EP1051365A1 - Method for making a marking in a glass body - Google Patents

Method for making a marking in a glass body

Info

Publication number
EP1051365A1
EP1051365A1 EP99964365A EP99964365A EP1051365A1 EP 1051365 A1 EP1051365 A1 EP 1051365A1 EP 99964365 A EP99964365 A EP 99964365A EP 99964365 A EP99964365 A EP 99964365A EP 1051365 A1 EP1051365 A1 EP 1051365A1
Authority
EP
European Patent Office
Prior art keywords
glass
marking
laser
wavelength
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP99964365A
Other languages
German (de)
French (fr)
Other versions
EP1051365B1 (en
Inventor
Jörg Kickelhain
Gennadij Kusnezow
Dieter Biere
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LPKF Laser and Electronics AG
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LPKF Laser and Electronics AG
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Publication date
Application filed by LPKF Laser and Electronics AG filed Critical LPKF Laser and Electronics AG
Publication of EP1051365A1 publication Critical patent/EP1051365A1/en
Application granted granted Critical
Publication of EP1051365B1 publication Critical patent/EP1051365B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
    • B41M5/00—Duplicating or marking methods; Sheet materials for use therein
    • B41M5/26—Thermography ; Marking by high energetic means, e.g. laser otherwise than by burning, and characterised by the material used

Definitions

  • This invention relates to a method for producing an under-surface mark in a glass body having a transmission curve with a plateau area at wavelengths greater than that of X-rays, a laser beam being directed onto a surface of the body is able to penetrate the body to the predetermined depth of the marking and is further focused at the predetermined location of the marking within the glass and has such a power density that a marking in the location in the form of a material change which is characterized by a reduced permeability to electromagnetic radiation arises essentially without any change occurring on the surface of the body.
  • EP 0 543 899 B1 discloses a method for producing a marking in a glass body in accordance with the preamble of claim 1.
  • laser radiation with an energy density is used such that at the focus, that is, where the marking is to be made, the energy density is sufficient to bring about permanent changes within the body, which can be made of glass or another material become. It is described as advantageous if the energy density at the focus of the laser beams is at least 10 J / cm 2 , since this is approximately the threshold for the occurrence of localized ionization of the glass molecules.
  • laser radiation with a wavelength of 1.06 ⁇ m is used for this.
  • the disadvantage here is that, at this wavelength in the infrared range, the associated transmittance for glass lies in the plateau range of the transmission curve of the glass. This means that at this wavelength the transmission of the laser beams through the vitreous body is approximately maximum with a linear absorption behavior.
  • a certain energy density threshold In order for the desired change in the glass to occur in the focus area of the laser beam - that is, the desired non-linear absorption behavior - a certain energy density threshold must be exceeded, as explained above.
  • this energy density threshold is very sharp when the laser radiation is in the infrared range, so that there is an abrupt transition from linear absorption to the non-linear absorption causing the marking.
  • the minimum distance of a marking in a glass body from the surface is about 1 mm, so that the glass body must have a total thickness of at least 3 mm to avoid the risk of breakage.
  • the method according to the invention for structuring the glass interior has the advantage over the prior art that the laser radiation can be focused better owing to the shorter wavelengths used, and thus additional favorable conditions are created to keep the extent of the focus as small as possible.
  • a wavelength is preferably selected for the laser radiation at which the transmittance is 60 to 95% of the plateau level.
  • the laser radiation is generated by means of an Nd-YAG laser, for example using the third harmonic or the fourth harmonic.
  • the wavelength will be in the UV range. It is important, of course, that the wavelength is chosen so that there is a partial permeability of the vitreous body, at which there is sufficient radiation intensity at the desired marking location.
  • the single figure shows schematically a typical transmission curve of a common type of glass.
  • the plateau region of the transmission curve is approximately formed by the transmission values which are given at the wavelengths greater than ⁇ 3 .
  • laser radiation which, depending on the glass chosen in each case, has a wavelength which is less than ⁇ 3 , but at which the transmission is not negligibly low, which is the case in the figure for wavelengths greater than ⁇ 0 is.
  • a preferred wavelength range is, for example, the range ⁇ i ⁇ ⁇ 2 .
  • the invention can be carried out, for example, as follows: Ordinary glass BK 7 in the form of a plate with a thickness of 1 mm is irradiated with laser beams with a wavelength of 355 nm using an Nd-YAG laser. This is done in such a way that the laser beam is focused within the glass plate with the usual means, the focus being 0.5 mm below the surface of the glass plate.
  • the laser is operated at a repetition rate of 5 kHz.
  • the pulse duration is 100 ns, the power density in focus is approximately 500 MW / cm 2 .
  • marking points that have a diameter of only 20 ⁇ m.
  • the marking points are lined up with a distance of 5 ⁇ m to create an almost continuous line by overlapping.
  • the power density used here in focus is significantly lower than the power density required in the known methods.
  • the repetition rate may also be up to 10 kHz.
  • quartz glass Suprasil 1 was processed under the same external process conditions.
  • the transmission factor associated with the wavelength 355 nm lies in the plateau range with this quartz glass.
  • such a fine structuring could not be achieved with the quartz glass as with the glass BK 7.
  • the extent of the marking points on the quartz glass was significantly greater than on the BK7 glass.
  • the markings produced by the method according to the invention can e.g. be provided for labeling or for decoration purposes.

