EP1168383A1 - Mikrokomponent wie Mikroinduktanz oder Mikrotransformator - Google Patents

Mikrokomponent wie Mikroinduktanz oder Mikrotransformator Download PDF

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Publication number
EP1168383A1
EP1168383A1 EP01420135A EP01420135A EP1168383A1 EP 1168383 A1 EP1168383 A1 EP 1168383A1 EP 01420135 A EP01420135 A EP 01420135A EP 01420135 A EP01420135 A EP 01420135A EP 1168383 A1 EP1168383 A1 EP 1168383A1
Authority
EP
European Patent Office
Prior art keywords
core
solenoid
micro
magnetic
microcomponent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01420135A
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English (en)
French (fr)
Inventor
Jean-Marc Fedeli
Bertrand Guillon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Memscap SA
Original Assignee
Memscap SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Memscap SA filed Critical Memscap SA
Publication of EP1168383A1 publication Critical patent/EP1168383A1/de
Withdrawn legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F3/00—Cores, Yokes, or armatures
    • H01F3/10—Composite arrangements of magnetic circuits
    • H01F3/14—Constrictions; Gaps, e.g. air-gaps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00—Fixed inductances of the signal type 
    • H01F17/0006—Printed inductances
    • H01F17/0033—Printed inductances with the coil helically wound around a magnetic core
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00—Fixed inductances of the signal type 
    • H01F17/0006—Printed inductances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00—Details of transformers or inductances, in general
    • H01F27/34—Special means for preventing or reducing unwanted electric or magnetic effects, e.g. no-load losses, reactive currents, harmonics, oscillations, leakage fields

