EP1122029A2 - Module de meulage de haute précision à disques multiples et son procédé de fabrication - Google Patents

Module de meulage de haute précision à disques multiples et son procédé de fabrication Download PDF

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Publication number
EP1122029A2
EP1122029A2 EP01100721A EP01100721A EP1122029A2 EP 1122029 A2 EP1122029 A2 EP 1122029A2 EP 01100721 A EP01100721 A EP 01100721A EP 01100721 A EP01100721 A EP 01100721A EP 1122029 A2 EP1122029 A2 EP 1122029A2
Authority
EP
European Patent Office
Prior art keywords
grinding
spindle
spacer rings
shoulder
spacer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01100721A
Other languages
German (de)
English (en)
Other versions
EP1122029A3 (fr
EP1122029B1 (fr
Inventor
Markus Dr. Vos
Sven Pallhorn
Patrick W. Julius
Thomsa Dr Kessler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schott AG
Original Assignee
Carl Zeiss AG
Schott Glaswerke AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss AG, Schott Glaswerke AG filed Critical Carl Zeiss AG
Publication of EP1122029A2 publication Critical patent/EP1122029A2/fr
Publication of EP1122029A3 publication Critical patent/EP1122029A3/fr
Application granted granted Critical
Publication of EP1122029B1 publication Critical patent/EP1122029B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B45/00—Means for securing grinding wheels on rotary arbors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D5/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
    • B24D5/06—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor with inserted abrasive blocks, e.g. segmental
    • B24D5/066—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor with inserted abrasive blocks, e.g. segmental with segments mounted axially one against the other
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D5/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
    • B24D5/16—Bushings; Mountings

