EP1212794A2 - Method for producing an integrated circuit having at least one metalicized surface - Google Patents
Method for producing an integrated circuit having at least one metalicized surfaceInfo
- Publication number
- EP1212794A2 EP1212794A2 EP00965776A EP00965776A EP1212794A2 EP 1212794 A2 EP1212794 A2 EP 1212794A2 EP 00965776 A EP00965776 A EP 00965776A EP 00965776 A EP00965776 A EP 00965776A EP 1212794 A2 EP1212794 A2 EP 1212794A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- dielectric layer
- thickness
- etching
- layer
- etched
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
- H01L21/76807—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
- H01L21/76807—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures
- H01L21/76813—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures involving a partial via etch
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31144—Etching the insulating layers by chemical or physical means using masks
Definitions
- V out for the manufacture of an integrated circuit with at least one metallization.
- Metallization levels are used in m integrated circuits for connecting active components.
- a metallization level comprises lines and contacts via which the lines are connected to conductive structures. These contacts are often referred to as vias in the professional world.
- These conductive structures can be diffusion regions, connection electrodes, metal contacts or lines from metallization levels arranged below the respective metallization level. If a plurality of metallization levels arranged one above the other are provided in an integrated circuit, this is referred to as multilayer metallization.
- a dielectric is first deposited, which surrounds the lines and contacts to be manufactured later. Holes and trenches are formed in the intermetallic dielectric and then filled with metal. This creates contacts in the holes, which are also called vias, and the cables are created in the trench. Filling with metal is carried out by PVD, CVD or electroplating and subsequent chemical mechanical polishing. This method is used in particular when the metallization level is formed from a metal that is difficult to etch
- dual da ascene is understood to mean that the contact holes and trench are first structured and these are filled together by deposition of metal and chemical mechanical polishing.
- the contact hole etching be carried out first and then the trench etching for the lines.
- the contact hole etching there is a risk of exposing the surface of the conductive structure, which can in particular be a copper conductor track, and of applying impurities to the walls of the contact hole.
- an etch stop layer made of silicon nitride is usually used, on the surface of which a silicon oxide layer is arranged, with which the contact hole and the trench are etched.
- the selectivity of the etching is limited in many etching processes, for example by the oxygen released during the Si 2 etching, so that the surface underneath is nevertheless exposed.
- a layer sequence of a first silicon nitride layer be used as intermetallic dielectric, a SiO 2 layer and a second silicon nitride layer.
- the upper second silicon nitride layer is first structured with a contact hole mask. After removing the contact hole mask, a second layer of SiO 2 is applied.
- the trenches are then first etched with a line mask and then the contact holes are selectively selected for silicon nitride, except for the lower first silicon nitride layer. With this etching, the structured upper silicon nitride layer acts as an additional mask.
- the problem of reduced selectivity due to the oxygen released during the Si2 etching also occurs here.
- the invention is based on the problem of specifying a method for producing an integrated circuit with at least one metallization level, which is suitable for the production of metallization levels with metals which are difficult to etch and in which contamination is avoided. This problem is solved by a method according to claim 1. Further developments of the invention result from the remaining claims.
- a first dielectric layer, a second dielectric layer, a third dielectric layer and a fourth dielectric layer are applied to a surface of a substrate.
- the Dik ke of the second dielectric layer differs from the thickness of the fourth dielectric layer.
- the second dielectric layer is etched through the fourth dielectric layer and the third dielectric layer using a first etching mask which defines the arrangement of contact holes.
- the second dielectric layer is etched so deep m that the remaining thickness of the second dielectric layer is substantially equal to the thickness of the fourth dielectric layer.
- etching is ended before the surface of the underlying layer is exposed. Then, parts of the fourth dielectric layer and the second dielectric layer that are exposed to the third dielectric layer and to the first dielectric layer are etched until the surface underneath is exposed. In the case of the fourth dielectric layer, the surface of the third dielectric layer is exposed; in the case of the second dielectric layer, the surface of the first dielectric layer is exposed.
- the second etching mask After formation of the second etching mask, it is preferred to first etch m exposed parts of the fourth dielectric layer and the second dielectric layer using a non-selective etching method, which is optimized with a high etching rate. The etching is ended before the surfaces under the surface are exposed. In this Weis 0, the layer thickness must be etched with a selective etching process, which is usually very low etching rates is having vernn- siege. This shortens the duration of the manufacturing process.
- the third dielectric layer and the first dielectric layer are then etched until the surface underneath is exposed.
