EP1226636A4 - Amplificateur laser de correction de faisceaux - Google Patents

Amplificateur laser de correction de faisceaux

Info

Publication number
EP1226636A4
EP1226636A4 EP00972112A EP00972112A EP1226636A4 EP 1226636 A4 EP1226636 A4 EP 1226636A4 EP 00972112 A EP00972112 A EP 00972112A EP 00972112 A EP00972112 A EP 00972112A EP 1226636 A4 EP1226636 A4 EP 1226636A4
Authority
EP
European Patent Office
Prior art keywords
laser amplifier
correcting laser
beam correcting
amplifier
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP00972112A
Other languages
German (de)
English (en)
Other versions
EP1226636A1 (fr
Inventor
Harry Rieger
Serge Cambeau
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JMAR Research Inc
Original Assignee
JMAR Research Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JMAR Research Inc filed Critical JMAR Research Inc
Publication of EP1226636A1 publication Critical patent/EP1226636A1/fr
Publication of EP1226636A4 publication Critical patent/EP1226636A4/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H01S3/2308—Amplifier arrangements, e.g. MOPA
    • H01S3/2325—Multi-pass amplifiers, e.g. regenerative amplifiers
    • H01S3/2341—Four pass amplifiers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/0941—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08072—Thermal lensing or thermally induced birefringence; Compensation thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/10076—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating using optical phase conjugation, e.g. phase conjugate reflection

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
EP00972112A 1999-10-15 2000-10-12 Amplificateur laser de correction de faisceaux Withdrawn EP1226636A4 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15952199P 1999-10-15 1999-10-15
US159521P 1999-10-15
PCT/US2000/028252 WO2001029941A1 (fr) 1999-10-15 2000-10-12 Amplificateur laser de correction de faisceaux

Publications (2)

Publication Number Publication Date
EP1226636A1 EP1226636A1 (fr) 2002-07-31
EP1226636A4 true EP1226636A4 (fr) 2006-01-11

Family

ID=22572903

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00972112A Withdrawn EP1226636A4 (fr) 1999-10-15 2000-10-12 Amplificateur laser de correction de faisceaux

Country Status (4)

Country Link
EP (1) EP1226636A4 (fr)
JP (1) JP2003524889A (fr)
AU (1) AU1082001A (fr)
WO (1) WO2001029941A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6999491B2 (en) 1999-10-15 2006-02-14 Jmar Research, Inc. High intensity and high power solid state laser amplifying system and method
JP2016171156A (ja) * 2015-03-12 2016-09-23 ソニー株式会社 光増幅装置、及び光源装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5774488A (en) * 1994-06-30 1998-06-30 Lightwave Electronics Corporation Solid-state laser with trapped pump light

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4943782A (en) * 1988-03-21 1990-07-24 Hughes Aircraft Company Four-pass phase conjugate optical amplifier system and method
US5790574A (en) * 1994-08-24 1998-08-04 Imar Technology Company Low cost, high average power, high brightness solid state laser
JP3588195B2 (ja) * 1996-07-18 2004-11-10 浜松ホトニクス株式会社 固体レーザ増幅器

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5774488A (en) * 1994-06-30 1998-06-30 Lightwave Electronics Corporation Solid-state laser with trapped pump light

Non-Patent Citations (8)

* Cited by examiner, † Cited by third party
Title
BRIGNON A ET AL: "ND:YAG MASTER-OSCILLATOR POWER AMPLIFIER WITH A RHODIUM-DOPED BATIO3 SELF-PUMPED PHASE-CONJUGATE MIRROR", OPTICS LETTERS, OSA, OPTICAL SOCIETY OF AMERICA, WASHINGTON, DC, US, vol. 22, no. 7, 1 April 1997 (1997-04-01), pages 442 - 444, XP000690669, ISSN: 0146-9592 *
BRIGNON A ET AL: "Rhodium-doped barium titanate phase-conjugate mirror for an all-solid-state, high-repetition-rate, diode-pumped Nd:YAG master-oscillator power amplifier laser", APPLIED OPTICS OPT. SOC. AMERICA USA, vol. 37, no. 18, 20 June 1998 (1998-06-20), pages 3990 - 3995, XP002353087, ISSN: 0003-6935 *
FUJIKAWA S ET AL: "HIGH-POWER AND HIGH-EFFICIENCY OPERATION OF A CW-DIODE-SIDE-PUMPED ND: YAG ROD LASER", IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, IEEE SERVICE CENTER, US, vol. 3, no. 1, February 1997 (1997-02-01), pages 40 - 44, XP000694386, ISSN: 1077-260X *
HIRANO Y ET AL: "208-W TEM00 OPERATION OF A DIODE-PUMPED ND:YAG ROD LASER", OPTICS LETTERS, OSA, OPTICAL SOCIETY OF AMERICA, WASHINGTON, DC, US, vol. 24, no. 10, 15 May 1999 (1999-05-15), pages 679 - 681, XP000846963, ISSN: 0146-9592 *
JACKEL S ET AL: "HIGH-ENERGY ND:CR:GSGG LASERS BASED ON PHASE AND POLARIZATION CONJUGATED MULTIPLE-PASS AMPLIFIERS", OPTICAL ENGINEERING, SOC. OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS. BELLINGHAM, US, vol. 36, no. 7, July 1997 (1997-07-01), pages 2031 - 2036, XP000658609, ISSN: 0091-3286 *
KONNO S ET AL: "HIGH-BRIGHTNESS 138-W GREEN LASER BASED ON AN INTRACAVITY-FREQUENCY-DOUBLED DIODE-SIDE-PUMPED Q-SWITCHED ND:YAG LASER", OPTICS LETTERS, OSA, OPTICAL SOCIETY OF AMERICA, WASHINGTON, DC, US, vol. 25, no. 2, 15 January 2000 (2000-01-15), pages 105 - 107, XP000928547, ISSN: 0146-9592 *
See also references of WO0129941A1 *
TURCU I C E ET AL: "High power X-ray point source for next generation lithography", PROCEEDINGS OF THE SPIE, SPIE, BELLINGHAM, VA, US, vol. 3767, 21 July 1999 (1999-07-21), pages 21 - 32, XP002326969, ISSN: 0277-786X *

Also Published As

Publication number Publication date
WO2001029941A1 (fr) 2001-04-26
AU1082001A (en) 2001-04-30
JP2003524889A (ja) 2003-08-19
EP1226636A1 (fr) 2002-07-31

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Legal Events

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RIC1 Information provided on ipc code assigned before grant

Ipc: H01S 3/081 19740701AFI20010427BHEP

Ipc: H01S 3/0941 19950101ALI20051119BHEP

18W Application withdrawn

Effective date: 20051219