EP1029114A1 - Product designed to be subjected to the effects of hot gas and method for producing a coating for this product - Google Patents

Product designed to be subjected to the effects of hot gas and method for producing a coating for this product

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Publication number
EP1029114A1
EP1029114A1 EP98961039A EP98961039A EP1029114A1 EP 1029114 A1 EP1029114 A1 EP 1029114A1 EP 98961039 A EP98961039 A EP 98961039A EP 98961039 A EP98961039 A EP 98961039A EP 1029114 A1 EP1029114 A1 EP 1029114A1
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EP
European Patent Office
Prior art keywords
product
coating
chromium
oxide
chromium nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP98961039A
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German (de)
French (fr)
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EP1029114B1 (en
Inventor
Wolfram Beele
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Siemens AG
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Siemens AG
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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/321Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
    • C23C28/3215Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer at least one MCrAlX layer
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/345Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/345Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
    • C23C28/3455Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer with a refractory ceramic layer, e.g. refractory metal oxide, ZrO2, rare earth oxides or a thermal barrier system comprising at least one refractory oxide layer
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/02Pretreatment of the material to be coated

Definitions

  • the invention relates to a product designed for hot gas application with a coating, in particular a gas turbine blade.
  • the invention further relates to a method for producing a coating for a product designed for the application of hot gas.
  • the aim of the research is to develop a diffusion barrier between the base material and the coating, which at the same time guarantees a good connection of the coating to the base material. This is achieved using a chrome-aluminum-oxide-nitride system (Cr-AL-0-N).
  • the object of the invention is to provide a product designed for hot gas application, in which a coating is provided which is improved with regard to its long-term resistance.
  • Another object of the invention is to provide a method for producing a coating for a product designed for the application of hot gas.
  • the object aimed at specifying a product is achieved by a product made of a base material on which a coating is applied and which is designed for hot gas application, comprising:
  • a protective layer made of MCrAlY which contains at least one metal from the group (iron, cobalt,
  • Chromium (Cr) with a content of at least 15 wt%, in particular at least 20 wt%;
  • a product which can be subjected to hot gas is often provided with a protective layer of the type just mentioned.
  • Protective layer serves to protect against oxidation and corrosion.
  • an oxide layer is formed on such a protective layer, which essentially consists of aluminum oxide and / or chromium oxide.
  • the oxide layer can also be formed by oxidation from a thin layer of an oxide former, such as aluminum or chromium, applied to the protective layer.
  • an oxide former such as aluminum or chromium
  • the protective layer of aluminum and chromium becomes poorer because aluminum and / or chromium diffuse into the oxide layer and oxidize there. As a result, the oxide layer grows. This is usually the life-limiting aging process for the coating and affects the mechanical properties of the growing oxide layer.
  • chromium nitride is built into the coating.
  • the invention is based on the surprising finding that chromium nitride is present in sufficient amounts in the protective layer can be formed if the concentration of chromium is above 15 wt%, preferably above 20 wt%.
  • the chromium nitride acts as a particularly efficient diffusion barrier for the diffusion of aluminum and / or chromium to oxygen. This significantly improves the long-term durability of the coating.
  • the protective layer preferably contains rhenium, in particular with a proportion between 1 wt% and 15 wt%.
  • wt% means percent by weight and at% atomic percent.
  • the chromium nitride is preferably contained in the oxide layer.
  • the chromium nitride is more preferably present in a concentration between 10 at% and 60 at%, in particular about 50 at%.
  • the chromium nitride is preferably present between the protective layer and the oxide layer, preferably in a transition region or also anchoring region between the oxide layer and the protective layer.
  • chromium nitride in the form of a lattice.
  • the chromium nitride preferably forms such a lattice, in particular an approximately rectangular lattice with a side length between 0.1 ⁇ m and 10 ⁇ m.
  • the formation of such a lattice represents a particularly efficient diffusion barrier.
  • the lattice structure reduces the susceptibility of the coating to cracking, which additionally improves the long-term durability of the coating.
  • the product is preferably designed as a turbine blade, in particular as a gas turbine blade.
  • a turbine blade Today, gas turbine showings are mostly exposed to particularly high thermal loads and an intensive attack by oxidation or corrosion.
  • the service life of the coating of a gas turbine blade usually determines the inspection interval of the entire blade.
  • the product is preferably designed as a heat shield of a thermal machine, in particular for a combustion chamber.
  • a ceramic thermal barrier coating is preferably applied to the oxide layer, in particular a zircon-based thermal barrier coating.