- the surface of the second dielectric layer is uncovered under the third dielectric layer, and the surface of the substrate is uncovered under the first dielectric layer. After this etching, the contact holes and the cable trench are completed.
- the first etching mask which defines the arrangement of contact holes, is etched into the fourth dielectric layer.
- the fourth dielectric layer is etched so deep m that the remaining thickness of the fourth dielectric layer is substantially equal to the thickness of the second dielectric layer.
- a non-selective etching process is then carried out using the second etching mask, which defines the arrangement of line trenches. Due to the preceding etching with the first etching mask, the fourth dielectric layer has depressions at the locations of the contact holes.
- the non-selective etching process which etches the fourth dielectric layer, the third dielectric layer and the second dielectric layer with essentially the same etching rate, at the locations of the contact holes through the fourth dielectric layer and the third dielectric layer m the second dielectric Layer etched.
- the fourth layer is etched at the locations of the line trenches outside the contact holes m. Subsequently, parts of the fourth dielectric layer and the second dielectric layer that are exposed to the third dielectric layer and to the first dielectric layer are etched until the underlying surface of the third dielectric layer or the first dielectric layer is exposed.
- the third dielectric layer and the first dielectric layer are etched, until the underlying surface of the second dielectric layer and the sub ⁇ strats exposed. After this etching the Maislo ⁇ cher and the line trench are completed.
- the metallization level is completed by forming contacts and lines in the contact holes and the line trench.
- the first dielectric layer and the third dielectric layer can be made of silicon nitride and the second dielectric layer and the fourth dielectric layer S1O2 are formed without the impairment of the selectivity of the etching of S1O2 with reference to ⁇ 13N4 known from the literature. Therefore, the widths and heights of the trenches and the contact holes can be checked safely. Since the third dielectric layer is not exposed prematurely, widening and beveling of the contact holes is avoided. The bottom of the trench is smooth.
- Another advantage is that a non-selective etching process can be used for the etching with the first etching mask, which can be optimized with regard to the speed of the etching removal. This means that a fast, inexpensive etching process with a high etching rate can be used for the etching with the first etching mask, since no selectivity of the etching is required here.
- line trenches and contact holes are first produced, which are subsequently used to form contacts and lines at the metallization level. It is therefore for Preparation of metallization of difficult atzbaren Me ⁇ metals suitable for a damascene technique or dual damascene technology.
- first dielectric layer and the third dielectric layer are formed from a material containing S13N4 and the second dielectric layer and the fourth dielectric layer are formed from a material containing S1O2.
- first dielectric layer and the third dielectric layer which act as an etch stop: SiON, amorphous silicon, polysilicon, SiC, Al2O3.
- the following materials are also suitable for the second dielectric layer and the fourth dielectric layer, in which the majority of the contact holes and the line trench are arranged: S1O2, BPSG, SOG, Flare, BCB, Silk, HSQ, FSG, nanoglass, parylme , PTFE, xerogels, aerogels.
- the first dielectric layer and the third dielectric layer are preferably of substantially the same thickness. In this case, the first dielectric is etched
- Layer and the third dielectric layer prevents premature exposure of the surface of the substrate. This avoids contamination of the side walls of the contact holes and / or line trench by material which is present in the surface of the substrate and which is removed by premature exposure in the sense of overstressing.
- the method is therefore particularly suitable for producing a metallization level which extends to contacts or lines containing copper.
- any substrate that is suitable as a carrier for a metallization eye is suitable as a substrate.
- a substrate a semiconductor wafer containing an inte grated circuit ⁇ .
- the contacts can be manufactured both to one above the integrated circuit that are already metallization and on the Surface Terminal of active components of the integrated circuit rich.
- the contacts can be on lines, contacts, diffusion areas such as source / dram areas, base areas, emitter areas, collector areas as well as on doped areas of a solar cell or a diode, or connections such as gate electrodes, source / drain areas.
- An integrated circuit realized in thin-film technology or an insulating carrier is also suitable as a substrate.
- the integrated circuit can be generated both before and after the production of the metallization level.
- FIG. 1 shows a section through a substrate on which a first dielectric layer, a second dielectric layer, a third dielectric layer and a fourth dielectric layer are arranged.
- FIG. 2 shows the section through the substrate after formation of a first etching mask and etching up to m d e second dielectric layer.
- FIG. 3 shows a section through the substrate after the formation of a second etching mask after a partial etching.
- FIG. 4 shows a section through the substrate after selective etching of the fourth dielectric layer and second dielectric layer.