Definitions

  • the invention relates to the field of microelectronics, and more specifically to the sector of the manufacture of microcomponents, in particular intended for use in radio frequency applications. More precisely, it relates to microcomponents such as micro-inductors or micro-transformers equipped with a magnetic core allowing operation at particularly high frequencies.
  • the electronic circuits used for radio frequency applications include oscillating circuits including capacitors and inductances.
  • microcomponents such as micro-inductors occupy an increasingly reduced volume, while retaining a sufficient inductance value and a high quality coefficient.
  • the general trend is towards an increase in operating frequencies.
  • inductance of the micro-inductance To obtain a good quality factor, one generally seeks to increase the value of inductance of the micro-inductance.
  • magnetic materials are chosen whose geometry and dimensions allow the greatest possible permeability.
  • a problem which the invention proposes to solve is that of limiting the frequency of use inherent in the existence of a phenomenon of gyromagnetism.
  • the invention therefore relates to an inductive microcomponent such as a micro-inductor or a micro-transformer, comprising a metal coil having the shape of a solenoid, and a magnetic core made of a ferromagnetic material positioned in the center of the coil.
  • an inductive microcomponent such as a micro-inductor or a micro-transformer, comprising a metal coil having the shape of a solenoid, and a magnetic core made of a ferromagnetic material positioned in the center of the coil.
  • the core of this microcomponent consists of several sections separated by cutouts oriented perpendicular to the main axis of the solenoid.
  • the magnetic core does not form a monolithic piece elongated along the axis of the solenoid, but on the contrary is segmented along the direction of the solenoid.
  • the fractionation of the magnetic core causes a decrease in the magnetic permeability of each section, and therefore a decrease in the inductance value of the microcomponent.
  • this drawback is offset by the increase in the maximum frequency at which the microcomponent retains its inductive behavior.
  • H int The field opposing the external field
  • H d The field opposing the external field
  • N the demagnetizing field coefficient
  • This demagnetizing field created by the supply components along the direction of the difficult axis, decreases the resulting internal field and therefore opposes the passage of flow lines. In other words, this demagnetizing field results in a decrease in permeability.
  • the magnetizing field coefficient is significantly higher than for a monolithic core occupying the entire length of the solenoid. It follows that the demagnetizing field is also stronger and that the magnetic permeability along the difficult axis is lower.
  • the resonant frequency for the gyromagnetic effect is higher, which allows the use of micro-inductance or microtransformer at higher frequencies.
  • the thickness of the core can be between 0.1 and 10 micrometers. It can be seen that it is possible to overcome the phenomena of induced currents, which are all the more important as the frequency of use is high, by limiting as much as possible the thickness of each section of the magnetic core.
  • the core can be made of materials chosen from the group comprising alloys based on iron, nickel, cobalt, zirconium, or niobium.
  • Micro-inductors are obtained having a minimum series resistance and therefore a particularly important quality factor by producing the solenoid from electrolytic copper, which can be deposited on an insulating substrate such as quartz or glass.
  • the solenoid can also be deposited on a conductive or semiconductor substrate, with the interposition of an insulating layer between this substrate and the solenoid.
  • the invention relates to microcomponents such as micro-inductance or microtransformer whose magnetic core is fractionated.
  • a micro-inductor (1) according to the invention comprises a metal coil (2) consisting of a plurality of turns (3) wound around the magnetic core.
  • each turn (3) of the solenoid comprises a bottom part (5) which is inserted on the surface of the substrate (6) as well as a plurality of arches (7) connecting the ends (8, 9) of the bottom parts adjacent (5, 5 ').
  • a layer of silica (11) is deposited above the upper face of the substrate (6) so as to isolate the lower parts (5) of the turns of the magnetic materials which will be deposited above.
  • the magnetic core (4) is then produced, which can be obtained by different techniques, such as sputtering or electrolytic deposition.
  • the magnetic material is electrodeposited above predetermined growth zones, located above the plurality of segments (5) forming the lower parts of the turns.
  • the magnetic core (4) has several sections (13-16) separated from each other by cutouts (17-19) perpendicular to the longitudinal axis (20) of the solenoid (2).
  • the number of sections of the magnetic core (4) is determined according to various parameters such as the type of magnetic material used, the maximum frequency at which the inductance must be used, the desired inductance value as well as the thickness of the layer of magnetic material.
  • the magnetic core (4) has four sections (13-16) separated by three cutouts (17-19). These four sections (13-16) can be obtained as already said by an additive technique in which the electrolytic deposition takes place on four growth zones drawn above the copper segments (5).
  • These four sections (13-16) can also be obtained by a subtractive technique consisting in, in a first step, depositing a uniform magnetic layer on the substrate, then in a second step removing the magnetic material to form the different sections.
  • the thickness (e) of the magnetic layer (13-16) is chosen between 0.1 and 10 micrometers to obtain sufficient inductance while limiting the phenomena of induced currents.
  • the width (d) of the cutouts (17-19) separating each section (13-16) is preferably chosen to be close to four times the thickness (e) of the layer of magnetic material. This ratio is not respected in FIG. 2 only for reasons of clarity of the figure.
  • the overall thickness of the magnetic core (4) can be increased by depositing several superimposed layers of magnetic material isolated from each other by non-magnetic layers, preferably insulating, such as silica or silicon nitride.
  • a layer of silica (22) is applied, intended to electrically isolate the magnetic core (4) from the upper part (7) of the turns (2).
  • connection pads (23, 24) as well as a possible passivation can be carried out.
  • the magnetic materials used can be relatively varied, since they have a strong magnetization and a controlled anisotropy.
  • it can be crystalline or amorphous materials such as for example CoZrNb.
  • the solenoid can be made of copper as illustrated, or even incorporate other materials with low resistivity such as gold.
  • microcomponents in accordance with the invention have multiple advantages and in particular the increase in the maximum operating frequency compared to microcomponents of identical size and material.
  • microcomponents find a very particular application in radio frequency applications and in particular in mobile telephony.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Composite Materials (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Soft Magnetic Materials (AREA)
EP01420135A 2000-06-29 2001-06-13 Mikrokomponent wie Mikroinduktanz oder Mikrotransformator Withdrawn EP1168383A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0008413 2000-06-29
FR0008413A FR2811135B1 (fr) 2000-06-29 2000-06-29 Microcomposant du type micro-inductance ou microtransformateur

Publications (1)

Publication Number Publication Date
EP1168383A1 true EP1168383A1 (de) 2002-01-02

Family

ID=8851877

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01420135A Withdrawn EP1168383A1 (de) 2000-06-29 2001-06-13 Mikrokomponent wie Mikroinduktanz oder Mikrotransformator

