EP1227060A3 - Micromechanical device and process for its manufacture - Google Patents

Micromechanical device and process for its manufacture Download PDF

Info

Publication number
EP1227060A3
EP1227060A3 EP01123641A EP01123641A EP1227060A3 EP 1227060 A3 EP1227060 A3 EP 1227060A3 EP 01123641 A EP01123641 A EP 01123641A EP 01123641 A EP01123641 A EP 01123641A EP 1227060 A3 EP1227060 A3 EP 1227060A3
Authority
EP
European Patent Office
Prior art keywords
manufacture
micromechanical device
micromechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01123641A
Other languages
German (de)
French (fr)
Other versions
EP1227060B1 (en
EP1227060A2 (en
Inventor
Hubert Benzel
Heribert Weber
Frank Schaefer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP1227060A2 publication Critical patent/EP1227060A2/en
Publication of EP1227060A3 publication Critical patent/EP1227060A3/en
Application granted granted Critical
Publication of EP1227060B1 publication Critical patent/EP1227060B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Micromachines (AREA)
EP20010123641 2001-01-26 2001-10-02 Micromechanical device and process for its manufacture Expired - Lifetime EP1227060B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2001103399 DE10103399A1 (en) 2001-01-26 2001-01-26 Micromechanical component and corresponding manufacturing method
DE10103399 2001-01-26

Publications (3)

Publication Number Publication Date
EP1227060A2 EP1227060A2 (en) 2002-07-31
EP1227060A3 true EP1227060A3 (en) 2004-12-29
EP1227060B1 EP1227060B1 (en) 2014-12-10

Family

ID=7671764

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20010123641 Expired - Lifetime EP1227060B1 (en) 2001-01-26 2001-10-02 Micromechanical device and process for its manufacture

Country Status (2)

Country Link
EP (1) EP1227060B1 (en)
DE (1) DE10103399A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10329979A1 (en) * 2003-06-27 2005-01-20 Universität Rostock Pump with at least one pumping chamber
DE102006004887B4 (en) 2006-02-03 2010-07-22 Karlsruher Institut für Technologie Device for generating fluid flows, process for their preparation and their operation and their use
DE102006009424A1 (en) * 2006-02-24 2007-09-06 Universität Rostock Electrohydrodynamic micropump and its use

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5482598A (en) * 1992-12-08 1996-01-09 Canon Kabushiki Kaisha Micro channel element and method of manufacturing the same
WO1996039252A1 (en) * 1995-06-06 1996-12-12 David Sarnoff Research Center, Inc. Electrokinetic pumping
WO2000011477A1 (en) * 1998-08-20 2000-03-02 Siemens Aktiengesellschaft Separation-column unit for a gas-chromatograph and method for making the same
WO2002036484A1 (en) * 2000-11-03 2002-05-10 Robert Bosch Gmbh Micromechanical component and corresponding production method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5482598A (en) * 1992-12-08 1996-01-09 Canon Kabushiki Kaisha Micro channel element and method of manufacturing the same
WO1996039252A1 (en) * 1995-06-06 1996-12-12 David Sarnoff Research Center, Inc. Electrokinetic pumping
WO2000011477A1 (en) * 1998-08-20 2000-03-02 Siemens Aktiengesellschaft Separation-column unit for a gas-chromatograph and method for making the same
WO2002036484A1 (en) * 2000-11-03 2002-05-10 Robert Bosch Gmbh Micromechanical component and corresponding production method

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
MORISHIMA K ET AL: "Microflow system and transportation of DNA molecule by dielectrophoretic force utilizing the conformational transition in the higher order structure of DNA molecule", PROCEEDINGS IEEE. THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS. AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS (CAT. NO.97CH36021) 26-30 JAN. 1997, NAGOYA, JAPAN, 1997, NEW YORK, NY, USA, pages 389 - 394, XP010216938, ISBN: 0-7803-3744-1 *
MORISHIMA K ET AL: "Noncontact transportation of DNA molecule by dielectrophoretic force", MHS'95. IEEE PROCEEDINGS OF THE SIXTH INTERNATIONAL SYMPOSIUM ON MICRO MACHINE AND HUMAN SCIENCE (CAT. NO.95TH8079) 4-6 OCT. 1995, NAGOYA, JAPAN, 1995, NEW YORK, NY, USA, pages 145 - 152, XP010159960, ISBN: 0-7803-2676-8 *
TJERKSTRA R W ET AL: "Multi-walled microchannels: free-standing porous silicon membranes for use in mu TAS", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, IEEE INC. NEW YORK, US, vol. 9, no. 4, December 2000 (2000-12-01), pages 495 - 501, XP002212547, ISSN: 1057-7157 *

Also Published As

Publication number Publication date
DE10103399A1 (en) 2002-08-22
EP1227060B1 (en) 2014-12-10
EP1227060A2 (en) 2002-07-31

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