EP1297556A1

EP1297556A1 - Storage and buffer system with transport elements

Info

Publication number: EP1297556A1
Application number: EP01940044A
Authority: EP
Inventors: Jakop Blattner; Rudy Federici
Original assignee: Brooks PRI Automation Switzerland GmbH
Current assignee: Brooks PRI Automation Switzerland GmbH
Priority date: 2000-07-06
Filing date: 2001-06-26
Publication date: 2003-04-02
Also published as: US20030161714A1; KR100764939B1; WO2002003424A1; CH714282B1; AU2001273760A1; KR20030026305A

Abstract

The invention relates to a storage and buffer system (12) for connection to transport units for containers, such as for example, cassettes (7), FOUP pods (8), or SMIF boxes for the storage of wafers (9) and similar, comprising a number of conveyor elements (1), arranged along a conveyor line (13), whereby the conveyor elements (1) are arranged in at least one storage line (14), running essentially horizontal, next to, under or over the transport line (13), whilst maintaining a transfer position relative to the adjacent conveyor elements (1). The system further comprises a means of rotation (17) with at least one conveyor element (1), by means of which the containers (7, 8) can be transferred in a horizontal direction from the conveyor line (13) to a storage line (14) and vice versa, or from one storage line to another.

Description

Storage or buffer system with conveyor elements

The invention relates - according to the preamble of independent claim 1 - to a storage or buffer system for connection to transport systems for containers - such as Cassettes, FOUP pods or SMIF boxes for storing wafers and the like - which comprises a plurality of conveyor elements which are arranged along a conveyor line.

In the manufacture of semiconductor elements, e.g. Integrated circuits or flat screens are processed silicon wafers or glass plates one after the other in different processing systems (such as coating, washing or drying systems, etc.). It is important that no dust particles or other contaminants can be deposited on the cleaned or treated surfaces of the substrates. Defects in the coating of the substrates caused by such contamination can cause larger parts of a production to be discarded. Also e.g. When coating optical lenses and storage disks for computers, attention is paid to a contamination-free environment.

Processing systems are often in a specially suitable clean room or clean room and are preferably connected to one another by a transport system that ensures gentle and low-contamination transport of the substrates. In such cases, open containers such as cassettes, rakes and the like can be used, in which the substrates are preferably stacked horizontally or vertically.

However, if the processing systems are located in a room that meets lower cleanliness requirements, they usually have a housing that encloses an internal clean room. These processing systems are also preferably by a Transport system connected to one another, which ensures gentle and low-contamination transport of the substrates. In such cases, closed containers such as FOUP pods (FRONT OPEN UNIFIED POD) or SMIF boxes (STANDARD MECHANICAL INTERFACE) are used to store the substrates such as wafers and the like. In these containers, the substrates are preferably also stacked horizontally or vertically. These containers are known in the prior art and are usually only opened by lifting a hood or lowering a base part (SMIF) or by moving a side door (FOUP) inside a processing system.

From the state of the art transport systems are known which are marketed under the brand name CLEAN DRIVE ^® from the US company General Middlesex Industries, Inc., Woburn, MA.

Middlesex General Industries, Inc. also sells a generic transport system under the name

ERECT-A-LINE ^® . Such a transport system is basically disclosed in WO-A-99/15445. These are systems that are composed of standardized conveyor elements. These conveying elements are each mounted in a stationary manner and have two longitudinal spars which are essentially parallel to one another and arranged at a distance, on each of which a number of rotating, driven or idling rollers are arranged, each around an axis which is essentially horizontal and perpendicular to the spars , These rollers have an essentially common, horizontal upper tangential surface on which such containers - such as cassettes, FOUP pods or SMIF boxes for storing substrates such as wafers and the like - can be placed and transported by means of a friction drive. Two types of interim storage systems (buffers) are known in connection with the ERECT-A-LINE ^® transport system: the "hard" and the "soft" buffers. The hard buffers have means with which mechanically block the further transport of containers located on a conveyor line. While the containers are being baked, the rollers which ensure the friction drive continue to rotate, so that there is a considerable risk that the containers, or if their contents are open, will contaminate the containers with these particles , When soft buffering (SOFT BUFFERING ™, trademark of Middlesex) is used, the driven rollers of the conveyor elements are stopped so that no abrasion is generated between the containers and the rollers carrying these containers.

These transport systems have proven themselves well. However, they only have limited storage or buffer systems that allow a larger number of containers - such as Cassettes, FOUP pods or SMIF boxes for storing substrates such as wafers and the like - without affecting the transport of other containers.

From US-A-5 957 648 an automation device for processing, transporting and storing wafer cassettes with two separate loading openings is known, each of which is coupled to a vertical transfer device. A horizontal transfer device is inserted between the two vertical transfer devices.

The automation device proposed in US Pat. No. 5,957,648, however, has a complicated interaction between the two vertical transfer devices and the horizontal transfer device and the two loading openings, and does not make good use of the space available, with the resulting disadvantages for gentle and low-contamination Transport that needs to be improved according to the invention. The object of the present invention is to propose an alternative storage system or buffer system which eliminates the problems known in the prior art.

