EP1153478A2 - Plaquette substrat constituee de langasite ou de langatate - Google Patents

Plaquette substrat constituee de langasite ou de langatate

Info

Publication number
EP1153478A2
EP1153478A2 EP00910543A EP00910543A EP1153478A2 EP 1153478 A2 EP1153478 A2 EP 1153478A2 EP 00910543 A EP00910543 A EP 00910543A EP 00910543 A EP00910543 A EP 00910543A EP 1153478 A2 EP1153478 A2 EP 1153478A2
Authority
EP
European Patent Office
Prior art keywords
crystal
surface wave
substrate
langasite
wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP00910543A
Other languages
German (de)
English (en)
Inventor
Ulrike RÖSLER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP1153478A2 publication Critical patent/EP1153478A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02598—Characteristics of substrate, e.g. cutting angles of langatate substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/0259—Characteristics of substrate, e.g. cutting angles of langasite substrates

Definitions

  • the invention relates to a substrate plate for, in particular, also frequency-stable surface waves (SAW) components, the substrate plate consisting of a single crystal of langasite or langatate and the surface of the substrate plate provided for the component being such a crystal cut with which this SAW component, based on this surface, has a high electromechanical coupling factor and low propagation speed for surface waves, and in particular also guarantees frequency stability of the SAW component that is independent of temperature changes.
  • SAW frequency-stable surface waves
  • Langasite and langatate are also used as crystal material such as quartz, lithium niobate, lithium tantalate and the like. used for surface wave devices as substrate platelets.
  • surface wave components serve as (high-frequency) filters, delay lines, identification marks and sensors for various applications.
  • electrode structures of a predetermined type and design are applied to the at least one flat surface of the substrate plate.
  • transducer electrode structures when the electrical signal is impressed, acoustic waves can be generated in the flat surface of the crystal which, depending on the prevailing boundary conditions, have respective wave forms, in particular are Rayleigh waves, shear waves or the like.
  • Such a wave runs on the surface at a material-specific speed which is dependent on the crystal cut and which can also depend on the respective temperature of the crystal.
  • the frequency stability of such a surface wave component is also temperature-dependent.
  • the crystal material can have the property that the selected structure of the transducer system has a particular main wave propagation direction actually pivoted by a beam steering angle.
  • the object of the invention is to find such crystal cuts for substrate platelets for surface acoustic wave components, regardless of already known crystal cuts for langasite and langatate, which have the greatest possible coupling factor, low propagation speed of the (selected) surface wave and as close as possible to zero have outgoing beam steering angles. If possible, this should be the case for all of these three properties in the crystal cut sought / found.
  • surface wave components with these crystal sections should also be temperature-stable, preferably temperature-invariant, and have high frequency stability as resonance components. With a high coupling factor, a large filter bandwidth can be achieved.
  • the propagation speed of a bulk wave in this material with a crystal cut according to the invention is to be significantly greater than the low propagation speed for the respective surface wave provided in the crystal cut or of the surface wave component.
  • the surface of the substrate plate is assigned its own right-angled axis system, here designated xl, x2 and x3.
  • xl right-angled crystal coordinate system
  • Xi right-angled crystal coordinate system
  • x 2 this axis system
  • x of the crystal section is defined in a known manner by the respective specification of the Euler angles ⁇ , ⁇ and ⁇ and can be clearly quantified.
  • FIG. 1 shows a schematic representation of a piezoelectric surface wave component or its substrate plate.
  • Figure 2 shows the already rectangular coordinate system X, Y, Z of the crystal and the position of the Euler angles.
  • 10 denotes the langasite or langatate crystal plate of the surface wave component 1.
  • a surface wave structure 12 is shown on the selected surface 11, which (simplified) comprises a transducer structure 112 and a reflector structure 212.
  • the other axes are x and x 3 oriented. This axis system x, x, x 3 characterizes the crystal cut of the surface 11.
  • the axes X, Y and Z of the crystal are shown in a perspective view.
  • the axes xi to x 3 of the crystal section of the surface 11 of FIG. 1 are additionally entered in this crystal coordinate system.
  • This orientation of the crystal cut axes to the crystal axes X, Y, Z is clearly described by the Euler angles ⁇ , ⁇ and ⁇ .
  • the three win- core rotations ⁇ , ⁇ and ⁇ the orientation of the axis system xi, x 2 , x.
  • the plane of the axes X and Y is first rotated around the axis Z by the angle ⁇ . This results in
  • Crystal cuts ones with relating to those fields Euler angles and all equivalent thereto crystallographically such combina- have very low linear temperature coefficients of the addition also low propagation velocity v of about 2680 m / s of the acoustic wave 13 and to rela ⁇ tively high electroacoustic coupling factor of about 0.45 to 0.5%.
  • Low speed of the wave makes it possible to implement a surface wave component with a predetermined property even with a comparatively short substrate plate, and such a component has a higher achievable frequency bandwidth with a comparatively low insertion loss due to the higher coupling factor.
  • the beam steering angle is particularly small for a component with Euler angles of the crystal section falling within the mentioned angle ranges.
  • the angle ⁇ is to be maintained as far as possible within the manufacturing accuracy of the crystal cut.
  • the crystallographically equivalent combinations are crystallographic and therefore their properties are equivalent to a combination ( ⁇ , ⁇ , ⁇ ). This applies again with the tolerance range specified above.
  • the statement that a crystal section is defined by a certain combination is to be interpreted in such a way that this crystal section corresponds to the specified combination or one of these crystallographically equivalent combinations as defined below.
  • the above-mentioned angle combination (10 °, 140 °, 166 °) is (lo, itio, to), where 1, m and t stand for ⁇ , ⁇ and ⁇ .
  • the Langatat monocrystalline material for Substratplätt ⁇ surfaces for surface acoustic wave elements has for the solution dersel ⁇ object above ben other combinations of Euler angles which are given below. Langatat crystal sections with high coupling factor and particularly low
  • Propagation speed and at least almost zero beam steering angle ( ⁇ o, ⁇ o ⁇ ⁇ o) are as follows:
  • the combination (0 °, 90 °, 0 °) (with the associated tolerance range) is characterized by a particularly low propagation speed for surface waves with little more than 2200 m / s and a coupling factor of 0.54% for Langatat.
  • This property can be used in particular to prevent the substrate wafer additionally occurring bulk waves influence on the property of the microwavenwel ⁇ len device, such as a resonator have.
  • the combinations mentioned above on two ter and third place are characterized particularly by the fact that the frequency-nearest bulk wave is far away from the frequency of a surface acoustic wave and thus precisely these sections particularly ge ⁇ are suitable for surface-wave filter with a particularly large usable bandwidth.
  • a particularly high coupling factor of even 0.7%, and this with a disappearing beam steering angle, has in particular a crystal cut with the combination (10 °, 140 °, 167.5 °) with a wave propagation speed of approx. 2540 m / s.
  • the beam steering angle is not to be neglected for Langgate, because it is more than 9 ° for the angle combination (40 °, 40 °, 0 °), for example.
  • the combination (30 °, 60 °, 0 °) is characterized by a negligible influence of the nearest volume wave. Their speed of propagation is more than 200 m / s different from that of a surface wave with the same coupling factor of about 0.52 °.
  • a combination on within the combination (10 °, 25 ° to 45 °, 26 °), especially with ⁇ 30 °, with a high coupling factor of 0.53% has a surface wave propagation speed of only approx. 2320 m / s.