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Laser Beam Processing (AREA)
  • Surface Treatment Of Glass (AREA)
  • Glass Compositions (AREA)

Abstract

A method for making a marking which is located beneath the surface of a glass body, in which the glass has a transmission curve with a plateau area at wavelengths which are longer than those of X-rays. A laser beam is directed onto a surface of the body. The laser beam can penetrate the body to a predetermined depth of the marking and is focused at the predetermined place of the marking inside the glass. The laser beam has a power density high enough to mark this location, essentially without changing the surface of the glass body in any perceptible way. The method is characterized in that a wavelength of the laser is used which makes the glass partially translucent and which is shorter than all the wavelengths of the laser light corresponding to the plateau area of the respective transmission curve. Using this method, very fine markings can be produced spaced a small distance underneath the surface of the glass body.

Description

Verfahren zur Erzeugung einer Markierung in einem Glaskörper Process for creating a mark in a vitreous body
Diese Erfindung betrifft ein Verfahren zur Erzeugung einer unter der Oberfläche liegenden Markierung in einem Körper aus Glas, das eine Transmissionskurve mit einem Plateaubereich bei Wellenlängen, die größer als die von Röntgenstrahlen sind, aufweist, wobei auf eine Oberfläche des Körpers ein Laserstrahl gerichtet wird, der den Körper bis zu der vorbestimmten Tiefe der Markierung zu durchdringen vermag und ferner an dem vorbestimmten Ort der Markierung innerhalb des Glases fokussiert wird und eine solche Leistungsdichte aufweist, daß an dem Ort eine Markierung in Form einer sich durch eine verringerte Durchlässigkeit für elektromagnetische Strahlung auszeichnenden Materialveränderung entsteht, im wesentlichen ohne daß an der Oberfläche des Körpers eine irgendwie feststellbare Veränderung eintritt.This invention relates to a method for producing an under-surface mark in a glass body having a transmission curve with a plateau area at wavelengths greater than that of X-rays, a laser beam being directed onto a surface of the body is able to penetrate the body to the predetermined depth of the marking and is further focused at the predetermined location of the marking within the glass and has such a power density that a marking in the location in the form of a material change which is characterized by a reduced permeability to electromagnetic radiation arises essentially without any change occurring on the surface of the body.
Aus der EP 0 543 899 B1 ist ein Verfahren zur Erzeugung einer Markierung in einem Glaskörper gemäß dem Oberbegriff des Anspruchs 1 bekannt. Bei diesem Verfahren wird Laserstrahlung mit einer solchen Energiedichte verwendet, daß an dem Fokus, also dort, wo die Markierung vorgenommen werden soll, die Energiedichte ausreicht, um bleibende Veränderungen innerhalb des Körpers, der aus Glas oder auch aus einem anderen Material bestehen kann, bewirkt werden. Dabei wird es als vorteilhaft beschrieben, wenn die Energiedichte am Fokus der Laserstrahlen wenigstens 10 J/cm2 beträgt, da dies etwa die Schwelle für das Auftreten lokalisierter Ionisierung der Glasmoleküle ist. Gemäß dem bekannten Verfahren wird dazu Laserstrahlung mit einer Wellenlänge von 1 ,06 μm verwendet.EP 0 543 899 B1 discloses a method for producing a marking in a glass body in accordance with the preamble of claim 1. In this method, laser radiation with an energy density is used such that at the focus, that is, where the marking is to be made, the energy density is sufficient to bring about permanent changes within the body, which can be made of glass or another material become. It is described as advantageous if the energy density at the focus of the laser beams is at least 10 J / cm 2 , since this is approximately the threshold for the occurrence of localized ionization of the glass molecules. According to the known method, laser radiation with a wavelength of 1.06 μm is used for this.
