EP1255971A1 - Kurzer fabry-perot-filter mit metallischen schichten - Google Patents
Kurzer fabry-perot-filter mit metallischen schichtenInfo
- Publication number
- EP1255971A1 EP1255971A1 EP01907709A EP01907709A EP1255971A1 EP 1255971 A1 EP1255971 A1 EP 1255971A1 EP 01907709 A EP01907709 A EP 01907709A EP 01907709 A EP01907709 A EP 01907709A EP 1255971 A1 EP1255971 A1 EP 1255971A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- plates
- optical filter
- wavelength
- thickness
- tunable optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 229910052751 metal Inorganic materials 0.000 claims abstract description 30
- 239000002184 metal Substances 0.000 claims abstract description 30
- 230000003287 optical effect Effects 0.000 claims abstract description 23
- 230000005540 biological transmission Effects 0.000 claims abstract description 20
- 125000006850 spacer group Chemical group 0.000 claims abstract description 15
- 229910052737 gold Inorganic materials 0.000 claims abstract description 7
- 239000010931 gold Substances 0.000 claims abstract description 7
- 229910052715 tantalum Inorganic materials 0.000 claims abstract description 7
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims abstract description 7
- 230000005670 electromagnetic radiation Effects 0.000 claims abstract description 3
- 238000001228 spectrum Methods 0.000 claims abstract description 3
- 239000000463 material Substances 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- 239000011810 insulating material Substances 0.000 claims description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005459 micromachining Methods 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Filters (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0001871 | 2000-02-14 | ||
| FR0001871A FR2805052A1 (fr) | 2000-02-14 | 2000-02-14 | Filtre fabry-perot court a couches metalliques |
| PCT/FR2001/000343 WO2001059415A1 (fr) | 2000-02-14 | 2001-02-06 | Filtre fabry-perot court a couches metalliques |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| EP1255971A1 true EP1255971A1 (de) | 2002-11-13 |
Family
ID=8847027
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP01907709A Withdrawn EP1255971A1 (de) | 2000-02-14 | 2001-02-06 | Kurzer fabry-perot-filter mit metallischen schichten |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP1255971A1 (de) |
| AU (1) | AU2001235612A1 (de) |
| FR (1) | FR2805052A1 (de) |
| WO (1) | WO2001059415A1 (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100472201C (zh) * | 2005-12-27 | 2009-03-25 | 中国科学院物理研究所 | 一种兼有干涉效应和等离子振荡效应的传感器及其用途 |
| CN109884837A (zh) * | 2019-04-26 | 2019-06-14 | 昆山锐芯微电子有限公司 | 光波滤波器 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW245772B (de) * | 1992-05-19 | 1995-04-21 | Akzo Nv | |
| DE4334578C2 (de) * | 1993-10-11 | 1999-10-07 | Dirk Winfried Rossberg | Spektral abstimmbarer Infrarot-Sensor |
| FI94804C (fi) * | 1994-02-17 | 1995-10-25 | Vaisala Oy | Sähköisesti säädettävä pintamikromekaaninen Fabry-Perot-interferometri käytettäväksi optisessa materiaalianalyysissä |
| FI98325C (fi) * | 1994-07-07 | 1997-05-26 | Vaisala Oy | Selektiivinen infrapunadetektori |
| US5825490A (en) * | 1995-06-07 | 1998-10-20 | Northrop Grumman Corporation | Interferometer comprising translation assemblies for moving a first optical member relative to a second optical member |
| US5920391A (en) * | 1995-10-27 | 1999-07-06 | Schlumberger Industries, S.A. | Tunable Fabry-Perot filter for determining gas concentration |
| US5584117A (en) * | 1995-12-11 | 1996-12-17 | Industrial Technology Research Institute | Method of making an interferometer-based bolometer |
| FR2768812B1 (fr) * | 1997-09-19 | 1999-10-22 | Commissariat Energie Atomique | Interferometre fabry-perot accordable integre |
-
2000
- 2000-02-14 FR FR0001871A patent/FR2805052A1/fr active Pending
-
2001
- 2001-02-06 EP EP01907709A patent/EP1255971A1/de not_active Withdrawn
- 2001-02-06 AU AU2001235612A patent/AU2001235612A1/en not_active Abandoned
- 2001-02-06 WO PCT/FR2001/000343 patent/WO2001059415A1/fr not_active Application Discontinuation
Non-Patent Citations (1)
| Title |
|---|
| See references of WO0159415A1 * |
Also Published As
| Publication number | Publication date |
|---|---|
| AU2001235612A1 (en) | 2001-08-20 |
| WO2001059415A1 (fr) | 2001-08-16 |
| FR2805052A1 (fr) | 2001-08-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
| 17P | Request for examination filed |
Effective date: 20020807 |
|
| AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR |
|
| AX | Request for extension of the european patent |
Free format text: AL;LT;LV;MK;RO;SI |
|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
| 18D | Application deemed to be withdrawn |
Effective date: 20030802 |
|
| RBV | Designated contracting states (corrected) |
Designated state(s): DE FR GB IT NL |