EP1269134A1 - Sensor assembly - Google Patents

Sensor assembly

Info

Publication number
EP1269134A1
EP1269134A1 EP01927588A EP01927588A EP1269134A1 EP 1269134 A1 EP1269134 A1 EP 1269134A1 EP 01927588 A EP01927588 A EP 01927588A EP 01927588 A EP01927588 A EP 01927588A EP 1269134 A1 EP1269134 A1 EP 1269134A1
Authority
EP
European Patent Office
Prior art keywords
sensor arrangement
pressure
circuit
sensor
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01927588A
Other languages
German (de)
French (fr)
Inventor
Erwin Naegele
Martin Knapp
Wolfgang E. Mueller
Andreas Fischer
Joerg Gebers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP1269134A1 publication Critical patent/EP1269134A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance

Definitions

  • the invention relates to a sensor arrangement, in particular for a high pressure sensor according to the preamble of the main claim.
  • a pressure sensor is known from DE 196 03 674.7 AI, in which the signal is detected by means of a pressure measuring cell made of stainless steel, in which a resistance measuring bridge, for example in thin-film technology, is arranged on a measuring membrane on the side facing away from the measuring medium. Movements of the measuring membrane due to changes in the pressure of the measuring medium lead to compression or stretching of the resistance tracks and thus to changes in resistance in the respective resistors. The exploitation of this change in resistance and the signal amplification takes place with an electronic evaluation circuit, which is arranged on a circuit board.
  • the contacting from the pressure measuring cell to the evaluation circuit takes place here via a soldered flexible conductor track film or possibly also via an additional intermediate carrier, a so-called spacer.
  • This spacer is contacted with the pressure measuring cell by means of bond connections and the evaluation circuit placed on the spacer is soldered.
  • the evaluation circuit is then contacted to the device plug, which is still attached to the sensor arrangement, either by soldered flexible lines or directly via the plug pins, which are sealed in the transition to the housing of the sensor arrangement by soft rubber.
  • the sensor arrangement of the type described at the outset is advantageous in the further development according to the invention with the characterizing features of claim 1 in that the evaluation circuit as a hybrid circuit with the sensor circuit, that is to say with the measuring bridge on the measuring membrane, with the establishment of electrical connections between the evaluation circuit and the sensor circuit and one Earth connection to the housing of the sensor arrangement, can be attached directly.
  • the contacts of the connections of the hybrid circuit with the connector pins of the device connector are made in the sensor arrangement by means of pressure contacts.
  • the pressure contacts can easily be either S-shaped leaf springs or helical compression springs, the helical springs being guided either on the hybrid circuit or on the device plug in a sleeve as a holder.
  • the electronic evaluation circuit according to the invention is implemented in hybrid technology known per se, e.g. ASIC, manufactured and can be connected directly to a measuring cell carrying the measuring membrane by means of an adhesive.
  • ASIC application-specific integrated circuit
  • the necessary electrical connection to the housing mass of the sensor arrangement is advantageously achieved without further components. Complex soldering or bonding processes can be omitted here, since the electrical connections are made simultaneously with the attachment of the hybrid circuit.
  • the flexible foils required in the prior art or an intermediate carrier, so-called spacer, as connecting elements are also not required here, which can save considerable costs.
  • the pressure measuring cell is mounted on a multi-part pressure connector, in which the measuring cell is first attached to a threaded connector that can be screwed onto an assembly to introduce the measuring medium.
  • the threaded connector is firmly connected to a basic housing.
  • the basic housing can be designed in a simple manner as a hexagonal housing which is advantageous for mounting on an assembly, either a milled or a particularly inexpensive deep-drawn part being considered.
  • a hexagon housing can be made of less solid and therefore less expensive material than the pressure port.
  • an improved EMC behavior of the sensor arrangement is to be expected via the resulting metal sheathing of the evaluation circuit, this being particularly advantageous with the small signal strokes of the pressure measuring cell.
  • the divided pressure connection means that mechanical stress is introduced into the measuring cell and thus Ne signal drift minimized by the tightening torque and the separate base housing enables a shorter plastic device plug, which improves its mechanical connection and thus the resistance to shaking of the entire arrangement.
  • the sensor arrangement can preferably be a high-pressure sensor for determining the pressure of oil, diesel, gasoline or brake fluid in a motor vehicle.
  • FIG. 1 shows a sectional illustration of a first exemplary embodiment of a high-pressure sensor with a hybrid circuit on a pressure measuring cell, which is fastened to a hexagonal housing via a separate threaded connector;
  • Figure 2 shows a modification of the embodiment of Figure 1 with a deep-drawn part as a hexagon housing and 3 shows a cross section through the hexagonal housing according to FIG.
  • FIG. 1 shows a high-pressure sensor 1, the housing parts of which consist of a threaded connector 2, a hexagonal housing 3 and a device connector 4.
  • the hexagon housing 3 With the hexagon housing 3, the entire arrangement is via the threaded connector 2 to an assembly or to a pressure-carrying line, e.g. a rail, screwable.
  • the device plug 4 can be firmly inserted into the hexagon housing 3 via seals or other connection methods.
  • the threaded connector 2 there is an inlet 5 for the pressure-carrying medium to be measured and a pressure measuring cell 6 with a measuring membrane is arranged at the end of the inlet 5.
  • the pressure measuring cell 6 is radially welded to the threaded connector 2.
  • a metal disc 7 or a metal sleeve is attached in an electrically conductive manner to the pressure measuring cell 6 in such a way that the disc or sleeve face forms a plane with the membrane surface on which a resistance measuring bridge working in a manner known per se is located.
  • the circuit board with a hybrid circuit 8 is attached to this structure as an evaluation circuit.
  • the hybrid circuit 8 for example a so-called ASIC, has, on the side facing the pressure measuring cell 6, contact surfaces 9 and 10 which are electrically connected to the opposite side of the component via vias.
  • the contact surfaces 9 are arranged geometrically in such a way that when they are joined together with the contact surfaces of the resistance measuring bridge on the pressure measuring cell 6 they produce an electrical connection.
  • On the possibly rotating Contact surface 10, the contact for the housing mass is made via the metal disc 7.
  • the hybrid circuit 8 is bonded to the pressure measuring cell 6 and the metal disk 7 or the sleeve on the contact surfaces 9 and 10 using a conductive adhesive. In this way, both the contacting of the hybrid circuit 8 to the housing ground and the resistance measuring bridge, and also the attachment of the hybrid circuit 8, are established.
  • the electrical connection from the hybrid circuit 8 to the connector pins 11 in the device connector 4 takes place in the exemplary embodiment according to FIG. 1, for example, via a compression spring or an S-shaped leaf spring 13.
  • One side of the leaf spring 13 is here directly with a conductive adhesive on the hybrid circuit 8 glued and contacted on the other side, plug contacts 14 of the plug pins 11.
  • a sleeve 15 is glued on the hybrid circuit 8 as a holder.
  • FIG. 2 and FIG. 3 An exemplary embodiment can be seen from FIG. 2 and FIG. 3, in which a hexagonal housing 20 is produced as a deep-drawn part. The same or equivalent components are provided with the same reference numerals as in Figure 1.
  • a pressure measuring cell 21 is only geometrically adapted to this design and the device connector 4 is held on the hexagon housing 20 by an adhesive 22.

