EP1200198A1 - Element d'actionneur destine a un microdiffuseur et son procede de realisation - Google Patents

Element d'actionneur destine a un microdiffuseur et son procede de realisation

Info

Publication number
EP1200198A1
EP1200198A1 EP00949481A EP00949481A EP1200198A1 EP 1200198 A1 EP1200198 A1 EP 1200198A1 EP 00949481 A EP00949481 A EP 00949481A EP 00949481 A EP00949481 A EP 00949481A EP 1200198 A1 EP1200198 A1 EP 1200198A1
Authority
EP
European Patent Office
Prior art keywords
membrane
liquid
piezoelectric actuator
channel device
micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00949481A
Other languages
German (de)
English (en)
Other versions
EP1200198B1 (fr
Inventor
Ralf Schnupp
Jochen Thomas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Publication of EP1200198A1 publication Critical patent/EP1200198A1/fr
Application granted granted Critical
Publication of EP1200198B1 publication Critical patent/EP1200198B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers

Definitions

  • the present invention relates to an actuator member for a micro atomizer and in particular to an actuator member for a piezoelectrically operated micro atomizer, to methods for producing such an actuator member and to a micro atomizer using such an actuator member.
  • Elements for atomizing liquid media which are referred to below simply as atomizers, are used in many technical areas, for example the cosmetics industry for atomizing hair sprays and perfumes, in medicine as medicament sprays, with different coating techniques for atomizing paints and adhesives chemistry for nebulizing liquid reagents, and in the field of domestic technology as room humidifiers.
  • a large part of the atomizers currently used works by means of mechanical atomization, in which the liquid is pressed through a mechanically generated overpressure through a valve of suitable shape and size. This causes the medium to flow, i.e. the liquid to be atomized is usually distributed statically in small droplets and forms a liquid mist.
  • the overpressure required is manually activated by a pumping process, for example in the case of perfume atomizers, or by using overpressure reservoirs, e.g. Propellant gas in hair sprays.
  • a piezoelectric atomizer in which a thin silicon membrane vibrates through a piezoelectric ZnO layer is displaced, with liquids being atomized by the thin silicon membrane.
  • the atomizer described in this document operates at an oscillation frequency of 80 to 86.5 kHz, the atomizer disclosed there producing droplets of widely differing diameters.
  • DE 19802368 C1 describes a microdosing device in which a pressure chamber is delimited on one side by a membrane, an inlet opening and an outlet opening being provided in the pressure chamber. A suitable control of the membrane causes fluid to be sucked in through the inlet opening for a dosing process and to be expelled through the outlet opening.
  • This microdosing device works on the basis of a displacement effect and not on the basis of the capillary wave theory.
  • a piezoelectric nebulizer is known in which liquid is applied to an atomizing grid that is set in vibration using a soft organ with a capillary or felt-like structure, such as an open-cell foam.
  • the object of the present invention is to create a micro-atomizer which, on the one hand, enables mass production and, on the other hand, enables atomization of droplets having a defined diameter with increased efficiency, and to provide a method for producing such a micro-atomizer.
  • the actuator member used in the atomizer according to the invention uses the piezoelectric principle.
  • a piezoelectric layer preferably produced using thin-film technology, is used to deflect a thin membrane, which is preferably etched in silicon Vibrations is set.
  • a channel device is also formed which serves to supply the liquid to be atomized in order to effect a substantially uniform wetting of the surface of the membrane opposite the piezoelectric actuator. The supply of liquid through the channel device provided according to the invention, such that the membrane is wetted essentially uniformly, prevents according to the invention that the droplet diameters vary within a wide range.
  • the actuator member of the atomizer according to the invention is preferably suitably adapted to be operated at a frequency between 2 and 2.5 MHz, and in such a way that the droplets produced by the atomization have a diameter between 1 and 5 ⁇ m.
  • the geometric dimensions of the membrane, the liquid supply and the vibration frequency used are suitably adapted as atomization parameters in order to set a desired droplet size.
  • the channel device can be rectangular, the channel device feeding the liquid to be atomized via the four corners of the membrane.
  • a micro atomizer according to the invention using such an actuator member can comprise a holder to which the actuator member is fixed in such a way that the inlet end is fluidly connected to a liquid supply line such that the channel device, with the exception of a fluid connection thereof, to a liquid supply line and to the piezoelectric actuator opposite surface of the membrane is sealed by the holder, and that in the region of the surface of the membrane opposite the piezoelectric actuator, an opening of the holder is provided for ejecting the atomized liquid - D -
