longitudinaux comprimés entre les demi-coquilles. Mais l'inconvénient majeur de cette solution réside dans le fait qu'il existe des lignes de fuite entre les joints longitudinaux assurant l'étanchéité radiale périphérique et les joints annulaires assurant l'étanchéité axiale d'extrémité. L'étanchéité n'est donc pas satisfaisante.Conventionally, it can be imagined that the axial end seal is provided by annular seals such as those illustrated in FIGS. 1 and 2 in the known pump, and that the peripheral radial seal is provided by compressed longitudinal seals. between the half-shells. But the major disadvantage of this solution lies in the fact that there are creepage distances between the longitudinal seals ensuring the peripheral radial seal and the annular seals ensuring the axial end seal. The seal is therefore not satisfactory.

EXPOSE DE L'INVENTIONSUMMARY OF THE INVENTION

Le problème proposé par la présente invention est de concevoir une nouvelle structure de pompe à vide sèche multi-étagée, permettant de réduire sensiblement le nombre de pièces à assembler lors du montage, en facilitant le montage et en réduisant sa durée, et tout en assurant une étanchéité satisfaisante entre les cavités intérieures de la pompe à vide et l'atmosphère extérieure, afin d'éviter tous risques de pollution des gaz pompés par l'atmosphère extérieure, et tous risques de pollution de l'atmosphère extérieure par les gaz pompés.The problem proposed by the present invention is to design a new multi-stage dry vacuum pump structure, to reduce significantly the number of parts to assemble during assembly, facilitating assembly and reducing its duration, and while ensuring a satisfactory seal between the inner cavities of the vacuum pump and the outside atmosphere, in order to avoid any risk of pollution of the gases pumped by the external atmosphere, and all risks of pollution of the external atmosphere by the pumped gases.

La solution selon l'invention consiste à prévoir un joint d'étanchéité monobloc continu, qui assure à la fois les deux types d'étanchéité dans une structure à stator en deux demi-coquilles.The solution according to the invention consists in providing a continuous monobloc seal which ensures both types of sealing in a stator structure in two half-shells.

Ainsi, pour atteindre ces objets ainsi que d'autres, l'invention prévoit une pompe à vide sèche multi-étagée composée de plusieurs étages de compression placés en série, la pompe ayant au moins un rotor monté rotatif dans un stator fermé de façon étanche à ses extrémités par deux pièces rapportées d'extrémité ; en outre :

  • le stator est réalisé par assemblage radial de deux demi-coquilles selon une surface d'assemblage longitudinale, chaque étage de compression étant ainsi contenu dans deux portions correspondantes de chacune des demi-coquilles, les deux demi-coquilles enfermant, une fois assemblées, l'ensemble des étages de compression ;
  • un joint d'étanchéité monobloc continu assure à la fois l'étanchéité radiale périphérique dans la surface d'assemblage longitudinale des demi-coquilles, et assure l'étanchéité axiale d'extrémité entre les demi-coquilles et les pièces rapportées d'extrémité, pour isoler les étages de compression par rapport à l'atmosphère extérieure.
Thus, to achieve these objects as well as others, the invention provides a multi-stage dry vacuum pump composed of several compression stages placed in series, the pump having at least one rotor rotatably mounted in a closed stator sealingly at its ends by two end inserts; in addition :
  • the stator is produced by radial assembly of two half-shells along a longitudinal assembly surface, each compression stage being thus contained in two corresponding portions of each of the half-shells, the two half-shells enclosing, once assembled, all the compression stages;
  • a continuous monoblock seal ensures both radial circumferential sealing in the longitudinal assembly surface of the half-shells, and provides axial end sealing between the half-shells and the end inserts, to isolate the compression stages with respect to the external atmosphere.

Selon un mode de réalisation avantageux, le joint d'étanchéité comprend deux parties annulaires d'extrémité généralement parallèles l'une à l'autre et raccordées par deux longerons qui leur sont généralement perpendiculaires.According to an advantageous embodiment, the seal comprises two annular end portions generally parallel to each other and connected by two longitudinal members which are generally perpendicular to them.