Abstract

The invention relates to a sensor assembly comprising a pressure measuring cell (6) which has a measuring membrane that can be displaced by a pressurized measuring medium. A measuring bridge is provided as a sensor circuit which is directly placed on the measuring membrane. An evaluation circuit is configured as a hybrid circuit (8) and can be directly fastened to the measuring membrane while establishing electrical connections (9, 10) between the hybrid circuit (8) and the sensor circuit and establishing a ground connection to the housing (2, 3) of the sensor assembly (1). The housing (2, 3, 4) of the sensor assembly (1) is provided as several parts, and the terminals of the hybrid circuit (8) are placed in contact with contact pins (11) of the appliance connector (4), for example, by means of pressure contacts (12, 13; 23).

Description

Sensoranordnuncr Sensoranordnuncr
Stand der TechnikState of the art
Die Erfindung betrifft eine Sensoranordnung, insbesondere für einen Hochdrucksensor nach dem Oberbegriff des Hauptanspruchs .The invention relates to a sensor arrangement, in particular for a high pressure sensor according to the preamble of the main claim.
Beispielsweise ist aus der DE 196 03 674.7 AI ein Drucksensor bekannt, bei dem die Signalerfassung mittels einer Druckmesszelle aus Edelstahl erfolgt, bei der auf der dem Messmedium abgewandten Seite auf einer Messmembran eine Widerstandsmessbrücke, z.B. in Dünnschichttechnik, angeordnet ist. Bewegungen der Messmembran aufgrund von Druckänderungen des Messmediums führen hierbei zu Stauchungen oder Streckungen der Widerstandsbahnen und damit zu Widerstandsänderungen in den jeweiligen Widerständen. Die Ausnutzung dieser Widerstandsänderung und die Signal- verstärkung erfolgt mit einer elektronischen Auswerteschaltung, die auf einer Leiterplatte angeordnet ist.For example, a pressure sensor is known from DE 196 03 674.7 AI, in which the signal is detected by means of a pressure measuring cell made of stainless steel, in which a resistance measuring bridge, for example in thin-film technology, is arranged on a measuring membrane on the side facing away from the measuring medium. Movements of the measuring membrane due to changes in the pressure of the measuring medium lead to compression or stretching of the resistance tracks and thus to changes in resistance in the respective resistors. The exploitation of this change in resistance and the signal amplification takes place with an electronic evaluation circuit, which is arranged on a circuit board.
Die Kontaktierung von der Druckmesszelle zur Auswerte- Schaltung erfolgt hier über eine aufgelötete flexible Leiterbahnfolie oder ggf. auch über einen zusätzlichen Zwischenträger, ein sog. Spacer. Dieser Spacer wird dabei mittels Bondverbindungen mit der Druckmesszelle kontaktiert und die auf dem Spacer plazierte Auswerteschaltung wird verlötet . Die Kontaktierung der Auswerteschaltung an den weiterhin an der Sensoranordnung angebrachten Gerätestecker erfolgt dann entweder durch angelötete flexible Leitungen oder direkt über die Steckerpins, welche im Obergang zum Gehäuse der Sensoranordnung durch Weichgummi abgedichtet werden.The contacting from the pressure measuring cell to the evaluation circuit takes place here via a soldered flexible conductor track film or possibly also via an additional intermediate carrier, a so-called spacer. This spacer is contacted with the pressure measuring cell by means of bond connections and the evaluation circuit placed on the spacer is soldered. The evaluation circuit is then contacted to the device plug, which is still attached to the sensor arrangement, either by soldered flexible lines or directly via the plug pins, which are sealed in the transition to the housing of the sensor arrangement by soft rubber.
Bei der Herstellung eines solchen Drucksensors sollte ein kostengünstiger, konstruktiv einfacherer Sensoraufbau vorhanden sein, der für eine hohe Schüttel- und Temperaturbelastungen zur Hochdruckmessung in aggressiven Medien, wie z.B. Öl, Diesel, Benzin, oder Bremsflüssigkeit in Kraftfahrzeug, geeignet ist.When manufacturing such a pressure sensor, an inexpensive, structurally simpler sensor structure should be available, which is suitable for high shaking and temperature loads for high pressure measurement in aggressive media, such as Oil, diesel, petrol, or brake fluid in motor vehicles is suitable.
Vorteile der ErfindungAdvantages of the invention
Die Sensoranordnung der eingangs beschriebenen Art ist in der erfindungsgemäßen Weiterbildung mit den kennzeichnenden Merkmalen des Anspruchs 1 dadurch vorteilhaft, dass die Auswerteschaltung als Hybridschaltung mit der Sensorschaltung, d.h. mit der Messbrücke an der Messmembran, unter Herstellung elektrischer Verbindungen zwischen der Auswerteschaltung und der Sensorschaltung und einer Masseverbindung zum Gehäuse der Sensoranordnung, direkt befestigbar ist. Gemäß einer besonders vorteilhaften Ausführungsform werden die Kontaktierungen der Anschlüsse der Hybridschaltung mit den Steckerstiften des Gerätesteckers in der Sensoranordnung mittels Druckkontakten hergestellt. Die Druckkontakte können dabei auf einfache Weise entweder s- förmige Blattfedern oder Schraubendruckfedern sein, wobei die Schraubenfedern entweder auf der Hybridschaltung oder am Gerätestecker