EP1091411A3 - A solid-state image pickup device - Google Patents

A solid-state image pickup device Download PDF

Info

Publication number
EP1091411A3
EP1091411A3 EP00121322A EP00121322A EP1091411A3 EP 1091411 A3 EP1091411 A3 EP 1091411A3 EP 00121322 A EP00121322 A EP 00121322A EP 00121322 A EP00121322 A EP 00121322A EP 1091411 A3 EP1091411 A3 EP 1091411A3
Authority
EP
European Patent Office
Prior art keywords
ccds
image pickup
pickup device
state image
photoelectric converters
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00121322A
Other languages
German (de)
French (fr)
Other versions
EP1091411B1 (en
EP1091411A2 (en
Inventor
Nobuo c/o Fuji Film Microdevices Co. Ltd Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Publication of EP1091411A2 publication Critical patent/EP1091411A2/en
Publication of EP1091411A3 publication Critical patent/EP1091411A3/en
Application granted granted Critical
Publication of EP1091411B1 publication Critical patent/EP1091411B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/762—Charge transfer devices
    • H01L29/765—Charge-coupled devices
    • H01L29/768—Charge-coupled devices with field effect produced by an insulated gate
    • H01L29/76816—Output structures
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70—SSIS architectures; Circuits associated therewith
    • H04N25/71—Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors
    • H04N25/73—Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors using interline transfer [IT]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/148—Charge coupled imagers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/148—Charge coupled imagers
    • H01L27/14831—Area CCD imagers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/762—Charge transfer devices
    • H01L29/765—Charge-coupled devices
    • H01L29/768—Charge-coupled devices with field effect produced by an insulated gate

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • Electromagnetism (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)

Abstract

In the production of an IT-CCD including many photoelectric converters in columns and rows, vertical transfer CCDs for transferring signal charge accumulated in the photoelectric converters to a horizontal transfer CCD, and readout gate regions to control, for each photoelectric converter, readout operation of signal charge from the photoelectric converters to the vertical charge transfer CCDs; one joining channel is formed for each set of two vertical transfer CCDs to combine the CCDs with each other and hence a high-pixel-density solid-state image pickup device can be implemented using ordinary fine patterning technique.
EP00121322A 1999-10-07 2000-10-09 A solid-state image pickup device and driving method Expired - Lifetime EP1091411B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP28733499A JP2001111026A (en) 1999-10-07 1999-10-07 Solid state image sensor
JP28733499 1999-10-07

Publications (3)

Publication Number Publication Date
EP1091411A2 EP1091411A2 (en) 2001-04-11
EP1091411A3 true EP1091411A3 (en) 2004-01-28
EP1091411B1 EP1091411B1 (en) 2006-12-20

Family

ID=17716031

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00121322A Expired - Lifetime EP1091411B1 (en) 1999-10-07 2000-10-09 A solid-state image pickup device and driving method

Country Status (5)

Country Link
US (1) US6541805B1 (en)
EP (1) EP1091411B1 (en)
JP (1) JP2001111026A (en)
KR (1) KR100549641B1 (en)
DE (1) DE60032433T2 (en)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4738667B2 (en) * 2001-08-10 2011-08-03 キヤノン株式会社 Imaging device
US7138696B2 (en) * 2001-10-19 2006-11-21 Canon Kabushiki Kaisha Image pickup apparatus, radiation image pickup apparatus and radiation image pickup system
JP3693026B2 (en) * 2002-03-01 2005-09-07 ソニー株式会社 Solid-state imaging device
JP2003319408A (en) * 2002-04-26 2003-11-07 Seiko Epson Corp Color area sensor and imaging circuit
US20050224842A1 (en) * 2002-06-12 2005-10-13 Takayuki Toyama Solid-state imaging device, method for driving dolid-state imaging device, imaging method, and imager
US7432971B2 (en) * 2002-06-21 2008-10-07 Shimadzu Corporation In-situ storage image sensor and in-situ storage image pickup apparatus
US7022579B2 (en) * 2003-03-14 2006-04-04 Micron Technology, Inc. Method for filling via with metal
JP2004303982A (en) * 2003-03-31 2004-10-28 Matsushita Electric Ind Co Ltd Solid-state imaging element
KR100601425B1 (en) * 2004-06-23 2006-07-14 주식회사 대우일렉트로닉스 Lighting apparatus for a microwave oven
JP4524609B2 (en) * 2004-10-29 2010-08-18 ソニー株式会社 Solid-state imaging device, solid-state imaging device driving method, and imaging apparatus
JP4566848B2 (en) * 2005-07-11 2010-10-20 富士フイルム株式会社 Imaging device and driving method of imaging device
US8446508B2 (en) * 2005-07-27 2013-05-21 Sony Corporation Solid state imaging device with optimized locations of internal electrical components
TW200746409A (en) * 2005-12-01 2007-12-16 Matsushita Electric Ind Co Ltd Solid-state image pickup device and camera including the same
JP2008131169A (en) * 2006-11-17 2008-06-05 Shimadzu Corp Image pickup device and imaging apparatus using it
JP2009213106A (en) * 2008-02-06 2009-09-17 Sony Corp Solid-state image pickup device
JP5562335B2 (en) * 2009-07-10 2014-07-30 パナソニック株式会社 Solid-state imaging device and driving method thereof
JPWO2011086622A1 (en) * 2010-01-12 2013-05-16 パナソニック株式会社 Solid-state imaging device, driving method thereof, and camera
JP5643555B2 (en) * 2010-07-07 2014-12-17 キヤノン株式会社 Solid-state imaging device and imaging system