  • a ceramic thermal barrier coating serves to protect the turbine blade from very high temperatures.
  • the ceramic thermal barrier coating is coupled to the protective layer via the oxide layer. An increase in the oxide layer leads to an increasing brittleness of the oxide layer.
  • the increasing brittleness of the oxide layer has a reducing effect on the long-term durability of the coating due to an increased susceptibility to detachment of the thermal insulation layer. Because the diffusion-inhibiting effect of the chromium nitride slows down the growth of the oxide layer, the long-term stability of the coating is improved at a particularly vulnerable point, namely the boundary layer between the thermal insulation layer and the protective layer.
  • the object aimed at specifying a method is achieved by a method for producing a coating for a product designed for the application of hot gas, whereby
  • At least one metal from the group (iron, cobalt, Nikkei), abbreviated with M, • chromium (Cr) with a content of at least 15 at%, in particular at least 20 at%,
  • Yttrium (Y) and / or hafnium and / or a metal from the group of rare earths, in particular scandium, lanthanum or cerium, is applied to the product
  • an oxide layer, in particular with aluminum oxide and / or chromium oxide, is formed on the protective layer
  • chromium nitride is generated via a nitrogen supply in the coating.
  • the nitrogen is preferably supplied from a nitrogen plasma source via a nitrogen plasma treatment.
  • a nitrogen plasma which additionally contains hydrogen as an oxygen getter, is more preferably supplied to the coating. The provision of hydrogen in a non-molecular form enables oxygen to be extracted from the chromium oxide.
  • a DC voltage (BIAS) is more preferably applied between the product and the nitrogen plasma source. This enables faster production of chromium nitride because the nitrogen penetrates the product more efficiently.
  • Fig. 1 shows a longitudinal section through a coating of a hot gas product
  • Fig. 2 is an enlarged, schematic representation of a chromium nitride lattice in an oxide layer.
  • the gas turbine blade 1 shows a section of a longitudinal section through a gas turbine blade which represents the product 1 which can be subjected to hot gas.
  • the gas turbine blade 1 consists of a
  • Base material 2 e.g. made of a nickel-based superalloy.
  • the gas turbine blade 1 has a surface 1A.
  • AI aluminum between 6 wt and 15 wt%
  • y yttrium and / or hafnium and / or a rare earth metal, in particular scandium, lanthanum or cerium between 0.01 wt% and 2 wt%
  • M nickel and / or cobalt and / or iron as the rest.
  • Rhenium or other additives may also be present.
  • a grid 8 made of chromium nitride 6 is shown schematically, which grid is made up of grid cells 7A.
  • the interior of the grid cells 7A consists of aluminum oxide and / or chromium oxide.
  • the grid 8 is not geometrically perfect, so it has e.g. Interruptions, changing thicknesses and changing area sizes of the grid cells 7A.
  • an approximate average side length A of a grid cell 7A can be specified, which is preferably between 0.1 ⁇ m and 5 ⁇ m. This average side length A depends in particular on the material of the protective layer and / or the oxide layer or also on process parameters in the formation of the chromium nitride.
  • Such a lattice of the chromium nitride 6 particularly efficiently prevents diffusion of aluminum or chromium.

Abstract

The invention relates to a product (1) which is designed to be subjected to the effects of hot gas. Said product has a coating (3) into which chromium nitride (6) has been incorporated in the form of a diffusion barrier to improve the long-term resistance of the coating (3). The invention also relates to a method for producing a coating (3) for a product (1) designed to be subjected to the effects of hot gas.

Description

Beschreibungdescription
FÜR EINE HEISSGASBEAUFSCHLAGUNG AUSGELEGTES ERZEUGNIS UND VERFAHREN ZUR HERSTELLUNG EINER BESCHICHTUNG FÜR EIN FÜR DIESES ERZEUGNISPRODUCT DESIGNED FOR HOT GAS APPLICATION AND METHOD FOR PRODUCING A COATING FOR ONE FOR THIS PRODUCT
Die Erfindung betrifft ein für eine Heißgasbeaufschlagung ausgelegtes Erzeugnis mit einer Beschichtung, insbesondere eine Gasturbinenschaufel. Die Erfindung betrifft weiter ein Verfahren zur Herstellung einer Beschichtung für ein für eine Heißgasbeaufschlagung ausgelegtes Erzeugnis.The invention relates to a product designed for hot gas application with a coating, in particular a gas turbine blade. The invention further relates to a method for producing a coating for a product designed for the application of hot gas.