Dans cette structure de joint d'étanchéité, à l'état assemblé, les longerons du joint d'étanchéité sont comprimés latéralement entre les deux demi-coquilles dans la surface d'assemblage longitudinale, tandis que les deux parties annulaires d'extrémité sont comprimées entre les deux demi-coquilles d'une part et les pièces rapportées d'extrémité respectives d'autre part.In this seal structure, in the assembled state, the gasket longitudinal members are compressed laterally between the two half-shells in the longitudinal assembly surface, while the two annular end portions are compressed. between the two half-shells on the one hand and the respective end inserts on the other hand.

Pour assurer une bonne compression de la première partie annulaire d'extrémité du joint, on peut avantageusement prévoir qu'une première pièce rapportée d'extrémité comporte un nez axial conformé pour occuper un évidement axial correspondant de la première extrémité du corps de stator constitué par les deux demi-coquilles assemblées. De la sorte, la première partie annulaire d'extrémité du joint d'étanchéité est comprimée radialement par les deux demi-coquilles sur le nez axial.To ensure good compression of the first annular end portion of the seal, it is advantageous to provide a first end insert having an axial nose shaped to occupy a corresponding axial recess of the first end of the stator body constituted by the two half-shells assembled. In this way, the first annular end portion of the seal is compressed radially by the two half-shells on the axial nose.

De préférence, le nez axial comprend une gorge annulaire périphérique pour recevoir ladite première partie annulaire d'extrémité du joint d'étanchéité.Preferably, the axial nose comprises a peripheral annular groove for receiving said first annular end portion of the seal.

Pour faciliter le positionnement du joint d'étanchéité et assurer un bonne compression des longerons, l'une au moins des demi-coquilles comprend dans sa surface d'assemblage longitudinale deux gorges longitudinales pour recevoir les longerons du joint d'étanchéité.To facilitate the positioning of the seal and ensure good compression of the longitudinal members, at least one of the half-shells comprises in its longitudinal assembly surface two longitudinal grooves for receiving the longitudinal members of the seal.

La seconde partie annulaire d'extrémité du joint d'étanchéité peut simplement être comprimée axialement par la seconde pièce rapportée d'extrémité contre les faces frontales des deux demi-coquilles.The second annular end portion of the seal may simply be compressed axially by the second end insert against the end faces of the two half-shells.

De préférence, les deux demi-coquilles comprennent, sur leurs faces frontales de seconde extrémité, des gorges conformées pour recevoir ladite seconde partie annulaire d'extrémité du joint d'étanchéité.Preferably, the two half-shells comprise, on their end faces of the second end, grooves shaped to receive said second annular end portion of the seal.

DESCRIPTION SOMMAIRE DES DESSINSSUMMARY DESCRIPTION OF THE DRAWINGS

D'autres objets, caractéristiques et avantages de la présente invention ressortiront de la description suivante de modes de réalisation particuliers, faite en relation avec les figures jointes, parmi lesquelles:

