EP1167862A2 - Dispositif et procédé de contrôle de fourniture de gaz liquéfiés à partir d'un réservoir de grande capacité - Google Patents

Dispositif et procédé de contrôle de fourniture de gaz liquéfiés à partir d'un réservoir de grande capacité Download PDF

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Publication number
EP1167862A2
EP1167862A2 EP01401548A EP01401548A EP1167862A2 EP 1167862 A2 EP1167862 A2 EP 1167862A2 EP 01401548 A EP01401548 A EP 01401548A EP 01401548 A EP01401548 A EP 01401548A EP 1167862 A2 EP1167862 A2 EP 1167862A2
Authority
EP
European Patent Office
Prior art keywords
delivery
gas
vessel
controller
liquefied
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01401548A
Other languages
German (de)
English (en)
Other versions
EP1167862A3 (fr
Inventor
Richard J. Udischas
Benjamin J. Jurcik
Hwa-Chi Wang
Robert G. Irwin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Publication of EP1167862A2 publication Critical patent/EP1167862A2/fr
Publication of EP1167862A3 publication Critical patent/EP1167862A3/fr
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
    • F17C7/02—Discharging liquefied gases
    • F17C7/04—Discharging liquefied gases with change of state, e.g. vaporisation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C9/00—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure
    • F17C9/02—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure with change of state, e.g. vaporisation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/05—Ultrapure fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107—Single phase
    • F17C2223/013—Single phase liquid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/01—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the phase
    • F17C2225/0107—Single phase
    • F17C2225/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/03—Heat exchange with the fluid
    • F17C2227/0367—Localisation of heat exchange
    • F17C2227/0369—Localisation of heat exchange in or on a vessel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0404—Parameters indicated or measured
    • F17C2250/043—Pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/06—Controlling or regulating of parameters as output values
    • F17C2250/0605—Parameters
    • F17C2250/0631—Temperature
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0518—Semiconductors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/32—Hydrogen storage

