EP1292176B8 - Device for the production of an active gas beam - Google Patents

Device for the production of an active gas beam Download PDF

Info

Publication number
EP1292176B8
EP1292176B8 EP02019754A EP02019754A EP1292176B8 EP 1292176 B8 EP1292176 B8 EP 1292176B8 EP 02019754 A EP02019754 A EP 02019754A EP 02019754 A EP02019754 A EP 02019754A EP 1292176 B8 EP1292176 B8 EP 1292176B8
Authority
EP
European Patent Office
Prior art keywords
active gas
production
gas beam
cylindrical
limiting channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP02019754A
Other languages
German (de)
French (fr)
Other versions
EP1292176A3 (en
EP1292176B1 (en
EP1292176A2 (en
Inventor
Rudolph Konavko
Arkady Konavko
Hermann Schmid
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PVA TePla AG
Original Assignee
PVA TePla AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PVA TePla AG filed Critical PVA TePla AG
Publication of EP1292176A2 publication Critical patent/EP1292176A2/en
Publication of EP1292176A3 publication Critical patent/EP1292176A3/en
Application granted granted Critical
Publication of EP1292176B1 publication Critical patent/EP1292176B1/en
Publication of EP1292176B8 publication Critical patent/EP1292176B8/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3484—Convergent-divergent nozzles

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Percussion Or Vibration Massage (AREA)
  • Nozzles (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Lasers (AREA)

Abstract

The plasma is generated in a cylindrical discharge chamber (2) with a conically narrowing end (21) that increases the speed of the active gas jet (6). Adjoining the narrowing end is a limiting channel (4) that prevents the spreading out of the discharge zone (22) into free space. The limiting channel is cylindrical, earthed and has a length that is 5 to 10 times greater than its diameter.
EP02019754A 2001-09-07 2002-09-04 Device for the production of an active gas beam Expired - Lifetime EP1292176B8 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10145131A DE10145131B4 (en) 2001-09-07 2001-09-07 Device for generating an active gas jet
DE10145131 2001-09-07

Publications (4)

Publication Number Publication Date
EP1292176A2 EP1292176A2 (en) 2003-03-12
EP1292176A3 EP1292176A3 (en) 2008-07-02
EP1292176B1 EP1292176B1 (en) 2009-12-09
EP1292176B8 true EP1292176B8 (en) 2010-05-19

Family

ID=7698901

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02019754A Expired - Lifetime EP1292176B8 (en) 2001-09-07 2002-09-04 Device for the production of an active gas beam

Country Status (6)

Country Link
US (1) US6943316B2 (en)
EP (1) EP1292176B8 (en)
AT (1) ATE451824T1 (en)
CA (1) CA2399493C (en)
DE (2) DE10145131B4 (en)
ES (1) ES2337657T3 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10358329B4 (en) 2003-12-12 2007-08-02 R3T Gmbh Rapid Reactive Radicals Technology Device for generating excited and / or ionized particles in a plasma and method for producing ionized particles
DE102004028197B4 (en) * 2004-06-09 2006-06-29 Jenoptik Automatisierungstechnik Gmbh Process for the pretreatment of galvanized steel sheets or aluminum sheets for welding
US7148456B2 (en) * 2004-09-15 2006-12-12 The Penn State Research Foundation Method and apparatus for microwave phosphor synthesis
US7079962B2 (en) * 2004-10-20 2006-07-18 Itron, Inc. Automated utility meter reading system with variable bandwidth receiver
WO2006048650A1 (en) * 2004-11-05 2006-05-11 Dow Corning Ireland Limited Plasma system
SK51082006A3 (en) * 2006-12-05 2008-07-07 Fakulta Matematiky, Fyziky A Informatiky Univerzitfakulta Matematiky, Fyziky A Informatiky Univerzity Komensk�Hoy Komensk�Ho Apparatus and treatment method of surface of metals and metalloids, oxides of metals and oxides of metalloids and nitrides of metalloids
DE102006060942A1 (en) * 2006-12-20 2008-06-26 Plasma Treat Gmbh Apparatus and method for generating a plasma jet
DE102007002161B4 (en) * 2007-01-15 2011-11-10 Sergei Afanassev Electric rocket engine with powdered fuel
DE102007012882A1 (en) * 2007-03-17 2008-09-18 Je Plasmaconsult Gmbh Plasma treatment process for substrate surfaces involves use of inert working gas such as argon or nitrogen or mixture of these
DE102007024090A1 (en) 2007-05-22 2008-11-27 Diener, Christof, Dipl.-Ing. Device for plasma treatment of surfaces, has electrical generator and multiple plasma producers, where plasma producers are connected or disconnected together at individual output voltage of generators
JP2011522381A (en) * 2008-05-30 2011-07-28 コロラド ステート ユニバーシティ リサーチ ファンデーション Plasma-based chemical source apparatus and method of use thereof
CH700049A2 (en) * 2008-12-09 2010-06-15 Advanced Machines Sarl Method and device for generating a plasma stream.
KR101001477B1 (en) 2009-02-27 2010-12-14 아주대학교산학협력단 Atmospheric low-temperature micro plasma jet device for bio-medical application
FR2955628B1 (en) * 2010-01-27 2013-10-04 Centre Nat Rech Scient METHOD AND DEVICE FOR MODULATING THE MASS FLOW OF A GAS FLOW
TWI432228B (en) * 2010-09-07 2014-04-01 Univ Nat Cheng Kung Microplasma source and sterilization system including the same
WO2015030191A1 (en) * 2013-08-30 2015-03-05 独立行政法人産業技術総合研究所 Microwave plasma processing device
ITPD20130310A1 (en) 2013-11-14 2015-05-15 Nadir S R L METHOD FOR THE GENERATION OF AN ATMOSPHERIC PLASMA JET OR JET AND ATMOSPHERIC PLASMA MINITORCIA DEVICE
DE102014118909B4 (en) 2014-02-05 2016-12-29 Wilhelm Niemann GmbH & Co. KG Maschinenfabrik Immersion mill with grinding chamber seal
CN108714735A (en) * 2018-08-11 2018-10-30 刘冠诚 A kind of flame passes diffusion nozzle
DE102018221191A1 (en) 2018-12-07 2020-06-10 Carl Zeiss Smt Gmbh Optical element for reflection of VUV radiation and optical arrangement
CN111465160A (en) * 2020-05-14 2020-07-28 国网重庆市电力公司电力科学研究院 Plasma jet generating device and system

