DE202021106275U1 - Apparatus for producing filaments - Google Patents

Abstract

Device (100), which is configured to emit laser radiation (112) to generate filaments (158) in a workpiece (128), the device (100) having:an optical arrangement (102) which has a refractive optical element (104 );a first beam axis (108) along which the laser radiation (112) impinges on the refractive optical element (104);wherein the optical arrangement (102) is configured to direct the laser radiation (112) onto a second beam axis (110) to distract; and wherein the second beam axis (110) forms an acute angle (114) with the first beam axis (108).

Description

TECHNICAL AREA

The present disclosure relates to the field of creating a line of weakness in a material such as is used for filament cutting materials.

BACKGROUND

It is known from practice that transparent materials can be weakened locally by a self-focusing laser beam and this weakening can be used for material processing, e.g. for cutting along a contour line. Depending on the shape of the contour line (especially in the case of a closed contour line), it may be necessary to make relief cuts in the material, for example to enable the inner contour to be detached or, if the inner contour is the target object, to enable the outer contour to be detached. The relief cuts only allow the target objects to be separated and take up a significant portion of the total process time and energy. In addition, in the case of the inner contour, the creation of relief cuts is generally not sufficient to bring about a separation, since there is practically no gap between the components and the components are enclosed by solid material.

SUMMARY

In view of the situation described above, there is a need for a technique which allows separation of one of a material using filaments while substantially avoiding one or more of the problems identified above.

This need is taken into account by the independent claims. Some advantageous embodiments are given in the dependent claims.

According to a first aspect of the subjects disclosed herein, an apparatus for producing filaments in a workpiece is provided.

According to one embodiment of the first aspect, a device is provided which is configured to emit laser radiation for generating filaments in a workpiece, the device comprising: an optical arrangement having a refractive optical element; a first beam axis along which the laser radiation is incident on the refractive optical element; wherein the optical arrangement is configured to deflect the laser radiation onto a second beam axis; wherein the second beam axis forms an acute angle with the first beam axis.

According to a second aspect of the subject matter disclosed herein, a method is provided.

According to one embodiment of the second aspect, a method is provided, the method comprising: deflecting a laser radiation from a first beam axis onto a second beam axis which forms an acute angle with the first beam axis; wherein the laser radiation is configured to create filaments in a workpiece; and wherein the deflection of the laser radiation from the first beam axis onto the second beam axis takes place at least partially by a refractive optical element.

According to a third aspect of the subject matter disclosed herein, a method is provided.

According to one embodiment of the third aspect, a method is provided, the method comprising: moving a workpiece and a beam axis of laser radiation relative to one another and parallel to a plane; the beam axis forming an acute angle with the normal of the plane; Emitting the laser radiation along the beam axis, the laser radiation configured to create filaments in the workpiece; and wherein the acute angle is generated at least in part by a refractive optical element.

According to a fourth aspect of the subjects disclosed herein, a control device is provided.

According to one embodiment of the fourth aspect, a control device is provided which is configured to carry out a method according to the second aspect and / or to carry out a method according to the third aspect.

According to a fifth aspect of the subject matter disclosed herein, a computer program product is provided.

According to one embodiment of the fifth aspect, a computer program product is provided having a program element which is configured, when it is executed on a processor device, to carry out a method according to the second aspect and / or a method according to the third aspect.

DESCRIPTION OF EXEMPLARY EMBODIMENTS

A device according to the first aspect is configured to emit laser radiation for generating filaments in a workpiece. For this purpose, according to one embodiment, the device has an optical arrangement which in turn has a refractive optical element (i.e. an optical element whose operating principle is based on refraction). According to one embodiment, the device has a first beam axis along which the laser radiation falls on the refractive optical element. According to a further embodiment, the optical arrangement is configured to deflect the laser radiation from the first beam axis onto a second beam axis, wherein the second beam axis forms an acute angle with the first beam axis, i. H. an angle that is less than 90 degrees.

According to one embodiment, a method according to the second aspect comprises deflecting a laser radiation from a first beam axis onto a second beam axis, the first beam axis forming an acute angle with the second beam axis. According to one embodiment, the laser radiation is deflected from the first beam axis onto the second beam axis at least partially by a refractive optical element. According to a further embodiment, the laser radiation is configured to generate filaments in a workpiece.

According to one embodiment, a method according to the third aspect comprises moving a workpiece and a beam axis of laser radiation relative to one another, the movement taking place parallel to a plane (hereinafter also referred to as a movement plane), the beam axis being a beam axis along which the laser radiation impinges on the workpiece (also referred to herein as the second beam axis). According to one embodiment, the beam axis forms an acute angle with a normal to the plane. According to a further embodiment, the method comprises emitting the laser radiation along the beam axis, the laser radiation being configured to generate filaments in the workpiece. According to a further embodiment, the acute angle between the normal of the plane and the beam axis is at least partially generated by a refractive optical element.

According to one embodiment, a control device according to the fourth aspect is configured to carry out a method according to the second aspect (for example a method according to one or more embodiments of the second aspect) and / or for carrying out a method according to the third aspect (for example a method according to one or more embodiments of the third aspect).

According to one embodiment, a computer program product according to the fifth aspect has a program element which is configured, when it is executed on a processor device, to implement a method according to the second aspect (for example a method according to one or more embodiments of the second aspect) and / or to carry out a method according to the third aspect (for example a method according to one or more embodiments of the third aspect).

At least some of the aspects and embodiments of the subject matter disclosed herein are based on the idea that a workpiece can be separated along filaments more efficiently if the filaments at least in a section of the contour line form an acute angle with a normal to the workpiece surface or a normal along a contour line Include a plane parallel to which a movement of the workpiece and the laser radiation that generates the filaments takes place.

A filament in the sense of the subject matter disclosed herein is a material modification due to absorption of the laser radiation. When producing filaments, use is made of the fact that an intensity-dependent, non-linear component of the refractive index of the workpiece material to be processed leads to the laser intensity distribution also resulting in a refractive index distribution in the material, which in turn acts on the radiation like a lens (self-focusing / optical Kerr effect). The radiation experiences an increasing focus within the material to be processed along its direction of propagation until its intensity is so high that the radiation energy is coupled into the transparent material by non-linear absorption. A suitable choice of the process parameters and the beam shaping can ensure that the resulting material modification, the filament, takes up a large extent along the direction of propagation. The extent of the filament transversely to the direction of propagation is comparatively very small. Aspect ratios on the order of 1,000: 1 are possible here. In order to use this effect for cutting transparent materials, a large number of filaments are placed next to each other along a desired cutting contour (i.e. along the contour line). The material modified in this way is then separated along this contour line by introducing low mechanical stresses. This can be done, for example, by local heating with a CO2 laser.

Correspondingly, according to one embodiment, the workpiece is to be separated along a contour line. In this case, a large number of filaments are produced in the workpiece along the contour line. The plurality of filaments defines a parting surface through the workpiece, the contour line being a common line (intersection line) of the surface of the workpiece and the parting surface. According to one embodiment, the separation surface has a generally conical shape. A generally conical shape of the parting surface allows the workpiece to be separated along the parting surface without relief cuts even when the parting surface is closed. An example of a generally conical shape of the separating surface has filaments which are inclined in a direction perpendicular to the contour line and from a first side of the separating surface to a second side of the separating surface, for example, in the case of an annularly closed separating surface, from an inside the parting surface towards the outside.

According to one embodiment, the workpiece is a plate. According to a further embodiment, a center plane of the plate is arranged parallel to the plane of movement. Furthermore, according to one embodiment, the plate is a plane-parallel plate, for example a pane of glass. In the case of a plane-parallel plate, the acute angle between the normal of the plane of movement and the second beam axis corresponds to the acute angle between the normal of the workpiece surface (plate surface) and the second beam axis.

According to one embodiment, the amount of the acute angle is in an angular range between 0.5 degrees and 20 degrees. In other words, according to one embodiment, the second beam axis deviates from the first beam axis by 0.5 degrees to 20 degrees.

According to one embodiment, the acute angle is configured to be invariable. For example, according to one embodiment, the refractive optical element can be fixed in its spatial alignment with respect to the first beam axis. Such a fixation of the spatial alignment of the refractive in optical element with respect to the first beam axis can nevertheless, according to one embodiment, allow a rotation of the refractive in optical element about the first beam axis (or an axis parallel thereto).

According to one embodiment, the acute angle is defined solely by the refractive optical element. According to one embodiment, the acute angle can be defined by at least two optical elements, the at least two optical elements including the refractive optical element.

According to one embodiment, the refractive optical element has two surfaces facing away from one another, the two surfaces facing away from one another being angled (i.e. non-parallel) to one another. According to one embodiment, the refractive element is arranged such that the laser radiation passes through the two surfaces facing away from one another. For example, according to one embodiment, the refractive optical element is a wedge plate.

According to one embodiment, the second jet axis is mounted rotatably about an axis of rotation, the axis of rotation running parallel to the first jet axis. For example, according to one embodiment, the optical arrangement is mounted rotatably about the axis of rotation. For example, the device further comprises a base part, the optical arrangement being mounted so as to be rotatable about the axis of rotation with respect to the base part. According to one embodiment, an actuator arrangement is provided with which the base part and the workpiece can be moved relative to one another and parallel to a plane (for example parallel to the plane of movement described above).

According to one embodiment, the device also has a workpiece carrier for holding the workpiece. According to a further embodiment, the workpiece carrier and the second beam axis can be moved relative to one another, thereby moving an intersection of the second beam axis with the workpiece along a contour line and using the laser radiation to generate the filaments in the workpiece along the contour line.

According to one embodiment, the first beam axis and the second beam axis define a plane, the plane forming a predetermined, fixed angle with the contour line during the movement of the intersection point along the contour line. If this predetermined, fixed angle is, for example, 90 degrees (for example, if the second beam axis is always aligned so that the plane defined by the first and second beam axes is perpendicular to the contour line) the interface has a generally conical shape Shape, where a conicity is equal to the acute angle. If the predetermined, fixed angle is between 0 degrees and 90 degrees, the taper is present, but smaller than the acute angle.

In the event that the predetermined fixed angle is 0 degrees (for example if the second beam axis is always aligned such that the plane defined by the first and second beam axes is arranged tangential to the contour line, a generally cylindrical one results Shape (conicity equal to zero degrees) If the second beam axis is in the direction of the The direction of movement of the second beam axis is also referred to as a piercing machining. In the other case, when the second beam axis points opposite to the direction of movement of the second beam axis, this is also referred to as slow processing.

According to one embodiment, the first beam axis and the second beam axis define a plane, the plane forming an angle with the contour line during the movement of the intersection point along the contour line, the amount of which is in a predetermined angular range. For example, during the movement of the intersection point along the contour line, the angle can change within the predetermined angular range. This allows a higher tolerance in the control of the alignment of the plane to the contour line.

According to one embodiment, the angular range extends between a lower angle and an upper angle.

According to a further embodiment, the lower angle is greater than 0 degrees and the upper angle is less than 90 degrees. For example, according to one embodiment, the lower angle can be greater than 80 degrees and the upper angle can be less than or equal to 90 degrees. For example, the angle lies in the angle range between -80 degrees and +80 degrees (i.e. the amount of the angle lies in an angle range in which the lower angle = 80 degrees and the upper angle = 90 degrees).

