WO2002003856A3 - Self energized wireless mems devices - Google Patents

Self energized wireless mems devices Download PDF

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Publication number
WO2002003856A3
WO2002003856A3 PCT/US2001/020561 US0120561W WO0203856A3 WO 2002003856 A3 WO2002003856 A3 WO 2002003856A3 US 0120561 W US0120561 W US 0120561W WO 0203856 A3 WO0203856 A3 WO 0203856A3
Authority
WO
WIPO (PCT)
Prior art keywords
mems
sensor
transceiver
storage
monitoring station
Prior art date
Application number
PCT/US2001/020561
Other languages
French (fr)
Other versions
WO2002003856A2 (en
Inventor
Sheng T Wang
Original Assignee
Lockheed Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lockheed Corp filed Critical Lockheed Corp
Priority to EP01950583A priority Critical patent/EP1299030A2/en
Priority to AU2001271557A priority patent/AU2001271557A1/en
Publication of WO2002003856A2 publication Critical patent/WO2002003856A2/en
Publication of WO2002003856A3 publication Critical patent/WO2002003856A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M5/00—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/0002—Remote monitoring of patients using telemetry, e.g. transmission of vital signals via a communication network
    • A61B5/0031—Implanted circuitry
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/02—Details of sensors specially adapted for in-vivo measurements
    • A61B2562/028—Microscale sensors, e.g. electromechanical sensors [MEMS]

Abstract

A wireless, remote sensor is implemented by integrating a MEMS sensor, an energy harvesting/storage MEMS, a transceiver MEMS and a miniature antenna. A low charge of energy, created by vibratory, heat or chemical action, in the micro-watt range, is generated and stored by the harvesting/storage MEMS for powering the combined MEMS device. A central monitoring station signals the MEMS transceiver to transmit any data acquired by the MEMS sensor. Power is provided by the harvesting/storage MEMS to transmit data, obtained by the sensor, via the miniature antenna to the central monitoring station. Transmitting time is very short, requiring little power, and the transceiver is only activated by a signal from the monitoring station.
PCT/US2001/020561 2000-07-10 2001-06-28 Self energized wireless mems devices WO2002003856A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP01950583A EP1299030A2 (en) 2000-07-10 2001-06-28 Self energized wireless mems devices
AU2001271557A AU2001271557A1 (en) 2000-07-10 2001-06-28 Self energized wireless mems devices

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US61278500A 2000-07-10 2000-07-10
US09/612,785 2000-07-10

Publications (2)

Publication Number Publication Date
WO2002003856A2 WO2002003856A2 (en) 2002-01-17
WO2002003856A3 true WO2002003856A3 (en) 2002-06-06

Family

ID=24454650

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/020561 WO2002003856A2 (en) 2000-07-10 2001-06-28 Self energized wireless mems devices

Country Status (3)

Country Link
EP (1) EP1299030A2 (en)
AU (1) AU2001271557A1 (en)
WO (1) WO2002003856A2 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1827630B1 (en) 2004-10-25 2008-05-14 Koninklijke Philips Electronics N.V. Autonomous wireless die
US7586413B2 (en) 2005-09-01 2009-09-08 Assa Abloy Ab Human feedback using parasitic power harvesting of RFID tags
WO2007105606A1 (en) 2006-03-15 2007-09-20 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
FR2905974B1 (en) * 2006-09-15 2009-02-20 Snecma Sa SYSTEMS FOR DETECTING AND REGULATING GAS FLOW INSTABILITIES IN A COMPRESSOR, COMPRESSOR AND GAS TURBINE ENGINE, USING MEMS-TYPE DEVICES IN A TURBOJET ENGINE
US8354778B2 (en) 2007-09-18 2013-01-15 University Of Florida Research Foundation, Inc. Dual-mode piezoelectric/magnetic vibrational energy harvester
US8983817B2 (en) 2008-12-04 2015-03-17 The Boeing Company Dynamic load balancing for adaptive meshes
US8098143B2 (en) 2008-12-10 2012-01-17 Lockheed Martin Corporation Power aware techniques for energy harvesting remote sensor system
US8232706B2 (en) * 2009-01-09 2012-07-31 The Boeing Company Autonomous power generation unit for auxiliary system on an airborne platform
ITTO20110694A1 (en) * 2011-07-28 2011-10-27 Torino Politecnico SYSTEM OF INFOMOBILITY AND / OR SELF-ENHANCED DIAGNOSTICS AND HARVESTER DEVICE PERFECTED FOR SUPPLYING THIS SYSTEM
NL2012484B1 (en) 2014-03-20 2016-01-18 Stichting Incas3 Sensor system, Mote and a Motes-system for sensing an environmental parameter.
KR20160111063A (en) * 2015-03-16 2016-09-26 울산과학기술원 Measuring apparatus for In vivo bio material

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000019888A1 (en) * 1998-10-05 2000-04-13 The Regents Of The University Of California Implantable medical sensor system
WO2000032512A1 (en) * 1998-12-02 2000-06-08 Massachusetts Institute Of Technology Integrated palladium-based micromembranes for hydrogen separation and hydrogenation/dehydrogenation reactions
DE19857550A1 (en) * 1998-12-14 2000-06-21 Bosch Gmbh Robert Encapsulation of metallic microcomponents on analyzing circuit on substrate wafer, e.g. for car, machine control and consumer purposes, has protective coating on circuit covered by bonding medium on cap wafer

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000019888A1 (en) * 1998-10-05 2000-04-13 The Regents Of The University Of California Implantable medical sensor system
WO2000032512A1 (en) * 1998-12-02 2000-06-08 Massachusetts Institute Of Technology Integrated palladium-based micromembranes for hydrogen separation and hydrogenation/dehydrogenation reactions
DE19857550A1 (en) * 1998-12-14 2000-06-21 Bosch Gmbh Robert Encapsulation of metallic microcomponents on analyzing circuit on substrate wafer, e.g. for car, machine control and consumer purposes, has protective coating on circuit covered by bonding medium on cap wafer

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
SAFFORD ET AL: "MEMS application in tactical aircraft systems", DIGITAL AVIONICS SYSTEMS CONFERENCE, 1997. 16TH DASC., AIAA/IEEE IRVINE, CA, USA 26-30 OCT. 1997, NEW YORK, NY, USA,IEEE, US, 26 October 1997 (1997-10-26), pages 3.1-36 - 3.1-41, XP010256027, ISBN: 0-7803-4150-3 *
SUBRAMANIAN H ET AL: "DESIGN AND FABRICATION OF WIRELESS REMOTELY READABLE MEMS BASED MICROACCELEROMETERS", SMART MATERIALS AND STRUCTURES, IOP PUBLISHING LTD., BRISTOL, GB, vol. 6, no. 6, 1 December 1997 (1997-12-01), pages 730 - 738, XP000725242, ISSN: 0964-1726 *

Also Published As

Publication number Publication date
AU2001271557A1 (en) 2002-01-21
WO2002003856A2 (en) 2002-01-17
EP1299030A2 (en) 2003-04-09

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