This object is achieved by the features of independent claim 1 by proposing a storage or buffer system for connection to transport systems for containers - such as cassettes, FOUP pods or SMIF boxes for storing wafers and the like - which comprises a plurality of conveyor elements which are arranged along a conveyor line. In the storage or buffer system according to the invention, the conveying elements are arranged in at least one essentially horizontally extending storage line - which extends next to, above or below the conveying line of the transport system - while maintaining a transfer position relative to the nearest conveying elements. It comprises several storage lines, which are arranged in a horizontal register. Furthermore, according to the invention, it comprises rotating means with at least one conveying element with which the containers can be transferred in the horizontal direction from the conveying line to a storage line and vice versa or from one storage line to another. According to one aspect of the invention, a transport system with a storage or buffer system according to the basic concept of the invention described above is proposed, the transport system comprising conveyor elements which are each mounted in a stationary manner and have two longitudinal spars which are essentially parallel to one another and spaced apart a number of which are arranged around a substantially horizontal and perpendicular to the spars axis rotating, driven or moving rollers, which have a substantially common, horizontal upper tangential surface. Furthermore, the use of conveyor elements for the construction of a storage or buffer system according to the basic concept of the invention described above is proposed, the conveyor elements being mounted in a stationary manner and have two longitudinal spars which are essentially parallel to one another and arranged at a distance, on each of which a number of rollers are arranged, each of which essentially rotates, rotates or rotates about an axis which is essentially horizontal and perpendicular to the spars have a common, horizontal upper tangential surface on which containers - such as cassettes, FOUP-Pods or SMIF boxes for storing wafers and the like - can be placed and transported by means of a friction drive.

Further features result from the dependent claims.

The present invention enables in particular the establishment of a storage or buffer system for connection to transport systems for containers - such as e.g. Cassettes, FOUP pods, SMIF boxes or reticles for storing wafers and the like - which has the largest possible storage capacity with minimum space requirements. In addition, the storage or buffer system according to the invention allows the transport system to remove a large number of such containers and to hand them over again at a given time and in any number without impairing the transport of other containers.

The invention will now be explained in more detail with the aid of schematic drawings which merely illustrate the invention by way of example and do not limit the scope thereof. Show:

Fig. 1 is a known from the prior art conveyor element of the US company Middlesex General Industries, Inc., Woburn, MA, wherein under

Fig. 1A is a partial vertical section and a plan view is shown under Fig. 1B; 2 shows a basic, horizontal register arrangement according to the invention of conveyor elements which are arranged while maintaining a mutual transfer position;

3 shows a plan view of a storage system in which a plurality of storage lines - according to one aspect of the invention - are arranged in a vertical register;

Fig. 4 is a plan view of a bearing or. Buffer system, according to an embodiment, in which several storage lines are arranged in a horizontal register;

Fig. 5 is a plan view of a bearing or. Buffer system, according to a further embodiment, in which several storage lines are arranged in a vertical and horizontal register;

Fig. 6 is a plan view of a bearing or. Buffer system, according to a further developed embodiment.

Figure 1 shows a known from the prior art conveyor element of the company Middlesex General Industries Inc., Woburn, MA, USA, is sold under the name Erect-A-LINE ^®. FIG. 1A shows a vertical partial section through such a conveying element 1. Such conveying elements are each mounted in a stationary manner and have two longitudinal spars 2 which are essentially parallel to one another and arranged at a distance. The conveying elements 1 are preferably attached to a substructure (not shown) by means of a yoke-like component 3 connecting the two longitudinal spars 2. On each of the longitudinal spars 2, a number of rollers 4,4 'is arranged, each one in O on

H U α.

1 r

1

^ f

O

SO

C5 o o

I u

H U α.

1 co

1

^ f o o

O

C5 or

I

U

H U α.

• d

Φ

Ti

Φ

33

4J

N

4-1

= d

1 d φ

01 01

1 54

Φ

01 cd

XI

03 rH cd

03

H r-i cd

4H d

Φ

XI

Φ

1

H f

Φ o 4-1

<do Φ o ε

φ 1 rH 03 1 1 1 1 Φ A d 1 d -H 1 54 -H rH Φ H 1 1 5H • .. in -H -. 1 υ φ Φ

Φ Sä xl φ Φ cd 54 = Cd 1 ^ f ¹ . d Φ 1 Sä Φ Φ Φ H TJ H TJ -rl xl -H 0 so

Os X! cd XI Ss d P. Xl 5H H 03 -H cd 03 5H N 4-1 03 4-3 5H 03 -i u rH 03

C5 rH 1 Sä 4-1 Φ 03 Φ Φ 5H 54 54 Φ cd 03 Φ XI d -H d .03 d Φ 0 Φ 03 4-3 o

03 5π XI o d ü -H d cd d -H d 4H Φ TJ cd 1 ε Ss ε Φ 03 J d Ol xl rH Sä A Ti

M Φ 4-3 d 03 i d Φ φ -H Φ d Oi 03 03 TJ Φ rH Oi r-i d = cd -rl ε cd H 54 = rd 54 u -H rH; cd 03 d Ti d H PH d -H -H d i φ d Φ Φ xl XI Φ Φ cd Ti d Φ

Ti = Cd 4-3 rH φ Φ 0

H d Φ 4-1 5H m d Oi d ε O

Φ rd 5H N 54 ε Φ rH co 33 P. φ Ol U Xl ε φ d d 5H 03 03 φ H • Ti φ H TJ XI φ 5H Φ Φ ü ». Φ H -H Φ α. 03 Φ d d cd -H 4-1 Φ 03 Φ Oi Sä d PH -i 5H TJ O Ti r-i Ti 54 -. φ Xl -rl 4-1

Φ PQ N Oi 4-1 φ Φ d Ti s d Ti cd Φ N -rl 0 XI 03 5H> 54 Φ 03 d φ φ • 03 υ d 03

Xl -H 54 M Ti 5π 54 ε d rH -H XI 4H d 01> o cd = o = 0 54 Φ -rl Ti -HH -H 03 -H -rl α 5H 03 φ 0 rH φ = 0 Φ -H d 54 φ d cd P fr. | Fri. Φ Ti 03 5H d φ 5π -i