in einer Hülse als Halterung geführt sind.The sensor arrangement of the type described at the outset is advantageous in the further development according to the invention with the characterizing features of claim 1 in that the evaluation circuit as a hybrid circuit with the sensor circuit, that is to say with the measuring bridge on the measuring membrane, with the establishment of electrical connections between the evaluation circuit and the sensor circuit and one Earth connection to the housing of the sensor arrangement, can be attached directly. According to a particularly advantageous embodiment, the contacts of the connections of the hybrid circuit with the connector pins of the device connector are made in the sensor arrangement by means of pressure contacts. The pressure contacts can easily be either S-shaped leaf springs or helical compression springs, the helical springs being guided either on the hybrid circuit or on the device plug in a sleeve as a holder.
Die erfindungsgemäße elektronischen Auswerteschaltung wird in an sich bekannter Hybridtechnik, z.B. als ASIC, gefertigt und kann direkt mit einer die Messmembran tragenden Messzelle über eine Klebung verbunden werden. Die notwendige elektrische Verbindung zur Gehäusemasse der Sensoranordnung wird dabei in vorteilhafter Weise ohne weitere Bauteile erreicht. Aufwendige Löt- oder Bondprozesse können hierbei entfallen, da die elektrischen Verbindungen gleichzeitig mit der Befestigung des Hybridschaltung vorgenommen werden. Auch die beim Stand der Technik erforderlichen flexiblen Folien oder ein Zwischenträger, sog. Spacer, als Verbindungselemente sind hier nicht erforderlich, wodurch erhebliche Kosten erspart werden können.The electronic evaluation circuit according to the invention is implemented in hybrid technology known per se, e.g. ASIC, manufactured and can be connected directly to a measuring cell carrying the measuring membrane by means of an adhesive. The necessary electrical connection to the housing mass of the sensor arrangement is advantageously achieved without further components. Complex soldering or bonding processes can be omitted here, since the electrical connections are made simultaneously with the attachment of the hybrid circuit. The flexible foils required in the prior art or an intermediate carrier, so-called spacer, as connecting elements are also not required here, which can save considerable costs.
Weitere Vorteile der erfindungsgemäßen Anordnung sind die sehr kurzen und symmetrischen elektrischen Verbindungen zwischen der Messbrücke und der Auswerteschaltung. Damit wird eine sehr gute Verträglichkeit gegenüber elektromagnetischer Einstrahlung erreicht. Die somit kompakte Bauform reduziert nicht nur die Anzahl von elektrischen Verbindungseiementen sondern damit auch die Anzahl möglicher Ausfallstellen, wodurch die Lebensdauer der Sensoranordnung erhöht wird. Zudem weist die kompakte Bauform weniger schwingungsanfälligere mechanische Teile auf und die Sensoranordnung ist schüttelbeständiger. Mit den Schraubendruckfedern oder der s-förmigen Blattfedern ist eine einfache, automatisierte Montage des Gerätesteckers möglich.Further advantages of the arrangement according to the invention are the very short and symmetrical electrical connections between the measuring bridge and the evaluation circuit. This ensures very good compatibility with electromagnetic radiation. The compact design thus reduces not only the number of electrical connecting elements but also the number of possible failure points, which increases the service life of the sensor arrangement. In addition, the compact design has less vibration-prone mechanical parts and the sensor arrangement is more resistant to shaking. With the helical compression springs or the S-shaped leaf springs, simple, automated assembly of the device plug is possible.
Besonders vorteilhaft ist es, wenn die Druckmesszelle auf einem mehrteiligen Druckstutzen montiert ist, bei dem die Messzelle zunächst auf einem Gewindestutzen befestigt ist, der zur Einleitung des Messmediums auf ein Aggregat aufschraubbar ist. Der Gewindestutzen ist mit einem Grundgehäuse fest verbunden.It is particularly advantageous if the pressure measuring cell is mounted on a multi-part pressure connector, in which the measuring cell is first attached to a threaded connector that can be screwed onto an assembly to introduce the measuring medium. The threaded connector is firmly connected to a basic housing.
Mit dem so geteilten Druckstutzen, bei dem das Grundgehäuse und der Gewindestutzen getrennt hergestellt werden können, wird eine kleinere Bauhöhe der Sensoranordnung erreicht, da die Druckmesszelle zunächst ohne das Grundgehäuse auf den Gewindestutzen radial geschweißt werden kann. Die Herstellung des Druckstutzens ist damit kostengünstiger und an dem Gewindestutzen ist eine deutlich geringere Zerspanarbeit gegenüber der einteiligen Ausführung erforderlich.With the pressure nozzle divided in this way, in which the basic housing and the threaded connector can be produced separately, a smaller overall height of the sensor arrangement is achieved, since the pressure measuring cell can initially be welded radially onto the threaded connector without the basic housing. The production of the pressure nozzle is therefore more cost-effective and significantly less machining work is required on the threaded nozzle compared to the one-piece design.
