EP1305578A1 - Support de capteur scelle hermetiquement - Google Patents

Support de capteur scelle hermetiquement

Info

Publication number
EP1305578A1
EP1305578A1 EP01956321A EP01956321A EP1305578A1 EP 1305578 A1 EP1305578 A1 EP 1305578A1 EP 01956321 A EP01956321 A EP 01956321A EP 01956321 A EP01956321 A EP 01956321A EP 1305578 A1 EP1305578 A1 EP 1305578A1
Authority
EP
European Patent Office
Prior art keywords
sensor
membrane
frame element
recess
sensor according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01956321A
Other languages
German (de)
English (en)
Inventor
Uwe Konzelman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP1305578A1 publication Critical patent/EP1305578A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02D—CONTROLLING COMBUSTION ENGINES
    • F02D35/00—Controlling engines, dependent on conditions exterior or interior to engines, not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices

Definitions

  • the invention relates to a sensor according to the preamble of claim 1.
  • a sensor is known from US Pat. No. 4,934,190 in which a sensor is sealed airtight. However, the sensor does no membrane. It is also not shown how the sensor is installed in a device.
  • the sensor according to the invention with the characterizing features of claim 1 has the advantage that an underflow of the sensor is prevented in a simple manner.
  • a recess of the sensor is closed by a support body or by a sensor carrier.
  • the support body or the sensor carrier is designed in such a way that a membrane cannot break when bent.
  • Figure 2, 3, 4 a first, second, third
  • FIG. 1 shows a sensor according to the prior art, which has been improved in accordance with the statements relating to FIGS. 2 to 4.
  • the sensor has a frame element 3, which consists, for example, of silicon.
  • the frame element 3 has a recess 5.
  • a dielectric layer 21, for example made of SiO 2 is applied to the frame element.
  • the layer 21 can extend over the entire frame element 3, but also only over a region of the recess 5. This region forms a membrane 7 which partially or completely delimits the recess 5 on one side.
  • At least one, for example three, metal tracks 19 are applied to the side of the membrane 7 facing away from the recess 5.
  • the metal tracks 19 form, for example, electrical heaters and / or measuring resistors.
  • the metal tracks 19 form a sensor area 17 with the membrane 7.
  • the sensor area 17 is preferably covered with a protective view 23.
  • the protective layer 23 can also extend only over the metal tracks 19.
  • the sensor 1 has a surface 27 which is in direct contact with the flowing medium.
  • FIG. 2 shows a first exemplary embodiment of a sensor 1 designed according to the invention.
  • a sensor 1 consists of the frame element 3, which has the recess 5 having.
  • the membrane 7 is formed on the outside of the frame element 3 facing away from the recess 5.
  • the recess 5 is closed airtight by a support body 10. This prevents heat transfer by means of heat conduction through an underflow of the sensor 1 through a flowing medium.
  • an intermediate space 12 which is formed by the closed recess 5, can be at least partially evacuated.
  • the support body 10 can be connected to the frame element 3 in various ways, for example by gluing, welding.
  • the sensor 1 is arranged, for example, in a sensor carrier 15 which is installed in a measuring device or is part of a measuring device.
  • FIG. 3 shows a further exemplary embodiment of the sensor 1 designed according to the invention.
  • the membrane 7 can bend and break due to pressure fluctuations in the flowing medium, for example due to pulsations. This can be prevented by reducing a distance a between the underside of the membrane and the support body 10 such that the membrane 7 comes to rest on the support body 10 at a certain degree of bending. This prevents further bending of the membrane 7, which would otherwise have resulted in the membrane 7 breaking or being damaged.
  • a heat transfer by heat conduction and possibly by convection-related uncontrolled air movements below the membrane are prevented by the underside of the membrane being closed by the support body 10. This results in a more stable and more reproducible measurement signal from the sensor. Also heat flows caused by the uncontrolled air movement under the underside of the membrane, which can influence the measurement signal, is reduced.
  • Support body 10 and frame element 3 can, for example, also be made in one piece. This is e.g. B. possible with methods of surface micromechanics.
  • FIG. 4 shows a third exemplary embodiment of the sensor 1 designed according to the invention.
  • the recess 5 is closed by the sensor carrier 15.
  • This closed space can also be evacuated or the sensor carrier 15 can be designed according to FIG. 3, so that excessive bending of the membrane is prevented.
  • the frame element 3 can be connected to the sensor carrier 15 in various ways, for example by gluing, welding.
  • the sensor 1 can also be encapsulated with plastic in an airtight manner or pressed into plastic that is still deformable if the sensor carrier 15 is molded from plastic.
  • Plastic or metal is preferably used as the material for the sensor carrier 15 and the frame element 3 and the support body 10 are made of silicon.
  • Such a sensor 1 is particularly suitable as an air mass sensor.