H = d φ P. A -H 0) 4H Oi ε d -rl 1 H H d 03 d Ti = 0 -H d Sä φ ti cn

Φ 4H X 03 Ό X! cd Φ 03 d φ rH 5π cd 4-1 ε • 5H d -rH 54 XI 4-1 fr, H φ 03 4J Φ H

Ss 0 4-1 d 03 XI XI Oi N Ti 54 Φ d M X! φ 03 4 Φ Φ Φ = o rH Φ 54 -H Oi d J

Φ PQ 03 cd -H -. d d φ 01 φ -H ü 4-1

-. 01 1 03 54 4-> 4-1 ε rH d 5π 54 fr. cd d _^ - _^ Φ ddd 5H Φ dddd Φ Ti cd Ti 4-1 -H 03 Φ rH -H Φ TJ Xl TJ d Ti - l N d = 0 -H

CM cd fr. cd EH M 03 Φ N Ti -H d 54 XI d 54 5H 4 Φ φ 4-1 Φ 54 5H Φ 54 -i 5H cd fr. d

H rH H 4H cd 03 5H d xl = 0 φ Φ 5H 03 03 4 03 N φ -H Φ 0 4-1 = 0 ti O Φ -H d S ε Φ 5H cd = cd d -H xl Φ fr. d Oi φ 4-1 03 4-1 -H Ti d φ rH fr. Φ>> 5H rH ε cd Ü3 d XI P. 4H 5H Φ 4H υ TJ -rl φ Ti 54 03 Φ d Φ P d Oi rH 01 -rl Φ 54

Φ 4-3 U ε 0 oi 54 -H 03 5H Φ -rl ε 5H 0 4-3 01 φ rH Φ -H d Φ 54 cd Ti Ti Φ

1 4-> 54 54 1 rH CM d & cd Φ 03 d φ rH Φ = 0 P. 5H 54 ε -rl cd 4-3 φ XI d TJ

03 0 Φ 0 rH ε H cd Ti 4H 54 d fr, 03 0 cd 5H 54 4-1 Sä 54 03 Ti d ti d 54 o P. Ti d 03 H Φ d 03 dd 0 -H d P. TJ -H Φ l Φ CM Φ d φ φ = 0

H 03 03 0 Φ ε 4-3 cd Φ Φ rH 5H cd> Φ 5H rd 03 xl TJ u Φ XI H 01 5H o rH P Ti fr.

54 d XI d Φ Φ 4-1 d M cd φ Φ 5π d 03 o cd X! cd 54 φ> cd

1 Φ cd 00 υ cd 4-1 4-3 ε 5H -H υ 4-1 4-1 4-1 ti d TJ EH rd rH 03 03 54 = 0 03 rd 4-1 4-> d 5H

4H 5H -H 03 d d 0 Φ Φ d d Xl Φ -rl 5H rH ä 4-1 X M -.

N ε J d r-i d d Φ Φ

4H EH 03 Φ 03 ι Φ P. 5π 0 du Ti TJ 03 EH rd ri Φ 03 Φ d A 0 φ xl Ti d Ti rH 03 03 ε 03 H 4 N -H ^• P d Φ 4H cd Ol d ε 4- 1 4-1 cd N d υ

P Φ 0 Ol d 5H Φ 54 d 03 -H 5H. 03 4-1 H Φ J 03 d ε A 5H Φ 03 Xl 54 N -H xl 03 TJ d A. 5H rH φ rH Φ cd Φ 5H 54 φ 4-1 4H M xl Φ Φ dd Φ A 4->> , u φ d ti Φ -H

, d

- l 1 Φ XI 4H Φ 4H 5H 4-3 φ 0 Ti Φ d Φ d α - TJ XI N H 4-3 o 03 03 -H J 0 Ti Sä d

33 φ PH Ti ü 4H 5H 4H EH d A 0 TJ cd P. φ Φ H φ d -H 5H d 0 XI 03 N tsi 03 d Φ d Φ CM d 5H 03 -H 5H - 1 03 d φ 03 φ φ d ^

XI φ O J d P Ti. d ε H d 5π -H P: d P. 4-1 - CM Φ rH 4-1 4H 54 d d cd. H

-H fr, d << 5π φ Φ Φ Φ 4H -H 03 d H H 4-1 Ti in Oi 5H 4H Φ φ -H Φ Sä

1 Sä d • = o d Xl H 03 Xl X! Φ Φ ε rH 4-1 φ 03 r-i 0 d -H X! Φ XI co tsi d

54 d Sä fr. Φ o Φ ε ü = d X! d Φ 54 d ε 4-> ε -H • ti P, PL. P = d υ H XI Φ

Φ H [- σ \ Φ tsi 4-> rH 54 Φ -rl -H d Φ frl d Φ Sä Φ φ 03 d -H -H

01 TJ XI d M 0 Φ 4-> rH «. φ Φ -rl Ol rH Φ 4-3 CM tsi 03 Ti d • • 54 Φ rH Φ d d cd Φ d d Φ cd 03 TJ 03 4-3 d Oi φ cd. 03 ε 03 H X! d cd 33 cn φ Ti 4-1 -rl Φ -H

X! 4-1 Φ 5π 54 1 54 & 54 -, d Φ rd 4-> X! TJ 5H Φ> -, = rd 4H 5H NH Ti -idd -H rH d 4-> Φ = d 5H rd ε 4H ^■ ■ 0 03 Φ XI ri 01 03 d φ rH 03 ε 5H ld EH X Φ -H Φ -ιH d 54