  • the holder is designed in such a way that the actuator member can be easily attached to it, the liquid supply line preferably leaving the holder in a direction which is opposite to the direction of ejection of the atomized liquid.
  • the present invention provides a method for producing a piezoelectrically operated micro-atomizer, in which a piezoelectric actuator is first applied to a main surface of a semiconductor substrate, whereupon the main surface of the semiconductor substrate opposite the piezoelectric actuator is structured around a membrane on which the piezoelectric Actuator is arranged, and to fix a channel device, which extends from an inlet end to the membrane, in the same.
  • the actuator member is fixed to a holder such that the surface of the membrane opposite the piezoelectric actuator is facing an opening in the holder.
  • the present invention thus creates an actuator member for a piezoelectrically operated micro atomizer which, through the use of micromechanics, and in particular silicon technology, enables a very small and inexpensive system which can be produced in very large numbers. Due to the properties of the atomizer described above, the droplet distribution, the precision of the volume to be atomized and, in the case of a medical application, the medical effectiveness are considerably improved.
  • the actuator member does not require the use of a nozzle, so that signs of constipation cannot occur.
  • the system is thus also suitable for multiple use, for example only one liquid container connected to the liquid supply line has to be replaced. Due to the low power requirement of the piezo drive, the energy consumption need reduced.
  • Fig. La is a schematic perspective view of an embodiment of an actuator member according to the invention.
  • Fig. Lb is a schematic perspective view of a holder of a micro-atomizer according to the invention.
  • 2a) and 2b) are schematic representations to explain different exemplary embodiments of channel devices of actuator components according to the invention.
  • 3a) to 3e) are schematic sectional views to illustrate the method according to the invention for producing an actuator member.
  • FIG. 1 a shows a schematic perspective view of an exemplary embodiment of an actuator member in which a membrane 12 is formed in a main surface of a silicon substrate 10.
  • a schematic top view of the exemplary embodiment shown in FIG. La) is also shown in FIG. 2a), the following description being continued with reference to FIGS. La) and 2a).
  • the atomizing surface of the membrane 12 can be seen in each of these figures, so that the piezoelectric actuator arranged on the opposite surface of the membrane cannot be seen in these figures.
  • the piezoelectric actuator is used to vibrate the membrane 12.
  • a channel device 14 is formed on the substrate surface, which has the recess through which the membrane 12 is fixed, and enables a liquid to be atomized to be supplied to the atomizing surface of the membrane 12.
  • a recess 16 which serves as a media inlet, is provided in this main surface of the silicon substrate 10.
  • the channel device 14 provides a fluid connection between the media inlet 16 and the atomizing surface of the membrane 12 in order to enable a substantially uniform wetting of the atomizing surface with the liquid to be atomized.
  • the channel device 14 has channel sections 14a, 14b, 14c and 14d which feed the liquid to be atomized from the direction of the four corners of the substantially rectangular membrane 12 to the atomizing surface thereof.
  • the membrane 12 is fixed by a membrane recess, which was formed by means of a KOH etching process, so that the side walls 18 of the membrane recess have the bevel which can be seen in FIG 55 degrees.
  • the sections 14a, 14b, 14c and 14d of the channel device 14 each end in the upper region of the inclined side surfaces 18 such that the medium to be atomized is supplied via the inclined side surfaces 18.
  • the media inlet recess 16 and the channel device 14 can also be formed by KOH etching.
  • the actuator member formed in this way is now introduced into a holder, for example as shown in FIG. 1 b), to build up a micro-atomizer.
  • the holder 20 has a receiving compartment 22, into which the actuator member is inserted and in which the same can be fixed in a suitable manner.
  • the bracket 20 preferably protrusions 24 and 26 that hold the actuator member.
  • the holder 20 is designed such that it forms closed channels together with the actuator member, which are fluidly connected to the atomizing surface of the membrane 12 and the media inlet 16.
  • the holder 20 preferably also has a device 28 for connecting a liquid line 29, preferably a hose, in such a way that the liquid line 29 is fluidly connected to the media inlet 16.
  • the holder 20 also has an opening 30 which, when the actuator member is mounted in the holder 20, is arranged above the atomizing surface of the membrane 12, so as to enable the atomized liquid to be ejected.
  • the liquid line 29 is preferably arranged with respect to the opening 30 in such a way that the opening 30 is arranged, for example, in an inhalation channel of an inhaler.
  • the liquid line 29 preferably leaves the holder 20 opposite the opening 30, as shown in FIG. 1b).
  • the opening 30 can be provided with a grid which, for example, ensures a precisely defined droplet size or allows the system to be operated overhead.
