EP1045427A3 - Target locking system for electron beam lithography - Google Patents

Target locking system for electron beam lithography Download PDF

Info

Publication number
EP1045427A3
EP1045427A3 EP00105794A EP00105794A EP1045427A3 EP 1045427 A3 EP1045427 A3 EP 1045427A3 EP 00105794 A EP00105794 A EP 00105794A EP 00105794 A EP00105794 A EP 00105794A EP 1045427 A3 EP1045427 A3 EP 1045427A3
Authority
EP
European Patent Office
Prior art keywords
field
stage
substrate
alignment
marks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00105794A
Other languages
German (de)
French (fr)
Other versions
EP1045427B1 (en
EP1045427A2 (en
Inventor
John G. Hartley
Rodney A. Kendall
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of EP1045427A2 publication Critical patent/EP1045427A2/en
Publication of EP1045427A3 publication Critical patent/EP1045427A3/en
Application granted granted Critical
Publication of EP1045427B1 publication Critical patent/EP1045427B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3175—Lithography
    • H01J2237/31752—Lithography using particular beams or near-field effects, e.g. STM-like techniques
    • H01J2237/31754—Lithography using particular beams or near-field effects, e.g. STM-like techniques using electron beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3175—Lithography
    • H01J2237/31761—Patterning strategy
    • H01J2237/31766—Continuous moving of wafer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/887—Nanoimprint lithography, i.e. nanostamp

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

An e-beam lithographic system capable of in situ registration. The system has an optics section such as a VAIL lens. A controllable stage moves a substrate with respect to the beam axis to place substrate writing fields beneath the beam. A field locking target between the optics section and the stage has an aperture sized to permit the beam to write a target field on the substrate. The field locking target includes alignment or registration marks around the aperture. A differential interferometric system measures the relative positions of the field locking target and the stage and controls stage position. The beam patterns the substrate on a field by field basis. As the stage is moving into position for each field, the beam is swept until it hits the alignment marks, thereby checking system alignment. The beam control data, i.e., coil currents necessary to hit the marks are stored, and drift correction values calculated from the beam control data. Meanwhile, pattern beam control is compensated by the drift correction values. <IMAGE>
EP00105794A 1999-04-13 2000-03-18 Target locking system for electron beam lithography Expired - Lifetime EP1045427B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/290,785 US6437347B1 (en) 1999-04-13 1999-04-13 Target locking system for electron beam lithography
US290785 1999-04-13

Publications (3)

Publication Number Publication Date
EP1045427A2 EP1045427A2 (en) 2000-10-18
EP1045427A3 true EP1045427A3 (en) 2000-12-27
EP1045427B1 EP1045427B1 (en) 2007-05-02

Family

ID=23117558

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00105794A Expired - Lifetime EP1045427B1 (en) 1999-04-13 2000-03-18 Target locking system for electron beam lithography

Country Status (5)

Country Link
US (1) US6437347B1 (en)
EP (1) EP1045427B1 (en)
JP (1) JP3344713B2 (en)
AT (1) ATE361547T1 (en)
DE (1) DE60034625T2 (en)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10011202A1 (en) * 2000-03-08 2001-09-13 Leica Microsys Lithography Ltd Method for aligning an electron beam to a target position on a substrate surface
US6661015B2 (en) * 2000-09-15 2003-12-09 Ims-Ionen Mikrofabrikations Systeme Gmbh Pattern lock system
US7160475B2 (en) * 2002-11-21 2007-01-09 Fei Company Fabrication of three dimensional structures
US6908255B2 (en) * 2003-06-25 2005-06-21 International Business Machines Corporation Remote clamping mechanism via vacuum feedthrough
JP3889743B2 (en) 2003-12-05 2007-03-07 株式会社東芝 Charged beam drawing method and drawing apparatus
GB2409928B (en) * 2004-01-09 2007-03-21 Applied Materials Inc Improvements relating to ion implantation
US20060266953A1 (en) * 2005-05-27 2006-11-30 Uwe Kramer Method and system for determining a positioning error of an electron beam of a scanning electron microscope
US7477772B2 (en) * 2005-05-31 2009-01-13 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing 2D run length encoding for image data compression
JP4520426B2 (en) 2005-07-04 2010-08-04 株式会社ニューフレアテクノロジー Electron beam drift correction method and electron beam writing method
US7456414B2 (en) * 2005-09-28 2008-11-25 Applied Materials, Inc. Beam re-registration system and method
JP4980628B2 (en) * 2006-03-06 2012-07-18 日本電子株式会社 Hysteresis elimination method using automatic transition buttons
WO2008030929A1 (en) * 2006-09-06 2008-03-13 Massachusetts Institute Of Technology Nanometer-level mix-and-match scanning tip and electron beam lithography using global backside position reference marks
JP2009218474A (en) * 2008-03-12 2009-09-24 Jeol Ltd Method for suppressing beam position drift, method for suppressing beam size drift, and charged particle beam plotting device
EP2676168B1 (en) * 2011-02-16 2018-09-12 Mapper Lithography IP B.V. System for magnetic shielding
US8389962B2 (en) * 2011-05-31 2013-03-05 Applied Materials Israel, Ltd. System and method for compensating for magnetic noise
JP6057672B2 (en) * 2012-11-05 2017-01-11 株式会社ニューフレアテクノロジー Charged particle beam drawing apparatus and charged particle beam drawing method
DE102019200696B4 (en) 2019-01-21 2022-02-10 Carl Zeiss Smt Gmbh Apparatus, method and computer program for determining a position of an element on a photolithographic mask