According to a further embodiment, the lower angle is greater than or equal to zero degrees and the upper angle is less than 90 degrees. For example, according to one embodiment, the lower angle can be greater than or equal to zero degrees and the upper angle can be less than 10 degrees.

According to one embodiment, the optical arrangement has a focusing optical element, the second beam axis extending through the focusing optical element. In other words, the focusing optical element focuses the laser radiation, which propagates along the second beam axis and hits the workpiece.

According to one embodiment, the refractive optical element and the focusing optical element are part of an assembly which is rotatable about an axis of rotation, the axis of rotation extending parallel to the first beam axis. In this way, a rotation of the plane, which is defined by the first beam axis and the second beam axis, can take place merely by rotating the assembly.

According to one embodiment, the device (or, for example, the assembly) has an actuator arrangement (also referred to herein as a first actuator arrangement) which is designed to rotate the assembly about the axis of rotation. According to one embodiment, the device has a control device (also referred to herein as the first control device), which is set up to control the actuator arrangement, which is designed to rotate the assembly about the axis of rotation. For example, an existing device which is configured to produce filaments in a workpiece can be converted into a modified device which is suitable for realizing embodiments of the subject matter disclosed herein by providing the assembly and corresponding adaptation of a control of the device.

According to one embodiment, the refractive element (for example the wedge plate) defines the acute angle between the first beam axis and the second beam axis.

According to one embodiment, the acute angle is a first acute angle and the optical axis of the focusing optical element forms a second acute angle with the first beam axis. For example, according to one embodiment, the second acute angle can be equal to the first acute angle.

According to one embodiment, the device has an actuator arrangement (also referred to as a second actuator arrangement here) and a control device (also referred to as a second control device herein) for controlling the actuator arrangement and thereby moving the second beam axis and the workpiece relative to one another. According to one embodiment, the second actuator arrangement is set up to move (in particular to move linearly) the second beam axis and the workpiece relative to one another parallel to a plane. For example, according to one embodiment, the second actuator arrangement is set up to move the second beam axis and the workpiece relative to one another along two linearly independent axes. According to one embodiment, one of the second beam axis and the workpiece can be arranged in a stationary manner, while another of the second beam axis and the workpiece can be moved by the second actuator arrangement. According to a further embodiment, both the second beam axis and the workpiece can be moved (relative to one another) by the second actuator arrangement.

It goes without saying that the laser radiation is provided by a suitable laser source and that the laser source and the optical arrangement are configured to create filaments in the workpiece.

According to embodiments of the first aspect, the device is set up to deliver the functionality of one or more of the embodiments disclosed herein and / or to deliver the functionality as it is required for one or more of the embodiments disclosed herein, in particular the embodiments of the first aspect, of the second aspect, third aspect, fourth aspect and / or fifth aspect.

According to embodiments of the second aspect, the method is set up to deliver the functionality of one or more of the embodiments disclosed herein and / or to deliver the functionality as it is required for one or more of the embodiments disclosed herein, in particular the embodiments of the first aspect, of the second aspect, third aspect, fourth aspect and / or fifth aspect.

According to embodiments of the third aspect, the method is set up to deliver the functionality of one or more of the embodiments disclosed herein and / or to deliver the functionality as it is required for one or more of the embodiments disclosed herein, in particular the embodiments of the first aspect, of the second aspect, third aspect, fourth aspect and / or fifth aspect.

According to embodiments of the fourth aspect, the control device is set up to deliver the functionality of one or more of the embodiments disclosed herein and / or to deliver the functionality as it is required for one or more of the embodiments disclosed herein, in particular the embodiments of the first aspect, of the second aspect, third aspect, fourth aspect and / or fifth aspect.

According to embodiments of the fourth aspect, the computer program product is set up to deliver the functionality of one or more of the embodiments disclosed herein and / or to deliver the functionality as it is required for one or more of the embodiments disclosed herein, in particular the embodiments of the first aspect, of the second aspect, third aspect, fourth aspect and / or fifth aspect.