  • la figure 1 est une vue en perspective éclatée d'une structure connue de stator de pompe à vide sèche multi-étagée ;
  • la figure 2 est une vue en perspective en coupe longitudinale de la pompe de la figure 1, après assemblage du stator ;
  • la figure 3 est une vue en perspective illustrant une première demi-coquille de stator et une première pièce d'extrémité de pompe à vide sèche selon un mode de réalisation de la présente invention ;
  • la figure 4 est une vue en perspective éclatée montrant la première demi-coquille de stator et la première pièce d'extrémité après assemblage avec interposition d'un joint d'étanchéité selon l'invention, et montrant également la seconde demi-coquille de stator et la seconde pièce d'extrémité avant assemblage ;
  • les figures 5 et 6 illustrent, en perspective selon deux angles différents, une demi-coquille de stator avec joint d'étanchéité, dans le mode de réalisation des figures 3 et 4 ;
  • la figure 7 est une vue de côté montrant la face intérieure de la demi-coquille de stator des figures précédentes, avec le joint d'étanchéité en place ;
  • la figure 8 est une coupe transversale de la demi-coquille et du joint de la figure 7 selon le plan de coupe A-A, avec les rotors montés ;
  • la figure 9 est une vue en perspective du joint d'étanchéité selon un mode de réalisation de la présente invention ; et
  • la figure 10 est une coupe transversale du joint d'étanchéité de la figure 9.
Other objects, features and advantages of the present invention will become apparent from the following description of particular embodiments, with reference to the accompanying figures, in which:
  • Figure 1 is an exploded perspective view of a known multi-stage dry vacuum pump stator structure;
  • Figure 2 is a perspective view in longitudinal section of the pump of Figure 1, after assembly of the stator;
  • Fig. 3 is a perspective view illustrating a first stator half-shell and a first dry vacuum pump end part according to an embodiment of the present invention;
  • FIG. 4 is an exploded perspective view showing the first stator half-shell and the first end piece after assembly with the interposition of a seal according to the invention, and also showing the second stator half-shell. and the second end piece before assembly;
  • Figures 5 and 6 illustrate, in perspective from two different angles, a stator half-shell with seal, in the embodiment of Figures 3 and 4;
  • Fig. 7 is a side view showing the inner face of the stator half-shell of the preceding figures, with the seal in place;
  • Figure 8 is a cross section of the half-shell and the seal of Figure 7 along the cutting plane AA, with the rotors mounted;
  • Figure 9 is a perspective view of the seal according to one embodiment of the present invention; and
  • Figure 10 is a cross section of the seal of Figure 9.

DESCRIPTION DES MODES DE REALISATION PREFERESDESCRIPTION OF THE PREFERRED EMBODIMENTS

Dans le mode de réalisation des figures 3 à 10, la pompe à vide sèche multi-étagée selon l'invention est une pompe à cinq étages, dans laquelle on retrouve les éléments de structure habituels d'une pompe connue des figures 1 et 2, repérés par les mêmes références numériques. C'est ainsi que l'on retrouve l'entrée des gaz pompés 2, une sortie de gaz refoulés non visible sur les figures, les chambres de compression successives 4, 5, 6, 7 et 8, les parois transversales 9, 10, 11 et 12 de séparation de chambre de compression, les trous 13 et 14 de passage des arbres de rotor, et la canalisation de passage de gaz 15 entre deux chambres de compression successives. Sur la figure 8, on a également représenté les rotors 51 et 52.In the embodiment of FIGS. 3 to 10, the multi-stage dry vacuum pump according to the invention is a five-stage pump, in which the usual structural elements of a known pump of FIGS. 1 and 2 are found, marked with the same numerical references. Thus, the entry of the pumped gases 2, an outlet of gas that is not visible in the figures, the successive compression chambers 4, 5, 6, 7 and 8, the transverse walls 9, 10, 11 and 12 of compression chamber separation, the holes 13 and 14 for passage of the rotor shafts, and the gas passage pipe 15 between two successive compression chambers. In FIG. 8, the rotors 51 and 52 are also shown.

Selon l'invention, le stator est composé de deux demi-coquilles respectivement 101 et 102, qui se rejoignent selon une surface d'assemblage longitudinale 30. De préférence, la surface d'assemblage longitudinale 30 est plane et contient les axes respectifs I-I et II-II (figure 3) des deux arbres de rotor couplés.According to the invention, the stator is composed of two half-shells 101 and 102 respectively, which meet in a longitudinal assembly surface 30. Preferably, the longitudinal assembly surface 30 is flat and contains the respective axes II and II-II (Figure 3) of the two coupled rotor shafts.

