EP1284371A1 - Assemblage de valves sous forme de matrice - Google Patents

Assemblage de valves sous forme de matrice Download PDF

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Publication number
EP1284371A1
EP1284371A1 EP01119084A EP01119084A EP1284371A1 EP 1284371 A1 EP1284371 A1 EP 1284371A1 EP 01119084 A EP01119084 A EP 01119084A EP 01119084 A EP01119084 A EP 01119084A EP 1284371 A1 EP1284371 A1 EP 1284371A1
Authority
EP
European Patent Office
Prior art keywords
control device
fluid
main
distributor
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01119084A
Other languages
German (de)
English (en)
Other versions
EP1284371B1 (fr
Inventor
Jürgen Göbes
Grzegorz Bogdanowicz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Festo SE and Co KG
Original Assignee
Festo SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Festo SE and Co KG filed Critical Festo SE and Co KG
Priority to AT01119084T priority Critical patent/ATE262117T1/de
Priority to DE50101712T priority patent/DE50101712D1/de
Priority to EP01119084A priority patent/EP1284371B1/fr
Publication of EP1284371A1 publication Critical patent/EP1284371A1/fr
Application granted granted Critical
Publication of EP1284371B1 publication Critical patent/EP1284371B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0832—Modular valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0807—Manifolds
    • F15B13/0814—Monoblock manifolds
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0846—Electrical details
    • F15B13/0857—Electrical connecting means, e.g. plugs, sockets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0846—Electrical details
    • F15B13/0867—Data bus systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0878—Assembly of modular units
    • F15B13/0885—Assembly of modular units using valves combined with other components
    • F15B13/0889—Valves combined with electrical components
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B2013/002—Modular valves, i.e. consisting of an assembly of interchangeable components
    • F15B2013/006—Modular components with multiple uses, e.g. kits for either normally-open or normally-closed valves, interchangeable or reprogrammable manifolds

