AU5478800A - Multiple ultraviolet beam solid-state laser systems and methods - Google Patents

Multiple ultraviolet beam solid-state laser systems and methods

Info

Publication number
AU5478800A
AU5478800A AU54788/00A AU5478800A AU5478800A AU 5478800 A AU5478800 A AU 5478800A AU 54788/00 A AU54788/00 A AU 54788/00A AU 5478800 A AU5478800 A AU 5478800A AU 5478800 A AU5478800 A AU 5478800A
Authority
AU
Australia
Prior art keywords
methods
state laser
laser systems
ultraviolet beam
multiple ultraviolet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU54788/00A
Inventor
Richard S. Harris
Yunlong Sun
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Electro Scientific Industries Inc
Original Assignee
Electro Scientific Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electro Scientific Industries Inc filed Critical Electro Scientific Industries Inc
Publication of AU5478800A publication Critical patent/AU5478800A/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B23K26/0673—Dividing the beam into multiple beams, e.g. multifocusing into independently operating sub-beams, e.g. beam multiplexing to provide laser beams for several stations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0017—Etching of the substrate by chemical or physical means
    • H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
    • H05K3/0032—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material
    • H05K3/0038—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material combined with laser drilling through a metal layer
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/10—Using electric, magnetic and electromagnetic fields; Using laser light
    • H05K2203/107—Using laser light
    • H05K2203/108—Using a plurality of lasers or laser light with a plurality of wavelengths
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0017—Etching of the substrate by chemical or physical means
    • H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
    • H05K3/0032—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material
    • H05K3/0035—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material of blind holes, i.e. having a metal layer at the bottom

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Laser Beam Processing (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
AU54788/00A 1999-08-20 2000-06-08 Multiple ultraviolet beam solid-state laser systems and methods Abandoned AU5478800A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US37829799A 1999-08-20 1999-08-20
US09378297 1999-08-20
PCT/US2000/015941 WO2001014096A1 (en) 1999-08-20 2000-06-08 Multiple ultraviolet beam solid-state laser systems and methods

Publications (1)

Publication Number Publication Date
AU5478800A true AU5478800A (en) 2001-03-19

Family

ID=23492552

Family Applications (1)

Application Number Title Priority Date Filing Date
AU54788/00A Abandoned AU5478800A (en) 1999-08-20 2000-06-08 Multiple ultraviolet beam solid-state laser systems and methods

Country Status (3)

Country Link
AU (1) AU5478800A (en)
TW (1) TW464579B (en)
WO (1) WO2001014096A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7139294B2 (en) * 2004-05-14 2006-11-21 Electro Scientific Industries, Inc. Multi-output harmonic laser and methods employing same
CN101990729B (en) 2008-03-31 2013-02-27 伊雷克托科学工业股份有限公司 Combining multiple laser beams to form high repetition rate, high average power polarized laser beam
CN102163793A (en) * 2011-02-25 2011-08-24 天津梅曼激光技术有限公司 Multiple extra-cavity frequency conversion ultraviolet laser
CN103427325A (en) * 2012-05-15 2013-12-04 天津梅曼激光技术有限公司 Internal cavity and external cavity mixing type non-linear frequency conversion ultraviolet laser
JP2017100168A (en) * 2015-12-03 2017-06-08 キヤノン株式会社 Laser processing device, component manufacturing method, program and recording medium

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5272309A (en) * 1990-08-01 1993-12-21 Microelectronics And Computer Technology Corporation Bonding metal members with multiple laser beams
US5847960A (en) * 1995-03-20 1998-12-08 Electro Scientific Industries, Inc. Multi-tool positioning system
DE69737991T2 (en) * 1996-11-20 2008-04-30 Ibiden Co., Ltd., Ogaki LASER PROCESSING DEVICE, METHOD AND DEVICE FOR PRODUCING A MULTILAYER PRINTED PCB
JPH1190659A (en) * 1997-09-22 1999-04-06 Nikon Corp Laser repairing device

Also Published As

Publication number Publication date
WO2001014096A1 (en) 2001-03-01
TW464579B (en) 2001-11-21

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase