EP1299030A2 - Dispositifs de microsysteme electromecanique sans fil a mise sous tension automatique - Google Patents

Dispositifs de microsysteme electromecanique sans fil a mise sous tension automatique

Info

Publication number
EP1299030A2
EP1299030A2 EP01950583A EP01950583A EP1299030A2 EP 1299030 A2 EP1299030 A2 EP 1299030A2 EP 01950583 A EP01950583 A EP 01950583A EP 01950583 A EP01950583 A EP 01950583A EP 1299030 A2 EP1299030 A2 EP 1299030A2
Authority
EP
European Patent Office
Prior art keywords
mems
storage device
transceiver
sensor
power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01950583A
Other languages
German (de)
English (en)
Inventor
Sheng T. Wang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lockheed Martin Corp
Original Assignee
Lockheed Corp
Lockheed Martin Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lockheed Corp, Lockheed Martin Corp filed Critical Lockheed Corp
Publication of EP1299030A2 publication Critical patent/EP1299030A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M5/00—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/0002—Remote monitoring of patients using telemetry, e.g. transmission of vital signals via a communication network
    • A61B5/0031—Implanted circuitry
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/02—Details of sensors specially adapted for in-vivo measurements
    • A61B2562/028—Microscale sensors, e.g. electromechanical sensors [MEMS]