03 Φ 4-1 4H 4H Φ X) 0 d fr. 5H 03 Φ d -H 03 Φ -H TJ Φ 5H Φ Φ φ cd Φ Sä XI 03 ri -H Φ φ ε Φ cd 01 tsi M cd Φ Φ d cd Φ: fd 5-1 03 5H 5H Φ 4-1 4-1 Ü 03 1 -H 4-> Φ ti r- Oi

Xl 03 Ss Ti cd 4-> Φ 4H SS 4-3 N ε Φ = 0 Φ 4H 03 H Φ Φ 54 d d »Ss Φ ti cd ü rH 03 d XI d 4-1 -. -rl 4H xl 5H 5H 4-1 fr. TJ 4H, = cd

H Φ cd d Φ d 03 d P d ε υ 0 cn Oi Xl Φ 5H d 03 Xl ε A Ti Φ -H φ Ti Ti Φ XI

Φ ü Ol rH d ε 54 01 f 0 54 t 0 i 03 5H φ PL, -H -rl P. Φ d Φ = 0 PJ 5H φ d rH - rd 54 φ -H -H = 0 cd d

03 φ> cd φ 5H Φ Ti • 03 03 ti -. ε Ti 4-1 fr. φ PQ -H Φ - XI Φ i 03 fr, HH φ o Ti. 5H 03 Φ 03 d d. xl d d ε 5H N • 4H Φ 33 H Ti u Φ Ti

<d 5H PQ d 5H φ Oi 03 φ 5H 33 o φ cd 01 Φ ε 0 4-1 φ 33 44 5H .. 03 5H H 4-1 -i 5H d d o -rl = 0. Φ 0 -H cd d l Φ Nl -H -rl 5H -H 4-1 Φ φ Φ 4-> tsi d Φ d -, - Φ = 0 φ Φ H d Φ Φ

O frl fr, N 5H> TJ XJ = cd υ 4-> A 03 Ti EH fr. 03 Ti Oi rH 03 X! Pu Ti -H H H Ti fr. Sä d cd N Ti Oi

dimensioned so that a certain selection of the various types of containers used can pass freely.

The storage or buffer system 12 comprises a lifting means 16 (additionally marked with a cross) with at least one conveying element 1. The lifting means 16 can comprise any desired conveying element 1 of the storage or buffer system 12 and preferably does not require much more space in the horizontal direction as just this conveying element 1. The lifting means 16 can therefore - according to this first embodiment of the storage or buffer system 12 according to the invention shown in FIG. 3 - be arranged at three different positions. With the lifting device, the containers can be moved in the vertical direction from the conveyor line to a storage line and vice versa or from one storage line to another.

FIG. 4 shows a plan view of a storage or buffer system according to the invention, according to an embodiment of the invention, in which several storage lines are arranged in a horizontal register. Corresponding to the conveying direction 11, the last conveying element 1 'of the transport system is shown before and the first conveying element 1' 'of the transport system after the storage or buffer system 12 is also shown. The storage or buffer system 12 is preferably accommodated in a housing 15. The three conveyor elements 1, which are arranged at the same height as the conveyor elements 1 ', 1' 'of the transport system but within the housing 15 of the storage or buffer system 12, form the conveyor line 13. The conveyor elements 1, which in addition to the Conveyor line 13 are arranged, form two bearing lines 14 which extend essentially horizontally and preferably parallel to the conveyor line 13.

The storage or buffer system 12 comprises three rotating means 17 (additionally designated with a rotating arrow) with at least one 03 rH 1 1 1 rH 5H 5H 1

Φ Φ 1 1 0 1 1 4-1 «. rd Φ d 1 φ d d Φ -H

Oi 4-> H 4H 1 Xl -H cd 03 1 d X! 1 03 φ φ 4-1 1

SO Φ N TJ d

-H d 4-1 r-i d φ rH d 4-1 Xl 03 d 03 Φ d r-i 4-1 φ TJ Φ -H

C5 X Φ 4-3 -rl Φ P. Oi d 5H Φ d ü d cd 03 01 ε -H Φ Φ -H ε 01 rH rH X rH

©

-H 03 ü Xl 03 • cd Oi Φ tsi d 5H 03 dd φ Φ 4-1 d cd 03 cd rH = d Φ © H rd -H φ Φ Sä 54 cd TJ -H • EH d 03 54 -H • - H Ti 4H -H = Cd H 4-1 01

M Φ 4H d 54 01 N d Φ X! d 5H d d Φ = Cd l Φ Ti 54 54 -H Φ t ε xl rd 03 cd u XI ε P 54 XI Φ 4-3 cd o Φ Φ Φ TJ ε = d d Xl = 0 X! H Φ u 5H XI •

H d φ cd d H Φ A Ti d -H 5H Φ 4H d -H o fr. Ti -. Ol -rl cd d TJ U d 03 03 Ti 1 0 = cti d d 5H xl Ti Φ 01 03 -H 03 03 03 d o 03 P. -H Φ d α. -H CM -rH cd 5H -rl X3 -H tsi B Φ -H Sä 03 d Φ Φ rH d rH X! Φ -H -H

Φ H Φ P <φ Φ 4-1 φ Φ Φ 33 03 4-1 01! d 4-1 X! -H cd υ d d Sä 03

Sä Ol -H PQ φ dd 03 d 01 d Φ Φ 54 03 tsi 4-3 d φ Φ 03 O d 03 03 • • rd 03 d -H -H 4-> Φ cd Φ = cd dd -H d 0 01 dd cd M xl 03 03 4-1 d ε Oi H 01 XI 0 Φ -rl d Φ 54 Ti TJ ε 54 Ti Φ d Ti!> 03 -H Φ Φ V υ rd Φ cd Φ d -H P. -H -rl φ ε 4-> d 5H -H 54 03 4-1 5π ε Φ φ -H Ti - d