In dem Artikel „Diffusion barrier coatings with active bonding, designed for gas turbine blades", von 0. Knotek, E. Lugscheider, F. Löffler, W. Beele, in den „Proceedings of the 21sC International Conference on Metallurgical Coatings and Thin Films", San Diego, CA, USA, April 25 - 29, 1994, ist eine Diffusionsbarrierenbeschichtung für eine Gasturbinen- schaufel beschrieben. Eine Gasturbinenschaufel weist häufig eine Oxidations- bzw. Korrosionsschutzbeschichtung auf einem Grundwerkstoff, in der Regel einer Superlegierung, auf. Aufgrund von Diffusionsprozessen kann es zur Bildung spröder Phasen in der Beschichtung kommen, wodurch die Lebensdauer der Gasturbinenschaufel beeinträchtigt wird. Ziel der For- schung ist es, eine Diffusionsbarriere zwischen dem Grundwerkstoff und der Beschichtung zu entwickeln, die gleichzeitig eine gute Anbindung der Beschichtung an den Grundwerkstoff gewährleistet. Dies wird durch ein Chrom-Aluminium- Oxid-Nitrid-System (Cr-AL-0-N) erreicht.In the article "Diffusion barrier coatings with active bonding, designed for gas turbine blades", by 0. Knotek, E. Lugscheider, F. Löffler, W. Beele, in the "Proceedings of the 21 sC International Conference on Metallurgical Coatings and Thin Films ", San Diego, CA, USA, April 25-29, 1994, describes a diffusion barrier coating for a gas turbine blade. A gas turbine blade often has an oxidation or corrosion protection coating on a base material, usually a superalloy. Diffusion processes can lead to the formation of brittle phases in the coating, which affects the service life of the gas turbine blade. The aim of the research is to develop a diffusion barrier between the base material and the coating, which at the same time guarantees a good connection of the coating to the base material. This is achieved using a chrome-aluminum-oxide-nitride system (Cr-AL-0-N).
Aufgabe der Erfindung ist die Angabe eines für eine Heißgas- beaufschlagung ausgelegten Erzeugnisses, bei dem eine bezüglich ihrer Langzeitbest ndigkeit verbesserte Beschichtung vorgesehen ist. Weitere Aufgabe der Erfindung ist die Angabe eines Verfahrens zur Herstellung einer Beschichtung für ein für eine Heißgasbeaufschlagung ausgelegtes Erzeugnis . Erfindungsgemäß wird die auf Angabe eines Erzeugnisses gerichtete Aufgabe gelöst durch ein für eine Heißgasbeaufschla- gung ausgelegtes Erzeugnis aus einem Grundwerkstoff auf dem eine Beschichtung aufgebracht ist, umfassend:The object of the invention is to provide a product designed for hot gas application, in which a coating is provided which is improved with regard to its long-term resistance. Another object of the invention is to provide a method for producing a coating for a product designed for the application of hot gas. According to the invention, the object aimed at specifying a product is achieved by a product made of a base material on which a coating is applied and which is designed for hot gas application, comprising:
a) eine Schutzschicht aus MCrAlY, die mindestens ein Metall aus der Gruppe (Eisen, Kobalt,a) a protective layer made of MCrAlY, which contains at least one metal from the group (iron, cobalt,
Nickel) , abgekürzt mit M;Nickel), abbreviated to M;
Chrom (Cr) mit einem Gehalt von mindestens 15 wt%, insbe sondere mindestens 20 wt%;Chromium (Cr) with a content of at least 15 wt%, in particular at least 20 wt%;
Aluminium (AI) undAluminum (AI) and
Yttrium (Y) und/oder Hafnium und/oder ein Metall aus derYttrium (Y) and / or hafnium and / or a metal from the
Gruppe der Seltenen Erden, insbesondere Scandium,Rare earth group, especially scandium,
Lanthan oder Cer enthält; b) eine Oxidschicht, insbesondere mit Aluminiumoxid und/oder Chromoxid; c) Chromnitrid.Contains lanthanum or cerium; b) an oxide layer, in particular with aluminum oxide and / or chromium oxide; c) Chromium nitride.