1. 1. Vorrichtung, welche konfiguriert ist zum Abgeben einer Laserstrahlung zur Erzeugung von Filamenten in einem Werkstück, die Vorrichtung aufweisend:
   • eine optische Anordnung, welche ein refraktives optisches Element aufweist;
   • eine erste Strahlachse, entlang welcher die Laserstrahlung auf das refraktive optische Element fällt;
   • wobei die optische Anordnung konfiguriert ist, um die Laserstrahlung auf eine zweite Strahlachse abzulenken; und
   • wobei die zweite Strahlachse mit der ersten Strahlachse einen spitzen Winkel bildet.
2. 2. Vorrichtung nach Ausführungsform 1, wobei der Betrag des spitzen Winkels in einem Winkelbereich zwischen 0,5 Grad und 20 Grad liegt.
3. 3. Vorrichtung nach irgendeiner der Ausführungsformen 1 oder 2, wobei der spitze Winkel unveränderlich konfiguriert ist.
4. 4. Vorrichtung nach irgendeiner der Ausführungsformen 1 bis 3, wobei das refraktive optische Element zwei voneinander abgewandte Oberflächen aufweist; wobei die zwei voneinander abgewandten Oberflächen gewinkelt zueinander angeordnet sind; und wobei das refraktive Element angeordnet ist, so dass die Laserstrahlung durch die zwei voneinander abgewandten Oberflächen hindurchtritt.
5. 5. Vorrichtung nach irgendeiner der Ausführungsformen 1 bis 4, wobei die zweite Strahlachse um eine Drehachse drehbar gelagert ist; und wobei die Drehachse parallel zu der ersten Strahlachse verläuft.
6. 6. Vorrichtung nach irgendeiner der Ausführungsformen 1 bis 5, wobei die Vorrichtung ferner einen Werkstückträger zum Halten des Werkstücks aufweist; wobei der Werkstückträger und die zweite Strahlachse relativ zueinander bewegbar sind, um dadurch einen Schnittpunkt der zweiten Strahlachse mit dem Werkstück entlang einer Konturline zu bewegen und die Filamente in dem Werkstück entlang der Konturlinie zu erzeugen.
7. 7. Vorrichtung nach Ausführungsform 6, wobei die erste Strahlachse und die zweite Strahlachse eine Ebene definieren; und wobei die Ebene während der Bewegung des Schnittpunkts entlang der Konturlinie einen Winkel mit der Konturlinie bildet, dessen Betrag in einem vorbestimmten Winkelbereich liegt; wobei der Winkelbereich sich zwischen einem unteren Winkel und einem oberen Winkel erstreckt und der untere Winkel größer als Null Grad ist und der obere Winkel kleiner oder gleich 90 Grad ist, insbesondere wobei der untere Winkel größer als 80 Grad ist und der obere Winkel kleiner oder gleich 90 Grad ist.
8. 8. Vorrichtung nach Ausführungsform 6, wobei die erste Strahlachse und die zweite Strahlachse eine Ebene definieren; und wobei die Ebene während der Bewegung des Schnittpunkts entlang der Konturlinie einen Winkel mit der Konturlinie bildet, dessen Betrag in einem vorbestimmten Winkelbereich liegt; wobei der vorbestimmte Winkelbereich sich zwischen einem unteren Winkel und einem oberen Winkel erstreckt und der untere Winkel größer oder gleich Null Grad ist und der obere Winkel kleiner 90 Grad ist, insbesondere wobei der untere Winkel größer oder gleich Null Grad ist und der obere Winkel kleiner als 10 Grad ist.
9. 9. Vorrichtung nach irgendeiner der Ausführungsformen 1 bis 8, wobei die optische Anordnung ein fokussierendes optisches Element aufweist; und die zweite Strahlachse sich durch das fokussierende optische Element erstreckt.
10. 10. Vorrichtung nach irgendeiner der Ausführungsformen 1 bis 9, wobei das refraktive Element den spitzen Winkel zwischen der ersten Strahlachse und der zweiten Strahlachse definiert.
11. 11. Vorrichtung nach irgendeiner der Ausführungsformen 1 bis 10, wobei der spitze Winkel ein erster spitzer Winkel ist und wobei eine optische Achse des fokussierenden optischen Elements einen zweiten spitzen Winkel mit der ersten Strahlachse bildet, insbesondere wobei der erste spitze Winkel und der zweite spitze Winkel gleich sind.
12. 12. Vorrichtung nach irgendeiner der Ausführungsformen 1 bis 11, ferner aufweisend eine Aktoranordnung; eine Steuervorrichtung zum Steuern der Aktoranordnung und dadurch Bewegen der zweiten Strahlachse und des Werkstücks relativ zueinander.
13. 13. Verfahren aufweisend:
    • Ablenken einer Laserstrahlung von einer ersten Strahlachse auf eine zweite Strahlachse, welche mit der ersten Strahlachse einen spitzen Winkel bildet;
    • wobei die Laserstrahlung konfiguriert ist zum Erzeugen von Filamenten in dem Werkstück; und
    • wobei das Ablenken der Laserstrahlung von der ersten Strahlachse auf die zweite Strahlachse mindestens teilweise durch ein refraktives optisches Element erfolgt.
14. 14. Verfahren aufweisend:
    • Bewegen eines Werkstücks und einer Strahlachse einer Laserstrahlung relativ zueinander und parallel zu einer Ebene;
    • wobei die Strahlachse mit der Normalen der Ebene einen spitzen Winkel bildet;
    • Abgeben der Laserstrahlung entlang der Strahlachse, wobei die Laserstrahlung konfiguriert ist zum Erzeugen von Filamenten in dem Werkstück; und
    • wobei der spitze Winkel durch mindestens teilweise durch ein refraktives optisches Element erzeugt wird.
15. 15. Steuervorrichtung, welche konfiguriert ist zum Durchführen eines Verfahrens gemäß Ausführungsform 13 und/oder zum Durchführen eines Verfahrens gemäß Ausführungsform 14.
16. 16. Computerprogrammprodukt aufweisend ein Programmelement, welches konfiguriert ist, um, wenn es auf einer Prozessorvorrichtung ausgeführt wird, ein Verfahren gemäß Ausführungsform 13 und/oder ein Verfahren gemäß Ausführungsform 14 durchzuführen.

Exemplary implementations of the subjects disclosed herein include in particular the embodiments and combinations of embodiments described below:

1. 1. Apparatus which is configured to emit laser radiation to generate filaments in a workpiece, the apparatus comprising:
   • an optical arrangement comprising a refractive optical element;
   • a first beam axis along which the laser radiation is incident on the refractive optical element;
   • wherein the optical arrangement is configured to deflect the laser radiation onto a second beam axis; and
   • wherein the second beam axis forms an acute angle with the first beam axis.
2. 2. Device according to embodiment 1, wherein the amount of the acute angle is in an angular range between 0.5 degrees and 20 degrees.
3. 3. The device according to any one of embodiments 1 or 2, wherein the acute angle is configured to be invariable.
4. 4. The device according to any one of embodiments 1 to 3, wherein the refractive optical element has two surfaces facing away from one another; wherein the two surfaces facing away from one another are arranged at an angle to one another; and wherein the refractive element is arranged so that the laser radiation passes through the two surfaces facing away from one another.
5. 5. The device according to any one of embodiments 1 to 4, wherein the second beam axis is rotatably mounted about an axis of rotation; and wherein the axis of rotation is parallel to the first beam axis.
6. 6. Apparatus according to any one of Embodiments 1 to 5, the apparatus further comprising a workpiece carrier for holding the workpiece; wherein the workpiece carrier and the second beam axis are movable relative to one another in order to thereby move an intersection of the second beam axis with the workpiece along a contour line and to generate the filaments in the workpiece along the contour line.
7. 7. The apparatus of embodiment 6, wherein the first beam axis and the second beam axis define a plane; and wherein the plane forms an angle with the contour line during the movement of the intersection point along the contour line, the amount of which is in a predetermined angular range; wherein the angular range is between a lower angle and an upper angle extends and the lower angle is greater than zero degrees and the upper angle is less than or equal to 90 degrees, in particular wherein the lower angle is greater than 80 degrees and the upper angle is less than or equal to 90 degrees.
8. 8. The apparatus of embodiment 6, wherein the first beam axis and the second beam axis define a plane; and wherein the plane forms an angle with the contour line during the movement of the intersection point along the contour line, the amount of which is in a predetermined angular range; wherein the predetermined angular range extends between a lower angle and an upper angle and the lower angle is greater than or equal to zero degrees and the upper angle is less than 90 degrees, in particular wherein the lower angle is greater than or equal to zero degrees and the upper angle is less than 10 degrees is.
9. 9. Apparatus according to any one of embodiments 1 to 8, wherein the optical arrangement comprises a focusing optical element; and the second beam axis extends through the focusing optical element.
10. 10. The device of any one of embodiments 1 to 9, wherein the refractive element defines the acute angle between the first beam axis and the second beam axis.
11. 11. The device according to any one of embodiments 1 to 10, wherein the acute angle is a first acute angle and wherein an optical axis of the focusing optical element forms a second acute angle with the first beam axis, in particular wherein the first acute angle and the second acute angle are the same.
12. 12. The device according to any one of embodiments 1 to 11, further comprising an actuator arrangement; a control device for controlling the actuator arrangement and thereby moving the second beam axis and the workpiece relative to one another.
13. 13. Process comprising:
    • Deflecting a laser radiation from a first beam axis onto a second beam axis which forms an acute angle with the first beam axis;
    • wherein the laser radiation is configured to create filaments in the workpiece; and
    • wherein the deflection of the laser radiation from the first beam axis onto the second beam axis takes place at least partially by a refractive optical element.
14. 14. Process comprising:
    • Moving a workpiece and a beam axis of laser radiation relative to one another and parallel to a plane;
    • the beam axis forming an acute angle with the normal of the plane;
    • Emitting the laser radiation along the beam axis, wherein the laser radiation is configured to create filaments in the workpiece; and
    • wherein the acute angle is generated at least partially by a refractive optical element.
15. 15. Control device which is configured to carry out a method according to embodiment 13 and / or to carry out a method according to embodiment 14.
16. 16. A computer program product comprising a program element which is configured, when it is executed on a processor device, to carry out a method according to embodiment 13 and / or a method according to embodiment 14.

According to one embodiment, the program element is a non-transient program element. According to a further embodiment, the computer program product is a non-transient computer program product.

As used herein, the reference to a computer program product is regarded as equivalent to a reference to a computer program that has a program element and / or a computer-readable medium that has a program element. According to one embodiment, a program element has instructions for controlling a processor device (with one or more microprocessors, for example a computer system), for effecting and / or coordinating the execution of a method described herein.

The (non-transient) program element can be implemented as computer-readable instruction code using any suitable programming language, such as JAVA, C #, Python, etc. and can be stored on a computer-readable medium (removable disk, volatile or non-volatile memory, embedded memory / processor , etc.) must be saved. In one embodiment, the instruction code is executable to program a computer or any other programmable processor device to perform the intended functions. The computer program can be available in a network, for example the World Wide Web from which it can be downloaded, for example.

Some of the subjects disclosed herein can be implemented by means of a computer program product (program element) or software. However, the subjects concerned here can also be implemented by one or more specific electronic circuits or hardware. Furthermore, the objects disclosed herein can also be in hybrid form, i.e. H. Can be implemented in a combination of software modules and hardware modules.

Unless otherwise stated, numerical values are to be understood as including a ± 5% window, i.e. H. For example, an indication of 20 degrees comprises, according to one embodiment, an angle within an interval of (20 ± 5%) degrees = [21 degrees; 19 degrees] and a percentage of 50% includes, according to one embodiment, a percentage within an interval of 50% ± 5% = [47.5%; 52.5%]. According to a further embodiment, numerical values including a ± 10% window are to be understood.

In the following, exemplary embodiments of the subject matter disclosed herein are described, reference being made, for example, to a method, a device, a control device and a computer program product. It should be emphasized that any combination of features from various aspects, embodiments and examples is of course possible. In particular, some embodiments are described with reference to a method, while other embodiments are described with reference to an apparatus. Still other embodiments are described with reference to a computer program product, while other embodiments are described with reference to a control device for interacting with elements of the device (for example an actuator arrangement). However, the person skilled in the art will infer from the above and the following description, the claims and the drawings that, unless otherwise stated, features of various aspects, embodiments and examples can be combined and such combinations of features are to be regarded as disclosed by this application. For example, even a feature that relates to a method can be combined with a feature that relates to a device, and vice versa.

