EP1040923A3 - Tintenstrahlaufzeichnungskopf, piezoelektrische Vibratorelementeinheit und Verfahren zur Herstellung der piezoelektrischen Vibratorelementeinheit - Google Patents

Tintenstrahlaufzeichnungskopf, piezoelektrische Vibratorelementeinheit und Verfahren zur Herstellung der piezoelektrischen Vibratorelementeinheit Download PDF

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Publication number
EP1040923A3
EP1040923A3 EP00106070A EP00106070A EP1040923A3 EP 1040923 A3 EP1040923 A3 EP 1040923A3 EP 00106070 A EP00106070 A EP 00106070A EP 00106070 A EP00106070 A EP 00106070A EP 1040923 A3 EP1040923 A3 EP 1040923A3
Authority
EP
European Patent Office
Prior art keywords
piezoelectric vibration
vibration element
element unit
manufacturing
recording head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00106070A
Other languages
English (en)
French (fr)
Other versions
EP1040923B1 (de
EP1040923A2 (de
Inventor
Tsuyoshi Kitahara
Hiroshi Arai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of EP1040923A2 publication Critical patent/EP1040923A2/de
Publication of EP1040923A3 publication Critical patent/EP1040923A3/de
Application granted granted Critical
Publication of EP1040923B1 publication Critical patent/EP1040923B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1612—Production of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
EP00106070A 1999-03-29 2000-03-29 Tintenstrahlaufzeichnungskopf, piezoelektrische Vibratorelementeinheit und Verfahren zur Herstellung der piezoelektrischen Vibratorelementeinheit Expired - Lifetime EP1040923B1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP8578899 1999-03-29
JP8578899 1999-03-29
JP2000076269 2000-03-17
JP2000076269 2000-03-17

Publications (3)

Publication Number Publication Date
EP1040923A2 EP1040923A2 (de) 2000-10-04
EP1040923A3 true EP1040923A3 (de) 2000-11-08
EP1040923B1 EP1040923B1 (de) 2003-12-03

Family

ID=26426792

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00106070A Expired - Lifetime EP1040923B1 (de) 1999-03-29 2000-03-29 Tintenstrahlaufzeichnungskopf, piezoelektrische Vibratorelementeinheit und Verfahren zur Herstellung der piezoelektrischen Vibratorelementeinheit

Country Status (3)

Country Link
EP (1) EP1040923B1 (de)
AT (1) ATE255505T1 (de)
DE (1) DE60006878T2 (de)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0550030A2 (de) * 1991-12-26 1993-07-07 Seiko Epson Corporation Tintenstrahldruckkopf und sein Herstellungsverfahren
WO1996000151A1 (fr) * 1994-06-23 1996-01-04 Citizen Watch Co., Ltd. Actionneur piezo-electrique pour tete d'impression a jet d'encre et son procede de fabrication
EP0761447A2 (de) * 1995-09-05 1997-03-12 Seiko Epson Corporation Tintenstrahlaufzeichnungskopf und sein Herstellungsverfahren
EP0787589A2 (de) * 1996-02-05 1997-08-06 Seiko Epson Corporation Tintenstrahlaufzeichnungskopf
EP0860279A1 (de) * 1997-02-21 1998-08-26 Seiko Epson Corporation Tintenstrahlaufzeichnungskopf
EP0861725A2 (de) * 1997-01-27 1998-09-02 Seiko Epson Corporation Tintenstrahldruckkopf
DE19745980A1 (de) * 1997-03-19 1998-10-01 Fujitsu Ltd Tintenstrahlkopf zum Vorsehen eines akkuraten Positionierens von Düsen von Segmentchips auf einem Halter

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0550030A2 (de) * 1991-12-26 1993-07-07 Seiko Epson Corporation Tintenstrahldruckkopf und sein Herstellungsverfahren
WO1996000151A1 (fr) * 1994-06-23 1996-01-04 Citizen Watch Co., Ltd. Actionneur piezo-electrique pour tete d'impression a jet d'encre et son procede de fabrication
US5945773A (en) * 1994-06-23 1999-08-31 Citizen Watch Co., Ltd. Piezoelectric actuator for ink-jet printer and method of manufacturing the same
EP0761447A2 (de) * 1995-09-05 1997-03-12 Seiko Epson Corporation Tintenstrahlaufzeichnungskopf und sein Herstellungsverfahren
EP0787589A2 (de) * 1996-02-05 1997-08-06 Seiko Epson Corporation Tintenstrahlaufzeichnungskopf
EP0861725A2 (de) * 1997-01-27 1998-09-02 Seiko Epson Corporation Tintenstrahldruckkopf
EP0860279A1 (de) * 1997-02-21 1998-08-26 Seiko Epson Corporation Tintenstrahlaufzeichnungskopf
DE19745980A1 (de) * 1997-03-19 1998-10-01 Fujitsu Ltd Tintenstrahlkopf zum Vorsehen eines akkuraten Positionierens von Düsen von Segmentchips auf einem Halter

Also Published As

Publication number Publication date
ATE255505T1 (de) 2003-12-15
EP1040923B1 (de) 2003-12-03
EP1040923A2 (de) 2000-10-04
DE60006878T2 (de) 2004-10-14
DE60006878D1 (de) 2004-01-15

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