Nachteilig dabei ist, daß bei dieser im Infrarotbereich liegenden Wellenlänge der zugehörige Transmissionsgrad für Glas in dem Plateaubereich der Transmissionskurve des Glases liegt. Das bedeutet, daß bei dieser Wellenlänge die Transmission der Laserstrahlen durch den Glaskörper hindurch bei linearem Absorptionsverhalten annähernd maximal ist. Damit die gewünschte Veränderung des Glases im Fokusbereich des Laserstrahls - also das gewünschte nichtlineare Absorptionsverhalten - auftritt, muß wie oben dargelegt eine bestimmte Energiedichteschwelle überschritten werden. Diese Energiedichteschwelle ist jedoch, wenn die Laserstrahlung im Infrarotbereich liegt, sehr scharf, so daß ein abrupter Übergang von linearer Absorption hin zu der die Markierung bewirkenden nichtlinearen Absorption stattfindet. Hierin könnte die Tatsache begründet sein, daß bei dem bekannten Verfahren eine Veränderung des Glases über den eigentlichen Fokusbereich der Laserstrahlung hinaus stattfindet, was damit zusammenhängt, daß diese durch eine lokale Aufschmelzung des Glases erklärbare, bläschenartige Veränderung schlagartig, quasi explosionsartig, eintritt. Daraus resultiert die Notwendigkeit, daß die Markierung, die durch eine Aneinanderreihung dieser Markierungspunkte erzeugt wird, einen gewissen Mindestabstand von der Oberfläche des Glaskörpers aufweisen muß, da sich die Markierungspunkte sonst von ihrem unterhalb der Oberfläche des Glaskörpers liegenden Zentrum bis zur Oberfläche erstrecken und dadurch ein Zerspringen des Glases an der Oberfläche hervorrufen. Bei dem bekannten Verfahren beträgt der Mindestabstand einer Markierung in einem Glaskörper von der Oberfläche etwa 1 mm, so daß der Glaskörper zur Vermeidung von Bruchgefahr insgesamt eine Dicke von mindestens 3 mm besitzen muß.The disadvantage here is that, at this wavelength in the infrared range, the associated transmittance for glass lies in the plateau range of the transmission curve of the glass. This means that at this wavelength the transmission of the laser beams through the vitreous body is approximately maximum with a linear absorption behavior. In order for the desired change in the glass to occur in the focus area of the laser beam - that is, the desired non-linear absorption behavior - a certain energy density threshold must be exceeded, as explained above. However, this energy density threshold is very sharp when the laser radiation is in the infrared range, so that there is an abrupt transition from linear absorption to the non-linear absorption causing the marking. This could be due to the fact that in the known method a change in the glass takes place beyond the actual focus range of the laser radiation, which is related to the sudden, quasi-explosive, bubble-like change that can be explained by local melting of the glass. This results in the necessity that the marking, which is produced by a series of these marking points, must be at a certain minimum distance from the surface of the vitreous body, since the marking points would otherwise extend from their center below the surface of the vitreous body to the surface and thereby Crack the glass on the surface. In the known method, the minimum distance of a marking in a glass body from the surface is about 1 mm, so that the glass body must have a total thickness of at least 3 mm to avoid the risk of breakage.
Weiterhin ist ein gattungsgemäßes Verfahren im Laser Magazin 1/95, Seiten 16 ff beschrieben worden. Dieses Verfahren, bei dem ebenfalls Laserstrahlen mit im Plateaubereich der Transmissionskurve des bearbeiteten Glases liegendem Transmissionsgrad verwendet wurden, zeigte bei Quarzglas in bezug auf die Ausdehnung des Aufschmelzungsbereiches die besten Ergebnisse, wobei ca. 100 μm erreicht wurden. Bei Verwendung anderer Prozeßparameter betrug die Ausdehnung des Aufschmelzungsbereiches auch mehrere Hundert Mikrometer. Dieses Verfahren weist somit grundsätzlich dieselben Nachteile wie das oben beschriebene bekannte Verfahren auf.Furthermore, a generic method has been described in Laser Magazin 1/95, pages 16 ff. This method, in which laser beams with a transmittance lying in the plateau region of the transmission curve of the processed glass was also used, showed the best results with quartz glass with regard to the expansion of the melting region, with approx. 100 μm being achieved. When using other process parameters, the extent of the melting area was also several hundred micrometers. This method therefore basically has the same disadvantages as the known method described above.