Further advantages and features of the present disclosure emerge from the following exemplary description of currently preferred embodiments, to which, however, the claimed invention is not limited. The individual figures of the drawings of this document are only to be regarded as schematic and not true to scale.

Figure list

• 1 Fig. 10 shows part of an apparatus according to embodiments of the subjects disclosed herein.
• 2 shows the device 1 with the further components according to embodiments of the subjects disclosed herein.
• 3 FIG. 4 shows a top view of the device from FIG 2 seen from the line III-III.
• 4th shows a part of the workpiece in a sectional view according to embodiments of the subjects disclosed herein.
• 5 shows the workpiece 4th after cutting out the inner contour.

DETAILED DESCRIPTION

It is noted that similar or identical elements or components are provided with the same reference numbers in different figures, or with reference numbers that differ only in the first digit. Such features or components, which are identical or at least functionally identical to the corresponding features or components in another figure, are only described in detail when they appear for the first time in the following text and the description will be used when these features and components (or the corresponding reference numbers) are not repeated.

1 shows part of a device 100 in accordance with embodiments of the subject matter disclosed herein.

According to one embodiment, the device 100 an optical arrangement 102 on which, according to one embodiment, a refractive optical element 104 in the form of a wedge plate and a focusing optical element 106 in the form of a lens, for example as in 1 shown.

According to one embodiment, the device 100 a first beam axis 108 and a second beam axis 110 on. According to one embodiment, laser radiation falls 112 along the first beam axis 108 on the refractive optical element 104 . According to one embodiment, the optical arrangement is 102 configured to the laser radiation 112 on the second beam axis 110 deflect, with the second beam axis 110 with the first Beam axis 108 an acute angle 114 forms, for example as in 1 shown.

For deflecting the laser radiation 112 on the second beam axis 110 is, according to one embodiment, the refractive optical element 104 with a first surface 116 and a second surface 118 equipped, which are facing away from each other and are arranged at an angle to each other, for example as in 1 shown. According to one embodiment, the laser radiation occurs 116 due to the two surfaces facing away from each other 116 , 118 through it, for example as in 1 shown.

According to one embodiment, the second beam axis is 110 around an axis of rotation 120 rotatable, wherein, according to a further embodiment, the axis of rotation 120 parallel to the first beam axis 108 runs, for example with the first beam axis 108 coincides, for example as in 1 shown. For example, one embodiment provides that the optical arrangement 102 Part of an assembly 122 is, for example with a housing 124 in which the optical arrangement 102 is arranged. According to one embodiment, the assembly is 122 around the axis of rotation 120 rotatable. According to a further embodiment, the refractive optical element is 104 and the focusing optical element 106 stationary with respect to the assembly 122 arranged, for example stationary in the housing 124 .

In such an embodiment, the housing 124 be rotatable about the axis of rotation (and thus the rotatability of the assembly 122 cause).

According to one embodiment, is an optical axis of the focusing element 106 parallel to the second beam axis 110 arranged and coincides with the second beam axis, for example according to one embodiment 110 together, for example as in 1 shown. This is an example of an embodiment in which the second beam axis is 110 through the focusing optical element 106 extends.

2 shows the device 100 out 1 with the further components according to embodiments of the subjects disclosed herein.

According to one embodiment, the device 100 a workpiece carrier 126 on which to hold a workpiece 128 configured. According to one embodiment, the workpiece is 128 a transparent plate, for example a glass plate. According to one embodiment, the device 100 also a base part 130 on which the assembly 122 around the axis of rotation 120 is rotatable. The base part 130 can for example be part of a laser head. According to one embodiment, the device has a first actuator arrangement 134 on which to rotate the assembly 122 around the axis of rotation 120 is trained.

According to one embodiment, the workpiece carriers are 126 and the second beam axis 110 movable relative to one another, for example parallel to a plane, such as a plane passing through a surface 132 of the workpiece carrier 126 defines on which the workpiece 128 rests.

According to one embodiment, the device 100 a second actuator arrangement 136 to move the second beam axis 110 and the workpiece 128 relative to each other. For this purpose it can be provided that the second actuator arrangement 136 on the workpiece carrier 126 acts to over the workpiece carrier 126 the workpiece 128 to move, for example as in 2 shown.

3 shows a plan view of the device 100 out 2 seen from the line III-III.

According to one embodiment, the second actuator arrangement comprises 136 a first actuator 138 with which the workpiece carrier 126 in a first direction 140 is movable. According to a further embodiment, the second actuator arrangement comprises 136 a second actuator 142 with which the workpiece carrier 126 in a second direction 144 is movable. According to a further embodiment, the first direction 140 and the second direction 144 linearly independent of one another and can, for example, be perpendicular to one another, for example as in 3 shown. According to one embodiment, the second actuator arrangement 136 alternatively or in addition to the first actuator 138 and the second actuator 142 have at least one actuator with which the assembly 122 in the first direction 140 and / or in the second direction 144 with respect to the workpiece 128 is movable.

According to one embodiment, the first actuator arrangement comprises 134 an actuator 146 which is used to rotate the assembly 122 is provided and designed. According to one embodiment, the actuator is 146 the only actuator of the first actuator arrangement 134 . According to a further embodiment, a single actuator arrangement can be used to move the second beam axis 110 and the workpiece 128 relative to each other as well as for rotating the second beam axis 110 around the axis of rotation 120 be provided. In other words, according to one embodiment, a single actuator arrangement can be provided which provides the functionality of the first actuator arrangement and the second actuator arrangement.