Weiterhin ist es vorteilhaft, wenn der Gewindestutzen anschließend mit dem Grundgehäuse gewindeseitig verschweißt wird. Das Grundgehäuse kann dabei auf einfache Weise als ein für die Montage auf einem Aggregat vorteilhaften Sechskantgehäuse ausgeführt sein, wobei entweder ein gefrästes oder ein besonders kostengünstiges Tiefziehteil in Frage kommt. Ein solches Sechskantgehäuse kann aus weniger festem und damit kostengünstigerem Material als der Druckstutzen gefertigt werden. Außerdem ist über die somit entstehende Metallummantelung der Auswerteschaltung ein verbessertes EMV-Verhalten der Sensoranordnung zu erwarten, wobei dies insbesondere bei den kleinen Signalhüben der Druckmesszelle vorteilhaft ist.It is also advantageous if the threaded connector is then welded to the base housing on the thread side. The basic housing can be designed in a simple manner as a hexagonal housing which is advantageous for mounting on an assembly, either a milled or a particularly inexpensive deep-drawn part being considered. Such a hexagon housing can be made of less solid and therefore less expensive material than the pressure port. In addition, an improved EMC behavior of the sensor arrangement is to be expected via the resulting metal sheathing of the evaluation circuit, this being particularly advantageous with the small signal strokes of the pressure measuring cell.
Insgesamt ist mit dem geteilten Druckstutzen eine mechanische Spannungseinleitung in die Messzelle und damit ei- ne Signaldrift durch das Anzugsmoment minimiert und durch das separate Grundgehäuse ist ein kürzerer Gerätestecker aus Kunststoff möglich, wodurch sich dessen mechanische Anbindung und damit die Schüttelbeständigkeit der gesamten Anordnung verbessert.Overall, the divided pressure connection means that mechanical stress is introduced into the measuring cell and thus Ne signal drift minimized by the tightening torque and the separate base housing enables a shorter plastic device plug, which improves its mechanical connection and thus the resistance to shaking of the entire arrangement.
Die Sensoranordnung kann vorzugsweise ein Hochdrucksensor zur Bestimmung des Drucks von Öl, Diesel, Benzin oder Bremsflüssigkeit in einem Kraftfahrzeug sein.The sensor arrangement can preferably be a high-pressure sensor for determining the pressure of oil, diesel, gasoline or brake fluid in a motor vehicle.
Diese und weitere Merkmale von bevorzugten Weiterbildungen der Erfindung gehen außer aus den Ansprüchen auch aus der Beschreibung und den Zeichnungen hervor, wobei die einzelnen Merkmale jeweils für sich allein oder zu mehreren in Form von Unterkombinationen bei der Ausführungsform der Erfindung und auf anderen Gebieten verwirklicht sein und vorteilhafte sowie für sich schutzfähige Ausführungen darstellen können, für die hier Schutz beansprucht wird.These and further features of preferred developments of the invention are evident from the claims and also from the description and the drawings, the individual features being implemented individually or in groups in the form of subcombinations in the embodiment of the invention and in other fields, and can represent advantageous and protectable versions for which protection is claimed here.
ZeichnuncrZeichnuncr
Ausführungsbeispiele einer erfindungsgemäßen Sensoranordnung für einen Hochdrucksensor werden anhand der Zeichnung erläutert. Es zeigen:Exemplary embodiments of a sensor arrangement according to the invention for a high-pressure sensor are explained on the basis of the drawing. Show it:
Figur 1 eine Schnittdarstellung eines ersten Ausführungsbeispiels eines Hochdrucksensors mit einer Hybridschaltung an einer Druckmesszelle, die über einen separaten Gewindestutzen an einem Sechskantgehäuse befestigt ist;FIG. 1 shows a sectional illustration of a first exemplary embodiment of a high-pressure sensor with a hybrid circuit on a pressure measuring cell, which is fastened to a hexagonal housing via a separate threaded connector;
Figur 2 eine Abwandlung des Ausführungsbeispiels nach der Figur 1 mit einem Tiefziehteil als Sechskantgehäuse und Figur 3 einen Querschnitt durch das Sechskantgehäuse nach der Figur 2.Figure 2 shows a modification of the embodiment of Figure 1 with a deep-drawn part as a hexagon housing and 3 shows a cross section through the hexagonal housing according to FIG.
Beschreibung- der AusführuncrsbeispieleDescription of the execution examples
In Figur 1 ist ein Hochdrucksensor 1 dargestellt, dessen Gehäuseteile aus einem Gewindestutzen 2, einem Sechskantgehäuse 3 und einem Gerätestecker 4 bestehen. Mit dem Sechskantgehäuse 3 ist die gesamte Anordnung über den Gewindestutzen 2 auf ein Aggregat oder an eine druckführende Leitung, z.B. ein Rail, schraubbar. In das Sechskantgehäuse 3 ist der Gerätestecker 4 über Dichtungen oder sonstige Verbindungsmethoden fest einfügbar.FIG. 1 shows a high-pressure sensor 1, the housing parts of which consist of a threaded connector 2, a hexagonal housing 3 and a device connector 4. With the hexagon housing 3, the entire arrangement is via the threaded connector 2 to an assembly or to a pressure-carrying line, e.g. a rail, screwable. The device plug 4 can be firmly inserted into the hexagon housing 3 via seals or other connection methods.