Country Status (5)

Country Link
US (1) US6529110B2 (de)
EP (1) EP1168383A1 (de)
JP (1) JP2002050520A (de)
CA (1) CA2351790A1 (de)
FR (1) FR2811135B1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7642098B2 (en) 2005-04-06 2010-01-05 Forschungszentrum Karlsruhe Gmbh Ferromagnetic or ferrimagnetic layer, method for the production thereof, and use thereof

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6924434B2 (en) * 2000-10-24 2005-08-02 Philip John Manison Physiological effect device
US7113066B2 (en) * 2001-07-04 2006-09-26 Koninklijke Philips Electronics, N.V. Electronic inductive and capacitive component
KR100776406B1 (ko) 2006-02-16 2007-11-16 삼성전자주식회사 마이크로 인덕터 및 그 제작 방법
FR2908231B1 (fr) * 2006-11-07 2009-01-23 Commissariat Energie Atomique Noyau magnetique ferme en forme de spirale et micro-inductance integree comportant un tel noyau magnetique ferme
US11935678B2 (en) * 2020-12-10 2024-03-19 GLOBALFOUNDARIES Singapore Pte. Ltd. Inductive devices and methods of fabricating inductive devices

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2701296B1 (de) * 1977-01-14 1978-04-20 Philips Patentverwaltung Duennschicht-Magnetfeld-Sensor
EP0642142A2 (de) * 1993-09-01 1995-03-08 Philips Electronique Grand Public Drosselspule
EP0725407A1 (de) * 1995-02-03 1996-08-07 International Business Machines Corporation Dreidimensionale integrierte Induktivität

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2062710C (en) * 1991-05-31 1996-05-14 Nobuo Shiga Transformer for monolithic microwave integrated circuit
JPH0689809A (ja) * 1991-05-31 1994-03-29 Amorphous Denshi Device Kenkyusho:Kk 薄膜インダクタンス素子
JPH05121242A (ja) * 1991-10-29 1993-05-18 Amorphous Denshi Device Kenkyusho:Kk 分割積層型コイル
US5793272A (en) * 1996-08-23 1998-08-11 International Business Machines Corporation Integrated circuit toroidal inductor
FR2769122B1 (fr) * 1997-09-29 2001-04-13 Commissariat Energie Atomique Procede pour augmenter la frequence de fonctionnement d'un circuit magnetique et circuit magnetique correspondant
US6249039B1 (en) * 1998-09-10 2001-06-19 Bourns, Inc. Integrated inductive components and method of fabricating such components
US6147582A (en) * 1999-03-04 2000-11-14 Raytheon Company Substrate supported three-dimensional micro-coil

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2701296B1 (de) * 1977-01-14 1978-04-20 Philips Patentverwaltung Duennschicht-Magnetfeld-Sensor
EP0642142A2 (de) * 1993-09-01 1995-03-08 Philips Electronique Grand Public Drosselspule
EP0725407A1 (de) * 1995-02-03 1996-08-07 International Business Machines Corporation Dreidimensionale integrierte Induktivität

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
SHIRAKAWA K ET AL: "THIN FILM CLOTH-STRUCTURED INDUCTOR FOR MAGNETIC INTEGRATED CIRCUIT", IEEE TRANSACTIONS ON MAGNETICS,US,IEEE INC. NEW YORK, vol. 26, no. 5, 1 September 1990 (1990-09-01), pages 2262 - 2264, XP000150520, ISSN: 0018-9464 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7642098B2 (en) 2005-04-06 2010-01-05 Forschungszentrum Karlsruhe Gmbh Ferromagnetic or ferrimagnetic layer, method for the production thereof, and use thereof

Also Published As

Publication number Publication date
US20020050906A1 (en) 2002-05-02
US6529110B2 (en) 2003-03-04
JP2002050520A (ja) 2002-02-15
FR2811135A1 (fr) 2002-01-04
FR2811135B1 (fr) 2002-11-22
CA2351790A1 (fr) 2001-12-29

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