Definitions

  • the invention relates to a fluid power control device, those for the controlled actuation of at least partially fluidically operated consumers, in particular actuators becomes.
  • a fluid power control device for the control device, the several as electrically actuated fluid control modules contains trained electro-fluidic control unit modules, which are arranged on a fluid distributor over which they are supplied with working fluid to be controlled.
  • the control device contains trained electro-fluidic control unit modules, which are arranged on a fluid distributor over which they are supplied with working fluid to be controlled.
  • To one Controlling machines or other equipment can do several such fluid power control devices used simultaneously that are electrically networked.
  • German utility model 29909529.0 shows another Design of a fluid power control unit.
  • These electrical and / or electro-fluidic control unit modules directly attached to each other and fluidly with each other concatenated.
  • the working fluid required for operation is via an end plate attached to the front fed.
  • control units which are then expedient are networked with each other in terms of control technology.
  • the object of the present invention is to take measures to meet a compact arrangement of several for Control tasks of required fluid power control devices enable.
  • a fluid power control device with a main fluid manifold that has an assembly level defined with a plurality of in the direction a first alignment axis in succession arranged and in fluid communication with the main fluid distributor standing fluid technology control units is, each several in the direction of a second Alignment axis arranged in succession and at least partially designed as electrically operated fluid control modules, electrical and / or electro-fluidic control unit modules included, and are aligned so that the second alignment axes parallel to each other and at the same time at right angles to the assembly level of the main fluid distributor run.
  • electro-fluidic control module can be a three-dimensional Control unit module matrix of flexible construction available be placed in the large number of control module housed in a confined space and easy to handle is.
  • Control unit modules in particular in the form of electrically actuated Fluid control modules, which are designed as a multi-way valve Fluid part and one for actuating the multi-way valve serving electrical actuator can contain.
  • Electrically actuated Fluid control modules which are designed as a multi-way valve Fluid part and one for actuating the multi-way valve serving electrical actuator can contain.
  • purely electrical ones can also be used
  • Control unit modules are contained within the control units, for example input and / or output modules, in the sensor signals external sensors are fed in and / or the Output electrical control signals for electrical consumers can.
  • electrical also means electronic designs are.
  • the individual fluid power control units each have expediently a main expansion level, which is in the Extends the direction of the associated second alignment axis, where all control units with parallel to each other Main expansion planes are arranged. In this way a kind of sandwich construction can be realized in which the control units are placed in the immediate vicinity are.
  • the main planes of expansion are preferably rectangular aligned with the first alignment axis.
  • control unit modules preferably have an elongated shape and are aligned so that their module longitudinal axes are parallel to each other and at the same time perpendicular to the associated one second alignment axis.
  • the main expansion plane each control unit expediently contains both the second alignment axis and the module longitudinal axes the associated control unit modules.
  • control unit modules one or more fluid control modules include, the electrical actuating parts are preferred in the module longitudinal direction in the extension of the fluid part arranged. This allows very compact cross dimensions that have a high module density both in Direction of the first alignment as well as in the direction allow the second alignment axis.
  • each control unit is expedient with one in the direction of the second alignment extending electrical control unit signal distributor equipped with the control unit modules is electrically contacted. It is advantageous here if all control unit signal distributors with a common one main electrical signal distributors are electrically connected, which is parallel in the direction of the first alignment axis extends to the main fluid manifold.
  • the main signal distributor can be arranged alongside the fluid distributor be, whereby a mutual fixation is recommended. It is also possible to use the main fluid distributor and the Main signal distributor as a firmly connected unit perform.
  • Both the main fluid distributor and the main signal distributor can in the direction of the first alignment axis be continuously trained.
  • Another Increase in the flexibility of the control device structure can be achieved if the main fluid distributor and / or the main signal distributor in Direction of development of the first alignment axis is segmented is, that is, of individual, firmly attached Distribution segments exist. With segmented design can be provided that the control units individually or in Groups grouped together on individual distribution segments, so that there is a modular structure that is very simple an expansion of the size allowed.
  • control units in each case have plate-like flat shape and with it the plate level defining main expansion planes parallel to each other are arranged.
  • the individual control units can be found here quasi in a layered construction immediately adjacent to each other to be placed. Touch contact is possible, but will expediently maintained a small space. Thereby an exchange of individual control units becomes independent favored by other control units if this is for retrofitting or Maintenance purposes should be required.
  • control unit modules are within a respective control unit preferably successively alongside each other prepared and immediately fluidly chained together. This eliminates the need within a particular Control unit a separate, the control unit modules carrying Fluid distributor.
  • Each control unit expediently has the main fluid distributor opposite end via a final module.
  • All control units are expediently individually Unit releasably arranged on the fluid distributor, so that each Control unit can be assembled and disassembled without also other of the control units from the main fluid distributor need to remove. Nevertheless, it would also be one Embodiment conceivable in which all control units are fixed are combined into a package, which in turn sits uniformly detachable on the main fluid distributor.
  • Control device contains a plurality of fluid power Control devices 2 that work together on an assembly level 3 of one assigned to all control units 2 Main fluid distributor 4 sit.
  • the individual control devices 2 preferably have one from the Drawing clearly visible plate-like flat shape, see above that there is a main expansion level 5, the corresponds to the plane of expansion of the plate-like structure.
  • the main fluid distributor 4 is in the embodiment as elongated, strip-like body formed in the Is traversed by several distributor channels 6 in the longitudinal direction, those via distributor branch channels 7 to the assembly level 3 open out.
  • control unit 2 located at the top is not shown, so the assigned assembly area 13 with the distributor branch channels 7 opening there is.
  • the main fluid distributor could differ from the design shown 4 in the direction of the first alignment axis 8 also divided into individual fluid distribution segments 14 be, as indicated by dash-dotted lines in the drawing is.
  • the control units 2 could then be used individually or in groups summarized on the individual fluid distributor segments 14 sit. It would then be particularly easy to choose the overall length of the main fluid distributor 4 according to the one used Number of control units 2 variable.
  • the shown in the embodiment, continuous in the longitudinal direction Design has the advantage of very simple manufacture, for example as an extruded part.
  • main fluid distributor 4 and the main signal distributor 15 are the main fluid distributor 4 and the main signal distributor 15 as components a common unit executed.
  • the housing can be integrally connected to one another. It is also possible to use the fluid distributor segments 14 and Signal distributor segments 16 in pairs to distributor segment units summarize.
  • the main signal distributor 15 has a direction in the course the first alignment axis 8 extending contacting plane 17, which runs parallel to the assembly plane 3 and in particular coincides with the latter.