Definitions

  • the present invention relates to a system and method for controlled delivery of a gas from a liquefied state.
  • the invention relates to a system and method for delivery of a gas from a bulk source.
  • the primary purpose of the bulk delivery vessel and system is to store the above-listed electronic specialty gases (ESG) and provide a safe vehicle for delivering gas from the vessel to the process tool.
  • ESG electronic specialty gases
  • Ultra-high purity is herein defined in terms of impurity concentrations of less than 100 ppb (parts per billion) for any volatile molecule, and in particular, particulate concentration of a size larger than 0.3 micrometers at less than 1/liter of gas under normal conditions and metallic impurities at less than 1 ppb (parts per billion in atomic units) per element.
  • vapor phase ESG withdrawal of vapor phase ESG at a high flow rate may entrain liquid droplets of the gas, thereby having a deleterious effect on the process and apparatus.
  • condensation occurs by the Joule-Thompson effect (see, Joule-Thompson Expansion and Corrosion in HCl System, Solid State Technology, July 1992, pp. 53-57).
  • Liquid HCl is more corrosive than its vapor form.
  • the liquid forms thereof are more corrosive than their respective vapor forms.
  • condensation of these materials in the gas delivery system can lead to corrosion, which is harmful to the components of the gas delivery system.
  • the corrosion products can lead to contamination of the highly pure process gases. This contamination can have deleterious effects on the processes being run, and ultimately on the manufactured semiconductor devices.
  • liquid in the gas delivery system has also been determined to lead to inaccuracies in flow control. That is, the accumulation of liquid in various flow control devices can cause flow rate and pressure control problems as well as component failure, leading to misprocessing.
  • One example of such behavior is the swelling of a valve seat by liquid chlorine, which causes the valve to become permanently closed. Such failure can necessitate shutdown of the process during replacement of the failed parts and subsequent leak checking. Extensive process downtime can result.
  • the Figure of the Drawing is a schematic diagram of a system for delivery of a gas from a liquefied state in accordance the invention.
  • vapor phase gas can be withdrawn from a bulk delivery vessel at a desired flow rate by maintaining and controlling the energy input to the vessel via pressure measurement and controls.
  • energy transfer means are provided in an area that holds liquid phase gas.
  • temperature stabilization is attained in a fast and facile manner.
  • bulk means any vessel having capacity greater that standard cylinders (about 20 liters).
  • a system for delivery of a gas from a liquefied state includes: (a) a delivery vessel holding a bulk quantity of liquefied gas therein; (b) a heat exchanger disposed on the delivery vessel to provide or remove energy from the liquefied gas only; and (c) a pressure controller for monitoring pressure and adjusting the energy delivered to the liquefied gas.
  • the controller monitors the pressure to derive the temperature in the delivery vessel and adjusts the energy exchange therein.
  • a method for delivery of gas from a liquefied state in a controlled manner includes: (a) providing a delivery vessel holding a bulk quantity of liquefied gas therein; (b) supplying energy in a pressure controlled manner to the bulk delivery vessel via a heat exchanger; and (c) delivering the liquefied gas at a controlled flow rate from the vessel to a point of use.
  • the invention provides for maintaining controlled conditions of the gas-liquid phase equilibrium in order to deliver gases from a delivery vessel holding a bulk quantity of the gas in liquefied state at a desired flow rate.
  • a chemical such as a liquefied electronic specialty gas (ESG) is stored in bulk vessel 110 under its own vapor pressure.
  • the bulk vessel can be constructed from a material such as type 304 and 316 stainless steel, Hastelloy, nickel or a coated metal (e.g., a zirconium-coated carbon) which is strictly non-reactive with the ESG and can withstand both a vacuum and high pressures.
  • the specific material contained within the bulk vessel is not limited, but is process dependent. Typical materials include these specified in Tables 1, e.g., NH 3 , BCl 3 , CO 2 , SiH 2 Cl 2 , HBr, HCl, HF, N 2 O, C 3 F 8 , SF 6 and WF 6 .
  • bulk vessel 110 is delivered to the site in full.
  • bulk vessel 110 is filled on-site. There it is purged prior to introduction of ESG by alternating vacuum-high pressure cycles of high purity inert gases.
  • the bulk vessel is heated to a temperature ranging from about 80°-120° C, and can withstand both vacuum and pressures of up to 100 bar employed during the purge process.
  • the ESG is transfilled to bulk vessel in either gaseous or liquid phase.
  • the transfilling affords another measure of purification of the ESG prior to its introduction into bulk vessel 110.
  • the transfer is preferably assisted by cooling the bulk vessel at cryogenic temperature using, if necessary, external and/or internal heat exchangers.
  • the bulk vessel is installed "on-site,” that is in close proximity to the semiconductor manufacturing facility where the outside temperature can be as low as -30°C, or inside the facility, from where the ESG is delivered in a safe and facile manner to the point of use.
  • the facility is preferably equipped with automatic gas sensors and an emergency abatement system in case of an accidental leakage or other malfunctions of the system.
  • Vessel 110 is connected to the point of use, such as a semiconductor processing tool, through conduit 120. While initially in equilibrium condition, the liquid-vapor phase thermodynamic equilibrium is imbalanced in bulk vessel 110 as the gas is delivered to the point of use under its vapor pressure. Transfer of energy from the ambient, thus occurs when the gas is withdrawn at a high flow rate or the temperature is low to facilitate delivery of gas to a point of use. In order to move back to equilibrium, energy is transferred from bulk vessel 110 to the environment, reducing the temperature of the liquid and vapor, and the vapor withdrawn and delivered from vessel 110 may have a minimal amount of liquid droplets entrained therein.
  • conduit 120 is preferably fabricated from a corrosion resistant material as described above in connection with bulk vessel 110.
  • vapor phase ESG is withdrawn from bulk vessel 110 at a variable rate and in a controlled manner.
  • the vapor phase is withdrawn from or near the top of bulk vessel 110 and gas in liquid state remains in the vessel.
  • the gas within the bulk vessel is maintained in a compressed state during operation and the vapor withdrawn therefrom has a low concentration of impurities due to the lack of entrainment of liquid droplets in the vapor delivered.
  • the source of energy is a heat exchanger 130 having either a liquid transfer media circulating in a metallic coil, or by electrical heating using a heater embedded in a metallic coil, such as the ones available under the trade designation THERMOCOAX®.
  • the metallic coiling is made of a corrosion resistant material, such as the ones discussed above, for the specific ESG considered.
  • the liquid heat transfer medium is selected not only for its thermal properties but also safety concerns in the case of accidental leaks in system 100. Suitable energy sources are further described in U.S. Patent No. 5,673,562 and hereby incorporated by reference in its entirety.
  • Heat exchanger 130 is preferably positioned at or near a bottom portion of bulk vessel 110, and even more preferably at the lower one quarter of the bulk vessel, to ensure that the energy transfer occurs in an area where there is ESG contained in liquid form.
  • the pressure of bulk vessel 110 is regulated is such a way that liquid in the bulk vessel is within approximately 5°C of room temperature.
  • Efficient energy input occurs as a result of the heat exchanger being in close proximity to liquid form ESG.
  • ESG vapor is demanded by a semiconductor tool or tools causing a flow control valve 140 to open. Vaporized ESG exits bulk vessel 110 and flows through conduit 120, which has a flow control valve 140.
  • a pressure sensor 150 such as a transducer is disposed downstream of vessel 110 in conduit 120.
  • Delivery system 100 includes a closed-loop control means to monitor the pressure at which the ESG is withdrawn through conduit 130 and to compensate for the energy of vaporization utilized to deliver the ESG at a desired flow rate.
  • Suitable control means are known in the art, and include, for example, a programmable logic controller (PLC) or microprocessor 160.
  • PLC programmable logic controller
  • pressure sensor 150 sends a measurement signal to controller 160 thereby indicating the pressure of the vapor phase ESG in conduit 120.
  • An algorithm is employed to determine the temperature of the liquid phase ESG in bulk vessel based on the measured pressure in conjunction with the pressure vs. temperature curve of the particular ESG employed. Upon deriving the temperature, it is compared with a temperature set point range. In the event that the temperature falls below the lower limit of the range, energy in the form of heat is applied. Conversely, if the temperature is above the range energy is removed by the heat exchanger.
  • the measured pressure is compared to a pressure set point range for the acceptable temperature. Should the pressure decrease below the expected pressure at ambient temperature, for example, a signal is transmitted from controller 160 to heat exchanger 130 to deliver energy to bulk vessel 110. Thus, the thermal energy is employed to restore the pressure necessary to maintain demanded flow rate of vapor delivered to the point of use.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
EP01401548A 2000-06-20 2001-06-14 Dispositif et procédé de contrôle de fourniture de gaz liquéfiés à partir d'un réservoir de grande capacité Withdrawn EP1167862A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/597,262 US6363728B1 (en) 2000-06-20 2000-06-20 System and method for controlled delivery of liquefied gases from a bulk source
US597262 2000-06-20