Definitions

  • the invention relates to a method for producing a high-precision multi-disc grinding modules with several, on one common spindle, highly precisely axially spaced by spacer rings to each other, arranged precision grinding wheels for simultaneous Grinding of microstructures running parallel to each other in one Workpiece.
  • the invention further relates to a manufactured by this method, high-precision multi-disc grinding module.
  • Such multi-disc grinding modules are typically used for high-precision cutting of silicon wafers and for high-precision Microstructuring used. However, you can also apply Microstructures in special glasses, plastics and other abrasive materials Materials are used.
  • channel plates are micro-channel structures in the form of several channels running in parallel.
  • Such a channel plate is shown in detail in Fig. 4 in principle on a greatly enlarged scale.
  • the channel-shaped microstructuring shown in this figure must be carried out inexpensively and in large numbers for different display sizes (screen diagonals up to 55 ").
  • the webs are screen printed in applied several layers in succession to the glass substrate. This The process is very complex and expensive.
  • Another method uses Structures in the glass created by hot forming by embossing.
  • the channels are sandblasted or a Structured grinding process. Grinding becomes a highly precise one Multi-disc grinding module that uses several on a common Spindle, with high precision axially spaced apart by spacer rings arranged precision grinding wheels.
  • the invention is based on this.
  • the manufacture of the channel plates prepares for this Difficulties that the individual grinding wheels of the multi-wheel grinding module not at correspondingly small axial distances from one another can be arranged. For this reason, the distance is individual grinding wheels an integer multiple of the pitch "X" of the bridges. Since the length of the multi-disc grinding module is determined by the Vibration behavior of the machining spindle and due to the speed a channel plate cannot be limited to a single multi-disc grinding module can be edited simultaneously.
  • the manufacture of the channel plates is then done by so-called offset grinding, in which by multiple Overflow of the multi-disc grinding module the duct plate is structured.
  • the multi-disc grinding module is located between the individual overflows offset at right angles to the longitudinal axis of the canal and exactly around the manufacturing pitch.
  • High demands are placed on the multi-disc grinding module. They are derived directly from the high demands on the manufacturing tolerances of the duct plates. For example, the pitch is to be manufactured with a dimensional accuracy of ⁇ 4 ⁇ m to ⁇ 10 ⁇ m . The requirements are also clear from the considerations below.
  • the spacer rings also called intermediate discs, are used to achieve a defined axial distance between the individual grinding wheels. To produce the microstructures described above, this distance and therefore the thickness of the spacer ring must not exceed a very small tolerance. This places the highest demands on the process for manufacturing these multi-disc grinding modules.
  • the individual components of the modular multi-wheel grinding module essentially the grinding wheels and the spacer rings, are finished in independent, separate manufacturing or machining processes, for example lapping, and then mounted on the spindle.
  • An essential feature of the known method for producing a multi-wheel grinding module is therefore that the manufacture or finishing of the individual components and the assembly of these parts for the multi-wheel grinding module are separate process steps which are carried out in succession.
  • the individual grinding wheels and spacer rings are manufactured, whereby there are still no high demands on the position or surface tolerances.
  • fine machining takes place by lapping the end faces of the grinding wheels and the spacer rings, which are later to be in axial operative engagement, in order to achieve the required surface quality or position tolerance of these functional surfaces.
  • a spindle with a larger diameter at one end provided stop is used to equip with the grinding wheels or spacer rings placed on a rotary table so that the front of the Stop, which is on the spindle end, comes to rest on the table. Then the first grinding wheel is pushed over the open spindle end and placed on the spindle stop. Then the first spacer ring is opened the free spindle end is pushed on, and with the first grinding wheel in Brought stop.
  • the grinding wheels and the spacer rings are finished despite fine machining Provide lapping with manufacturing tolerances. Random stacking would be eliminated for this reason there is a risk that the Manufacturing inaccuracies of the individual grinding wheels and spacer rings add up to inadmissible errors when stacking.
  • the stacking of the finished individual parts of the multi-disc grinding module is therefore constantly measuring and checking the tolerances to be observed.
  • the grinding wheel is replaced every time it is pushed on Grinding wheel or another spacer ring the step of Measuring and checking carried out.
  • The serves as the reference point Face of the spindle stop, which receives the first grinding wheel axially.
  • This method of producing a multi-disc grinding module comes across not only in terms of its manufacturing tolerances, but also in terms of Limit the number of stackable grinding wheels, as the number increases Number of grinding wheels the effort and the manufacturing inaccuracy increase. This is also due to the fact that the individual tense Parts by a locknut once and only at the end of the manufacturing process is carried out taking into account that between the parts Fit play may remain during the stacking process. Due to the high The number of setting joints continues to occur during the axial bracing of the Grinding wheels to shift the individual grinding wheels, the may be inadmissible. From the point of view of rationalizing the Production process, however, is as large as possible Desired grinding wheels.
  • the invention has for its object a method for producing a To provide multi-disc grinding modules and a multi-disc grinding module to create the time for its manufacture, in particular the assembly time, the processing time and the measuring time, compared to conventional methods according to the prior art is reduced, wherein the manufacturing quality of the multi-disc grinding module produced in this way is increased or its dimensional and positional tolerances are reduced and maximizes the number of grinding wheels on the multi-wheel grinding module becomes.
  • the roughly pre-processed Spacer rings successively on an ultra-precision lathe for the mounting stroke of grinding wheels mounted in one setting and finished to the necessary precision during assembly As a result, the assembly time and the measuring time can be significantly reduced.
  • the manufacturing quality of the final assembled multi-disc grinding module very high because it is assembled and finished alternately and thus during assembly - in contrast to conventional methods - on the geometric dimensions of certain components, namely the Spacer rings, can be influenced.
  • the distance between the grinding wheels is therefore only through incorporation of a shoulder in a spacer ring, whereby the web spacing (pitch) the duct plate to be manufactured can be manufactured with smaller tolerances.