Ein heißgasbeaufschlagbares Erzeugnis ist häufig mit einer Schutzschicht der eben genannten Art versehen. Eine solcheA product which can be subjected to hot gas is often provided with a protective layer of the type just mentioned. Such
Schutzschicht dient einem Oxidations- und Korrosionsschutz. Auf einer solchen Schutzschicht bildet sich bei Kontakt mit Sauerstoff eine Oxidschicht, die im wesentlichen aus Aluminiumoxid und/oder Chromoxid besteht. Die Oxidschicht kann auch durch Oxidation von einer dünnen, auf die Schutzschicht aufgebrachten Lage eines Oxidbildners, wie z.B. Aluminium oder Chrom gebildet sein. Im Laufe der Zeit verarmt die Schutzschicht an Aluminium und Chrom dadurch, daß Aluminium und/oder Chrom in die Oxidschicht diffundieren und dort oxi- dieren. Die Oxidschicht wächst dadurch. Dies ist in der Regel der lebensdauerbegrenzende Alterungsprozeß für die Beschichtung und beeinträchtigt die mechanischen Eigenschaften der wachsenden Oxidschicht. Um der Diffusion von Aluminium und/oder Chrom zum Sauerstoff oder umgekehrt entgegenzuwir- ken, wird in die Beschichtung Chromnitrid eingebaut. Die Erfindung beruht dabei auf der überraschenden Erkenntnis, daß in der Schutzschicht in ausreichenden Mengen Chromnitrid bildbar ist, wenn die Konzentration des Chroms über 15 wt%, vorzugsweise über 20 wt% liegt. Das Chromnitrid wirkt als eine besonders effiziente Diffusionsbarriere für die Diffusion von Aluminium und/oder Chrom zum Sauerstoff. Damit wird die Langzeitbestandigkeit der Beschichtung deutlich verbessert.Protective layer serves to protect against oxidation and corrosion. Upon contact with oxygen, an oxide layer is formed on such a protective layer, which essentially consists of aluminum oxide and / or chromium oxide. The oxide layer can also be formed by oxidation from a thin layer of an oxide former, such as aluminum or chromium, applied to the protective layer. In the course of time, the protective layer of aluminum and chromium becomes poorer because aluminum and / or chromium diffuse into the oxide layer and oxidize there. As a result, the oxide layer grows. This is usually the life-limiting aging process for the coating and affects the mechanical properties of the growing oxide layer. In order to counteract the diffusion of aluminum and / or chromium to oxygen or vice versa, chromium nitride is built into the coating. The invention is based on the surprising finding that chromium nitride is present in sufficient amounts in the protective layer can be formed if the concentration of chromium is above 15 wt%, preferably above 20 wt%. The chromium nitride acts as a particularly efficient diffusion barrier for the diffusion of aluminum and / or chromium to oxygen. This significantly improves the long-term durability of the coating.
Vorzugsweise enthält die Schutzschicht Rhenium, insbesondere mit einem Anteil zwischen 1 wt% und 15 wt% . Hier und im folgenden bedeuten wt% Gewichtsprozent und at% Atomprozent.The protective layer preferably contains rhenium, in particular with a proportion between 1 wt% and 15 wt%. Here and below, wt% means percent by weight and at% atomic percent.
Bevorzugt ist das Chromnitrid in der Oxidschicht enthalten. Weiter bevorzugt ist das Chromnitrid in einer Konzentration zwischen 10 at% und 60 at%, insbesondere etwa 50 at%, enthalten. Bevorzugtermaßen ist das Chromnitrid zwischen der Schutzschicht und der Oxidschicht vorhanden, vorzugsweise in einem Übergangsbereich oder auch Verankerungsbereich zwischen Oxidschicht und Schutzschicht.The chromium nitride is preferably contained in the oxide layer. The chromium nitride is more preferably present in a concentration between 10 at% and 60 at%, in particular about 50 at%. The chromium nitride is preferably present between the protective layer and the oxide layer, preferably in a transition region or also anchoring region between the oxide layer and the protective layer.
Überraschenderweise ist es möglich, Chromnitrid in Form eines Gitters zu bilden. Bevorzugt bildet das Chromnitrid ein solches Gitter, insbesondere ein etwa rechteckiges Gitter mit einer Seitenlänge zwischen 0,1 μ und 10 μm. Die Bildung eines solchen Gitters stellt eine besonders effiziente Diffusionsbarriere dar. Zudem wird durch die Gitterstruktur die Riß- anfälligkeit der Beschichtung herabgesetzt, was zusätzlich die Langzeitbestandigkeit der Beschichtung verbessert.Surprisingly, it is possible to form chromium nitride in the form of a lattice. The chromium nitride preferably forms such a lattice, in particular an approximately rectangular lattice with a side length between 0.1 μm and 10 μm. The formation of such a lattice represents a particularly efficient diffusion barrier. In addition, the lattice structure reduces the susceptibility of the coating to cracking, which additionally improves the long-term durability of the coating.