Definitions

  • the present invention generally relates to miniature electro-mechanical devices and in particular to MicroElectroMechanical Systems (MEMS). Still more particularly, the present invention relates to combining a plurality of MEMS each having different functions.
  • MEMS MicroElectroMechanical Systems
  • MEMS are very small devices that combine electrical and mechanical components. Generally, the size of MEMS vary from as large as a few millimeters to much smaller. MEMS can be made extremely small, so small in fact that hundreds of the devices can fit in the same space as a single non-MEMS that performs the same function. MEMS are fabricated, usually, using integrated circuit processing methods and depending on the structure, hundreds to thousands of these devices can be fabricated on a single wafer.
  • MEMS device An example of a MEMS device is a micro-circuit that is Texas Instruments' Digital MicroMirror DeviceTM (DMD) which uses extremely tiny movable mirrors to reflect light.
  • DMD Digital MicroMirror Device
  • the mirrors develop a digital image by rapidly switching on or off according to logic programming.
  • a light beam then reflects the digital image off the DMD's surface.
  • the digital images are generated and may then be projected onto a surface for viewing.
  • MEMS devices that are capable of storing an electrical charge.
  • power harvesting MEMS devices that utilize heat, mechanical or chemical environments to produce electrical power.
  • Other MEMS devices are in development that are capable of transmitting signals and still more devices that sense and measure inputs.
  • MEMS devices that are capable of receiving, storing and performing programmable functions, but all utilize a power source with at limited life span.
  • a wireless, remote sensor is implemented by integrating a MEMS sensor, an energy harvesting/storage MEMS, a transceiver MEMS and a miniature antenna.
  • a low charge of energy, created by vibratory, heat or chemical action, in the micro-watt range, is generated and stored by the harvesting/storage MEMS for powering the combined MEMS device.
  • a central monitoring station signals the MEMS transceiver to transmit any data acquired by the MEMS sensor. Power is provided by the harvesting/storage MEMS to transmit data, obtained by the sensor, via the mimature antenna to the central monitoring station. Transmitting time is very short, requiring little power, and the transceiver is only activated by a signal from the monitoring station.
  • Figure 1 depicts a high-level block diagram of a self-powered MEMS device in which a preferred embodiment of the present invention may be implemented
  • Figure 2 illustrates an embodiment wherein self-powered MEMS devices are utilized in an aircraft, in accordance with a preferred embodiment of the present invention
  • Figure 3 depicts an installation of a self-powered MEMS device in an aircraft, in accordance with a preferred embodiment of the present invention.
  • Figure 4 is an application of self-powered MEMS devices for monitoring the human body, in accordance with a preferred embodiment of the present invention.
  • a high-level block diagram of a micro-electro-mechanical system device in which a preferred embodiment of the present invention may be implemented is depicted.
  • the present invention comprises a combination of MEMS devices to provide a self-powered, sensing and signaling mechanism.
  • self-powered sensor 100 is depicted with MEMS sensor 102, MEMS energy harvesting/storage device 104, MEMS transceiver 106 and miniature antenna 108.
  • MEMS sensor 102 may sense heat, cold, vibration, etc.
  • Interfaces 103 and 105 are formed at the boundaries between sensor 102 and energy harvesting device 104, and between energy harvesting/storage device 104 and transceiver 106. Communication is achieved between the individual MEMS devices that make up self-powered sensor 100 through the use of the interfaces.
  • Energy harvesting/storage device 104 may be based on energy provided by mechanical, chemical, heat, solar, etc., means. In this embodiment, the energy harvesting/storage device 104 converts mechanical energy to electrical energy using a piezoelectric or electro-strictive device which converts vibration or mechanical energy, to electrical energy. This electrical energy is then made available to both sensor 102 and transceiver 106 via the respective interfaces 103 and 105. The energy is made available only for a short period of time and at a low energy level - generally measured in micro-watts. As the device is usually in constant mechanical stress, the harvesting device is constantly charging.
  • the harvesting MEMS 104 may be constantly producing electrical power during operation of the aircraft because energy harvesting/storage device 104 is constantly being stressed. This power is made available to sensor 102 and transceiver 106. Specific parameters are measured by sensor 102 and passed to transceiver 106 which then transmits the data, utilizing antenna 108, to a central receiving station (not shown) for processing.
  • Aircraft 200 is manufactured with conventional sensing devices installed in specific locations throughout the aircraft.
  • the sensors are connected, utilizing wiring harnesses, to a central receiver that provides the incoming sensor data to recording and processing devices.
  • problems occur that may have been unforeseen during the design stage. For instance, a problem may occur that requires MEMS sensor 204 being located in the tail of the aircraft to monitor the j ackscrew (for raising and lowering tail flaps). Normally, a periodic visual inspection by maintenance workers would be required.
  • the present invention may be installed in the tail in an appropriate position to monitor the jack screw, to provide the required data to central transceiver 202 without the need for an additional wiring harness. Also, the location of MEMS sensor 204 may be too far from central transceiver 202, so the signal may be transferred by relay antenna 208.
  • MEMS sensors and relay antennas may be located around the aircraft for detecting and transmitting required information.
  • MEMS sensor 204 can be used to detect internal aircraft temperatures.