- FIG. 5 shows a section through the substrate after etching the third dielectric layer and the first dielectric layer and formation of contacts and lines.
- a first dielectric layer 3, a second dielectric layer 4, a third dielectric layer 5 and a fourth dielectric layer 6 are applied to a substrate 1, which has a conductive structure 2 (see FIG. 1).
- the substrate 1 is a monocrystalline silicon wafer in which an integrated circuit (not shown in detail) is implemented.
- the surface of the substrate 1 is formed by a dielectric passivation layer, on which the conductive structure 2 is arranged.
- the conductive structure 2 is a copper line.
- the first dielectric layer 3 is formed by deposition in a Plas a CVD process from S13N4 in a layer thickness of 50 nm.
- the second dielectric layer 4 is formed by deposition in a Plas a CVD process of S1O2 m with a layer thickness of 850 nm.
- the third dielectric layer 5 is formed by deposition in a plasma CVD method of S13N4 in a layer thickness of 50 nm.
- the fourth dielectric layer 6 is formed by deposition in a plasma CVD process from S1O2 in a layer thickness of 600 nm.
- a first etching mask of photoresist 7 is formed (s ⁇ ere Figure 2).
- the first etching mask 7 defines the arrangement of contact holes.
- the second dielectric layer 4 is etched through the fourth dielectric layer 6 and the third dielectric layer 5 m.
- the etching process used has essentially the same etching rates for S ⁇ 0 2 and S13N4.
- the etching is controlled over time. The etching stops as soon as the remaining plane thickness of the third dielectric layer is substantially equal to the thickness of the fourth dielectric layer 6, that is to say 600 nm.
- the first etching mask 7 is then removed by ashing and / or wet-chemically with EKC 525 (this is wet-chemical polymer removal).
- a second etching mask 8 is subsequently produced, which defines the arrangement of line trenches (see FIG. 3).
- a RIE process with a high etching rate, the exposed parts of the fourth dielectric layer 6 and the second dielectric layer 4 are subsequently etched.
- the etching is controlled via the etching time. It is ended before the surface of the third dielectric layer 5 or the first dielectric layer 3 is exposed.
- the etching is also carried out with CHF 3 and CF4.
- the remaining thickness of the second dielectric layer 4 and the fourth dielectric layer is 50 to 100 nm.
- the etching takes place in a RIE process with CF4 and Ar with a low RF power of 250 W and a diameter of the substrate disk of 6.
- the contact holes and the cable trench are completed.
- a conformal diffusion barrier layer is subsequently applied by sputtering, which is composed of a 10 nm thick TaN layer and a 40 nm thick Ta layer.
- a copper seed layer is then sputtered on.
- the contact holes and cable trenches are filled by electroplating with copper.
- CMP chemical mechanical polishing
Abstract
Description
Claims
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19940358 | 1999-08-25 | ||
DE19940358 | 1999-08-25 | ||
PCT/DE2000/002811 WO2001015219A2 (en) | 1999-08-25 | 2000-08-18 | Method for producing an integrated circuit having at least one metalicized surface |
Publications (1)
Publication Number | Publication Date |
---|---|
EP1212794A2 true EP1212794A2 (en) | 2002-06-12 |
Family
ID=7919589
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP00965776A Withdrawn EP1212794A2 (en) | 1999-08-25 | 2000-08-18 | Method for producing an integrated circuit having at least one metalicized surface |
Country Status (7)
Country | Link |
---|---|
US (2) | US20020098679A1 (en) |
EP (1) | EP1212794A2 (en) |
JP (1) | JP2003508896A (en) |
KR (1) | KR20020025237A (en) |
CN (1) | CN1192427C (en) |
TW (1) | TW461037B (en) |
WO (1) | WO2001015219A2 (en) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6605540B2 (en) * | 2001-07-09 | 2003-08-12 | Texas Instruments Incorporated | Process for forming a dual damascene structure |
KR100506943B1 (en) * | 2003-09-09 | 2005-08-05 | 삼성전자주식회사 | Methods of fabricating a semiconductor device having a slope at lower side of interconnection hole with an etch stopping layer |