M 4-1 tsi 4-1 fr. d Ti ro rH d -H 5H -. o φ -H Φ H 0 54 cd -H «Φ -H 54 rH Φ TJ

03 54 d Φ d H 54 -H 5H Φ 5H d XI 44 4-> 5H φ φ TJ Φ rH J5 4-3 4-> .. 4-1 5π r 0 φ d 03 Φ d φ φ XI cd Φ 5H -H φ 01 TJ N ε Φ 03 d 4-3 4-> 0

H 03> ε -rl 03 l φ Φ 01 d 4H = d X! Oi o φ Φ Oi d «. Xl φ d 54 φ 01 -H φ

54 Φ = rd u d -H cd Φ 03 d d d o Sä cd cd Φ 4 O d cd ε Φ 03 d

Oi rH 54 H d ε 0) rH Φ ε - d XI -H d Φ φ -rl 01 d XI rH Φ -rH -HQ 5H Φ N Xl d φ 4H d Φ φ Φ rH = 0 -H d cd Oi TJ Φ -rH 54 54 cd d φ φ 0 SS 54 Φ cd

4-> 4H d 5H 03 01 Ti M rH 54 -H 5H Φ 5H d φ Φ φ φ ε xl rH d 4H d 0 54

1 4-1 d 4-> Φ Φ 03 Φ 5H Φ rH 4-> 01 0 H 0 d 54 4-> M υ 01 4-> Φ 03 Φ ε> P in

-H PH Xl TJ -H Oi -H rH Φ d 54 d Φ> 44 -H Φ 03 ti -H -H 4-1 01 Oi -H φ H

CM ε ü 54 Ti d Xl Φ Ti -H Φ, -, H cd M d Φ 5H -H Φ Φ ε ε Φ dd A Ti H Xl • -rl = 0 d U 4-> 54 φ Ol 4-> Φ d 03 cd Xl 01 £ N Φ Ti dd TJ d φ φ Sä PH fr. Ti TJ 03 J = 0 cd rH 4-1 0 -rl φ 03 Φ Φ d d xl r- 5H 54 d TJ d 03

N

1 5π d d 54 -H fr. d X! H 4-1 03 Sä Xl 4-3 03 i

Φ ε Φ d -H υ -H xl xl d 54 d

P X ti 03 Φ -H ε 0 Φ -rl A α Xl = rd -H Φ Φ -H XI = d = d -H 1 = Cd

Φ Φ Xl 4H 4-1 Xl 5H> 54 4-1 ε H φ cd u ε ε d TJ M rH Φ 4H 4H Φ 33 4-1 Xl

03 1 H 03 u 5H d Φ Φ X! 03 Xl 5H 4H -H φ Φ Φ φ d N 0) 03 03 03 4H φ cd 5H rd Φ φ φ d 5H TJ • Φ Φ Φ d P ri 03 01 Ti H 4-1 01 -H 4-3 03 dd -H 03 -HO

P Φ 4-1 -rl 54 P Ss ε 01 54 Φ Φ 44 cd 01 = rd d:! Φ rH X!

01 d Ti P, 03 -H d N 54 P 4-1 ε -H d -. -H 4-1 -H Xl Φ 03 cd Sä r-i d

, cd 0 03 Φ Φ ε o X! 5π cd d Φ> rd ε Φ d d u X! d d d 03 rd Φ Φ

H XI N Φ 4-1 TJ 54 Φ> Φ Ti φ Φ d 5H Φ X! 0 -H 5H ü N, - _^ φ φ Oi 4H xl

-H TJ d TJ Ti + J Ti -rl ε ε -H 03 P 4-1 N Φ -3 rH - '4 5π 4-1 d d O cd

4-3 03 5H cd Φ φ ε Oi 5H 0 4-1 Ti Φ Φ Φ 03 -rl 54 Ti Φ Φ Φ 54 tsi Φ -rl 03 d 0 5H 5H d 4-3 d Xl A rH Oi Φ>. Oi 5H Φ cd Sä r-i d 4-> rd 54 X! rH d

Φ Ti Xl Φ 1 0 cd -H d Φ -rl ü Ti Φ 54 -H d 03 d 0> Ti Φ xl -rl X! O frl 4-1 -H ε Oi 4H £ 4J M φ -rl d 5H Φ rH -H 54 d Xl 4-3 υ Φ d>

Φ H 5H ε Φ d XI 03 1 xl Φ d -H φ 4-1 Xl Φ Φ Ti cd rH -rl 03 r-i ε 4-1 4-1 4-> -rl 33 φ • =

0 ⁾ • o J 03 TJ d cd 4H d Ti 5H 03 03 -H Φ 4H ^< Φ cn 03 ε Φ

Φ 4J H cd d CM d -H B ... 54 d 1X1 4-> 4H -H d 0 -H 03 ε tsi 54 4H rH rH Oi

54 d 4-1 cd Xl d H Φ P- d d 54 Φ = o N 01 d 4H d 4H rd l φ • φ 0 -. φ Φ Oi 03 54 Ti 0 φ 03 fr. d d -H P. 54 03 Ti 4H Φ XI TJ 03 d Φ φ ε