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3042830A (en) * 1960-04-04 1962-07-03 Mhd Res Inc Method and apparatus for effecting gas-stabilized electric arc reactions
US3264508A (en) * 1962-06-27 1966-08-02 Lai William Plasma torch
US3239130A (en) * 1963-07-10 1966-03-08 Cons Vacuum Corp Gas pumping methods and apparatus
CH607540A5 (en) * 1976-02-16 1978-12-29 Niklaus Mueller
US4800716A (en) * 1986-07-23 1989-01-31 Olin Corporation Efficiency arcjet thruster with controlled arc startup and steady state attachment
US4916273A (en) * 1987-03-11 1990-04-10 Browning James A High-velocity controlled-temperature plasma spray method
FR2618796B1 (en) * 1987-07-27 1993-02-05 Centre Nat Rech Scient SURFACE TREATMENT METHOD USING ELECTRIC POST-DISCHARGE IN FLOW GAS AND DEVICE FOR CARRYING OUT SAID METHOD
US4882465A (en) * 1987-10-01 1989-11-21 Olin Corporation Arcjet thruster with improved arc attachment for enhancement of efficiency
US4926632A (en) * 1988-02-01 1990-05-22 Olin Corporation Performance arcjet thruster
US5111656A (en) * 1990-07-12 1992-05-12 Olin Corporation Arcjet nozzle having improved electrical-to-thrust conversion efficiency and high voltage operation
US5901551A (en) * 1994-10-24 1999-05-11 Primex Technologies, Inc. Converging constrictor for an electrothermal arcjet thruster
US5640843A (en) * 1995-03-08 1997-06-24 Electric Propulsion Laboratory, Inc. Et Al. Integrated arcjet having a heat exchanger and supersonic energy recovery chamber
JPH0967191A (en) * 1995-08-29 1997-03-11 Komatsu Ltd Device for surface treatment by gas jetting
DE19532412C2 (en) * 1995-09-01 1999-09-30 Agrodyn Hochspannungstechnik G Device for surface pretreatment of workpieces
DE19546930C1 (en) * 1995-12-15 1997-05-07 Agrodyn Hochspannungstechnik G Corona nozzle for corona discharge of workpiece surfaces
JP3423543B2 (en) * 1996-08-30 2003-07-07 株式会社荏原製作所 Fast atom beam source
WO1999049705A1 (en) * 1998-03-20 1999-09-30 Tokyo Electron Limited Plasma processing apparatus
DE29919142U1 (en) * 1999-10-30 2001-03-08 Agrodyn Hochspannungstechnik GmbH, 33803 Steinhagen Plasma nozzle
DE10115241A1 (en) * 2001-03-28 2002-10-24 Aurion Anlagentechnik Gmbh Plasma torch for treating surfaces at atmospheric pressure includes a jet pump within torch to provide low pressure region
DE10303402A1 (en) * 2003-01-24 2004-08-12 Pva Tepla Ag Device for generating a broad jet of active gas based on a gas discharge plasma

Also Published As

Publication number Publication date
ATE451824T1 (en) 2009-12-15
CA2399493C (en) 2011-05-24
CA2399493A1 (en) 2003-03-07
ES2337657T3 (en) 2010-04-28
DE10145131A1 (en) 2003-03-27
EP1292176A3 (en) 2008-07-02
US20030047540A1 (en) 2003-03-13
US6943316B2 (en) 2005-09-13
EP1292176B1 (en) 2009-12-09
DE10145131B4 (en) 2004-07-08
DE50214062D1 (en) 2010-01-21
EP1292176A2 (en) 2003-03-12

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