According to one embodiment, each actuator arrangement 134 , 136 a control device 148 assigned. According to a further embodiment, the first actuator arrangement 134 and the second actuator arrangement 136 a common control device 148 be assigned, for example as in 3 shown. According to one embodiment, the relevant control device is 148 with the assigned actuator arrangement 134 , 136 connected in terms of signal transmission, for transmitting signals (in 3 indicated at 150) between the actuator arrangement 134 , 136 and the control device 148 . According to one embodiment, the signals include 150 Control signals which the control device sends to the actuator arrangement 134 , 136 releases, to control the actuator assembly 134 , 136 . According to a further embodiment, the signals include 150 optionally also sensor signals, which for example the actuator arrangement 134 , 136 to the control device 148 gives away.

According to one embodiment, the control device 148 a processor device 149 on as well as a storage device 151 , in which a program element according to embodiments of the subjects disclosed herein is stored and which, when executed on the processor device 149 causes control of a method according to one or more embodiments of the subjects disclosed herein.

According to one embodiment, the control device is set up to control the workpiece carrier 126 and the second beam axis 110 move relative to each other, thereby creating an intersection 152 the second beam axis 110 with the workpiece 128 along a contour line 154 to move and by emitting the laser radiation along the second beam axis 110 the filaments in the workpiece 128 along the contour line 154 to create. According to one embodiment, this is a plane 156 passing through the first beam axis 110 and the second beam axis 108 (in 3 not shown) is defined (or by the first beam axis 110 and the second beam axis 108 is spanned), in a predetermined angular range (for example between -80 degrees and + 80 degrees to the contour line 154 held (ie in a symmetrical interval of 90 degrees, for example perpendicular to the contour line 154 ). For example, the first actuator arrangement and optionally the second actuator arrangement are controlled by the control device 148 controlled in a way that when moving the intersection 152 along the contour line 154 the level 156 always stands in the desired angular range to the contour line. For example, according to one embodiment, the control takes place in such a way that the plane 156 always perpendicular to the contour line 154 stands, ie an angle 157 of 90 degrees with the contour line 154 forms, for example as in 3 shown. It goes without saying that the contour line 154 is an imaginary line along which the filaments enter the workpiece 128 should be introduced. Only when the filaments are actually in the one workpiece 128 were introduced, the contour line 154 be visible under certain circumstances (depending on the configuration of the filaments). Even after the workpiece has been separated along the contour line, it is of course visible as an edge of the relevant part of the workpiece. It is also noted that in 3 the contour line is not shown in full (indicated by the dashed continuation of the solid line at 154) in order to increase the clarity of the illustration.

4th shows part of the workpiece 128 in a sectional view according to embodiments of the subjects disclosed herein.

According to one embodiment, the workpiece 128 which has been processed with an apparatus according to embodiments of the objects disclosed herein, filaments 158 on (in 4th represented by dashed lines), which has a generally conical parting surface 160 define. A continuation of the filaments towards the surface 162 of the workpiece 168 opens according to one embodiment in the contour line 154 . With an annular closed contour line 154 the contour line defines a so-called inner contour 164 , ie the part of the workpiece 128 which is inside the contour line 154 lies, as well as a so-called outer contour 166 which are outside the contour line 154 located.

5 shows the workpiece 128 out 4th after cutting out the inner contour 164 . In other words shows 5 the outer contour 166 of the workpiece 128 . As already with reference to 4th explained, has the interface 160 according to one embodiment has a generally conical shape, for example as in FIG 5 shown. The interface is accordingly 160 (as well as the filaments that make up the interface 160 defined) in one direction 168 perpendicular to the contour line 154 and from a first page 170 the interface 160 to a second page 172 the interface 160 inclined, for example as in 5 shown. The direction 168 perpendicular to the contour line (see also 3 ) runs in 5 in the drawing plane. It should be noted that the direction 168 perpendicular to the contour line in 5 exemplarily proceeding from the inner contour to the contour line 154 is shown. Of course, the direction can 168 also opposite, from the outer contour 166 to the contour line 154 be defined. It is also noted that the first page 170 the interface 160 according to one embodiment always points in the direction of the inner contour, while the second side of the separating surface accordingly always points in the direction of the outer contour, for example as in FIG 5 shown. It is also pointed out that that a generally conical shape does not mean that the contour line 154 has a circular shape. Rather, the contour line 154 have any shape, in particular any annular closed shape. Furthermore, the contour line 154 also have an open shape such as a straight line or a curved line. For example, the contour line 154 have an open shape extending from an edge portion of the workpiece 128 to another edge portion of the workpiece 128 extends.

Compared to embodiments of the subject matter disclosed herein, the production of filaments for a generally conical separation surface when using mirrors instead of a refractive optical element would require considerably more installation space, since a mirror diameter of approx. 25 cm would be required for typical dimensions and angles. In contrast to a mirror solution, embodiments of the objects disclosed herein allow the cutting of contours, in particular inner contours, in a favorable, compact, adjustment-tolerant and easy-to-implement manner. This makes cutting inner contours an alternative to drilling. Furthermore, relief cuts can be dispensed with, which improves the efficiency of the entire cutting process (cycle time advantages).

According to embodiments of the subject matter disclosed herein, any suitable entity (e.g. (e.g. a device, a control device, an arrangement (e.g. an actuator arrangement), an element, a component and a unit) may at least in part be in the form of corresponding Computer programs may be provided which enable a processor device to provide the functionality of the corresponding entity as described herein. According to other embodiments, any suitable entity as described herein may be provided in hardware. According to other, hybrid embodiments some entities are provided in software while other entities are provided in hardware.