Ti ε -H tsi Φ xl 03 5H ti Ti> 4-> -H 0 cd Φ frl d 01 d ε ti d Φ Ti Φ -H -H Φ

5H Φ 4-1 4-1 Ti = d ε Φ φ d 03 Φ d -H Oi N • Φ d d d P rH -H -rH d -rl d d d

= o rH = 0 rd 4H φ 33 rH d rH -H Sä Φ 4-1 Ss 5H H d -H 03 Ti Φ d -rH -H -rl fr. Φ d rH d 03 4-3 cd rH 01 03 d -H d in tsi φ cd 5π φ H 03 Φ Xl -H rH rH φ

5H φ P. d d 03 4-3 -P * cd φ 01 Φ 03 -rl X Ti M xl 4-1 rH 4H 4-3 03 φ H 54 5H ε Φ XI cd! -. Φ d H fr. PH d 0i 0 φ 5H -H = d; φ cd P. Φ 03 4-1 5H Φ φ d

Φ TJ 5H M 03 d 0 N Φ P, d 1 H ε 4-> 4H φ 4-1 ld = cd 03 φ TJ TJ -H d 5H Ti Xl d 5 Ti tsi Φ ε d 5π rH 54 5H 0i 5H 54 54 03 P. d J Φ Ti ε 54 Ol 5H 5H

O φ fr. d ε H 4-1 4H O ti d "" ^* rH> 01 4H Ti fr. 01 4H!><Ε d PO Ü X) fr. Fri. Φ

1 1 d 1 1 1 1

1 d 1 54 1 d - l 1 Φ φ rd rd Φ 1 φ 1 d = 0 1 -H φ H H 01 Oi • SS 1 1 X! 4-1 d 1 d 03 1 PQ -H

-rl fr. d d Oi CM d 5H 03 -H 5H d PQ rH 54 d φ -H = 54 = 0 03 cd 1 4-1 1

C5 4H -H = 0 φ -H φ -rl 03 Φ Φ rd in • φ

54 d A! Pd d Φ 01 X! Φ 4-> d cd N 0 03 Oi XI Φ H Xl Ti φ d 0 Oi

Φ 0 xl Φ cd d -H rH •> rd υ W -H 4-1 φ 03 r- 03 d 54 03

I 03 -H φ r-i d Φ o Φ Sä 4-1 -rl d -rH d -r | 0.-Cd φ -H ti Φ 03 Ti = 0 -H cd u rd rH 03 N d Oi Ti Φ N Φ 4-1 fr. cd Sä Φ frl 03 03 Oi Φ

4-> -H P4 54 Φ φ ε 4J H M d d

H Ti Xl d 4->. -H 0 -H Ol X! 03 d> ra φ. A Φ 54 0 U rd Φ Φ d d fr, TJ r-i d d ε d 1 l • d d Oi d O 03 4-3 d H 4-1 d Φ 03 α. d tsi XI 5H 0 -H d Φ d 1 φ Xl -H 5H rd 4-1 -H cd 03 cd -H -H 03 4-3 -H cd -H TJ d rH ü MN Φ d Φ Xl Λi 03 ε φ Φ 54 Sä IM Φ Oi 4-> Φ 5H -H Φ Xl ε. 54 03 rd Φ rH -H 03 Φ i ü d rH -H Φ 5H 54 P φ Φ 4-1 5H d 5H -rl 5H Φ ε 03 54 0 Ss 0 Ti

XI -H Φ d 5H Ti rd -H -H -H Φ r-i P Φ 4-1 XI = d d φ d Φ 03 r4 4H Xl Φ 03 t i 4H 0

> S Φ 0 d 5H 03 SS PQ 54 Φ Ti r-i 4H d Φ TJ TJ 4-1 0 -: 4H Φ 4-1 d XI 5-1 P. d d l Φ d 4-3 M 54. -. = Cd d Φ 4-1 0 d -H P. d 5H Φ d • W 1

Φ Φ. Φ XI -H Φ 03 ε Φ Φ 4-1 Φ 4-1 Xl << Oi XI ^• H φ M 4-> P. P Ti -H TJ 4-3 P.

01 d d X! 5H Φ X! 03 -HB Ti 4H 4-3 oi Φ 03 υ d 4H Sä ü 5H rH 54 Xl A! => D -H Φ frl Φ 03 01 cd d P Φ 54 -H d -H PQ ε d -H -H 54 H i • 54 -H 5H -H φ ü od Φ 03 T5 φ d 0 Ti -H d = 0 XI cö Φ d cd 5H Φ 5H 33 Φ XI Φ Sä 54 cd fr.

H 03 d 0 Oi do Φ • -H fr, -H tsi 5H N 5H 5H φ 54 Φ tsi TJ Φ 4 Ti d rH ε cd Φ \ 5H rH vo 0 d Φ 03 54 φ = d 4-1 frl φ dd X d X! 01 H 4-1 Φ φ

Φ Φ 4H xl Ti 0 H 03 d Φ φ Φ cd 01 4H 03 A 4-1 -H -H Ti -H φ 03 = rd xl 01 Φ -r |

4-> 4-1 ε o d> φ -rl d Ti -H 4-1> φ ü Φ r-i Φ φ φ Φ 1 54 d Xl u -n TJ

03 03 d -rl d 4-1 PQ d d TJ 54 4-1 d X Φ Ti = rd -r-i 54 Φ cd Φ -H o

54! rH m 03 • dd = 0 d Φ φ Xl φ o rl d Xl 4H 03 03 φ 5H PQ rH O d. m rd 03 ^• φ Ti Φ 54 ti Φ 54 ^ ε -H xl u Oi PQ A φ Φ d 03 d 03 Oi Xl vo 01 co Φ PQ