Publications (2)

Publication Number Publication Date
EP1167862A2 true EP1167862A2 (fr) 2002-01-02
EP1167862A3 EP1167862A3 (fr) 2008-09-03

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EP01401548A Withdrawn EP1167862A3 (fr) 2000-06-20 2001-06-14 Dispositif et procédé de contrôle de fourniture de gaz liquéfiés à partir d'un réservoir de grande capacité

Country Status (6)

Country Link
US (1) US6363728B1 (fr)
EP (1) EP1167862A3 (fr)
JP (1) JP2002048298A (fr)
KR (1) KR20010114163A (fr)
CN (1) CN1338586A (fr)
TW (1) TW494208B (fr)

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FR2927146A1 (fr) * 2008-02-06 2009-08-07 Air Liquide Systeme de chauffage de stockages des gaz liquefies sous pression
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US5673562A (en) 1996-02-23 1997-10-07 L'air Liquide, S.A. Bulk delivery of ultra-high purity gases at high flow rates
US5761911A (en) 1996-11-25 1998-06-09 American Air Liquide Inc. System and method for controlled delivery of liquified gases

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EP1354165A2 (fr) * 2001-01-05 2003-10-22 Praxair Technology, Inc. Apport de gaz a debits eleves
EP1354165A4 (fr) * 2001-01-05 2009-04-22 Praxair Technology Inc Apport de gaz a debits eleves
FR2897413A1 (fr) * 2006-02-16 2007-08-17 Air Liquide Recipient de conditionnement d'acetylene a dispositif de rechauffage externe
FR2927146A1 (fr) * 2008-02-06 2009-08-07 Air Liquide Systeme de chauffage de stockages des gaz liquefies sous pression
EP3489569A4 (fr) * 2016-07-20 2020-03-25 Showa Denko K.K. Appareil d'alimentation en gaz et procédé d'alimentation en gaz
US11427907B2 (en) 2016-07-20 2022-08-30 Showa Denko K.K. Gas supply apparatus and gas supply method
CN107228278A (zh) * 2017-07-26 2017-10-03 张家港奕炜桐五金机械设备有限公司 一种天然气调压站用换热器

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US6363728B1 (en) 2002-04-02
TW494208B (en) 2002-07-11
KR20010114163A (ko) 2001-12-29
JP2002048298A (ja) 2002-02-15
EP1167862A3 (fr) 2008-09-03
CN1338586A (zh) 2002-03-06

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