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

L'invention concerne une plaquette substrat constituée de langasite ou de langatate. Elle présente une coupe cristalline (x1, x2, x3) pour la langasite, dans une plage autour de la combinaison d'angles d'Euler (10°, 140°, 166°) ou bien des combinaisons d'angles d'Euler équivalentes, ou des combinaisons d'angles spéciales du langatate.
EP00910543A 1999-02-23 2000-02-18 Plaquette substrat constituee de langasite ou de langatate Withdrawn EP1153478A2 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19907761 1999-02-23
DE19907761 1999-02-23
PCT/DE2000/000470 WO2000051233A2 (fr) 1999-02-23 2000-02-18 Plaquette substrat constituee de langasite ou de langatate

Publications (1)

Publication Number Publication Date
EP1153478A2 true EP1153478A2 (fr) 2001-11-14

Family

ID=7898557

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00910543A Withdrawn EP1153478A2 (fr) 1999-02-23 2000-02-18 Plaquette substrat constituee de langasite ou de langatate

Country Status (5)

Country Link
US (1) US20020017828A1 (fr)
EP (1) EP1153478A2 (fr)
JP (1) JP2002543633A (fr)
DE (1) DE10006241A1 (fr)
WO (1) WO2000051233A2 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001257554A (ja) * 2000-01-07 2001-09-21 Tdk Corp 弾性表面波装置
FR2837636B1 (fr) * 2002-03-19 2004-09-24 Thales Sa Dispositif a ondes acoustiques d'interface en tantalate de lithium
US7781498B2 (en) * 2003-07-03 2010-08-24 Mallard Creek Polymers, Inc. Cationic latex as a carrier for bioactive ingredients and methods for making and using the same
DE102006048879B4 (de) * 2006-10-16 2018-02-01 Snaptrack, Inc. Elektroakustisches Bauelement
AT509633A1 (de) * 2010-03-29 2011-10-15 Ctr Carinthian Tech Res Ag Hochtemperaturbeständige, elektrisch leitfähige dünnschichten
US10063453B1 (en) 2014-08-07 2018-08-28 Amdocs Development Limited System, method, and computer program for tag based testing of virtual services
US20160344657A1 (en) * 2015-05-20 2016-11-24 International Business Machines Corporation PROVIDING PERFORMANCE ALTERNATIVES BASED ON COMPARATIVE PRICE AND PERFORMANCE DATA OF A RUNNING SaaS INSTANCE

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19532602C1 (de) * 1995-09-04 1997-04-03 Siemens Ag Piezoelektrisches Kristallelement aus Langasit
EP0874455B1 (fr) * 1996-06-21 2002-10-09 TDK Corporation Dispositif a ondes acoustiques de surface
EP0866551A3 (fr) * 1997-03-21 2000-05-24 Mitsubishi Materials Corporation Elément à ondes acoustiques de surface

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO0051233A2 *

Also Published As

Publication number Publication date
US20020017828A1 (en) 2002-02-14
DE10006241A1 (de) 2001-02-08
JP2002543633A (ja) 2002-12-17
WO2000051233A3 (fr) 2000-12-14
WO2000051233A2 (fr) 2000-08-31

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