De la sorte, après assemblage radial des demi-coquilles 101 et 102, chaque étage de compression de la pompe, par exemple le premier étage de compression constitué par la première chambre de compression 4 et les lobes de rotor qu'elle contient, est contenu dans deux portions correspondantes de chacune des demi-coquilles 101 et 102. En d'autres termes, les deux demi-coquilles 101 et 102 enferment, une fois assemblées, l'ensemble des étages de compression de la pompe.In this way, after radial assembly of the half-shells 101 and 102, each compression stage of the pump, for example the first compression stage consisting of the first compression chamber 4 and the rotor lobes it contains, is contained in two corresponding portions of each of the half-shells 101 and 102. In other words, the two half-shells 101 and 102 enclose, once assembled, all the compression stages of the pump.

Le corps principal de stator ainsi constitué par les demi-coquilles 101 et 102 assemblées est fermé de façon étanche à ses extrémités par deux pièces rapportées d'extrémité, respectivement une première pièce d'extrémité 31 et une seconde pièce d'extrémité 32.The main stator body thus constituted by the half-shells 101 and 102 assembled is sealed at its ends by two end inserts, respectively a first end piece 31 and a second end piece 32.

Selon l'invention, l'étanchéité entre l'atmosphère extérieure et les cavités intérieures de la pompe à vide est réalisée par un joint d'étanchéité 33 monobloc continu. Dans le mode de réalisation illustré sur les figures, et mieux visible sur les figures 9 et 10, le joint d'étanchéité 33 comprend deux parties annulaires d'extrémité 34 et 35 généralement parallèles l'une à l'autre et raccordées par deux longerons 36 et 37 qui leur sont généralement perpendiculaires. Dans ce mode de réalisation, adapté à la structure générale de stator précédemment décrite, les longerons 36 et 37 du joint d'étanchéité 33 sont généralement parallèles l'un à l'autre et se raccordent aux parties annulaires d'extrémité 34 et 35 selon des zones de raccordement respectives 38, 39, 40 et 41 diamétralement opposées deux à deux.According to the invention, the seal between the external atmosphere and the internal cavities of the vacuum pump is achieved by a continuous monobloc seal 33. In the embodiment illustrated in the figures, and better visible in FIGS. 9 and 10, the seal 33 comprises two parts annular end 34 and 35 generally parallel to each other and connected by two longitudinal members 36 and 37 which are generally perpendicular to them. In this embodiment, adapted to the general stator structure described above, the longitudinal members 36 and 37 of the seal 33 are generally parallel to one another and are connected to the annular end portions 34 and 35 according to respective connection areas 38, 39, 40 and 41 diametrically opposite two by two.

Comme on le voit sur la figure 9, dans ce mode de réalisation, la première partie annulaire d'extrémité 34 est généralement circulaire et de diamètre plus petit que la seconde partie annulaire d'extrémité 35 qui elle-même a une forme oblongue pour suivre l'encombrement des rotors couplés décalés verticalement l'un par rapport à l'autre. Les longerons 36 et 37 se raccordent axialement directement aux zones supérieures et inférieures respectives de la seconde partie annulaire d'extrémité 35, tandis qu'ils se raccordent radialement par des coudes 42 et 43 à la première partie annulaire d'extrémité 34.As seen in FIG. 9, in this embodiment, the first annular end portion 34 is generally circular and of smaller diameter than the second annular end portion 35 which itself has an oblong shape to follow. the size of the coupled rotors offset vertically relative to each other. The beams 36 and 37 are axially connected directly to the respective upper and lower regions of the second annular end portion 35, while they are radially connected by elbows 42 and 43 to the first annular end portion 34.

Dans le mode de réalisation de la figure 10, le joint d'étanchéité 33 a une section transversale sensiblement circulaire, visible sur la coupe des longerons 36 et 37. On pourra toutefois utiliser des joints ayant des coupes transversales de formes différentes, par exemple carrée, rectangulaire, etc. Les joints peuvent être en élastomère, ou en toute matière appropriée telle qu'un métal de type cuivre, aluminium ou indium.In the embodiment of Figure 10, the seal 33 has a substantially circular cross section, visible on the section of the longitudinal members 36 and 37. However, it will be possible to use joints having cross sections of different shapes, for example square , rectangular, etc. The seals may be of elastomer, or of any suitable material such as a copper, aluminum or indium type metal.