  • the implementation takes place in such a way that for each individual grinding wheel to be mounted the reference point for the distance to the neighboring one, previous grinding wheel regardless of the previously installed Grinding wheels and spacer rings is newly established.
  • This distance reference point which when incorporating the spacer ring heel Takes into account, namely, is located in the sales flank of the Spacer ring paragraph, the spacer currently being processed runs ahead.
  • This process variant allows both the production of a predetermined, precise grinding wheel distance, as well as compliance with tight tolerances with regard to the total stroke to be observed.
  • the solution is successful the task, based on a high-precision multi-disc grinding module, with several, on a common spindle, with high precision through spacer rings axially spaced from each other, mounted precision grinding wheels for simultaneous grinding of parallel ones Microstructures in a workpiece according to the invention in that the first grinding wheel on a screwed-in assembly paragraph one on one End of the spindle molded flange-like spindle shoulder is added and the other grinding wheels each on mounting heels are, which are each screwed into the previous spacer ring so that the Distance from flank to flank of successive assembly steps high-precision each equal to the nominal axial spacing of the grinding wheels is that the first spacer ring on the flange-like spindle shoulder of the spindle and the other spacer rings with each other while clamping the grinding wheels are mechanically attached, and that the spacer rings normal workshop manufacturing quality have.
  • a spindle 1 a shaft on which the Grinding wheels and spacer rings can be mounted, clamped and finished.
  • This spindle has a narrow end Spindle or shaft shoulder 2 with a larger diameter than that Diameter of the spindle 1 with which it is used in the ultra-precision lathe is recorded.
  • the spindle 1 is set in rotation about its axis 5, with a tool 4 of the lathe a paragraph 8 for receiving the first grinding wheel 7 incorporated into the spindle or shaft shoulder 2 becomes.
  • the edge 9 of this paragraph 8 serves as a reference point, i.e. the NC control the ultra-precision machine is measured in terms of its distance in the Z direction, i.e. set to zero in the longitudinal direction of the spindle.
  • the first one is already finished Sliding the grinding wheel 7 over the free end of the spindle onto the spindle 1 and attached to the paragraph 8 in the spindle or shaft paragraph 2.
  • the spacer ring 10 is screwed 6 in threaded holes 3, which are incorporated in paragraph 2 attached, thereby creating the first grinding wheel 7 is firmly clamped between paragraph 8 and spacer ring 10.
  • a shoulder 11 for receiving a second grinding wheel with a predetermined dimension is now worked in with the tool 4 such that the flank 12 of this shoulder 11 has the precise distance to be achieved from the neighboring one Flank 9 in the paragraph 8 of the spindle shoulder 2, which has received the first grinding wheel 7, and thus the two adjacent grinding wheels have the necessary predetermined spacing with high precision.
  • This distance measure is an integral multiple of the pitch "X" and is the same size for all grinding wheels 7 seated on the spindle 1.
  • this dimension is the important dimension for the manufacturing process which is preferably used for the production of duct plates and, depending on the requirements, must be manufactured with a tolerance of ⁇ 4 ⁇ m to ⁇ 10 ⁇ m . It is manufactured in a simple manner by the tool feed in the manufacture of the respective paragraph 11 in the spacer rings 10 and by the control of the ultra-precision machine. Manual measurement and checking of this dimension in the actual sense, as is necessary with methods according to the prior art, is not required.
  • FIG. 3 shown multi-disc grinding module 13.
  • the stacked Grinding wheels 7 and spacer rings 10 via one at the free spindle end seated locknut 15, which is screwed onto a thread 14, additionally secured.
  • the axial depth of the shoulder 8 in the spindle stop 2 is less than the thickness the grinding wheel to be picked up, so that the grinding wheel is non-positive is axially fixed.
  • the diameter of the paragraph is chosen so that there is a clearance fit between the shoulder and the grinding wheel.
  • the grinding wheels are lapped before assembly End faces precisely finished for thickness tolerance.
  • the spacer rings used to achieve a defined distance between the individual grinding wheels preferably consist of a material with a low coefficient of thermal expansion. These are primarily Zerodur, ceramics, glass ceramics or iron alloys. Non-ferrous alloys, plastics or graphite can also be used due to their good machinability.
  • a preferred method is the one described above in the drawings fastening of the spacer shown with several screws on Spindle stop or on the previous spacer ring.
  • Another Fastening method is the adhesive connection.
  • the fastening of the spacer rings is also advantageous by shrinking onto the spindle, whereby between the spindle and Spacer ring results in a non-positive press connection.
  • the grinding wheels themselves are firmly clamped between the spacer rings.
  • the stacked grinding wheels and spacer rings attached to each other are expediently arranged by one on the free spindle Securing element can be fixed.
  • a preferred backup is how described above, the locknut attached to the spindle.
  • Further Embodiments of this securing element are a clamping element or a clamping set, the last element of the multi-disc grinding module to be stacked is a spacer ring in the area of its bore is trained that it can be centered on the one hand on the spindle and on the other hand is able to accommodate the clamping element.
  • the Grinding Wheel includes profiling, sharpening or dressing the Grinding wheel.
  • the aim of profiling is to provide the grinding wheel with the desired one To give profile and the necessary concentricity.
  • the grinding wheel not machined on their faces or changed in thickness, but, considering the depth tolerance of those to be manufactured later Structure with a uniform radius.
  • the grinding wheels are namely from the assembly heels made with the ultra-precision machine received radially, the parts being dimensioned so that in there is a clearance fit in the contact surfaces, which means profiling becomes necessary.
  • grinding wheels are used for the duct plates, the one Have a rectangular contour. Depending on the requirements of the microstructured However, rounded contours may also be required.
  • Sharpening also called dressing, provides the necessary Grinding wheel topography with cutable grains and a removal of deposits that sit in the chip spaces of the disc.
  • Conditioning can take place between processing times on the Processing machine take place or preferably during the Machining process, which is then a continuous one Conditioning acts.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
EP01100721A 2000-01-15 2001-01-12 Module de meulage de haute précision à disques multiples et son procédé de fabrication Expired - Lifetime EP1122029B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10001480 2000-01-15
DE10001480A DE10001480B4 (de) 2000-01-15 2000-01-15 Verfahren zum Herstellen eines hochpräzisen Mehrscheiben-Schleifmodules und nach diesem Verfahren hergestelltes Mehrscheiben-Schleifmodul

