EP1048086A1 - Dispositif d'entrainement piezoelectrique - Google Patents

Dispositif d'entrainement piezoelectrique

Info

Publication number
EP1048086A1
EP1048086A1 EP99953750A EP99953750A EP1048086A1 EP 1048086 A1 EP1048086 A1 EP 1048086A1 EP 99953750 A EP99953750 A EP 99953750A EP 99953750 A EP99953750 A EP 99953750A EP 1048086 A1 EP1048086 A1 EP 1048086A1
Authority
EP
European Patent Office
Prior art keywords
drive device
clamping elements
piezo element
impact
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99953750A
Other languages
German (de)
English (en)
Inventor
Christian Reichinger
Gerhard Diefenbach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Intellectual Property and Standards GmbH
Koninklijke Philips NV
Original Assignee
Philips Corporate Intellectual Property GmbH
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Corporate Intellectual Property GmbH, Koninklijke Philips Electronics NV filed Critical Philips Corporate Intellectual Property GmbH
Publication of EP1048086A1 publication Critical patent/EP1048086A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004—Rectangular vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape

Definitions

  • the invention relates to a drive device with at least one substantially cuboid piezoelectric element and with means for generating a vibration of the piezoelectric element in a vibration plane (x / y plane), a plunger for applying an impact force on at least one lateral surface of the piezoelectric drive element is provided in an impact direction (x direction).
  • Such a drive device is known for example from EP 633 616 A2.
  • this known drive device has a rectangular plate with a plunger, by means of which a force in the direction of impact can be transmitted, for example, to a shaft to be driven.
  • the piezo element has four electrically controllable electrodes, by means of which the piezoelectric element can be excited to oscillate in a vibration plane. With this vibration, the plunger moves approximately on an elliptical curve.
  • a prestressing element is provided which presses by means of a spring force on the lateral surface of the piezoelectric element opposite the plunger.
  • four clamping elements are provided, which on the lateral lateral surfaces of the
  • Act piezo element wherein two of the clamping elements are rigid and press the other two clamping elements by means of a spring force on one of the lateral lateral surfaces of the piezo element.
  • the biasing element presses the plunger of the piezoelectric element against the element to be driven, for example the shaft to be driven.
  • the resilient clamping elements cause a pretension between the piezo element and a motor housing in order to prevent the piezo element, which is relatively thin in the direction perpendicular to the plane of oscillation, from rotating or changing its position about an axis perpendicular or parallel to the direction of impact.
  • the resilient clamping elements mean that a frictional force always occurs between all clamping elements and the piezo element, by means of which the
  • Vibration quality and thus the performance of the engine can be reduced.
  • the vibration of the piezoelectric element is also substantially damped by the biasing force applied in the direction of impact by the biasing element, since the biasing force in an antinode of the longitudinal vibration of the piezoelectric element is initiated.
  • This object is achieved in that only a central suspension element arranged in the center of the piezo element is provided within the volume of the piezo element and that the central suspension element is provided for applying a pretensioning force in the direction of impact.
  • Both the longitudinal vibration and the bending vibration of the piezoelectric element have a node in the center of the piezoelectric element.
  • the central suspension element therefore does not hinder the longitudinal or bending vibration.
  • the application of the pretensioning force in the direction of impact on the central suspension element also does not cause any friction losses. Because the central suspension element is arranged exclusively in the center, the entire volume of the piezoelectric element is available as an active resonator volume outside of this center. Therefore, the drive device according to the invention has a high efficiency.
  • the piezoelectric element it is possible to mount the piezoelectric element exclusively by means of the central suspension element and to provide no further clamping elements.
  • Such a construction is particularly advantageous if the piezo element can be selected to be sufficiently large so that there is also sufficient space available for the central suspension element.
  • a central rectangular hole is preferably provided in the piezo element, into which a rectangular bolt is pressed or glued.
  • Such a rectangular hole is particularly suitable for absorbing high torques which act about an axis running perpendicular or parallel to the direction of impact in the plane of vibration.
  • the advantageous embodiment of the invention according to claim 2 is particularly advantageous for applications in which the available volume of the piezoelectric element is limited.