En se référant plus spécialement aux figures 3 et 4, on voit que la première pièce rapportée d'extrémité 31 comporte un nez axial 44 conformé pour occuper un évidement axial 45 correspondant de la première extrémité du stator. Le nez axial 44 comprend une gorge annulaire 46 périphérique pour recevoir la première partie annulaire d'extrémité 34 du joint d'étanchéité 33. De la sorte, en position assemblée, la première partie annulaire d'extrémité 34 du joint d'étanchéité 33 est comprimée radialement par les deux demi-coquilles 101 et 102 sur le nez axial 44 de la première pièce rapportée d'extrémité 31. La gorge annulaire 46 peut avoir une section transversale rectangulaire, de profondeur inférieure au diamètre du joint d'étanchéité 33.Referring more particularly to Figures 3 and 4, it is seen that the first end insert 31 has an axial nose 44 shaped to occupy a corresponding axial recess 45 of the first end of the stator. The axial nose 44 comprises a peripheral annular groove 46 for receiving the first annular end portion 34 of the seal 33. In this way, in the assembled position, the first annular end portion 34 of the seal 33 is compressed radially by the two half-shells 101 and 102 on the axial nose 44 of the first end insert 31. The annular groove 46 may have a rectangular cross section, of a depth smaller than the diameter of the seal 33.

L'une au moins des demi-coquilles 101 et 102, par exemple la demi-coquille 101, comprend dans sa surface d'assemblage longitudinale 30 deux gorges longitudinales 47 et 48 (figure 3) pour recevoir les longerons 36 et 37 respectivement du joint d'étanchéité 33, comme on le voit sur les figures 4 à 6. De la sorte, les longerons 36 et 37 du joint d'étanchéité 33 sont comprimés latéralement entre les deux demi-coquilles 101 et 102 dans la surface d'assemblage longitudinale 30. Les gorges longitudinales 47 et 48 peuvent avoir une section transversale rectangulaire, avec une profondeur inférieure au diamètre du joint d'étanchéité 33.At least one of the half-shells 101 and 102, for example the half-shell 101, comprises in its longitudinal assembly surface 30 two longitudinal grooves 47 and 48 (Figure 3) to receive the longitudinal members 36 and 37 respectively of the seal Sealing 33, as seen in Figures 4 to 6. In this way, the longitudinal members 36 and 37 of the seal 33 are compressed laterally between the two half-shells 101 and 102 in the longitudinal assembly surface 30. The longitudinal grooves 47 and 48 may have a rectangular cross-section, with a depth less than the diameter of the seal 33.

Comme on le comprend sur la figure 4 et sur la figure 7, la seconde partie annulaire d'extrémité 35 du joint d'étanchéité 33 est comprimée axialement par la seconde pièce rapportée d'extrémité 32 du stator contre les deux demi-coquilles 101 et 102. Dans la réalisation illustrée, les deux demi-coquilles 101 et 102 comprennent, sur leurs faces frontales de seconde extrémité telles que la face frontale 49 de la première demi-coquille 101 (figure 3), des gorges telles que la gorge 50 conformées pour recevoir la seconde partie annulaire d'extrémité 35 du joint d'étanchéité 33. Les gorges telles que la gorge 50 peuvent avoir une section rectangulaire, de profondeur inférieure au diamètre du joint d'étanchéité 33. Les gorges telles que la gorge 50 se raccordent l'une à l'autre pour former une gorge continue, et se raccordent simultanément à leur point de raccordement avec les gorges longitudinales 47 et 48 de la surface d'assemblage longitudinale 30.As can be seen in FIG. 4 and FIG. 7, the second end annular portion 35 of the seal 33 is compressed axially by the second end insert 32 of the stator against the two half-shells 101 and 102. In the illustrated embodiment, the two half-shells 101 and 102 comprise, on their end-end faces such as the end face 49 of the first half-shell 101 (FIG. 3), grooves such as the groove 50 in a conformed manner. to accommodate the second annular end portion 35 of the seal 33. The grooves such as the groove 50 may have a rectangular section, of lesser depth than the diameter of the seal 33. The grooves such as the groove 50 are connect to each other to form a continuous groove, and simultaneously connect at their point of connection with the longitudinal grooves 47 and 48 of the longitudinal joining surface 30.