Bevorzugt ist das Erzeugnis als Turbinenschaufel, insbesondere als Gasturbinenschaufel ausgeführt. Gasturbinenschaufein sind heute zumeist besonders hohen thermischen Belastungen und einem intensiven Angriff durch Oxidation oder Korrosion ausgesetzt. Die Lebensdauer der Beschichtung einer Gasturbinenschaufel bestimmt dabei in der Regel das Revisionsinter- vall der ganzen Schaufel. Vorzugsweise ist das Erzeugnis als Hitzeschild einer thermischen Maschine, insbesondere für eine Brennkammer, ausgeführt. Bevorzugt ist auf die Oxidschicht eine keramische Wärmedämmschicht aufgebracht, insbesondere eine Wärmedämmschicht auf Zirkonbasis. Eine keramische Wärmedämmschicht dient zum Schutz der Turbinenschaufel vor sehr hohen Temperaturen. Die keramische Wärmedämmschicht ist über die Oxidschicht an die Schutzschicht angekoppelt. Ein Anwachsen der Oxidschicht führt zu einer zunehmenden Sprödheit der Oxidschicht. Die zunehmende Sprödheit der Oxidschicht hat eine die Langzeitbestandigkeit der Beschichtung verringernde Wirkung durch eine vergrößerte Anfälligkeit für ein Ablösen der Wärmedämmschicht. Indem durch die diffusionshemmende Wirkung des Chromnitrids ein Anwachsen der Oxidschicht verlangsamt wird, wird die Beschichtung in ihrer Langzeitbestandigkeit an einer besonders anfälligen Stelle, nämlich der Grenzschicht zwi- sehen Wärmedämmschicht und Schutzschicht verbessert.The product is preferably designed as a turbine blade, in particular as a gas turbine blade. Today, gas turbine showings are mostly exposed to particularly high thermal loads and an intensive attack by oxidation or corrosion. The service life of the coating of a gas turbine blade usually determines the inspection interval of the entire blade. The product is preferably designed as a heat shield of a thermal machine, in particular for a combustion chamber. A ceramic thermal barrier coating is preferably applied to the oxide layer, in particular a zircon-based thermal barrier coating. A ceramic thermal barrier coating serves to protect the turbine blade from very high temperatures. The ceramic thermal barrier coating is coupled to the protective layer via the oxide layer. An increase in the oxide layer leads to an increasing brittleness of the oxide layer. The increasing brittleness of the oxide layer has a reducing effect on the long-term durability of the coating due to an increased susceptibility to detachment of the thermal insulation layer. Because the diffusion-inhibiting effect of the chromium nitride slows down the growth of the oxide layer, the long-term stability of the coating is improved at a particularly vulnerable point, namely the boundary layer between the thermal insulation layer and the protective layer.
Erfindungsgemäß wird die auf Angabe eines Verfahrens gerichtete Aufgabe gelöst durch ein Verfahren zur Herstellung einer Beschichtung für ein für eine Heißgasbeaufschlagung ausgeleg- tes Erzeugnis, wobeiAccording to the invention, the object aimed at specifying a method is achieved by a method for producing a coating for a product designed for the application of hot gas, whereby
a) eine Schutzschicht aus MCrAlY, diea) a protective layer of MCrAlY, the
• mindestens ein Metall aus der Gruppe (Eisen, Kobalt, Nikkei) , abgekürzt mit M, • Chrom (Cr) mit einem Gehalt von mindestens 15 at%, insbesondere mindestens 20 at%,At least one metal from the group (iron, cobalt, Nikkei), abbreviated with M, • chromium (Cr) with a content of at least 15 at%, in particular at least 20 at%,
• Aluminium (AI) und• Aluminum (AI) and