  • the piezo element is additionally clamped by means of clamping elements which act on the lateral surfaces of the piezo element in the y-direction and / or the z-direction.
  • clamping elements in particular prevent the piezo element from rotating about an axis running perpendicular or parallel to the direction of impact in the plane of vibration.
  • the piezo element is indeed clamped in the directions (y, z) perpendicular to the direction of impact (x direction).
  • this clamping is preferably made as slippery as possible and without applying a biasing force to the piezo element. If the clamping is as slippery as possible, no frictional forces occur between the piezo element and the
  • the advantageous embodiment of the invention according to claim 6 is inexpensive and easy to manufacture.
  • the one clamping element of the first pair prevented a movement of the piezo element in the positive y direction and the other clamping element of the first pair a movement of the piezo element in the opposite negative y direction.
  • the movement of the piezoelectric element in the z direction is limited by means of the second pair.
  • the advantageous embodiment of the invention according to claim 7 ensures a good efficiency of the drive device with high adjustment precision.
  • the fact that only a single clamping element is provided for applying a biasing force minimizes the frictional forces between the clamping elements and the piezo element. At the same time, however, the pretensioning force applied by means of the single clamping element ensures high positioning precision.
  • the advantageous embodiment of the invention according to claim 8 is particularly simple and inexpensive to manufacture.
  • these elastic clamping elements hold the piezoelectric element back until it comes to a stop as a result of the electrical actuation on the other pair of clamping elements.
  • the elastic clamping elements do not exert a prestressing force on the piezoelectric element.
  • the advantageous embodiments of the drive device according to claims 9 and 10 enable simple and inexpensive manufacture of the motor.
  • the drive device according to claim 11 has the advantage that, in the direction of impact, the distance between the central suspension element and the clamps which are rigid in the y-direction remains constant even when the tappet is worn as a result of wear. This ensures that the clamps which are stiff in the y-direction are always positioned precisely at the nodes of the bending vibration even when the ram is abraded. As a result, low friction between the clamping elements and the piezo element is achieved even when the drive is in operation for a longer time, thus ensuring a consistently good efficiency of the drive.
  • the advantageous embodiment of the invention according to claim 12 enables simple attachment of the electrical connections to the drive electrodes of the piezo element.
  • Possible applications for the drive device according to the invention are in particular in drives for driving the reading or writing unit, in particular in optical drives such as CD or DVD drives, in which the optical unit is moved in the radial direction at the highest possible speed while at the same time requiring little space and power the optical disk must be moved.
  • the positioning of a positioning table of an electron microscope represents another Advantageous applications.
  • FIG. 1 shows a drive device with a cuboid piezoelectric element which is mounted in a housing by means of a single central suspension element arranged in the center,
  • FIG. 2a shows a plan view of an embodiment of the drive device, the piezo element of which is mounted in the housing both by means of a central suspension element and by means of clamping elements acting on the lateral surfaces of the piezo element,
  • Fig. 2c shows the waveform of the longitudinal vibration of the piezoelectric
  • FIG. 3 shows a plan view of an embodiment of the drive device according to FIG. 2, the clamping elements acting on the piezoelectric element without bias,
  • FIG. 4 shows a perspective view of a frame which is provided for suspending and clamping the piezoelectric element in the housing
  • FIG. 5 shows a perspective view of the frame according to FIG. 4 together with the piezoelectric element suspended from the frame
  • Fig. 7 shows another embodiment of a CD drive with the motor according to the invention.
  • Fig. 8 shows a third embodiment of a CD drive with a motor according to the invention.
  • 1 shows a plan view of an electrical drive device with a piezo element 1 which has a plunger 3 on a first lateral surface 2.
  • the piezo element 1 is mounted in a housing 4 by means of a central suspension element 5.
  • the central suspension element 5 has a rectangular bolt 6 which engages in a rectangular hole 7 of the piezoelectric element 1.
  • the bolt 6 can be fastened in the hole 7 by means of a press connection or by means of an adhesive.
  • a biasing spring 8 acts on the bolt 6, which biases the piezo element 1 in the direction of impact (x direction) of the piezoelectric element 1 against the housing 4.
