EP1305578A1 - Support de capteur scelle hermetiquement - Google Patents
Support de capteur scelle hermetiquementInfo
- Publication number
- EP1305578A1 EP1305578A1 EP01956321A EP01956321A EP1305578A1 EP 1305578 A1 EP1305578 A1 EP 1305578A1 EP 01956321 A EP01956321 A EP 01956321A EP 01956321 A EP01956321 A EP 01956321A EP 1305578 A1 EP1305578 A1 EP 1305578A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- sensor
- membrane
- frame element
- recess
- sensor according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02D—CONTROLLING COMBUSTION ENGINES
- F02D35/00—Controlling engines, dependent on conditions exterior or interior to engines, not otherwise provided for
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
Definitions
- the invention relates to a sensor according to the preamble of claim 1.
- a sensor is known from US Pat. No. 4,934,190 in which a sensor is sealed airtight. However, the sensor does no membrane. It is also not shown how the sensor is installed in a device.
- the sensor according to the invention with the characterizing features of claim 1 has the advantage that an underflow of the sensor is prevented in a simple manner.
- a recess of the sensor is closed by a support body or by a sensor carrier.
- the support body or the sensor carrier is designed in such a way that a membrane cannot break when bent.
- Figure 2, 3, 4 a first, second, third
- FIG. 1 shows a sensor according to the prior art, which has been improved in accordance with the statements relating to FIGS. 2 to 4.
- the sensor has a frame element 3, which consists, for example, of silicon.
- the frame element 3 has a recess 5.
- a dielectric layer 21, for example made of SiO 2 is applied to the frame element.
- the layer 21 can extend over the entire frame element 3, but also only over a region of the recess 5. This region forms a membrane 7 which partially or completely delimits the recess 5 on one side.
- At least one, for example three, metal tracks 19 are applied to the side of the membrane 7 facing away from the recess 5.
- the metal tracks 19 form, for example, electrical heaters and / or measuring resistors.
- the metal tracks 19 form a sensor area 17 with the membrane 7.
- the sensor area 17 is preferably covered with a protective view 23.
- the protective layer 23 can also extend only over the metal tracks 19.
- the sensor 1 has a surface 27 which is in direct contact with the flowing medium.
- FIG. 2 shows a first exemplary embodiment of a sensor 1 designed according to the invention.
- a sensor 1 consists of the frame element 3, which has the recess 5 having.
- the membrane 7 is formed on the outside of the frame element 3 facing away from the recess 5.
- the recess 5 is closed airtight by a support body 10. This prevents heat transfer by means of heat conduction through an underflow of the sensor 1 through a flowing medium.
- an intermediate space 12 which is formed by the closed recess 5, can be at least partially evacuated.
- the support body 10 can be connected to the frame element 3 in various ways, for example by gluing, welding.
- the sensor 1 is arranged, for example, in a sensor carrier 15 which is installed in a measuring device or is part of a measuring device.
- FIG. 3 shows a further exemplary embodiment of the sensor 1 designed according to the invention.
- the membrane 7 can bend and break due to pressure fluctuations in the flowing medium, for example due to pulsations. This can be prevented by reducing a distance a between the underside of the membrane and the support body 10 such that the membrane 7 comes to rest on the support body 10 at a certain degree of bending. This prevents further bending of the membrane 7, which would otherwise have resulted in the membrane 7 breaking or being damaged.
- a heat transfer by heat conduction and possibly by convection-related uncontrolled air movements below the membrane are prevented by the underside of the membrane being closed by the support body 10. This results in a more stable and more reproducible measurement signal from the sensor. Also heat flows caused by the uncontrolled air movement under the underside of the membrane, which can influence the measurement signal, is reduced.
- Support body 10 and frame element 3 can, for example, also be made in one piece. This is e.g. B. possible with methods of surface micromechanics.
- FIG. 4 shows a third exemplary embodiment of the sensor 1 designed according to the invention.
- the recess 5 is closed by the sensor carrier 15.
- This closed space can also be evacuated or the sensor carrier 15 can be designed according to FIG. 3, so that excessive bending of the membrane is prevented.
- the frame element 3 can be connected to the sensor carrier 15 in various ways, for example by gluing, welding.
- the sensor 1 can also be encapsulated with plastic in an airtight manner or pressed into plastic that is still deformable if the sensor carrier 15 is molded from plastic.
- Plastic or metal is preferably used as the material for the sensor carrier 15 and the frame element 3 and the support body 10 are made of silicon.
- Such a sensor 1 is particularly suitable as an air mass sensor.
