EP1177858A1 - Polissoir a bande de abrasiv fixé - Google Patents

Polissoir a bande de abrasiv fixé Download PDF

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Publication number
EP1177858A1
EP1177858A1 EP00306584A EP00306584A EP1177858A1 EP 1177858 A1 EP1177858 A1 EP 1177858A1 EP 00306584 A EP00306584 A EP 00306584A EP 00306584 A EP00306584 A EP 00306584A EP 1177858 A1 EP1177858 A1 EP 1177858A1
Authority
EP
European Patent Office
Prior art keywords
belt
polishing
substrate
membrane
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP00306584A
Other languages
German (de)
English (en)
Inventor
John M White
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to EP00306584A priority Critical patent/EP1177858A1/fr
Publication of EP1177858A1 publication Critical patent/EP1177858A1/fr
Withdrawn legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B24B37/245—Pads with fixed abrasives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
    • B24B21/10—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces involving a rigid member, e.g. pressure bar, table, pressing or supporting the belt over substantially its whole span
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
EP00306584A 2000-08-02 2000-08-02 Polissoir a bande de abrasiv fixé Withdrawn EP1177858A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP00306584A EP1177858A1 (fr) 2000-08-02 2000-08-02 Polissoir a bande de abrasiv fixé

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP00306584A EP1177858A1 (fr) 2000-08-02 2000-08-02 Polissoir a bande de abrasiv fixé

Publications (1)

Publication Number Publication Date
EP1177858A1 true EP1177858A1 (fr) 2002-02-06

Family

ID=8173158

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00306584A Withdrawn EP1177858A1 (fr) 2000-08-02 2000-08-02 Polissoir a bande de abrasiv fixé

Country Status (1)

Country Link
EP (1) EP1177858A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3356652A4 (fr) * 2015-09-28 2019-06-19 Saint-Gobain Abrasives, Inc. Procédé et système de retrait de matériau d'une pièce de travail

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997020660A1 (fr) * 1995-12-05 1997-06-12 Applied Materials, Inc. Polisseuse a bande pour substrat
WO1998045090A1 (fr) * 1997-04-04 1998-10-15 Obsidian, Inc. Magasin pour support de polissage ameliorant le polissage
WO1998049723A1 (fr) * 1997-04-30 1998-11-05 Minnesota Mining And Manufacturing Company Procede de planage de la surface superieure d'une plaquette de semi-conducteur
WO1999006182A1 (fr) * 1997-07-30 1999-02-11 Scapa Group Plc Polissage de plaquettes en semiconducteur

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997020660A1 (fr) * 1995-12-05 1997-06-12 Applied Materials, Inc. Polisseuse a bande pour substrat
WO1998045090A1 (fr) * 1997-04-04 1998-10-15 Obsidian, Inc. Magasin pour support de polissage ameliorant le polissage
WO1998049723A1 (fr) * 1997-04-30 1998-11-05 Minnesota Mining And Manufacturing Company Procede de planage de la surface superieure d'une plaquette de semi-conducteur
WO1999006182A1 (fr) * 1997-07-30 1999-02-11 Scapa Group Plc Polissage de plaquettes en semiconducteur

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3356652A4 (fr) * 2015-09-28 2019-06-19 Saint-Gobain Abrasives, Inc. Procédé et système de retrait de matériau d'une pièce de travail
US11298791B2 (en) 2015-09-28 2022-04-12 Saint-Gobain Abrasives, Inc. Method and system for removing material from a workpiece

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