Daher liegt der Erfindung die Aufgabe zugrunde, ein gattungsgemäßes Verfahren zur Verfügung zu stellen, mit dem die einzelnen, zusammen die Markierung ausmachenden Markierungspunkte mit einem sehr kleinen minimalen Durchmesser erzeugt werden können.It is therefore the object of the invention to provide a generic method with which the individual marking points which together make up the marking can be produced with a very small minimum diameter.
Diese Aufgabe wird durch das Verfahren gemäß Anspruch 1 gelöst. Dadurch, daß eine Wellenlänge des Laserlichtes verwendet wird, bei der das Glas teildurchlässig ist und die kleiner als alle dem Plateaubereich entsprechenden Wellenlängen des Laserlichtes ist, ist erreicht, daß die Ausdehnung der Markierungspunkte im Glaskörper sehr gering gehalten werden kann. Dieser Effekt wurde überraschenderweise festgestellt. Eine mögliche Erklärung könnte darin liegen, daß bei Wellenlängen, die einem Transmissionsgrad unterhalb des Plateauniveaus entsprechen, der Übergang von im wesentlichen linearer Absorption hin zu Absorption mit einem beträchtlichen Anteil nichtlinearer Absorption „weicher" ist, d. h. ein Energiedichtenbereich besteht, in dem der Anteil nichtlinearer Absorption allmählich zunimmt. Denn es wurde experimentell gefunden, daß erfindungsgemäß die Ausdehnung des Markierungspunktes durch entsprechende Einstellung der Energiedichte im Fokusbereich sehr gut kontrolliert werden kann und damit verbunden somit auch Glaskörper einer Dicke von nur 1 mm mit einer im Inneren liegenden Markierung versehen werden können.This object is achieved by the method according to claim 1. The fact that a wavelength of the laser light is used at which the glass is partially transparent and which is smaller than all the wavelengths of the laser light corresponding to the plateau region means that the extent of the marking points in the glass body can be kept very small. This effect was surprisingly found. A possible explanation could be that at wavelengths that correspond to a transmittance below the plateau level, the transition from essentially linear absorption to absorption with a considerable proportion of nonlinear absorption is "softer", ie there is an energy density range in which the proportion is nonlinear Absorption increases gradually because it has been experimentally found that According to the invention, the extent of the marking point can be controlled very well by appropriate adjustment of the energy density in the focus area and thus glass bodies with a thickness of only 1 mm can also be provided with a marking on the inside.
Darüber hinaus weist das erfindungsgemäße Verfahren zur Glasinnenstrukturierung gegenüber dem Stand der Technik den Vorteil auf, daß die Laserstrahlung aufgrund der geringeren verwendeten Wellenlängen besser fokussierbar ist und damit zusätzlich günstige Bedingungen geschaffen sind, die Ausdehnung des Fokus möglichst gering zu halten.In addition, the method according to the invention for structuring the glass interior has the advantage over the prior art that the laser radiation can be focused better owing to the shorter wavelengths used, and thus additional favorable conditions are created to keep the extent of the focus as small as possible.
Vorzugsweise wird eine Wellenlänge für die Laserstrahlung gewählt, bei der der Transmissionsgrad 60 bis 95 % des Plateauniveaus beträgt.A wavelength is preferably selected for the laser radiation at which the transmittance is 60 to 95% of the plateau level.
Ferner ist im Rahmen der Erfindung vorzugsweise vorgesehen, daß die Laserstrahlung mittels eines Nd-YAG-Lasers erzeugt wird, wobei beispielsweise die dritte Harmonische oder auch die vierte Harmonische verwendet wird.Furthermore, it is preferably provided in the context of the invention that the laser radiation is generated by means of an Nd-YAG laser, for example using the third harmonic or the fourth harmonic.
In der Regel wird die Wellenlänge im UV-Bereich liegen. Wichtig ist natürlich, daß die Wellenlänge so groß gewählt ist, daß eine Teildurchlässigkeit des Glaskörpers gegeben ist, bei der genügend Strahlungsintensität am gewünschten Markierungsort vorhanden ist.As a rule, the wavelength will be in the UV range. It is important, of course, that the wavelength is chosen so that there is a partial permeability of the vitreous body, at which there is sufficient radiation intensity at the desired marking location.
Im folgenden wird die Erfindung anhand eines Ausführungsbeispiels näher erläutert, wobei auf die Figur Bezug genommen wird.The invention is explained in more detail below with the aid of an exemplary embodiment, reference being made to the figure.