Publications (3)

Publication Number Publication Date
EP1122029A2 true EP1122029A2 (fr) 2001-08-08
EP1122029A3 EP1122029A3 (fr) 2003-10-29
EP1122029B1 EP1122029B1 (fr) 2006-05-17

Family

ID=7627612

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01100721A Expired - Lifetime EP1122029B1 (fr) 2000-01-15 2001-01-12 Module de meulage de haute précision à disques multiples et son procédé de fabrication

Country Status (3)

Country Link
EP (1) EP1122029B1 (fr)
AT (1) ATE326314T1 (fr)
DE (2) DE10001480B4 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2298495A3 (fr) * 2009-09-22 2014-10-29 Schaudt Mikrosa GmbH Machine de meulage pour meuler des cames
CN114025300A (zh) * 2021-11-26 2022-02-08 苏州星微奇精密科技有限公司 一种型腔针、型腔针加工装置及加工方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10026976C2 (de) * 2000-05-31 2002-08-01 Schott Glas Kanalplatte aus Glas für Flachbildschirme und Verfahren zu ihrer Herstellung
DE102006012926A1 (de) * 2006-03-21 2007-09-27 Dr. Wilh. Müller Diamantmetall Inh. G. Müller KG Werkzeug zum Bearbeiten von Oberflächen und Verfahren zur Herstellung eines solchen Werkzeugs
CN110893469A (zh) * 2019-11-22 2020-03-20 南通通州东大机械有限公司 一种超精密金属机械零部件的加工方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08318524A (ja) * 1995-05-26 1996-12-03 Asahi Glass Co Ltd 砥石による複数平行溝の研削加工方法
EP0865877A2 (fr) * 1997-02-05 1998-09-23 Toyoda Koki Kabushiki Kaisha Meule de rectification
EP0940237A1 (fr) * 1998-03-06 1999-09-08 Quintilio Lupi Système modulaire de lames de scies circulaires pour former des surfaces courbées dans des pièces en marbre, pierre ou matériaux similaires

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3646711A (en) * 1969-08-12 1972-03-07 Toyoda Machine Works Ltd Mounting adapter assembly

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08318524A (ja) * 1995-05-26 1996-12-03 Asahi Glass Co Ltd 砥石による複数平行溝の研削加工方法
EP0865877A2 (fr) * 1997-02-05 1998-09-23 Toyoda Koki Kabushiki Kaisha Meule de rectification
EP0940237A1 (fr) * 1998-03-06 1999-09-08 Quintilio Lupi Système modulaire de lames de scies circulaires pour former des surfaces courbées dans des pièces en marbre, pierre ou matériaux similaires

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 04, 30. April 1997 (1997-04-30) -& JP 08 318524 A (ASAHI GLASS CO LTD), 3. Dezember 1996 (1996-12-03) *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2298495A3 (fr) * 2009-09-22 2014-10-29 Schaudt Mikrosa GmbH Machine de meulage pour meuler des cames
CN114025300A (zh) * 2021-11-26 2022-02-08 苏州星微奇精密科技有限公司 一种型腔针、型腔针加工装置及加工方法
CN114025300B (zh) * 2021-11-26 2024-03-22 苏州星微奇精密科技有限公司 一种型腔针、型腔针加工装置及加工方法

Also Published As

Publication number Publication date
DE10001480A1 (de) 2001-07-26
ATE326314T1 (de) 2006-06-15
EP1122029A3 (fr) 2003-10-29
EP1122029B1 (fr) 2006-05-17
DE10001480B4 (de) 2005-03-17
DE50109778D1 (de) 2006-06-22

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