Pour l'assemblage d'une pompe selon l'invention, on adapte le joint d'étanchéité 33 en engageant sa première partie annulaire d'extrémité 34 dans la gorge annulaire 46 du nez axial 44 de première pièce rapportée d'extrémité 31, puis on vient appliquer latéralement la première demi-coquille 101 contre le nez axial 44. Les longerons 36 et 37 du joint d'étanchéité 33 sont engagés dans les gorges longitudinales 47 et 48, et une première moitié de la seconde partie annulaire d'extrémité 35 du joint d'étanchéité 33 est engagée dans la gorge 50. On peut alors monter les rotors, et positionner de façon aisée les lobes des rotors dans les chambres de compression 4-8. On peut ensuite adapter la seconde demi-coquille 102 à la fois latéralement contre le nez axial 44 et contre la surface d'assemblage longitudinale 30, en insérant la seconde moitié de seconde partie annulaire d'extrémité 35 du joint d'étanchéité 33 dans la gorge frontale correspondante de seconde demi-coquille 102. On peut enfin amener axialement la seconde pièce rapportée d'extrémité 32 contre les faces frontales telles que la face 49 des demi-coquilles 101 et 102.For the assembly of a pump according to the invention, the seal 33 is fitted by engaging its first annular end portion 34 in the annular groove 46 of the axial nose 44 of the first end insert 31, then the first half-shell 101 is applied laterally against the axial nose 44. The longitudinal members 36 and 37 of the seal 33 are engaged in the longitudinal grooves 47 and 48, and a first half of the second annular end portion 35 of the seal 33 is engaged in the groove 50. It is then possible to mount the rotors, and easily position the lobes of the rotors in the chambers. Compression 4-8. The second half-shell 102 can then be adapted both laterally against the axial nose 44 and against the longitudinal assembly surface 30, by inserting the second half of the second annular end portion 35 of the seal 33 into the corresponding front groove of second half-shell 102. Finally, it is possible to bring axially the second end insert 32 against the end faces such as the face 49 of the half-shells 101 and 102.

Le montage d'une telle pompe est beaucoup plus rapide que celui des pompes connues généralement utilisées. Simultanément, l'étanchéité est assurée de manière très efficace et satisfaisante.The mounting of such a pump is much faster than that of known pumps generally used. At the same time, tightness is ensured very efficiently and satisfactorily.

L'invention s'applique notamment à la constitution d'une pompe primaire multi-étagée de type Roots, ou de type Claw, ou de type Roots-Claw.The invention applies in particular to the constitution of a multi-stage primary pump type Roots, or type Claw, or Roots-Claw type.

Claims (11)