  • MEMS sensor 210 can be used to detect engine temperature or vibrations.
  • MEMS 212 can be used to sense stress in fuel tank walls.
  • MEMS devices in the manner of the present invention, can be substituted for hard wired sensors in virtually any situation. Additionally, there is no need to go to the expense and effort of providing wiring harnesses to the devices as there would be with normal sensors for any new aircraft design and construction.
  • FIG. 3 an installation of a self-powered MEMS device in an aircraft in accordance with a preferred embodiment of the present invention, is depicted.
  • Installed on the interior of surface 220 is self-powered MEMS device 224.
  • the sensor portion of self- powered MEMS device 224 is mounted directly to aircraft skin 220 for sensing stress in the skin.
  • the energy harvesting portion of self-powered MEMS device 224 converts mechanical energy (aircraft skin vibrations) to electrical energy which powers the sensor portion and the transceiver portion of sensor 224.
  • Signals are generated and transmitted through the antenna to relay antenna 226, which then relays the signal to central transceiver 202.
  • self powered MEMS sensors may be placed in virtually any location on the aircraft.
  • the present invention utilizes the environment, through surface vibration, to power the sensing and transmitting sections of the self- powered MEMS device.
  • Central transceiver 202 can poll all the self-powered MEMS devices installed on the aircraft. When the device receives a polling signal, power generated by the energy harvesting portion of the device is provided to the sensor and transceiver. Since the power is always present during operation of the aircraft, due to constant vibration, the power is available and power storage is not particularly necessary for this application.
  • the sensor communicates the sensed data to the transceiver portion of the MEMS device. The transceiver then transmits the data to central transceiver 202 via relay antenna 226.
  • Remote applications are one of the problems solved by the present invention. All problems relating to locations that are difficult to monitor, locations with no wiring available, hazardous locations, etc., are easily solved by self-powered MEMS devices. Other locations that are hard or dangerous to monitor with standard sensing devices include monitoring devices for the human body. Wireless sensors for human body monitoring are operated the same as the MEMS sensors on the aircraft except, in addition to ambient energy conversion, energy creation may be provided by magnetic resonance charging. Referring to Figure 4, an application of self-powered MEMS devices for monitoring the human body, in accordance with a preferred embodiment of the present invention, is depicted. Human body 300 may be monitored by implanting MEMS devices 302 in strategic locations for detecting specific actions by the body.
  • Conventional implanted devices can be a source of infection especially if the device is large or has wires for attaching to the external monitoring device. Connectors and wiring inside the human body are a major cause of infection. Fissures periodically form at the interface between the passages through the skin and the skin tissue, through which microorganisms can enter and infect the body. The intrusions can result from various movements of the body which exert transient tensile and compressive forces on the passages by which the implants pass through the skin. Additionally, a device that uses a battery, generally requires that the battery be surgically replaced periodically, providing yet another source of infection and trouble.
  • a MEMS device combining a MEMS energy harvesting and storage device, a MEMS sensing device and a MEMS tranceiver can be enclosed in a non-reactive coating for implantation in the human body.
  • Constant monitoring of the device may be accomplished by providing a portable data collector/storage device 306 worn on the body.
  • the power required for transmission of data is minimal. Since the distance to the receiving collector/storage device is small, an implanted MEMS device 302 can generally generate enough power on its own.
  • One method for generating the required power can be converting heat generated by a normal body temperature of 98.6 degrees.
  • the amount generated may be small, but the need is small, because power is only used when the device is polled by the external collector/storage device.
  • external charging device 304 may be used to charge MEMS device 302 when the power source is a non-pathogenic re-chargeable MEMS device.
  • the MEMS device can also have a programmable circuit included for preprocessing collected data.
  • Self-powered MEMS devices allow maximum flexibility in placing the sensors and are not tied to power replacement requirements or wiring constraints. For instance, a device for monitoring pulse rate or blood pressure may be located next to an artery or a blood vessel.
  • a mechanical energy conversion device e.g., piezoelectric
  • the sensor can measure body fluids makeup using microcircuits that sense chemicals.
  • a MEMS device that includes an energy harvesting MEMS and a transceiver MEMS is versatile.
  • the energy harvesting MEMS converts mechanical, heat or chemical energy to a low electrical energy charge.
  • the energy is in the microwatt range and signal transmission is in the form of a burst signal and is around one millisecond. Storage time of the charge is about 99 milliseconds and the transceiver is only activated when a coded signal is received from a data collection station.
  • the energy harvesting MEMS is constantly charging and storing electrical power, so the data is always able to be transmitted when polled.
  • the transmitted data pulses from the MEMS device are in the nanometer wavelength range. Miniature relay antennas used on inanimate objects can be located to relay remote data pulses.
  • relay antennas may not be needed unless the body is in a remote location relative to a receiving monitor.
  • a relay antenna can be strategically located to automatically relay the vital data to a remote transmitter. The transmitter can then transmit the data to a health facility.