Im Gewindestutzen 2 befindet sich ein Einlass 5 für das zu messende druckführende Medium und es ist am Abschluss des Einlasses 5 eine Druckmesszelle 6 mit einer Messmembran angeordnet. Die Druckmesszelle 6 ist am Gewindestutzen 2 radial verschweißt.In the threaded connector 2 there is an inlet 5 for the pressure-carrying medium to be measured and a pressure measuring cell 6 with a measuring membrane is arranged at the end of the inlet 5. The pressure measuring cell 6 is radially welded to the threaded connector 2.
An die Druckmesszelle 6 ist hier eine Metallscheibe 7 oder eine Metallhülse elektrisch leitend so angebracht, dass die Scheiben- oder Hülsenstirnfläche mit der Membranfläche, auf der sich eine in an sich bekannter Weise arbeitende Widerstandsmessbrücke befindet, eine Ebene bildet. Auf dieses Gebilde ist die Leiterplatte mit einer Hybridschaltung 8 als Auswerteschaltung angebracht .A metal disc 7 or a metal sleeve is attached in an electrically conductive manner to the pressure measuring cell 6 in such a way that the disc or sleeve face forms a plane with the membrane surface on which a resistance measuring bridge working in a manner known per se is located. The circuit board with a hybrid circuit 8 is attached to this structure as an evaluation circuit.
Die Hybridschaltung 8, z.B. ein sogenannates ASIC, hat auf der, der Druckmesszelle 6 zugewandten Seite, Kontaktflächen 9 und 10, die über Durchkontaktierungen mit der gegenüberliegenden Bauteilseite elektrisch verbunden sind. Die Kontaktflächen 9 sind geometrisch so angeordnet, dass sie beim Zusammenfügen mit den Kontaktflächen der Widerstandsmessbrücke auf der Druckmesszelle 6 eine elektrische Verbindung herstellen. An der ev. umlaufenden Kontaktflache 10 wird die Kontaktierung für die Gehäusemasse über die Metallscheibe 7 hergestellt.The hybrid circuit 8, for example a so-called ASIC, has, on the side facing the pressure measuring cell 6, contact surfaces 9 and 10 which are electrically connected to the opposite side of the component via vias. The contact surfaces 9 are arranged geometrically in such a way that when they are joined together with the contact surfaces of the resistance measuring bridge on the pressure measuring cell 6 they produce an electrical connection. On the possibly rotating Contact surface 10, the contact for the housing mass is made via the metal disc 7.
Mit einem Leitkleber wird bei dem dargestellten Ausführungsbeispiel die Hybridschaltung 8 an den Kontaktflächen 9 und 10 auf die Druckmesszelle 6 und die Metallscheibe 7 oder die Hülse geklebt. Damit ist auf einfache Weise sowohl die Kontaktierung der Hybridschaltung 8 zur Gehäuse- masse und zur Widerstandsmessbrücke als auch die Befestigung der Hybridschaltung 8 hergestellt.In the exemplary embodiment shown, the hybrid circuit 8 is bonded to the pressure measuring cell 6 and the metal disk 7 or the sleeve on the contact surfaces 9 and 10 using a conductive adhesive. In this way, both the contacting of the hybrid circuit 8 to the housing ground and the resistance measuring bridge, and also the attachment of the hybrid circuit 8, are established.
Die elektrische Verbindung von der Hybridschaltung 8 zu den Steckerstiften 11 im Gerätestecker 4 erfolgt beim Ausführungsbeispiel nach der Figur 1 beispielsweise über eine Druckfeder, bzw. eine s-förmige Blattfeder 13. Eine Seite der Blattfeder 13 ist hier direkt mit einem Leitkleber auf die Hybridschaltung 8 geklebt und kontaktiert auf der anderen Seite Steckerkontakte 14 der Steckerstifte 11. Bei der Kontaktierung mit der Druckfeder ist auf der Hybridschaltung 8 eine Hülse 15 als Halterung aufgeklebt.The electrical connection from the hybrid circuit 8 to the connector pins 11 in the device connector 4 takes place in the exemplary embodiment according to FIG. 1, for example, via a compression spring or an S-shaped leaf spring 13. One side of the leaf spring 13 is here directly with a conductive adhesive on the hybrid circuit 8 glued and contacted on the other side, plug contacts 14 of the plug pins 11. When contacting the compression spring, a sleeve 15 is glued on the hybrid circuit 8 as a holder.
Aus Figur 2 und Figur 3 ist ein Ausführungsbeispiel zu entnehmen, bei dem ein Sechskantgehäuse 20 als Tiefziehteil hergestellt ist. Gleiche oder gleichwirkende Bauelemente sind hier mit den gleichen Bezugszeichen wie bei der Figur 1 versehen. Eine Druckmesszelle 21 ist lediglich geometrisch angepasst an diese Ausführung entsprechend gestaltet und der Gerätestecker 4 ist über einen Klebstoff 22 am Sechskantgehäuse 20 gehalten.An exemplary embodiment can be seen from FIG. 2 and FIG. 3, in which a hexagonal housing 20 is produced as a deep-drawn part. The same or equivalent components are provided with the same reference numerals as in Figure 1. A pressure measuring cell 21 is only geometrically adapted to this design and the device connector 4 is held on the hexagon housing 20 by an adhesive 22.
Die Kontaktierung der Hybridschaltung mit den Steckerstiften 11 erfolgt hier mit Kontakten 23 und Schraubendruckfedern 12, die am Gerätestecker 4 in entsprechenden Hülsen 24 gehalten sind. The contacting of the hybrid circuit with the plug pins 11 takes place here with contacts 23 and helical compression springs 12, which are held on the device plug 4 in corresponding sleeves 24.