  • the actuator member shown in Fig. La) is preferably made of silicon, while the holder shown in Fig. Lb) made of plastic, which is advantageous in terms of the system price, or any other suitable material.
  • the actuator member can be attached to the holder, for example, by means of anodic bonding processes, and in addition, such anodic bonding processes also enable a very strong, tight and stable connection to another silicon chip, which in turn can contain suitable channels and liquid connections.
  • a corresponding recess 32 in the holder 20 means that the media inlet recess 16 in the substrate 10 of the actuator member can be dispensed with if the channel device 14 ends under the recess 32, so that a fluid connection is thereby ensured.
  • the atomizing surface of the membrane 12 is uniformly wetted with the liquid to be atomized via the liquid line 29, the media inlet 16 and the channel device 14.
  • the liquid line 29 is connected to a liquid reservoir (not shown), which is preferably an overpressure container which can be fluidly connected to the liquid line 29 via a valve.
  • the membrane 12 is vibrated by the piezoelectric actuator, so that the liquid located on the atomizing surface of the membrane 12 is atomized on the basis of the capillary wave theory.
  • atomization liquid is continuously supplied via the channel device 14.
  • atomization can be carried out by the actuator member according to the invention, which results in droplets whose diameters do not vary in a large range, but whose diameters in a defined range, for medical technology preferably between 1 and 5 ⁇ m. Droplets of this order of magnitude are obtained using an excitation frequency of the piezeoelectric actuator in the range from 2.0 to 2.5 MHz, the exact value of the excitation frequency having little dependence on the viscosity of the liquid to be atomized.
  • FIG. 2b shows a schematic top view of a channel device 34, as it can be sufficient for a membrane 36 of small size, in order to ensure even wetting to effect the same with the liquid to be atomized.
  • the channel device 34 is in turn fluidly connected to a recess 16 which defines a media inlet.
  • the arrangement shown in FIG. 2b) is suitable for atomizing small fluid volumes, while the embodiment shown in FIG. 2a) is suitable for atomizing larger fluid volumes.
  • the channels 14 and 34 act in addition to the liquid supply due to the narrowing of the cross section also as a flow restriction. With a constant outlet pressure of the liquid and through the channels produced with a precise cross-section, a constant flow to the piezoelectric membrane 12 or 36 is established.
  • the channels according to the present invention can be precisely etched using silicon technology, so that a defined supply of the liquid to the atomizing surface of the membrane is possible.
  • the microactuators can be specifically adjusted to the desired flow quantities by means of differently selected cross sections, so that the atomization of very precisely defined volumes is possible.
  • a protective layer which preferably consists of titanium or titanium nitride.
  • a p-silicon is preferably used as the silicon substrate 10, while the layer 40 is an n-type layer.
  • Layer 40 later also serves as the lower electrode for driving the piezoelectric layer.
  • the substrate 10 on which the implantation layer 40 is arranged is subsequently subjected to an oxidation in order to produce SiO 2 layers 42 and 44. The resulting layer composite is shown in Fig. 3a).
  • An opening 48 is formed in the upper oxide layer 42 for later contacting of the implantation layer 40, see FIG. 3b).
  • the lower oxide layer 44 and the silicon nitride layer 46 are structured, for example by photolithographic methods, in order to define an opening 50 for the later etching free of the membrane recess from the underside of the silicon substrate 10.
  • a piezoelectric material 52 is applied to the upper oxide layer 42, which acts as a piezoelectric actuator in the finished component.
  • the piezoelectric material can consist of AlN, PZT or ZnO, for example. This results in the structure shown in FIG. 3c).
  • metallizations 54 and 56 for the electrical control of the piezoelectric element 52 are produced on the top of the structure shown in FIG. 3c), see FIG. 3d), whereupon a passivation layer 58 is applied and structured to openings 60 and 62 for contacting the To define metallizations 54 and 56, see Fig. 3e).
  • a KOH etching delimited by the masking layers deposited on the front and rear, is carried out from the rear up to the implantation layer 40, which serves as an etching stop that the membrane 12, which is formed in the implantation layer 40, is produced.
  • the integrated flow channels with a shallower depth and the necessary depressions for the media inlet can be produced at the same time.
  • the lower mask layers 44 and 46 are further patterned to define the channels and the media inlet, whereupon a further KOH etching is carried out to the channels and the media inlet in the back of the silicon substrate 10 to generate.
  • the recess, which defines the membrane, and the feed channels, which ensure uniform wetting of the atomizing surface of the membrane, are formed in the same main surface of a silicon substrate, so that the present invention makes the mass production of actuator components of small size inexpensive and with low energy consumption.