  • This Contacting level 17 is in the direction of the first alignment axis 8 in a number corresponding to the number of control units 2
  • Relative to the direction of the first alignment 8 are the contacting areas 18 and the mounting areas 13 for the individual control units 2 preferably in pairs at the same height. Under certain circumstances a certain offset is also possible.
  • the main signal distributor 15 contains main electrical signal distributor means 21, which are made up of electrical conductors and Also put together electronic components and the need expediently inside the housing of the main signal distributor 15 run. On the one hand, they lead to another Outside surface of the main signal distributor 15 arranged central electrical interface 22 and on the other hand to everyone Contacting area 18, where they each with one on the main signal distributor 15 fixed first electrical control unit interface 23a are connected.
  • the central electrical interface 22 enables an electrical Connection to external electrical components, for example to an electronic control unit that the Control signals required for the actuation of the control units 2 transmitted.
  • the main signal distributor 15 equipped with a fieldbus station if required his. It is also possible to use the main signal distributor 15 to be equipped with an electronic control device, the one the operating sequence of the control units 2nd controlling control program contains.
  • the individual fluid power control units 2 each contain several in the direction of a second alignment 24 successively arranged electrical and / or electro-fluidic control unit modules 25. These are at Embodiment consistently of electrically actuated fluid control modules formed and each contain a fluid part 26 and an electrical actuator attached to it 27.
  • the control unit modules 25 preferably have an elongated one Design, the electrical actuating part 27 in the module longitudinal direction in the extension of the fluid portion 26 is.
  • the module longitudinal axis of a respective control module 25 can be seen in the drawing at 28.
  • Each fluid part 26 has at least one, in the exemplary embodiment equipped with two fluidic interfaces 34, which is an external fluid connection, i.e. a fluid connection to externally arranged components.
  • the Fluidic interfaces 34 can, for example, plug connection means contain the connection of pressure hoses allow which consumers to control, in particular actuators such as working cylinders or the like, to lead.
  • the fluidic interfaces 34 are in the exemplary embodiment on the electrical actuation parts 27 opposite front face of the fluid parts 26. You communicate with those running within the fluid part 26, 4 indicated working channels 36 with a receiving space 37 are connected inside the fluid part 26, the includes a movable valve member 38. The recording room 37 is simultaneously penetrated by the transverse channels 32.
  • the valve member 38 is movable in the longitudinal direction of the module and can be positioned in different positions. On this way the connection between the cross channels can be made 32 or the control unit distribution channels 33 and the working channels 36 for fluid passage Taxes.
  • the working fluid passes through one or more of the control device distribution channels 33 for the individual control unit modules 25.
  • the feed into the control unit distribution channels 33 takes place through the main fluid distributor 4, the distributor branch channels 7 in the contact area between the assembly level 3 and the mounting surface 12 with the control unit distribution channels 33 are connected.
  • At least one of the distribution channels 6 is a feed channel in which the to Working fluid to be fed to consumers is fed.
  • At least another distribution channel 6 is a discharge channel, about the working fluid flowing back from the consumer is discharged again.
  • Further distribution channels 6 can be provided to print medium feed and dissipate, for the pre-controlled actuation of the fluid parts 26 used in the embodiment are formed by multi-way valves.
  • connection means assigned to the connection enable fluid lines leading to a pressure source. You can also use compressed air with this Muffler connection means for the compressed air to be discharged be connected.
  • the fluid parts 26 are activated by the electrical ones Actuating parts 27. These are in the embodiment designed as electromagnetic actuation parts, where it is in particular solenoid valves, by the piloted actuation of the fluid parts 26 possible is.
  • the actuating parts could also be piezoelectric, for example be constructed.
  • the electrical actuators 27 receive the for their Operation required electrical control signals from the main signal distributor 15.
  • Each control unit 2 contains one in Direction of the second alignment axis 24 extending electrical control unit signal distributor 42, the particular in the area of the fluid parts 26 opposite Rear of the electrical actuating parts 27 is placed.
  • control devices 2 with status indicators 41 for the control unit modules 25.
  • Status display means 41 are found in the embodiment on the opposite of the actuating parts 27 Long side of the respective control unit signal distributor 42 and are thus in the expansion direction of the main expansion plane 5 oriented.
  • a respective control unit signal distributor 42 contains the main signal distributor 15 facing end second electrical control unit interface 23b, which with the assigned first electrical control unit interface 23a is electrically contacted. Each also contains Control unit signal distributor 42 from the second electrical Control unit interface 23b outgoing signal conductor 43, the lead to first electrical module interfaces 44a, which in the Frame of connectors with the individual electrical Actuating parts 27 provided second electrical Module interfaces 44b are connected.
  • Control unit modules 25 electrically with a control unit signal distributor 42 coupled, and there are all control unit signal distributors 42 of the individual control units 2 electrically with the commonly assigned main signal distributor 15 connected. In this way the transmission is electrical Signals to and from the control unit modules 25 guaranteed.
  • control units 2 especially aligned so that all second alignment axes 24 parallel to each other and at the same time rectangular run to the assembly level 3 of the main fluid distributor 4.
  • the main expansion level 5 of the control units 2 mentioned above extends in the direction of the associated second Alignment axis 24 and also contains the module longitudinal axes 28 of the individual control unit modules 25. Inside of the control units 2, the module longitudinal axes 28 run parallel to each other and at the same time perpendicular to the associated one second alignment axis 24.
  • control units 2 it is also advantageous if the main expansion planes 5 of the individual control units 2 at right angles to the first alignment axis 8 are aligned. It is therefore possible to the control units 2 with mutually parallel main expansion levels 5 to be arranged in layers adjacent to one another, so that there is no or only a small distance and realize a high packing density on control unit modules 25 leaves.
  • the Number of control module modules used per control unit 2 25 also different for the individual control units 2 his. You can easily control units 2 with different Combine the number of control unit modules 25.
  • Control unit modules 25 can for example electrical inputs and / or Include outputs to receive sensor signals from external components received and / or around external components by transmission to control electrical signals.
  • a vacuum generator can also be provided, for example to be connected to the fluidic interfaces 34 To be able to operate suction pads.
  • Control modules arranged at opposite ends 25a, 25b. With one control module at the end 25a is the relevant control unit 2 on the main fluid distributor 4 scheduled. On the other control module 25b at the end sits on the side facing away from the main fluid distributor 4, a termination module 45. This ensures a sealed longitudinal termination of the adjacent control module 25b and expediently extends parallel to the longitudinal axis of the module 28 to the electrical actuators 27.
  • the control unit signal distributors 42 are in length Conveniently designed so that they reach the final modules 45 protrude and can be attached to this.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Valve Housings (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Check Valves (AREA)
EP01119084A 2001-08-08 2001-08-08 Assemblage de valves sous forme de matrice Expired - Lifetime EP1284371B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
AT01119084T ATE262117T1 (de) 2001-08-08 2001-08-08 Matrixartige ventilanordnung
DE50101712T DE50101712D1 (de) 2001-08-08 2001-08-08 Matrixartige Ventilanordnung
EP01119084A EP1284371B1 (fr) 2001-08-08 2001-08-08 Assemblage de valves sous forme de matrice