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Medical Informatics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • Biophysics (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Transmitters (AREA)
  • Transceivers (AREA)

Abstract

L'invention concerne un capteur distant sans fil mis en oeuvre par intégration d'un capteur de microsystème électromécanique (MEMS), d'un MEMS de collecte/stockage d'énergie, d'un MEMS d'émetteur-récepteur, et d'une antenne miniature. Une faible charge d'énergie créée par une action vibratoire, thermique, ou chimique, dans la plage micro-watt, est générée et stockée par le MEMS de collecte/stockage afin d'alimenter le dispositif MEMS combiné. Une station de centrale de surveillance indique à l'émetteur-récepteur MEMS qu'il doit transmettre toute donnée acquise par le capteur MEMS. L'énergie est fournie par le MEMS de collecte/stockage de façon à transmettre les données obtenues par le capteur, via l'antenne miniature, à la station centrale de surveillance. La durée de la transmission est très courte et mobilise peu d'énergie, et l'émetteur-récepteur est activé uniquement au moyen d'un signal provenant de la station de surveillance.
EP01950583A 2000-07-10 2001-06-28 Dispositifs de microsysteme electromecanique sans fil a mise sous tension automatique Withdrawn EP1299030A2 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US61278500A 2000-07-10 2000-07-10
US612785 2000-07-10
PCT/US2001/020561 WO2002003856A2 (fr) 2000-07-10 2001-06-28 Dispositifs de microsysteme electromecanique sans fil a mise sous tension automatique

Publications (1)

Publication Number Publication Date
EP1299030A2 true EP1299030A2 (fr) 2003-04-09

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP01950583A Withdrawn EP1299030A2 (fr) 2000-07-10 2001-06-28 Dispositifs de microsysteme electromecanique sans fil a mise sous tension automatique

Country Status (3)

Country Link
EP (1) EP1299030A2 (fr)
AU (1) AU2001271557A1 (fr)
WO (1) WO2002003856A2 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE602005006843D1 (de) 2004-10-25 2008-06-26 Koninkl Philips Electronics Nv Autonomer drahtloser würfel
US7586413B2 (en) 2005-09-01 2009-09-08 Assa Abloy Ab Human feedback using parasitic power harvesting of RFID tags
EP2002383B1 (fr) * 2006-03-15 2012-04-25 Semiconductor Energy Laboratory Co., Ltd. Dispositif à semi-conducteurs
FR2905974B1 (fr) * 2006-09-15 2009-02-20 Snecma Sa Systemes de detection et de regulation d'instabilites de l'ecoulement des gaz dans un compresseur, compresseur et moteur a turbine a gaz, utilisation de dispositifs de type mems dans un turboreacteur
US8354778B2 (en) 2007-09-18 2013-01-15 University Of Florida Research Foundation, Inc. Dual-mode piezoelectric/magnetic vibrational energy harvester
US8983817B2 (en) 2008-12-04 2015-03-17 The Boeing Company Dynamic load balancing for adaptive meshes
US8098143B2 (en) 2008-12-10 2012-01-17 Lockheed Martin Corporation Power aware techniques for energy harvesting remote sensor system
US8232706B2 (en) 2009-01-09 2012-07-31 The Boeing Company Autonomous power generation unit for auxiliary system on an airborne platform
ITTO20110694A1 (it) * 2011-07-28 2011-10-27 Torino Politecnico Sistema di infomobilita' e/o diagnostica autoalimentato e dispositivo harvester perfezionato di alimentazione di tale sistema
NL2012484B1 (en) * 2014-03-20 2016-01-18 Stichting Incas3 Sensor system, Mote and a Motes-system for sensing an environmental parameter.
KR20160111063A (ko) * 2015-03-16 2016-09-26 울산과학기술원 생체 내 바이오물질 측정장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6201980B1 (en) * 1998-10-05 2001-03-13 The Regents Of The University Of California Implantable medical sensor system
AU3108700A (en) * 1998-12-02 2000-06-19 Massachusetts Institute Of Technology Integrated palladium-based micromembranes for hydrogen separation and hydrogenation/dehydrogenation reactions
DE19857550A1 (de) * 1998-12-14 2000-06-21 Bosch Gmbh Robert Verfahren zur Verkapselung von metallischen Mikrobauteilen

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO0203856A3 *

Also Published As

Publication number Publication date
AU2001271557A1 (en) 2002-01-21
WO2002003856A2 (fr) 2002-01-17
WO2002003856A3 (fr) 2002-06-06

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