  • On the top 9 of the piezoelectric element 1 four rectangular drive electrodes 10, 11, 12 and 13 are applied flat.
  • Piezo element 1 a common reference electrode, not shown, is applied.
  • the direction of polarization of the piezo element 1 below the drive electrodes 10J 1J2 and 13 is the same everywhere.
  • the piezo element 1 is controlled via the control electrodes 10, 11, 12 and 13 in such a way that the piezo element 1 oscillates in the oscillation plane (x / y plane), the oscillation being a superposition of two orthogonal oscillations (in x - or y direction) results.
  • the resonance frequencies of the two orthogonal vibrations can be adjusted by suitable control and by a suitable choice of the geometry of the piezo element 1 so that both vibrations are excited with sufficient amplitude and the desired phase position and that the plunger 3 lies on one in the x / y plane Curve, in particular on an elliptical curve E, the main axis of which is at an angle of, for example Forms 30 ° with the x-axis.
  • the plunger 3 can be used to move an element 14 to be driven in the y-direction by periodically bumping against the element 14 to be driven.
  • the central suspension element 5 can absorb large forces and torques due to the rectangular design of the bolt 6 and the hole 7.
  • the central suspension element 5 is located in the vibration node of both the longitudinal and the bending vibration of the piezo element 1. Since the piezo element does not move in the area of the central suspension element 5, the quality of the vibration of the
  • 2a and 2b show an alternative embodiment of the drive device according to the invention. The same reference numerals as in FIG. 1 are used for the same elements.
  • the piezoelectric element 1 is mounted on the housing 4 by means of a central suspension element 20.
  • the central suspension element 20 has a circular bolt 21 which is fastened in a circular hole 22 in the piezoelectric element 1.
  • This central suspension element 20 is particularly easy to manufacture.
  • the circular bolt 21 and the circular hole 22 can also be formed with a very small diameter.
  • a preload spring 23 acts on the circular bolt 21 and braces the piezo element 1 against the housing 1 in the direction of impact (x direction).
  • the drive device according to FIG. 2a has a first rigid clamping element 24 which is fastened to the housing 4 and which limits the movement of the piezo element 1 in the y direction.
  • a second resilient clamping element 25 is arranged opposite the first rigid clamping element 24 and exerts a biasing force on the piezoelectric element 1 in the y direction.
  • the first rigid clamping element 24 acts on the outer surface 26 and the second resilient clamping element 25 on the opposite outer surface 27 of the piezoelectric element 1.
  • FIG. 2b shows the arrangement according to FIG. 2a in a side view.
  • an elastic clamping element 28 and an elastic clamping element 29 are provided.
  • the elastic clamping element 28 is for acting on an upper lateral surface 30 and the elastic clamping element 29 for acting on a lower lateral surface 31 of the
  • Piezo element 1 is provided, which do not exert a biasing force on the piezoelectric element 1.
  • the elastic clamping elements 28 and 29 are not designed to absorb large forces. If the piezo element 1 hits the elastic clamping elements 28 and 29 during its vibrations, these act elastically on the piezo element 1 in the z direction and hold back the piezo element 1. By means of the electrical control, the piezo element 1 is then pressed against the clamping elements 24 or 25 acting in the y direction, which are provided to absorb larger forces.
  • FIGS. 2c and 2d show the course of the amplitudes of the two orthogonal vibrations of the piezo element 1 in the x and y directions when the electric drive device is operated along the longitudinal direction x of the piezo element 1.
  • FIG. 2c shows the course of the longitudinal vibration
  • FIG. 2d shows the course of the bending vibration.
  • the drive device according to FIGS. 2a and 2b is particularly suitable for applications in which on the one hand little space is available for the piezoelectric element and on the other hand a high adjustment accuracy is required.
  • the high adjustment accuracy is ensured by means of the resilient clamping element 25, which expresses the play between the clamping elements 24, 25, 28 and 29. Since the clamping elements 24, 25, 28 and 29 support the central suspension element 20, the central suspension element 20 can be made very thin, so that it occupies only a small piezo volume.
  • the clamping elements 24, 25, 28 and 29 in particular prevent rotation of the piezo element 1 both about an axis running in the y direction and about an axis running in the x direction.
  • Fig. 3 shows an alternative embodiment of the drive device according to the invention in plan view.
  • the embodiment according to FIG. 3 essentially corresponds to the embodiment according to FIGS. 2a and 2b.
  • the same reference numbers are therefore used.