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measuring Volume Flow (AREA)

Abstract

Selon la technique actuelle, un capteur, en particulier pour un dispositif capable de déterminer au moins un paramètre d'un fluide circulant dans une conduite, présente un élément d'encadrement doté d'un évidement au niveau duquel un sous-écoulement a lieu. Ce sous-écoulement influence le signal de mesure du capteur. Dans un capteur (1) conçu selon la présente invention, l'évidement (5) est obturé de sorte qu'un sous-écoulement ne peut plus avoir lieu.
EP01956321A 2000-07-21 2001-07-20 Support de capteur scelle hermetiquement Withdrawn EP1305578A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10035538 2000-07-21
DE10035538A DE10035538A1 (de) 2000-07-21 2000-07-21 Sensor
PCT/DE2001/002660 WO2002008699A1 (fr) 2000-07-21 2001-07-20 Support de capteur scelle hermetiquement

Publications (1)

Publication Number Publication Date
EP1305578A1 true EP1305578A1 (fr) 2003-05-02

Family

ID=7649734

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01956321A Withdrawn EP1305578A1 (fr) 2000-07-21 2001-07-20 Support de capteur scelle hermetiquement

Country Status (9)

Country Link
US (1) US20030019288A1 (fr)
EP (1) EP1305578A1 (fr)
JP (1) JP2004504620A (fr)
KR (1) KR20020042839A (fr)
CN (1) CN1386189A (fr)
AU (1) AU7838201A (fr)
DE (1) DE10035538A1 (fr)
TW (1) TW548407B (fr)
WO (1) WO2002008699A1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7935457B2 (en) 2003-09-16 2011-05-03 The Gillette Company Enhanced fuel delivery for direct methanol fuel cells
US8084166B2 (en) 2003-09-16 2011-12-27 The Gillette Company Enhanced fuel delivery for direct methanol fuel cells
US8114554B2 (en) 2003-09-16 2012-02-14 The Gillette Company—South Boston Enhanced fuel delivery for direct methanol fuel cells
JP5353229B2 (ja) * 2008-12-24 2013-11-27 株式会社デンソー 感熱式流量センサ
JP5182314B2 (ja) * 2009-05-01 2013-04-17 株式会社デンソー 空気流量測定装置
PT2780664T (pt) * 2011-11-15 2018-01-02 Hottinger Baldwin Messtechnik Gmbh Sensor de extensão fbg para superfícies curvas
DE102015224545A1 (de) * 2015-12-08 2017-06-08 Robert Bosch Gmbh Verfahren zum Herstellen eines mikromechanisches Bauelements
US10757973B2 (en) * 2016-07-25 2020-09-01 Fontem Holdings 1 B.V. Electronic cigarette with mass air flow sensor

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4881410A (en) * 1987-06-01 1989-11-21 The Regents Of The University Of Michigan Ultraminiature pressure sensor and method of making same
US5207103A (en) * 1987-06-01 1993-05-04 Wise Kensall D Ultraminiature single-crystal sensor with movable member
US4870745A (en) * 1987-12-23 1989-10-03 Siemens-Bendix Automotive Electronics L.P. Methods of making silicon-based sensors
DE4106288C2 (de) * 1991-02-28 2001-05-31 Bosch Gmbh Robert Sensor zur Messung von Drücken oder Beschleunigungen
DE4219454C2 (de) * 1992-06-13 1995-09-28 Bosch Gmbh Robert Massenflußsensor
US5883310A (en) * 1994-11-04 1999-03-16 The Regents Of The University Of California Micromachined hot-wire shear stress sensor
US5889211A (en) * 1995-04-03 1999-03-30 Motorola, Inc. Media compatible microsensor structure and methods of manufacturing and using the same
US5767387A (en) * 1996-10-22 1998-06-16 Hewlett-Packard Co. Chromatograph having pneumatic detector
DE19743409A1 (de) * 1997-10-01 1999-04-08 Bosch Gmbh Robert Meßvorrichtung zur Messung der Masse eines strömenden Mediums
LU90485B1 (de) * 1999-12-13 2001-06-14 Delphi Tech Inc Massendurchflussmesser

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO0208699A1 *

Also Published As

Publication number Publication date
DE10035538A1 (de) 2002-02-07
TW548407B (en) 2003-08-21
CN1386189A (zh) 2002-12-18
KR20020042839A (ko) 2002-06-07
US20030019288A1 (en) 2003-01-30
JP2004504620A (ja) 2004-02-12
WO2002008699A1 (fr) 2002-01-31
AU7838201A (en) 2002-02-05

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Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

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Designated state(s): DE ES FR GB IT

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18D Application deemed to be withdrawn

Effective date: 20040202