Die einzige Figur zeigt schematisch eine typische Transmissionskurve einer üblichen Glasart.The single figure shows schematically a typical transmission curve of a common type of glass.
Der Plateaubereich der Transmissionskurve ist ungefähr durch die Transmissionswerte gebildet, die bei den Wellenlängen größer λ3 gegeben sind. Erfindungsgemäß ist vorgesehen, daß Laserstrahlung verwendet wird, die in Abhängigkeit von dem jeweils gewählten Glas eine Wellenlänge aufweist, die kleiner als λ3 ist, bei der jedoch die Transmission nicht vernachlässigbar gering ist, was in der Figur für die Wellenlängen größer λ0 der Fall ist. Ein bevorzugter Wellenlängenbereich ist beispielsweise der Bereich λi < λ < λ2.The plateau region of the transmission curve is approximately formed by the transmission values which are given at the wavelengths greater than λ 3 . According to the invention, it is provided that laser radiation is used which, depending on the glass chosen in each case, has a wavelength which is less than λ 3 , but at which the transmission is not negligibly low, which is the case in the figure for wavelengths greater than λ 0 is. A preferred wavelength range is, for example, the range λi <λ <λ 2 .
Die Erfindung kann beispielsweise folgendermaßen ausgeführt werden: Gewöhnliches Glas BK 7 in Form eines Plättchens einer Dicke von 1 mm wird mit Laserstrahlen mit einer Wellenlänge von 355 nm unter Verwendung eines Nd-YAG-Lasers bestrahlt. Dies geschieht derart, daß der Laserstrahl mit den üblichen Mitteln innerhalb des Glasplättchens fokussiert wird, wobei der Fokus 0,5 mm unterhalb der Oberfläche des Glasplättchens liegt. Der Laser wird mit einer Repetitionsrate von 5 kHz betrieben. Die Pulsdauer beträgt 100 ns, die Leistungsdichte im Fokus ca. 500 MW/cm2.The invention can be carried out, for example, as follows: Ordinary glass BK 7 in the form of a plate with a thickness of 1 mm is irradiated with laser beams with a wavelength of 355 nm using an Nd-YAG laser. This is done in such a way that the laser beam is focused within the glass plate with the usual means, the focus being 0.5 mm below the surface of the glass plate. The laser is operated at a repetition rate of 5 kHz. The pulse duration is 100 ns, the power density in focus is approximately 500 MW / cm 2 .
Dabei entstehen Markierungspunkte, die etwa einen Durchmesser von nur 20 μm aufweisen. Die Markierungspunkte werden mit einem Abstand von 5 μm aneinandergereiht, um durch Überlappung eine fast kontinuierliche Linie zu ergeben. Die hierbei verwendete Leistungsdichte im Fokus ist deutlich geringer als die bei den bekannten Verfahren erforderliche Leistungsdichte.This creates marking points that have a diameter of only 20 μm. The marking points are lined up with a distance of 5 μm to create an almost continuous line by overlapping. The power density used here in focus is significantly lower than the power density required in the known methods.
Im obigen Ausführungsbeispiel kann gegebenenfalls die Repetitionsrate auch bis zu 10 kHz betragen.In the above exemplary embodiment, the repetition rate may also be up to 10 kHz.
Zum Vergleich wurde unter denselben äußeren Prozeßbedingungen Quarzglas Suprasil 1 bearbeitet. Im Gegensatz zu dem Glas BK 7 liegt jedoch bei diesem Quarzglas der zu der Wellenlänge 355 nm gehörige Transmissionsgrad im Plateaubereich. Infolgedessen konnte bei dem Quarzglas nicht eine solch feine Strukturierung wie bei dem Glas BK 7 erreicht werden. Vielmehr war die Ausdehnung der Markierungspunkte bei dem Quarzglas deutlich größer als bei dem Glas BK7.For comparison, quartz glass Suprasil 1 was processed under the same external process conditions. In contrast to the glass BK 7, however, the transmission factor associated with the wavelength 355 nm lies in the plateau range with this quartz glass. As a result, such a fine structuring could not be achieved with the quartz glass as with the glass BK 7. Rather, the extent of the marking points on the quartz glass was significantly greater than on the BK7 glass.
Die mit dem erfindungsgemäßen Verfahren hergestellten Markierungen können z.B. zu Kennzeichnungs- oder auch zu Verzierungszwecken vorgesehen sein. The markings produced by the method according to the invention can e.g. be provided for labeling or for decoration purposes.