It should be noted that each entity disclosed herein (e.g., a device, a control device, an arrangement, an element, a component, and a unit) is not limited to a dedicated entity as described in some embodiments. Rather, the subject matter described herein may be provided in various ways with various granularities at the device level or at the software module level while still providing the functionality indicated. It should also be noted that, according to embodiments, a separate entity (e.g., a software module, a hardware module, or a hybrid module) may be provided for each of the functions disclosed herein. According to other embodiments, an entity (e.g., a software module, a hardware module, or a hybrid module) can be configured to provide two or more functions as described herein. According to still other embodiments, two or more entities (e.g., e.g., a controller, an assembly, an element, a component, and a unit) may be configured to together provide a function as described herein.

According to one embodiment, the control device contains a processor device which has at least one processor for executing at least one program element which can correspond to a corresponding software module.

A definition of an optical arrangement or an optical geometry with reference to a laser radiation can of course also be defined analogously with reference to a radiation path of the laser radiation, and vice versa. To this extent, any reference herein to a laser radiation analogously discloses a reference to a radiation path of the laser radiation.

It is pointed out that the embodiments described here represent only a limited selection of possible embodiment variants of the present disclosure. It is thus possible to combine the features of different embodiments with one another in a suitable manner, so that for a person skilled in the art with the embodiment variants explicit here, a large number of different embodiments are to be regarded as disclosed. It should also be mentioned that terms such as “a” or “an” do not exclude a plurality. Terms such as “containing” or “having” do not exclude further features or process steps. Consequently, according to one embodiment, the term “having” or “containing” stands for “including”. According to a further embodiment, the term “having” or “containing” stands for “consisting of”. According to one embodiment, the term “configured for” includes the meaning “configured to”, among other things.

It should also be noted that any reference signs in the claims should not be construed as limiting the scope of the claims. Furthermore, it should be noted that reference characters in the description and the reference of the description to the drawings should not be construed as limiting the scope of the description. Rather, the drawings illustrate only one exemplary implementation of a specific combination of several embodiments of the subject matter disclosed herein, with any other combination of embodiments also being possible and being to be regarded as disclosed with this application.

In summary, it remains to be stated:

A device is described which is configured to emit laser radiation for generating filaments in a workpiece, the device having: an optical arrangement which has a refractive optical element; a first beam axis along which the laser radiation is incident on the refractive optical element; wherein the optical arrangement is configured to deflect the laser radiation onto a second beam axis; and wherein the second beam axis forms an acute angle with the first beam axis.

Claims (12)

Device (100) which is configured to emit laser radiation (112) to generate filaments (158) in a workpiece (128), the device (100) comprising: an optical arrangement (102) having a refractive optical element (104); a first beam axis (108) along which the laser radiation (112) is incident on the refractive optical element (104); wherein the optical arrangement (102) is configured to deflect the laser radiation (112) onto a second beam axis (110); and wherein the second beam axis (110) forms an acute angle (114) with the first beam axis (108). Device (100) according to Claim 1 , the magnitude of the acute angle being in an angular range between 0.5 degrees and 20 degrees. Apparatus (100) according to any one of the Claims 1 or 2 wherein the acute angle (114) is configured to be invariable. Apparatus (100) according to any one of the Claims 1 until 3 wherein the refractive optical element (104) has two surfaces (116, 118) facing away from one another; wherein the two surfaces (116, 118) facing away from one another are arranged at an angle to one another; and wherein the refractive optical element (104) is arranged so that the laser radiation (112) passes through the two surfaces (116, 118) facing away from one another. Apparatus (100) according to any one of the Claims 1 until 4th , wherein the second beam axis (110) is rotatably mounted about an axis of rotation (120); and wherein the axis of rotation (120) is parallel to the first beam axis (108). Device (100) according to any one of the preceding claims, wherein the apparatus (100) further comprises a workpiece carrier (126) for holding the workpiece (128); wherein the workpiece carrier (126) and the second beam axis (110) are movable relative to one another, thereby moving an intersection (152) of the second beam axis (110) with the workpiece (128) along a contour line (154) and moving the filaments (158 ) in the workpiece (128) along the contour line (154). Device (100) according to Claim 6 wherein the first beam axis (108) and the second beam axis (110) define a plane (156); and wherein the plane (156) during the movement of the point of intersection (152) along the contour line (154) forms an angle (157) with the contour line (154), the amount of which is in a predetermined angular range; wherein the angular range extends between a lower angle and an upper angle and the lower angle is greater than zero degrees and the upper angle is less than or equal to 90 degrees, in particular wherein the lower angle is greater than 80 degrees and the upper angle is less than or equal to 90 degrees is. Device (100) according to Claim 6 wherein the first beam axis (108) and the second beam axis (110) define a plane (156); and wherein the plane (156) during the movement of the point of intersection (152) along the contour line (154) forms an angle (157) with the contour line (154), the amount of which is in a predetermined angular range; wherein the predetermined angular range extends between a lower angle and an upper angle and the lower angle is greater than or equal to zero degrees and the upper angle is less than 90 degrees, in particular wherein the lower angle is greater than or equal to zero degrees and the upper angle is less than 10 degrees is. Device (100) according to one of the preceding claims, wherein the optical arrangement (102) comprises a focusing optical element (106); and the second beam axis (110) extends through the focusing optical element (106). Device (100) according to one of the preceding claims, wherein the refractive element (104) has the acute angle (114) between the first Defined beam axis (108) and the second beam axis (110). Device (100) according to one of the preceding claims, wherein the acute angle (114) is a first acute angle and wherein an optical axis of the focusing optical element forms a second acute angle with the first beam axis (108), in particular wherein the first acute angle and the second acute angle are the same. Device (100) according to one of the preceding claims, further comprising an actuator assembly (134, 136); a control device (148) for controlling the actuator arrangement (134, 136) and thereby moving the second beam axis (110) and the workpiece (128) relative to one another.

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