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Measuring Volume Flow (AREA)
Abstract
Selon la technique actuelle, un capteur, en particulier pour un dispositif capable de déterminer au moins un paramètre d'un fluide circulant dans une conduite, présente un élément d'encadrement doté d'un évidement au niveau duquel un sous-écoulement a lieu. Ce sous-écoulement influence le signal de mesure du capteur. Dans un capteur (1) conçu selon la présente invention, l'évidement (5) est obturé de sorte qu'un sous-écoulement ne peut plus avoir lieu.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10035538A DE10035538A1 (de) | 2000-07-21 | 2000-07-21 | Sensor |
DE10035538 | 2000-07-21 | ||
PCT/DE2001/002660 WO2002008699A1 (fr) | 2000-07-21 | 2001-07-20 | Support de capteur scelle hermetiquement |
Publications (1)
Publication Number | Publication Date |
---|---|
EP1305578A1 true EP1305578A1 (fr) | 2003-05-02 |
Family
ID=7649734
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP01956321A Withdrawn EP1305578A1 (fr) | 2000-07-21 | 2001-07-20 | Support de capteur scelle hermetiquement |
Country Status (9)
Country | Link |
---|---|
US (1) | US20030019288A1 (fr) |
EP (1) | EP1305578A1 (fr) |
JP (1) | JP2004504620A (fr) |
KR (1) | KR20020042839A (fr) |
CN (1) | CN1386189A (fr) |
AU (1) | AU7838201A (fr) |
DE (1) | DE10035538A1 (fr) |
TW (1) | TW548407B (fr) |
WO (1) | WO2002008699A1 (fr) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8114554B2 (en) | 2003-09-16 | 2012-02-14 | The Gillette Company—South Boston | Enhanced fuel delivery for direct methanol fuel cells |
US8084166B2 (en) | 2003-09-16 | 2011-12-27 | The Gillette Company | Enhanced fuel delivery for direct methanol fuel cells |
US7935457B2 (en) | 2003-09-16 | 2011-05-03 | The Gillette Company | Enhanced fuel delivery for direct methanol fuel cells |
JP5353229B2 (ja) * | 2008-12-24 | 2013-11-27 | 株式会社デンソー | 感熱式流量センサ |
JP5182314B2 (ja) * | 2009-05-01 | 2013-04-17 | 株式会社デンソー | 空気流量測定装置 |
EP2780664B1 (fr) * | 2011-11-15 | 2017-09-27 | Hottinger Baldwin Messtechnik GmbH | Capteur extensométrique à réseau de bragg sur fibre pour surfaces courbes |
DE102015224545A1 (de) * | 2015-12-08 | 2017-06-08 | Robert Bosch Gmbh | Verfahren zum Herstellen eines mikromechanisches Bauelements |
US10757973B2 (en) * | 2016-07-25 | 2020-09-01 | Fontem Holdings 1 B.V. | Electronic cigarette with mass air flow sensor |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5207103A (en) * | 1987-06-01 | 1993-05-04 | Wise Kensall D | Ultraminiature single-crystal sensor with movable member |
US4881410A (en) * | 1987-06-01 | 1989-11-21 | The Regents Of The University Of Michigan | Ultraminiature pressure sensor and method of making same |
US4870745A (en) * | 1987-12-23 | 1989-10-03 | Siemens-Bendix Automotive Electronics L.P. | Methods of making silicon-based sensors |
DE4106288C2 (de) * | 1991-02-28 | 2001-05-31 | Bosch Gmbh Robert | Sensor zur Messung von Drücken oder Beschleunigungen |
DE4219454C2 (de) * | 1992-06-13 | 1995-09-28 | Bosch Gmbh Robert | Massenflußsensor |
US5883310A (en) * | 1994-11-04 | 1999-03-16 | The Regents Of The University Of California | Micromachined hot-wire shear stress sensor |
US5889211A (en) * | 1995-04-03 | 1999-03-30 | Motorola, Inc. | Media compatible microsensor structure and methods of manufacturing and using the same |
US5767387A (en) * | 1996-10-22 | 1998-06-16 | Hewlett-Packard Co. | Chromatograph having pneumatic detector |
DE19743409A1 (de) * | 1997-10-01 | 1999-04-08 | Bosch Gmbh Robert | Meßvorrichtung zur Messung der Masse eines strömenden Mediums |
LU90485B1 (de) * | 1999-12-13 | 2001-06-14 | Delphi Tech Inc | Massendurchflussmesser |
-
2000
- 2000-07-21 DE DE10035538A patent/DE10035538A1/de not_active Ceased
-
2001
- 2001-07-19 TW TW090117642A patent/TW548407B/zh active
- 2001-07-20 WO PCT/DE2001/002660 patent/WO2002008699A1/fr not_active Application Discontinuation
- 2001-07-20 KR KR1020027003660A patent/KR20020042839A/ko not_active Application Discontinuation
- 2001-07-20 US US10/088,845 patent/US20030019288A1/en not_active Abandoned
- 2001-07-20 AU AU78382/01A patent/AU7838201A/en not_active Abandoned
- 2001-07-20 EP EP01956321A patent/EP1305578A1/fr not_active Withdrawn
- 2001-07-20 JP JP2002514343A patent/JP2004504620A/ja active Pending
- 2001-07-20 CN CN01802122A patent/CN1386189A/zh active Pending
Non-Patent Citations (1)
Title |
---|
See references of WO0208699A1 * |
Also Published As
Publication number | Publication date |
---|---|
DE10035538A1 (de) | 2002-02-07 |
WO2002008699A1 (fr) | 2002-01-31 |
TW548407B (en) | 2003-08-21 |
US20030019288A1 (en) | 2003-01-30 |
AU7838201A (en) | 2002-02-05 |
CN1386189A (zh) | 2002-12-18 |
JP2004504620A (ja) | 2004-02-12 |
KR20020042839A (ko) | 2002-06-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20030221 |
|
AK | Designated contracting states |
Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR |
|
RBV | Designated contracting states (corrected) |
Designated state(s): DE ES FR GB IT |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20040202 |