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4506299A (en) * 1981-04-16 1985-03-19 Thomson-Csf Device for scanning an image in successive lines, utilizing the electrical charge transfer, incorporating a line memory and a television camera incorporating such a device
JPS60229479A (en) * 1984-04-26 1985-11-14 Toshiba Corp Solid-state area sensor
EP0346102A2 (en) * 1988-06-08 1989-12-13 Nippon Hoso Kyokai Solid state image sensing device
JPH10136392A (en) * 1996-10-30 1998-05-22 Toshiba Corp Solid-state image pickup device
JPH10136391A (en) * 1996-10-30 1998-05-22 Toshiba Corp Solid-state image pickup device
JPH11205532A (en) * 1998-01-14 1999-07-30 Toshiba Corp Solid-state image pickup device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0644823B2 (en) * 1986-08-22 1994-06-08 日本ビクター株式会社 Solid-state imaging device
US4972254A (en) * 1987-02-24 1990-11-20 Kabushiki Kaisha Toshiba Solid state image sensors for reproducing high definition images
JP2807386B2 (en) * 1993-02-15 1998-10-08 株式会社東芝 Solid-state imaging device and driving method of solid-state imaging device
US6259478B1 (en) * 1994-04-01 2001-07-10 Toshikazu Hori Full frame electronic shutter camera
KR0165375B1 (en) * 1995-03-31 1999-03-20 김광호 Ccd type solid state image pick-up device
JP2865019B2 (en) * 1995-05-31 1999-03-08 日本電気株式会社 Driving method of charge transfer solid-state imaging device
JP3519202B2 (en) * 1996-03-11 2004-04-12 松下電器産業株式会社 Shading correction method and progressive scanning type imaging device with shading correction function
JP4497688B2 (en) * 1999-09-27 2010-07-07 富士フイルム株式会社 Solid-state imaging device

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4506299A (en) * 1981-04-16 1985-03-19 Thomson-Csf Device for scanning an image in successive lines, utilizing the electrical charge transfer, incorporating a line memory and a television camera incorporating such a device
JPS60229479A (en) * 1984-04-26 1985-11-14 Toshiba Corp Solid-state area sensor
EP0346102A2 (en) * 1988-06-08 1989-12-13 Nippon Hoso Kyokai Solid state image sensing device
JPH10136392A (en) * 1996-10-30 1998-05-22 Toshiba Corp Solid-state image pickup device
JPH10136391A (en) * 1996-10-30 1998-05-22 Toshiba Corp Solid-state image pickup device
US6236434B1 (en) * 1996-10-30 2001-05-22 Fuji Photo Film Co., Ltd. Solid state image pickup device
JPH11205532A (en) * 1998-01-14 1999-07-30 Toshiba Corp Solid-state image pickup device
US6153874A (en) * 1998-01-14 2000-11-28 Kabushiki Kaisha Toshiba Solid imaging device comprising electric charge transferring function

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 010, no. 087 (E - 393) 5 April 1986 (1986-04-05) *
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 10 31 August 1998 (1998-08-31) *
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 12 29 October 1999 (1999-10-29) *

Also Published As

Publication number Publication date
KR20010050904A (en) 2001-06-25
DE60032433D1 (en) 2007-02-01
DE60032433T2 (en) 2007-04-12
JP2001111026A (en) 2001-04-20
EP1091411B1 (en) 2006-12-20
KR100549641B1 (en) 2006-02-06
US6541805B1 (en) 2003-04-01
EP1091411A2 (en) 2001-04-11

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