Claims

Patentansprüche claims
1) Sensoranordnung, mit1) Sensor arrangement, with
einer Druckmesszelle (6) , die eine Messmembran aufweist, welche von dem druckbeaufschlagten Messmedium auslenkbar ist, mita pressure measuring cell (6) which has a measuring membrane which can be deflected by the pressurized measuring medium
einer Sensorschaltung, die direkt auf der Messmembran angebracht ist sowie einer damit verbundenen elektronischen Auswerteschaltung (8) und mita sensor circuit, which is attached directly to the measuring membrane and an associated electronic evaluation circuit (8) and with
einem mit der Sensorschaltung und/oder die Auswerte- Schaltung (8) kontaktierbaren Gerätestecker (4) , dadurch gekennzeichnet, dassone with the sensor circuit and / or the evaluation circuit (8) contactable connector (4), characterized in that
die Auswerteschaltung als Hybridschaltung (8) ausgebildet ist und an der Messmembran unter Herstellung elektrischer Verbindungen (9,10) zwischen der Hybridschaltung (8) und der Sensorschaltung und einer Masseverbindung zum Gehäuse (2,3) der Sensoranordnuno; (1) direkt befestigbar ist. 2) Sensoranordnung nach Anspruch 1, dadurch gekennzeichnet, dassthe evaluation circuit is designed as a hybrid circuit (8) and on the measuring diaphragm with electrical connections (9, 10) between the hybrid circuit (8) and the sensor circuit and a ground connection to the housing (2, 3) of the sensor arrangement; (1) can be attached directly. 2) Sensor arrangement according to claim 1, characterized in that
- die Kontaktierung der Anschlüsse der Hybridschaltung (8) mit Steckerstiften (11) des Gerätesteckers (4) mittels Druckkontakten (12, 13; 23) bewirkt ist.- The contacting of the connections of the hybrid circuit (8) with plug pins (11) of the connector (4) by means of pressure contacts (12, 13; 23) is effected.
3 ) Sensoranordnung nach Anspruch 2 , dadurch gekennzeichnet, dass3) Sensor arrangement according to claim 2, characterized in that
die Druckkontakte s-förmige Blattfedern (13) sind.the pressure contacts are s-shaped leaf springs (13).
4) Sensoranordnung nach Anspruch 2, dadurch gekennzeichnet, dass4) Sensor arrangement according to claim 2, characterized in that
- die Druckkontakte Schraubendruckfedern (12; 23) sind, die entweder auf der Hybridschaltung (8) oder am Gerätestecker (4) in einer Hülse (15,-24) als Halteruncg geführt sind.- The pressure contacts are helical compression springs (12; 23), which are guided either on the hybrid circuit (8) or on the connector (4) in a sleeve (15, -24) as a holder.
5) Sensoranordnung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass5) Sensor arrangement according to one of the preceding claims, characterized in that
die Druckmesszelle (6) an einem mehrteiligen Druckstutzens gehalten ist, bei dem die Druckmesszelle (6) auf einem Gewindestutzen (2) befestigt ist, der zur Einleitung des Messmediums auf ein Aggregat oder eine Leitung aufschraubbar ist, und dass der Gewindestutzen (6) mit einem Grundgehäuse (3) zur Montage der Sensoranordnung (1) und zur Aufnahme des Gerätesteckers (4) fest verbunden ist.the pressure measuring cell (6) is held on a multi-part pressure connection, in which the pressure measuring cell (6) is fastened on a threaded connection (2) which can be screwed onto an assembly or a line to introduce the measuring medium, and that the threaded connector (6) is firmly connected to a basic housing (3) for mounting the sensor arrangement (1) and for receiving the device plug (4).
6 ) Sensoranordnung nach Anspruch 5 , dadurch gekennzeichnet, dass6) Sensor arrangement according to claim 5, characterized in that
- die Druckmesszelle (6) auf dem Gewindestutzen (2) radial verschweißt ist und der Gewindestutzen (2) mit dem Grundgehäuse (3) gewindeseitig verschweißt ist.- The pressure measuring cell (6) is welded radially on the threaded connector (2) and the threaded connector (2) is welded to the basic housing (3) on the thread side.
7) Sensoranordnung nach Anspruch 5 oder 6, dadurch gekennzeichnet, dass7) Sensor arrangement according to claim 5 or 6, characterized in that
das Grundgehäuse ein Sechskantgehäuse (3; 20) ist.the basic housing is a hexagonal housing (3; 20).
8) Sensoranordnung nach Anspruch 7, dadurch gekennzeichnet, dass8) Sensor arrangement according to claim 7, characterized in that
das Sechskantgehäuse (20) ein Tiefziehteil ist.the hexagon housing (20) is a deep-drawn part.
9) Sensoranordnung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass9) Sensor arrangement according to one of the preceding claims, characterized in that
- die Sensoranordnung (1) ein Hochdrucksensor zur Bestimmung des Drucks von Öl, Diesel, Benzin oder Bremsflüssigkeit in einem Kraftfahrzeug ist. - The sensor arrangement (1) is a high-pressure sensor for determining the pressure of oil, diesel, gasoline or brake fluid in a motor vehicle.
EP01927588A 2000-03-25 2001-03-23 Sensor assembly Withdrawn EP1269134A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10014992 2000-03-25
DE10014992A DE10014992C2 (en) 2000-03-25 2000-03-25 sensor arrangement
PCT/DE2001/001119 WO2001073391A1 (en) 2000-03-25 2001-03-23 Sensor assembly