  1. Dry multistage vacuum pump consisting of a plurality of compression stages (4-8) placed in series, the pump having at least one rotor rotatably mounted in a stator closed of its ends by two separate end caps (31, 32), the stator being obtained by radial assembly of two half-shells (101, 102) at a longitudinal assembly surface (30), each compression stage (4-8) thus being contained in two corresponding portions of each of the half-shells (101, 102) and the two half-shells (101, 102), when assembled, enclosing all of the compression stages (4-8), characterised in that, to isolate the compression stages (4-8) from the external atmosphere, a continuous one-piece seal (33) provides both a peripheral radial seal at the longitudinal assembly surface (30) of the half-shells (101, 102) and an end axial seal between the half-shells (101, 102) and the separate end caps (31, 32).
  2. Vacuum pump according to claim 1, characterised in that the seal (33) has two generally parallel annular end portions (34, 35) joined by two longitudinal portions (36, 37) that are generally perpendicular to them.
  3. Vacuum pump according to claim 2, characterised in that, in the assembled state, the longitudinal portions (36, 37) of the seal (33) are compressed laterally between the two half-shells (101, 102) in the longitudinal assembly surface, (30) and the two annular end sections (34, 35) are compressed between the two half-shells (101, 102), on the one hand, and the respective separate end caps (31, 32), on the other hand.
  4. Vacuum pump according to either claim 2 or claim 3, characterised in that a first separate end cap (31) has an axial nose (44) shaped to occupy a corresponding axial recess (45) at the first end of the stator body consisting of the assembled two half-shells (101, 102), the first annular end portion (34) of the seal (33) being compressed radially onto the axial nose (44) by the two half-shells (101, 102).
  5. Vacuum pump according to claim 4, characterised in that the axial nose (44) comprises a peripheral annular groove (46) adapted to receive said first annular end portion (34) of the seal (33).
  6. Vacuum pump according to any one of claims 3 to 5, characterised in that at least one of the half-shells (101) comprises in its longitudinal assembly surface (30) two longitudinal grooves (47, 48) adapted to receive the longitudinal portions (36, 37) of the seal (33)
  7. Vacuum pump according to any one of claims 3 to 6, characterised in that the second annular end portion (35) of the seal (33) is compressed axially by the second separate end cap (32) against the front faces (49) of the two half-shells (101, 102).
  8. Vacuum pump according to claim 7, characterised in that the two half-shells (101, 102) comprise grooves on their second end front faces (49), (50) shaped to receive said second annular end portion (35) of the seal (33).
  9. Vacuum pump according to any one of claims 2 to 8, characterised in that the seal (33) has a substantially circular cross section and is accommodated in grooves (46, 47, 48, 50) of rectangular cross section.
  10. Vacuum pump according to any one of claims 1 to 9, characterised in that it constitutes a multistage primary pump of Roots, Claw or combined Roots-Claw type.
  11. Vacuum pump according to any one of claims 2 to 9, characterised in that:
    - the longitudinal assembly surface (30) is plane and contains the axes (I-I, II-II) of the two coupled rotor shafts,
    - the longitudinal portions (36, 37) of the seal (33) are generally parallel to each other and joined to the annular end portions (34, 35) in respective joining areas (38-41) that are diametrally opposed in pairs.
EP01963081A 2000-08-21 2001-08-09 Pressure seal for a vacuum pump Expired - Lifetime EP1311763B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0010744 2000-08-21
FR0010744A FR2813104B1 (en) 2000-08-21 2000-08-21 SEAL FOR VACUUM PUMP
PCT/FR2001/002581 WO2002016773A1 (en) 2000-08-21 2001-08-09 Pressure seal for a vacuum pump

Publications (2)

Publication Number Publication Date
EP1311763A1 EP1311763A1 (en) 2003-05-21
EP1311763B1 true EP1311763B1 (en) 2006-10-04

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EP01963081A Expired - Lifetime EP1311763B1 (en) 2000-08-21 2001-08-09 Pressure seal for a vacuum pump

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US (1) US6572351B2 (en)
EP (1) EP1311763B1 (en)
JP (1) JP4713059B2 (en)
AT (1) ATE341711T1 (en)
DE (1) DE60123637T2 (en)
FR (1) FR2813104B1 (en)
WO (1) WO2002016773A1 (en)

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Also Published As

Publication number Publication date
FR2813104A1 (en) 2002-02-22
FR2813104B1 (en) 2002-11-29
US20020155014A1 (en) 2002-10-24
JP2004507641A (en) 2004-03-11
US6572351B2 (en) 2003-06-03
WO2002016773A1 (en) 2002-02-28
ATE341711T1 (en) 2006-10-15
DE60123637D1 (en) 2006-11-16
DE60123637T2 (en) 2007-08-16
EP1311763A1 (en) 2003-05-21
WO2002016773A8 (en) 2002-07-11
JP4713059B2 (en) 2011-06-29

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