H P 54 H Φ r-i 03 cd ε φ d Φ d u -rl rd 1 ü 5π ffl cd = cd cd cd cd Φ H 54 = 0 H d

Φ -H cd -H Q Xl Xl TJ d Φ TJ -H -H d H fr. 03 rd ε Ti X! ü Φ d Φ d η rH - 'd H ε Φ ε d N d 4H d Xl M XI P. Φ 4-1 φ Φ r-i Ti 54 = 0

Φ 4H φ ü -H 5H d d 0 M Φ -rl g 01 cd £ 4-1 03 XI xl ε

Oi 03 o 03 5H Φ φ d A;

01 d -H 03 4-> o Φ cd d 03 υ XI φ 0 = 0 5π 4-1 co 4H N υ ü -H 03 Φ Φ 4-1 4-> ε Φ

-H P. d ti 5H TJ -H Φ Φ XI M ε rd 54 0 4-1 r-i -H -. Φ Ti Ti 4-1 -H CM d 54 TJ

5H -H Φ φ d H Φ - 5H 54 Ti 0 54 cd 0 03 CM Sä -. 0 -H Φ H Φ Φ d

Φ rH 4-3> Φ d φ 4-> Φ _^ d φ P, φ 4-1 r- 03 4H H 03 4-> XI ε MH 4-1 -H

Xl Sä SH d 5H o M 4-1 φ 03 01 03 -H d ε 03 Ti 03 PJ d Oi Φ r-i Φ 4-3 A 03 cd H

03 tSi Φ d φ d d 5H H 5π rd 03 φ -H 5H d 0 -H 5H rd ε d d rd d 4H U ε 4-3 = Cd

-rl X! 01 5π 0) -H Φ H φ XI -rl Φ 0 rd 03 = d 5π φ N TJ Xl r-i -H -H Φ d xl d

X! cd 4H Φ -H Ti Ss d 5π ε 4H 54 03 d cd 4-1 P 4-1 54 54 5H φ XI H 4-1 0 φ Φ

1 XI d 5H fr, d Xl 54 φ d Ti d 4J 03 EH Ti Φ T5 03 0 o Φ N 01 03 N PQ Ti d 54 cd Xl Φ Φ d rd -H Φ ^• d τ-i 0) 0 xl 03 Φ> φ dd 03 Φ -H 54 φ Φ • Φ 5H l 5H φ P. d 54 d oi ri dd P. ü 4-1 ε d 03 Oi d -rl ri 3s 03 54 φ φ

Ti 01 Sä 5π ε Φ u P 4-1 -H Φ 5H -H Φ d 0 1 -r | A φ -H 54 • d -H frl cd φ 54 0 -rl Sä cd tsi Φ Ti -H Φ 5H rH 54 Ü ε 4-1 54> P. φ d 4-1 Φ Φ ε cd PQ Φ KP d XI XI Ti d Φ 54 d Xl 5H Xl 54 03 xl rH cd 03 • 4H 54 co • Xl 4H 4-3

0 0 Φ Φ Sä Φ oi Φ φ Φ d = 0 = d d o Ol rH> d 4-1 4H 0 r TJ ü Φ 4H 54. 54

Φ cn d d X! TJ -rl ε TJ ε Φ 4H »4H Φ fr, 5H 5H 03 Φ 01 d 4H H 5H 54 d r-i d φ d Φ

03 H Φ dd cd φ 5H Oi d Ti 03 d φ φ 5H d ^• H 03 Φ -rl cd cd P. TJ φ -H

TJ 03 d = 0 -H d φ 4-1 = 0 4 -H 54 d d o ». Ti φ 0 Φ 01 H 4-3 Ss 4-3 d = cd d Φ XI 03 03 d Oi Xl fr, -H ε Φ -H; -rl d N. ε Ti d Φ rH

03 4-> Φ ε 44 -H

TJ 5H 4H 4-1 ε -H • d 5H d

Φ ε φ X! rH cd ü ε 5H 4-1 Sä d 4-1: Cd 4-3 Φ Sä -H φ Φ xl φ -H fr! 03 ε rH M d -H 5H = 0 03 d -H 4-1 ddd -H VO N 54 4-1 Xl A Ti cd N Sä -H f α 01 d frl -H cd Φ dd 03 4H 4 φ 03 4 -> d EH P4 03 XI A -H Φ ü di

-H 03 -H 5H 4H in 54 tsi Φ 03 Φ Φ 4-3 0 Φ 0 5H ε XI 5H t

= d ε PQ -H N φ 4-1 0

Sä d 5H d d Φ φ 03 TJ Φ o ε -H

54 Φ φ TJ -HX! 03 5H Φ Sä M 01 54 03 Φ 54 0 ⁾ dd 54 ri φ rH

that the lock door is directed forwards or backwards in the conveying direction. A storage or buffer system according to this further developed embodiment can thus also be used as a central administrator of containers, from which containers are delivered to individual processing stations.

In order for automatic operation of the bearing or To ensure buffer systems, the conveying elements preferably comprise detector means (such as light barriers, barcode readers, electromagnetic and / or inductive recognition devices and the like) with which the identity and / or the current position of containers 7, 8 and / or adapter means are related on an individual conveyor element 1 or on the location within a storage line 14 or conveyor line 13. This makes it possible to record the individual position, location and orientation of each individual container. The storage or buffer system preferably also includes a data processing system (not shown) for processing data recorded by the detector means, for processing them and for controlling drives for the motor-driven rollers or lifting means and / or rotating means.