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4119854A (en) * 1976-11-25 1978-10-10 Nihon Denshi Kabushiki Kaisha Electron beam exposure system
US4967088A (en) * 1987-06-02 1990-10-30 Oesterreichische Investitionskredit Aktiengesellschaft Method and apparatus for image alignment in ion lithography
US5552611A (en) * 1995-06-06 1996-09-03 International Business Machines Pseudo-random registration masks for projection lithography tool

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3874916A (en) * 1972-06-23 1975-04-01 Radiant Energy Systems Mask alignment system for electron beam pattern generator
JPS5530811A (en) * 1978-08-25 1980-03-04 Chiyou Lsi Gijutsu Kenkyu Kumiai Single field alignment method
JPS57183034A (en) 1981-05-07 1982-11-11 Toshiba Corp Electron bean transfer device
JPS62287556A (en) * 1986-06-05 1987-12-14 Toshiba Corp Axis-aligning method for charged beam
US4818885A (en) 1987-06-30 1989-04-04 International Business Machines Corporation Electron beam writing method and system using large range deflection in combination with a continuously moving table
JPH0831405B2 (en) * 1988-06-01 1996-03-27 イーエムエス イオーネン ミクロファブ リカチオンス ジステーメ ゲゼルシャフト ミト ベシュレンクテル ハフツング Ion projection lithographic apparatus and method
JPH0722010B2 (en) 1989-09-28 1995-03-08 株式会社日立製作所 Electron beam writer
US5043586A (en) * 1990-10-25 1991-08-27 International Business Machines Corporation Planarized, reusable calibration grids
JP3148353B2 (en) 1991-05-30 2001-03-19 ケーエルエー・インストルメンツ・コーポレーション Electron beam inspection method and system
JP2788139B2 (en) 1991-09-25 1998-08-20 株式会社日立製作所 Electron beam drawing equipment
US5424548A (en) 1993-09-21 1995-06-13 International Business Machines Corp. Pattern specific calibration for E-beam lithography
JPH09246135A (en) * 1996-03-04 1997-09-19 Hitachi Ltd Electric charge particle beam drawing device
US5793048A (en) * 1996-12-18 1998-08-11 International Business Machines Corporation Curvilinear variable axis lens correction with shifted dipoles
US6218671B1 (en) * 1998-08-31 2001-04-17 Nikon Corporation On-line dynamic corrections adjustment method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4119854A (en) * 1976-11-25 1978-10-10 Nihon Denshi Kabushiki Kaisha Electron beam exposure system
US4967088A (en) * 1987-06-02 1990-10-30 Oesterreichische Investitionskredit Aktiengesellschaft Method and apparatus for image alignment in ion lithography
US5552611A (en) * 1995-06-06 1996-09-03 International Business Machines Pseudo-random registration masks for projection lithography tool

Also Published As

Publication number Publication date
JP3344713B2 (en) 2002-11-18
ATE361547T1 (en) 2007-05-15
US6437347B1 (en) 2002-08-20
US20020056813A1 (en) 2002-05-16
JP2000349021A (en) 2000-12-15
DE60034625D1 (en) 2007-06-14
EP1045427B1 (en) 2007-05-02
DE60034625T2 (en) 2008-01-03
EP1045427A2 (en) 2000-10-18

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