Landscapes

  • Special Spraying Apparatus (AREA)
  • Micromachines (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Abstract

La présente invention concerne un élément d'actionneur destiné à un microdiffuseur piézo-électrique, comprenant une membrane (12) formée dans un substrat à semi-conducteur (10), un actionneur piézo-électrique se trouvant sur la surface de la membrane (12) et permettant de faire vibrer ladite membrane (12), et un dispositif de canaux (14) formé dans le substrat à semi-conducteur, servant à transporter un liquide à diffuser d'une extrémité d'entrée à la surface de la membrane opposée à l'actionneur piézo-électrique. Un microdiffuseur comprend, lorsqu'on se sert d'un élément d'actionneur de ce type, un support auquel l'élément d'actionneur est fixé de sorte que l'extrémité d'entrée se trouve reliée fluidiquement à une conduite d'acheminement de liquide, que le dispositif de canaux, à l'exception d'une liaison fluidique de ce dernier avec la conduite d'acheminement de liquide et la surface de la membrane opposée à l'actionneur piézo-électrique, se trouve obturé par le support, et que le support présente une ouverture dans la zone de la surface de la membrane opposée à l'actionneur piézo-électrique afin d'expulser le liquide de diffusion.
EP00949481A 1999-08-12 2000-08-10 Element d'actionneur destine a un microdiffuseur et son procede de realisation Expired - Lifetime EP1200198B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19938055A DE19938055A1 (de) 1999-08-12 1999-08-12 Aktorbauglied für einen Mikrozerstäuber und Verfahren zu seiner Herstellung
DE19938055 1999-08-12
PCT/EP2000/007798 WO2001012340A1 (fr) 1999-08-12 2000-08-10 Element d'actionneur destine a un microdiffuseur et son procede de realisation

Publications (2)

Publication Number Publication Date
EP1200198A1 true EP1200198A1 (fr) 2002-05-02
EP1200198B1 EP1200198B1 (fr) 2003-01-22

Family

ID=7918052

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00949481A Expired - Lifetime EP1200198B1 (fr) 1999-08-12 2000-08-10 Element d'actionneur destine a un microdiffuseur et son procede de realisation

Country Status (5)

Country Link
US (1) US6536682B1 (fr)
EP (1) EP1200198B1 (fr)
JP (1) JP3598095B2 (fr)
DE (2) DE19938055A1 (fr)
WO (1) WO2001012340A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW538823U (en) * 2002-09-18 2003-06-21 Kae Jyh Corp Improved structure for percussion board of water mist
TWI294789B (en) * 2005-11-29 2008-03-21 Ind Tech Res Inst Droplet ejecting head
EP1792662A1 (fr) 2005-11-30 2007-06-06 Microflow Engineering SA Appareil de distribution de gouttelettes
EP1952896B1 (fr) * 2007-02-01 2012-11-07 EP Systems SA Appareil de distribution de gouttelettes
EP2130611B1 (fr) * 2008-06-03 2010-11-03 Microflow Engineering SA Dispositif de distribution de gouttelettes d'un liquide volatile
CN103402907B (zh) * 2011-01-17 2016-03-23 新加坡科技研究局 微流体微滴发生器

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4605167A (en) * 1982-01-18 1986-08-12 Matsushita Electric Industrial Company, Limited Ultrasonic liquid ejecting apparatus
US5152456A (en) * 1989-12-12 1992-10-06 Bespak, Plc Dispensing apparatus having a perforate outlet member and a vibrating device
EP0465229B1 (fr) * 1990-07-02 1994-12-28 Seiko Epson Corporation Micropompe et son procédé de fabrication
AU9089591A (en) * 1990-12-17 1992-07-22 Minnesota Mining And Manufacturing Company Inhaler
AU665222B2 (en) * 1991-12-04 1995-12-21 Technology Partnership Plc, The Production of fluid droplets
FR2705911B1 (fr) 1993-06-02 1995-08-11 Oreal Appareil de nébulisation piézoélectrique.
GB9412669D0 (en) * 1994-06-23 1994-08-10 The Technology Partnership Plc Liquid spray apparatus
WO1995015822A1 (fr) 1993-12-09 1995-06-15 The Technology Partnership Plc Appareil et procede de pulverisation de liquide
US5685491A (en) * 1995-01-11 1997-11-11 Amtx, Inc. Electroformed multilayer spray director and a process for the preparation thereof
DE19802368C1 (de) * 1998-01-22 1999-08-05 Hahn Schickard Ges Mikrodosiervorrichtung

Non-Patent Citations (1)

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Title
See references of WO0112340A1 *

Also Published As

Publication number Publication date
US6536682B1 (en) 2003-03-25
EP1200198B1 (fr) 2003-01-22
WO2001012340A1 (fr) 2001-02-22
DE50001149D1 (de) 2003-02-27
JP3598095B2 (ja) 2004-12-08
DE19938055A1 (de) 2001-03-15
JP2003507168A (ja) 2003-02-25

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