If and insofar as this allows the construction of the conveying elements 1 and the containers to be transported and if this also does not adversely affect the substrates, all conveyors 13 or bearing lines 14 can deviate from the horizontal position — in deviation from the previous description. Identical elements are always provided with the same reference symbols in the figures.

Further advantages of the storage or buffer systems according to the invention include:

• There may be a new strategy in developing and building transportation systems to transport containers - such as a cassette, a FOUP-Pod or an SMIF box - in which wafers and the like are stored, are proposed, which comprises conveying elements with two longitudinal spars which are essentially parallel to one another and spaced apart, on each of which a number, is arranged around an axis which is essentially horizontal and at right angles to the spars and has rotating rollers which have an essentially common, horizontal upper tangential surface on which containers - such as cassettes, FOUP pods, SMIF boxes or reticles for storing wafers and the like - can be placed and transported by means of a friction drive. Such transport systems are characterized in that the conveying elements are arranged in at least one essentially horizontal storage line - which extends next to, above or below the conveyor line of the transport system - while maintaining a mutual transfer position.

The same components that are used in the construction of transport systems can also be used in the construction of a storage or buffer system according to the invention.

Claims

claims

Storage or buffer system for connection to transport systems for containers - such as Cassettes (7), FOUP pods (8) or SMIF boxes for storing wafers (9) and the like - which comprises a plurality of conveyor elements (1) which are arranged along a conveyor line (13), wherein

the conveying elements (1) are arranged in at least one essentially horizontally expanding storage line (14) - which extends next to, above and / or below the conveying line (13) of the transport system - while maintaining a transfer position relative to the nearest conveying elements (1),

characterized in that

- It comprises at least one bearing line (14), which extends next to the conveyor line (13), and it comprises rotating means (17) with at least one conveyor element (1), with which the containers (7, 8) in the horizontal direction from the conveyor line (13) to a storage line (14) and vice versa or can be transferred from one storage line to another.

2. Storage or buffer system according to claim 1, characterized in that it comprises a plurality of storage lines (14) which are arranged in a horizontal register.

3. Storage or buffer system according to claim 1 or 2, characterized in that the system comprises a lifting means (16) with at least one conveyor element (1) with which the container (7,8) in the vertical direction from the conveyor derlinie (13) in a storage line (14) and vice versa or can be moved from one storage line to another, and

Storage or buffer system according to one of claims 1 to 3, characterized in that it comprises a plurality of storage lines (14) which are arranged in a vertical register.

5. Storage or buffer system according to one of claims 1 to 4, characterized in that the rotating means (17) relative to the nearest conveyor elements (1) can be arranged so that the transfer position under one

Angle of rotation can be taken, which is an integer multiple of 90 °.

6. Storage or buffer system according to one of claims 1 to 5, characterized in that at least one of the lifting means (16) is simultaneously designed as a rotating means (17).

7. Storage or buffer system according to one of the preceding claims, characterized in that all bearing lines (14) extend substantially parallel to the conveyor line (13) and that a piece of the conveyor line (13), all lifting means (16) and rotating means (17) and bearing lines (14) are arranged in a common housing (15).

8. Storage or buffer system according to one of the preceding claims, characterized in that the conveying elements (1) are each mounted in a stationary manner and two in the way. have substantially parallel and spaced-apart longitudinal spars (2), each of which has a number, rotating or driven, about an axis (5,5 ') j which is essentially horizontal and perpendicular to the spars (2) Rollers (4,4 ') are arranged which have an essentially common, horizontal upper tangential surface (6) on which such containers (7,8) can be placed and transported by means of a friction drive.

9. Storage or buffer system according to claim 8, characterized in that the storage or buffer system (12) comprises adapter means with which the containers (7, 8) on the upper tangential surface (6) of the rollers (4,4 ' ) can be placed and transported on it.

10. Storage or buffer system according to one of claims 8 or 9, characterized in that the storage or buffer system (12) comprises detector means with which the current position of containers (7,8) and / or adapter means in relation an individual conveyor element (1) or the location within a storage (14) or conveyor line (13) can be detected.

11. Storage or buffer system according to claim 10, characterized in that the storage or buffer system (12) is a data processing system for processing data detected by the detector means, for processing them and for controlling drives for the motor-driven rollers (4) or lifting means (16) and / or rotating means (17).

12. Transport system for transporting containers - such as a cassette (7), a FOUP-Pod (8) or a SMIF box - in which wafers (9) and the like are stored, which comprises conveyor elements (1), which are each mounted in a fixed position and two essentially parallel to each other and in have a spaced longitudinal spars (2), each of which has a number of driven or idling rollers (4,4) rotating about an axis (5,5 ') which is essentially horizontal and perpendicular to the spars (2) ') is arranged, which have a substantially common, horizontal upper tangential surface (6), characterized in that the transport system comprises a storage or buffer system (12) according to one or more of claims 1 to 11, in which the Conveying elements (1) in at least one essentially horizontally expanding bearing line (14) - which extends next to, above or below the conveyor line (13) of the transport system - while maintaining a transfer position with respect to the nearest F conveyor elements (1) are arranged.

13. Use of conveyor elements (1) for the construction of a warehouse or. Buffer system (12) according to one or more of claims 1 to 11, wherein the conveying elements (1) are each mounted in a stationary manner and have two longitudinal spars (2) which are essentially parallel to one another and spaced apart, each of which has a number An axis (5,5 ') rotating, driven or moving rollers (4,4') which are essentially horizontal and perpendicular to the bars (2) and which have an essentially common, horizontal upper tangential surface (6) are arranged , on the container - such as Cassettes (7), FOUP-Pods (8) or SMIF boxes for storing wafers (9) and the like - can be placed and transported by means of a friction drive.