AU2002328510A1 - Micro device and its manufacturing method - Google Patents

Micro device and its manufacturing method

Info

Publication number
AU2002328510A1
AU2002328510A1 AU2002328510A AU2002328510A AU2002328510A1 AU 2002328510 A1 AU2002328510 A1 AU 2002328510A1 AU 2002328510 A AU2002328510 A AU 2002328510A AU 2002328510 A AU2002328510 A AU 2002328510A AU 2002328510 A1 AU2002328510 A1 AU 2002328510A1
Authority
AU
Australia
Prior art keywords
manufacturing
micro device
micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002328510A
Inventor
Toru Hirata
Koichiro Tsukane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Original Assignee
Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Publication of AU2002328510A1 publication Critical patent/AU2002328510A1/en
Abandoned legal-status Critical Current

Links

AU2002328510A 2001-08-30 2002-08-28 Micro device and its manufacturing method Abandoned AU2002328510A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001-261251 2001-08-30

Publications (1)

Publication Number Publication Date
AU2002328510A1 true AU2002328510A1 (en) 2003-03-18

Family

ID=

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