Claims

Patentansprüche claims
1. Verfahren zur Erzeugung einer unter der Oberfläche liegenden Markierung in einem Körper aus Glas, das eine Transmissionskurve mit einem Plateaubereich bei Wellenlängen, die größer als die von Röntgenstrahlen sind, aufweist, wobei auf eine Oberfläche des Körpers ein Laserstrahl gerichtet wird, der den Körper bis zu der vorbestimmten Tiefe der Markierung zu durchdringen vermag und ferner an dem vorbestimmten Ort der Markierung innerhalb des Glases fokussiert wird und eine solche Leistungsdichte aufweist, daß an dem Ort eine Markierung in Form einer sich durch eine verringerte Durchlässigkeit für elektromagnetische Strahlung auszeichnenden Materialveränderung entsteht, im wesentlichen ohne daß an der Oberfläche des Körpers eine irgendwie feststellbare Veränderung eintritt, dadurch gekennzeichnet, daß eine Wellenlänge des Laserlichtes verwendet wird, bei der das Glas teildurchlässig ist und die kleiner als alle dem Plateaubereich entsprechenden Wellenlängen des Laserlichtes ist.1. A method of producing an under-surface mark in a glass body having a transmission curve with a plateau area at wavelengths longer than that of X-rays, wherein a laser beam is directed onto a surface of the body, which is the body is able to penetrate to the predetermined depth of the marking and is further focused at the predetermined location of the marking within the glass and has such a power density that a marking is formed at the location in the form of a material change which is characterized by a reduced permeability to electromagnetic radiation, essentially without any change on the surface of the body occurring, characterized in that a wavelength of the laser light is used at which the glass is partially transparent and which is smaller than all wavelengths of the laser corresponding to the plateau region is.
2. Verfahren nach Anspruch 1 , dadurch gekennzeichnet, daß die Wellenlänge innerhalb eines Wellenlängenbereiches liegt, bei dem ein Transmissionsgrad von 60 bis 95 % des Plateauniveaus gegeben ist.2. The method according to claim 1, characterized in that the wavelength is within a wavelength range in which a transmittance of 60 to 95% of the plateau level is given.
3. Verfahren nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß der Laserstrahl mittels eines Nd-YAG-Lasers erzeugt wird.3. The method according to claim 1 or 2, characterized in that the laser beam is generated by means of an Nd-YAG laser.
4. Verfahren nach Anspruch 3, dadurch gekennzeichnet, daß die dritte Harmonische verwendet wird. 4. The method according to claim 3, characterized in that the third harmonic is used.
EP99964365A 1998-12-02 1999-11-23 Method for making a marking in a glass body Expired - Lifetime EP1051365B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19855623A DE19855623C1 (en) 1998-12-02 1998-12-02 Method of generating marking in glass body involves focusing laser light of wavelength for which glass is partly transmissive and smaller than all transmission plateau region wavelengths
DE19855623 1998-12-02
PCT/DE1999/003719 WO2000032531A1 (en) 1998-12-02 1999-11-23 Method for making a marking in a glass body

Publications (2)

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EP1051365A1 true EP1051365A1 (en) 2000-11-15
EP1051365B1 EP1051365B1 (en) 2002-06-05

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Country Status (7)

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US (1) US6596966B1 (en)
EP (1) EP1051365B1 (en)
JP (1) JP2002531361A (en)
AT (1) ATE218519T1 (en)
DE (2) DE19855623C1 (en)
ES (1) ES2177339T3 (en)
WO (1) WO2000032531A1 (en)

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EP1051365B1 (en) 2002-06-05
DE19855623C1 (en) 2000-02-24
DE59901616D1 (en) 2002-07-11
WO2000032531A1 (en) 2000-06-08
JP2002531361A (en) 2002-09-24
US6596966B1 (en) 2003-07-22
ATE218519T1 (en) 2002-06-15
ES2177339T3 (en) 2002-12-01

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