US20060261036A1 (en) * | 2005-04-11 | 2006-11-23 | Stmicroelectronics S.R.L. | Method for patterning on a wafer having at least one substrate for the realization of an integrated circuit |
US7358182B2 (en) * | 2005-12-22 | 2008-04-15 | International Business Machines Corporation | Method of forming an interconnect structure |
US7592253B2 (en) * | 2005-12-29 | 2009-09-22 | Dongbu Electronics Co., Ltd. | Method for forming a damascene pattern of a copper metallization layer |
EP1990432B1 (en) * | 2006-02-28 | 2012-04-11 | Advanced Interconnect Materials, LLC | Semiconductor device, its manufacturing method, and sputtering target material for use in the method |
US20080303154A1 (en) * | 2007-06-11 | 2008-12-11 | Hon-Lin Huang | Through-silicon via interconnection formed with a cap layer |
DE102007054384A1 (en) | 2007-11-14 | 2009-05-20 | Institut Für Solarenergieforschung Gmbh | Method for producing a solar cell with a surface-passivating dielectric double layer and corresponding solar cell |
TWI490939B (en) * | 2008-10-01 | 2015-07-01 | Vanguard Int Semiconduct Corp | Method for forming via |
CN102543837A (en) * | 2010-12-22 | 2012-07-04 | 中芯国际集成电路制造(上海)有限公司 | Structure and manufacturing method of top metal interconnection layer |
WO2013128341A2 (en) * | 2012-03-01 | 2013-09-06 | Koninklijke Philips N.V. | An electronic circuit arrangement and method of manufacturing the same |
KR102477608B1 (en) * | 2017-12-12 | 2022-12-14 | 삼성디스플레이 주식회사 | Display substrate, method of manufacturing the same, and display device including the same |
CN112018077A (en) * | 2020-07-29 | 2020-12-01 | 复旦大学 | Copper interconnection structure and manufacturing method thereof |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5143820A (en) | 1989-10-31 | 1992-09-01 | International Business Machines Corporation | Method for fabricating high circuit density, self-aligned metal linens to contact windows |
KR0184158B1 (en) * | 1996-07-13 | 1999-04-15 | 문정환 | Magnetic matching metal wiring method of semiconductor device |
US5821169A (en) * | 1996-08-05 | 1998-10-13 | Sharp Microelectronics Technology,Inc. | Hard mask method for transferring a multi-level photoresist pattern |
US6291334B1 (en) * | 1997-12-19 | 2001-09-18 | Applied Materials, Inc. | Etch stop layer for dual damascene process |
US6197696B1 (en) | 1998-03-26 | 2001-03-06 | Matsushita Electric Industrial Co., Ltd. | Method for forming interconnection structure |
US6211092B1 (en) * | 1998-07-09 | 2001-04-03 | Applied Materials, Inc. | Counterbore dielectric plasma etch process particularly useful for dual damascene |
JP3657788B2 (en) * | 1998-10-14 | 2005-06-08 | 富士通株式会社 | Semiconductor device and manufacturing method thereof |
FR2791472B1 (en) * | 1999-03-26 | 2002-07-05 | Commissariat Energie Atomique | METHOD OF CREATING CONNECTION LINES AND UNDERLYING CONTACT POINTS IN A DIELECTRIC SUBSTRATE |
US6326301B1 (en) * | 1999-07-13 | 2001-12-04 | Motorola, Inc. | Method for forming a dual inlaid copper interconnect structure |
-
2000
- 2000-08-18 JP JP2001519483A patent/JP2003508896A/en not_active Abandoned
- 2000-08-18 CN CNB008120277A patent/CN1192427C/en not_active Expired - Fee Related
- 2000-08-18 EP EP00965776A patent/EP1212794A2/en not_active Withdrawn
- 2000-08-18 WO PCT/DE2000/002811 patent/WO2001015219A2/en not_active Application Discontinuation
- 2000-08-18 KR KR1020027002328A patent/KR20020025237A/en not_active Application Discontinuation
- 2000-08-25 TW TW089117150A patent/TW461037B/en not_active IP Right Cessation
-
2001
- 2001-12-05 US US10/005,293 patent/US20020098679A1/en not_active Abandoned
-
2003
- 2003-09-03 US US10/654,054 patent/US6930052B2/en not_active Expired - Fee Related
Non-Patent Citations (1)
Title |
---|
See references of WO0115219A2 * |
Also Published As
Publication number | Publication date |
---|---|
TW461037B (en) | 2001-10-21 |
CN1192427C (en) | 2005-03-09 |
WO2001015219A3 (en) | 2001-07-19 |
US20020098679A1 (en) | 2002-07-25 |
US6930052B2 (en) | 2005-08-16 |
CN1377511A (en) | 2002-10-30 |
JP2003508896A (en) | 2003-03-04 |
US20040092093A1 (en) | 2004-05-13 |
KR20020025237A (en) | 2002-04-03 |
WO2001015219A2 (en) | 2001-03-01 |
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