Publications (1)

Publication Number Publication Date
EP1269134A1 true EP1269134A1 (en) 2003-01-02

Family

ID=7636432

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01927588A Withdrawn EP1269134A1 (en) 2000-03-25 2001-03-23 Sensor assembly

Country Status (8)

Country Link
US (1) US6810746B2 (en)
EP (1) EP1269134A1 (en)
JP (1) JP2003529070A (en)
KR (1) KR20020086683A (en)
CN (1) CN1172168C (en)
DE (1) DE10014992C2 (en)
RU (1) RU2261419C2 (en)
WO (1) WO2001073391A1 (en)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10163165A1 (en) * 2001-12-20 2003-07-03 Endress & Hauser Gmbh & Co Kg Field device and method for operating the field device
DE10201000A1 (en) * 2002-01-11 2003-07-31 Infineon Technologies Ag Integrated sensor module and method for its manufacture
DE10221303A1 (en) * 2002-05-14 2003-11-27 Valeo Schalter & Sensoren Gmbh Sensor, in particular ultrasound sensor, and method of manufacture
US7363819B2 (en) 2002-06-22 2008-04-29 Robert Bosch Gmbh High-pressure sensor housing which is simplified by means of a connection element (also emc)
DE10228000A1 (en) 2002-06-22 2004-01-08 Robert Bosch Gmbh Pressure measuring device
US6742395B1 (en) * 2002-12-20 2004-06-01 Texas Instruments Incorporated Hermetic pressure transducer
DE10354189A1 (en) * 2003-04-24 2004-11-11 Continental Teves Ag & Co. Ohg Pressure sensor assembly, especially for a motor vehicle braking system has a pressure element mounting in the form of a pressure pipe with a pressure measurement element and electronics contained within a sealed housing
DE10361769B4 (en) * 2003-12-29 2014-10-23 Robert Bosch Gmbh Pressure transducer with one-piece housing
JP3912400B2 (en) * 2004-03-30 2007-05-09 株式会社デンソー Pressure sensor
CN100541157C (en) * 2004-03-30 2009-09-16 株式会社电装 Pressure transducer
DE102007016474A1 (en) * 2007-04-05 2008-10-09 Robert Bosch Gmbh Connection unit for a pressure measuring cell
DE102007016477A1 (en) * 2007-04-05 2008-10-09 Robert Bosch Gmbh Connection unit for a pressure measuring cell
DE102007031980A1 (en) * 2007-07-10 2009-01-15 Robert Bosch Gmbh Connection unit for a pressure measuring cell
KR100923202B1 (en) * 2007-12-05 2009-10-22 주식회사 만도 Pressure sensor
DE102008054382A1 (en) 2008-12-08 2010-06-10 Robert Bosch Gmbh Pressure sensor module for mounting in opening of wall of pipe to measure pressure of medium in pipe, has fastening unit allowing movement of module relative to fastening flange, and plug part including resilient electrical connections
KR101600089B1 (en) * 2009-10-14 2016-03-07 타이코에이엠피 주식회사 vertical pressure sensor
JP2011221006A (en) * 2010-03-23 2011-11-04 Tokyo Electron Ltd Wafer type temperature detection sensor and method of manufacturing the same
CN101832797A (en) * 2010-05-21 2010-09-15 湖州爱迪电气有限公司 Wired compound sensor capable of being in direct sealed conductive connection
DE102012100942A1 (en) * 2012-01-05 2013-07-11 Trafag Ag Measuring cell for high-pressure sensor for measuring pressures above about hundred bar utilized in different types of markets such as automobile market, has metal body, where deflection measuring element detects deflection of membrane area
DE102012204904A1 (en) * 2012-03-27 2013-10-02 Robert Bosch Gmbh sensor unit
DE102012210752A1 (en) * 2012-06-25 2014-01-23 Robert Bosch Gmbh Pressure sensing module and pressure sensor device with such a pressure sensing module
US20140102210A1 (en) * 2012-10-11 2014-04-17 Continental Automotive Systems, Inc. Pressure Sensor With Robustness Against Mounting Stress
DE102012222089A1 (en) 2012-12-03 2014-06-05 Robert Bosch Gmbh Pressure sensor module
DE102013223442A1 (en) * 2013-11-18 2015-05-21 Robert Bosch Gmbh Pressure sensor arrangement for detecting a pressure of a fluid medium in a measuring space
US9869599B2 (en) * 2014-09-30 2018-01-16 Rosemount Inc. High-temperature pressure sensing
US9702740B2 (en) * 2015-04-17 2017-07-11 Wika Alexander Wiegand Se & Co. Kg Measuring instrument with connecting coupling
DE102015224472A1 (en) 2015-12-07 2017-06-08 Robert Bosch Gmbh Pressure sensor for detecting a pressure of a fluid medium
DE102016211704A1 (en) * 2016-06-29 2018-01-04 Robert Bosch Gmbh Apparatus for detecting a pressure of a fluid medium
DE102016113209A1 (en) * 2016-07-18 2018-01-18 Sensata Germany GmbH PRESSURE SENSOR
DE102016214952A1 (en) * 2016-08-11 2018-02-15 Robert Bosch Gmbh Pressure measuring cell and method for coating a carrier of a pressure measuring cell
JP6541083B1 (en) 2017-12-26 2019-07-10 Smk株式会社 Sensor connector
DE102019209030B3 (en) * 2019-06-21 2020-09-24 Metallux Ag Pressure sensor device
DE102019209443A1 (en) * 2019-06-28 2020-12-31 Continental Teves Ag & Co. Ohg Sensor device for determining a fluid pressure
DE102020212876A1 (en) 2020-10-13 2022-04-14 Robert Bosch Gesellschaft mit beschränkter Haftung Sensor device and method for manufacturing a sensor device
KR102539993B1 (en) * 2022-04-14 2023-06-05 김정기 Compact pressure sensor having high interrupting performance for torsion stress