  • the embodiment according to FIG. 3 has a rigid clamping element 32 instead of the resilient clamping element 25.
  • the piezo element is thus free of bias in the y-directional rigid clamping elements 24 and 32 as well as by means of the elastic clamping elements 28 and 29 not shown in FIG. Direction) in vertical directions (y, z).
  • the piezo element 1 moves in the x direction relative to the clamping elements 24, 32, 28 and 29. This movement in the x direction occurs in the arrangement according to FIG. 3 at the location of the clamping elements 24, 32, 28 and 29 due to the sliding design of the clamping elements not disabled. This increases the efficiency of the drive device compared to that
  • FIG. 4 shows a perspective view of a frame 40 which is provided for the suspension and clamping of a piezoelectric element, not shown.
  • the frame 40 for example, the suspension shown in FIG. 3 and
  • the frame 40 has a rectangular base frame 41 with four legs 41a, 41b, 41c and 41d.
  • the circular bolt 21 according to FIG. 3 is fastened in the middle of the leg 41a.
  • the first rigid clamping element 24 and the second rigid clamping element 32 are fastened to the opposite corners.
  • the elastic clamping elements 28 and 29 are designed as resilient lugs, which are not designed to absorb large forces.
  • the elastic clamping elements 28 and 29 have the task of restraining the piezo element somewhat in the z direction when the piezo element moves in the z direction until, due to the electrical actuation, the rigid clamping elements 24 and 32 stop.
  • the rigid clamping elements 24 and 32 are designed to absorb larger forces.
  • the circular bolt 21 is provided for fastening in the circular hole 22 according to FIG. 3.
  • the frame 40 is slidably supported in the x-direction in the housing 4 of the drive device, wherein guides (not shown) are to be provided in the y-direction. In the x-direction, the frame 40 is prestressed against the housing 4 by means of the prestressing spring 23.
  • the embodiments according to FIGS. 1 and 2 can also be implemented in an equivalent manner by means of a mounting frame.
  • FIG. 5 shows a perspective view of the installation frame 40 according to FIG. 4 together with the piezo element 1 suspended and clamped on the frame 40.
  • the circular bolt 21 of the frame 40 is fastened in the circular hole 22 of the piezo element 1.
  • the piezo element 1 is clamped in the y direction by means of the rigid clamping elements 24 and 32.
  • the piezo element 1 is clamped in the z direction by means of the elastic clamping elements 28 and 29.
  • the clamping elements 24, 32, 28 and 29 are dimensioned such that they do not touch the piezo element 1 in the idle state. In the case of the microscopic vibrations of the piezo element 1, essentially none occurs Friction between the rigid clamping elements 24 and 32 and the piezo element 1, since the rigid clamping elements 24 and 32 at the nodes of the bending vibration of the
  • Piezo element 1 has essentially no frictional forces between the piezo element 1 and the clamping elements 24, 32, 28 and 29. The clamping and suspension of the
  • Piezo element 1 by means of the frame 40 has the particular advantage that the distance D between the circular pin 21 and the rigid clamping elements 24 and 32 always remains constant even when the plunger 3 is worn. This ensures that even at
  • the rigid clamping elements 24 and 32 are always located in the vibration nodes of the bending vibration of the piezo element 1. This ensures that no frictional forces occur between the rigid clamping elements 24 and 32 and the piezo element 1 during the entire operating time of the electrical drive device. This ensures a consistently high level of efficiency.
  • FIG. 6 The use of a drive device according to the invention in a CD drive is shown in FIG. 6. With such drives, one with a read
  • / Write head 53, 54 provided arm 52 can be moved in the radial direction via a CD 51 which is driven by a motor 50.
  • the arm 52 is arranged on a shaft 55 which is rotatable about an axis of rotation 56 and is driven by a drive device according to the invention.
  • a piezo element 1 is arranged in a housing 4, which is biased against the shaft 55. Via the plunger 3, a force is transmitted to the shaft 55, which can be rotated in both directions of rotation depending on the control of the piezo element 1, so that the arm 52 moves in the desired direction via the CD 51.
  • FIG. 7 shows a further embodiment of a CD drive with a piezoelectric drive device 65.
  • the read / write head is hidden behind a lens 60.
  • the entire read / write unit is accommodated on a slide 61 and is moved linearly in the radial direction of the CD 51 by means of the piezoelectric drive device 65 along two guides 62, 63.
  • the piezoelectric drive element 65 can be permanently installed in the housing of the CD drive and can push against the slide 61 and move the slide 61.
  • FIG. 8 Another embodiment is shown in FIG. 8, in which the piezoelectric drive unit 65 is mounted on the carriage 61.
  • the plunger 3 abuts a part of the drive case 64, and the piezoelectric drive device 65 and the carriage 61 move together