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP01119084A EP1284371B1 (fr) 2001-08-08 2001-08-08 Assemblage de valves sous forme de matrice

Publications (2)

Publication Number Publication Date
EP1284371A1 true EP1284371A1 (fr) 2003-02-19
EP1284371B1 EP1284371B1 (fr) 2004-03-17

Family

ID=8178268

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01119084A Expired - Lifetime EP1284371B1 (fr) 2001-08-08 2001-08-08 Assemblage de valves sous forme de matrice

Country Status (3)

Country Link
EP (1) EP1284371B1 (fr)
AT (1) ATE262117T1 (fr)
DE (1) DE50101712D1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1593890A1 (fr) * 2004-05-03 2005-11-09 Rexroth Mecman GmbH Dispositif de vanne avec plusieurs soupapes
DE102008056742B3 (de) * 2008-11-11 2009-09-24 Festo Ag & Co. Kg Ventilanordnung
EP3101319A1 (fr) * 2015-06-04 2016-12-07 Surpass Industry Co., Ltd. Dispositif fluidique

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015221259A1 (de) 2015-10-30 2017-05-04 Festo Ag & Co. Kg Ventilmodul und Ventilanordnung

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2547847A1 (de) * 1975-10-25 1977-05-05 Beukenberg Maschf Vorrichtung zur verteilung von hydraulischen oder pneumatischen arbeitsmedien
DE3014927A1 (de) * 1980-04-18 1981-10-29 Gewerkschaft Eisenhütte Westfalia, 4670 Lünen Ventilvorrichtung, insbesondere fuer ausbausteuerungen im untertage-bergbau
EP0754867A2 (fr) * 1995-07-21 1997-01-22 Smc Corporation Arrangement de soupape en chaîne

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2547847A1 (de) * 1975-10-25 1977-05-05 Beukenberg Maschf Vorrichtung zur verteilung von hydraulischen oder pneumatischen arbeitsmedien
DE3014927A1 (de) * 1980-04-18 1981-10-29 Gewerkschaft Eisenhütte Westfalia, 4670 Lünen Ventilvorrichtung, insbesondere fuer ausbausteuerungen im untertage-bergbau
EP0754867A2 (fr) * 1995-07-21 1997-01-22 Smc Corporation Arrangement de soupape en chaîne

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1593890A1 (fr) * 2004-05-03 2005-11-09 Rexroth Mecman GmbH Dispositif de vanne avec plusieurs soupapes
DE102008056742B3 (de) * 2008-11-11 2009-09-24 Festo Ag & Co. Kg Ventilanordnung
EP3101319A1 (fr) * 2015-06-04 2016-12-07 Surpass Industry Co., Ltd. Dispositif fluidique
US10260649B2 (en) 2015-06-04 2019-04-16 Surpass Industry Co., Ltd. Fluidic device

Also Published As

Publication number Publication date
EP1284371B1 (fr) 2004-03-17
DE50101712D1 (de) 2004-04-22
ATE262117T1 (de) 2004-04-15

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