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US566780A (en) * 1896-09-01 Vehicle-wheel
US4536820A (en) * 1984-03-29 1985-08-20 General Signal Corporation Electrical feedthrough means for pressure transducer
JPS61209334A (en) * 1985-03-13 1986-09-17 Nippon Denso Co Ltd Pressure detector
DE3937573A1 (en) * 1989-11-11 1991-05-16 Gewerk Eisenhuette Westfalia ELECTRICAL PRESSURE GAUGE FOR MEASURING HYDRAULIC PRESSURES, ESPECIALLY FOR USE IN MINING HYDRAULICS
DE4009377A1 (en) * 1990-03-23 1991-10-02 Bosch Gmbh Robert PRESSURE SENSOR FOR DETECTING PRINTERS IN THE COMBUSTION CHAMBER OF COMBUSTION ENGINES
US5438876A (en) * 1993-08-05 1995-08-08 The Foxboro Company Modular diaphragm pressure sensor with peripheral mounted electrical terminals
JPH0864732A (en) * 1994-08-26 1996-03-08 Mitsubishi Electric Corp Semiconductor integrated circuit device
JP3465996B2 (en) * 1995-05-26 2003-11-10 株式会社シチズン電子 Pressure sensor
US5802912A (en) * 1996-01-25 1998-09-08 Delco Electronics Corporation Electrical terminal apparatus
DE19603674A1 (en) * 1996-02-02 1997-08-07 Bosch Gmbh Robert Pressure sensor
US5656780A (en) * 1996-03-28 1997-08-12 Kavlico Corporation Capacitive pressure transducer with an integrally formed front housing and flexible diaphragm
US6131467A (en) * 1997-05-09 2000-10-17 Fujikoki Corporation Pressure sensor including a joint for connecting a housing and connector case together
US5974893A (en) * 1997-07-24 1999-11-02 Texas Instruments Incorporated Combined pressure responsive transducer and temperature sensor apparatus
EP0913677B1 (en) * 1997-10-28 2003-08-27 Toyoda Koki Kabushiki Kaisha Pressure detection device
US6212955B1 (en) * 1997-12-09 2001-04-10 Hokuriku Electric Industry Co., Ltd. Capacitance-type pressure sensor unit

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO0173391A1 *

Also Published As

Publication number Publication date
US20030233881A1 (en) 2003-12-25
CN1419649A (en) 2003-05-21
JP2003529070A (en) 2003-09-30
WO2001073391A1 (en) 2001-10-04
DE10014992C2 (en) 2002-01-31
KR20020086683A (en) 2002-11-18
US6810746B2 (en) 2004-11-02
RU2261419C2 (en) 2005-09-27
DE10014992A1 (en) 2001-10-04
CN1172168C (en) 2004-10-20

Similar Documents

Publication Publication Date Title
DE10014992C2 (en) sensor arrangement
EP2167930B1 (en) Connection unit for a pressure measuring cell
EP0923717B1 (en) Device for determining the pressure and temperature in the suction pipe of an internal combustion engine
DE102010041169A1 (en) Pressure sensor, in particular for braking device
DE102012204904A1 (en) sensor unit
EP0927337A1 (en) Device for detecting the pressure and temperature in the induction pipe of an internal combustion engine and method for the production of said device
DE102007003446B4 (en) Mounting structure of a pressure sensor element
DE102012201416A1 (en) Sensor system and method for producing a sensor system
EP0935743B1 (en) Pressure sensor unit, especially for automotive engineering applications
WO2002066948A1 (en) Pressure sensor module
DE102012204905A1 (en) Circuit carrier for a sensor unit and corresponding sensor unit
EP0829003B1 (en) Pressure sensor and method of producing the same
DE102009028966A1 (en) pressure sensor
EP0993596B1 (en) Vibration pickup with pressure sheath
DE102014221365A1 (en) Pre-assembly assembly for a sensor unit and corresponding sensor unit
WO2019020220A1 (en) Sensor for detecting a spatial temperature profile and method for producing a sensor unit
EP0199772A1 (en) High pressure sensor.
DE102013220091A1 (en) pressure sensor
EP0909223A1 (en) Ultrasonic transducer with contact member
WO2019121208A1 (en) Pressure measuring unit and connection unit for a motor vehicle transmission
DE102012205280A1 (en) Pressure sensor assembly for detecting pressure in pressure chamber of motor vehicle transmission, has plate elements, on which printed circuit board is supported and pressure sensor is formed in housing, particularly in form of cavity
DE112018005685T5 (en) Flow meter
DE102007016536B4 (en) Device for measuring a pressure prevailing in a pressure medium
DE19844556A1 (en) Thruster
WO2013010836A2 (en) Connector module, in particular for window lifter drives, and method for producing said module

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20021025

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

RBV Designated contracting states (corrected)

Designated state(s): DE FR GB IT

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20071001