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Dry Shavers And Clippers (AREA)
  • Moving Of Heads (AREA)

Abstract

L'invention concerne un dispositif d'entraînement qui comprend au moins un élément piézoélectrique présentant sensiblement la forme d'un parallélépipède ainsi que des moyens pour produire une oscillation de l'élément piézoélectrique dans un plan d'oscillation (plan x/y). Un poussoir servant à appliquer une poussée dans une direction de poussée (axe des x) est placé au moins au niveau d'une surface extérieure de l'élément d'entraînement piézoélectrique. Afin d'améliorer le rendement de ce dispositif, un seul élément de suspension central, placé au centre de l'élément piézoélectrique, est prévu à l'intérieur du volume de l'élément piézoélectrique, ledit élément de suspension exerçant une force de précontrainte sur l'élément piézoélectrique dans le sens de poussée.
EP99953750A 1998-10-01 1999-09-30 Dispositif d'entrainement piezoelectrique Withdrawn EP1048086A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19845134A DE19845134A1 (de) 1998-10-01 1998-10-01 Piezoelektrische Antriebsvorrichtung
DE19845134 1998-10-01
PCT/EP1999/007484 WO2000021145A1 (fr) 1998-10-01 1999-09-30 Dispositif d'entrainement piezoelectrique

Publications (1)

Publication Number Publication Date
EP1048086A1 true EP1048086A1 (fr) 2000-11-02

Family

ID=7882992

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99953750A Withdrawn EP1048086A1 (fr) 1998-10-01 1999-09-30 Dispositif d'entrainement piezoelectrique

Country Status (6)

Country Link
EP (1) EP1048086A1 (fr)
JP (1) JP2002528021A (fr)
CN (1) CN1289458A (fr)
AU (1) AU1033500A (fr)
DE (1) DE19845134A1 (fr)
WO (1) WO2000021145A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10227509A1 (de) * 2002-04-22 2003-11-06 Elliptec Resonant Actuator Ag Piezomotor
WO2007032269A1 (fr) * 2005-09-15 2007-03-22 Sharp Kabushiki Kaisha Dispositif de deplacement par sustentation, son vibreur a ultrasons et procede de regulation des caracteristiques de vibration du vibreur
EP2381338B1 (fr) * 2010-04-23 2012-12-12 Research In Motion Limited Dispositif électronique portable comprenant un dispositif à touches tactiles
US8552997B2 (en) 2010-04-23 2013-10-08 Blackberry Limited Portable electronic device including tactile touch-sensitive input device
DE102010055848B4 (de) * 2010-12-22 2018-01-18 Physik Instrumente (Pi) Gmbh & Co. Kg Ultraschallaktor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5682076A (en) * 1993-08-03 1997-10-28 Nanomotion Ltd. Ceramic disc-drive actuator

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO0021145A1 *

Also Published As

Publication number Publication date
WO2000021145A1 (fr) 2000-04-13
AU1033500A (en) 2000-04-26
CN1289458A (zh) 2001-03-28
JP2002528021A (ja) 2002-08-27
DE19845134A1 (de) 2000-04-06

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