• Yttrium (Y) und/oder Hafnium und/oder ein Metall aus der Gruppe der Seltenen Erden, insbesondere Scandium, Lanthan oder Cer enthält, auf das Erzeugnis aufgebracht, b) eine Oxidschicht, insbesondere mit Aluminiumoxid und /oder Chromoxid auf der Schutzschicht gebildet und c) Chromnitrid über eine Stickstoffzufuhr in der Beschichtung erzeugt wird. Bevorzugt erfolgt die Stickstoffzufuhr aus einer Stickstoff- plasmaquelle über eine Stickstoffplasmabehandlung. Weiter bevorzugt wird der Beschichtung ein Stickstoffplasma zugeführt, welches als Sauerstoffgetter zusätzlich Wasserstoff enthält. Die Bereitstellung von Wasserstoff, und zwar in nicht molekularer Form ermöglicht es, dem Chromoxid Sauerstoff zu entziehen. Dadurch kann sich Stickstoff an das Chrom anlagern, was zur Bildung von Chromnitrid führt. Weiter bevorzugt wird zwischen dem Erzeugnis und der Stickstoffplasmaquelle eine Gleichspannung (BIAS) angelegt. Dadurch ist eine schnellere Erzeugung von Chromnitrid möglich, da der Stickstoff effizienter in das Erzeugnis eindringt. Vorzugsweise wird eine Gleichspannung von 50 V bis 600 V, insbesondere von 100 V bis 300 V angelegt.• Yttrium (Y) and / or hafnium and / or a metal from the group of rare earths, in particular scandium, lanthanum or cerium, is applied to the product, b) an oxide layer, in particular with aluminum oxide and / or chromium oxide, is formed on the protective layer and c) chromium nitride is generated via a nitrogen supply in the coating. The nitrogen is preferably supplied from a nitrogen plasma source via a nitrogen plasma treatment. A nitrogen plasma, which additionally contains hydrogen as an oxygen getter, is more preferably supplied to the coating. The provision of hydrogen in a non-molecular form enables oxygen to be extracted from the chromium oxide. This allows nitrogen to attach to the chromium, which leads to the formation of chromium nitride. A DC voltage (BIAS) is more preferably applied between the product and the nitrogen plasma source. This enables faster production of chromium nitride because the nitrogen penetrates the product more efficiently. A DC voltage of 50 V to 600 V, in particular 100 V to 300 V, is preferably applied.
Die Erfindung wird in einem Ausführungsbeispiel anhand der Zeichnung näher erläutert. Es zeigen:The invention is explained in more detail in an exemplary embodiment with reference to the drawing. Show it:
Fig. 1 einen Längsschnitt durch eine Beschichtung eines heißgasbeaufschlagbaren Erzeugnisses undFig. 1 shows a longitudinal section through a coating of a hot gas product and
Fig. 2 eine vergrößerte, schematische Darstellung eines Chromnitridgitters in einer Oxidschicht.Fig. 2 is an enlarged, schematic representation of a chromium nitride lattice in an oxide layer.
Gleiche Bezugszeichen haben in den Figuren die gleiche Bedeutung.The same reference numerals have the same meaning in the figures.
Fig. 1 ist ein Ausschnitt eines Längsschnittes durch eine das heißgasbeaufschlagbare Erzeugnis 1 darstellende Gasturbinen- schaufel gezeigt. Die Gasturbinenschaufel 1 besteht aus einem1 shows a section of a longitudinal section through a gas turbine blade which represents the product 1 which can be subjected to hot gas. The gas turbine blade 1 consists of a
Grundwerkstoff 2, z.B. aus einer Nickel-Basis-Superlegierung. Die Gasturbinenschaufel 1 weist eine Oberfläche 1A auf. Auf die Oberfläche 1A ist eine Schutzschicht aus MCrAlY aufgebracht, vorzugsweise mit den folgenden Konzentrationen: Cr = Chrom zwischen 15 wt% und 30 wt%,Base material 2, e.g. made of a nickel-based superalloy. The gas turbine blade 1 has a surface 1A. A protective layer of MCrAlY is applied to the surface 1A, preferably with the following concentrations: Cr = chromium between 15 wt% and 30 wt%,
AI = Aluminium zwischen 6 wt und 15 wt% y = Yttrium und/oder Hafnium und/oder ein Metall der Seltenen Erden, insbesondere Scandium, Lanthan oder Cer zwischen 0.01 wt% und 2 wt%, M = Nickel und/oder Kobalt und/oder Eisen als Rest.AI = aluminum between 6 wt and 15 wt% y = yttrium and / or hafnium and / or a rare earth metal, in particular scandium, lanthanum or cerium between 0.01 wt% and 2 wt%, M = nickel and / or cobalt and / or iron as the rest.
Weiterhin kann bzw. können Rhenium oder andere Zusätze enthalten sein.Rhenium or other additives may also be present.
An die Schutzschicht 4 schließt sich eine Oxidschicht 5 an. Diese ist stark vergrößert dargestellt. An die Oxidschicht 5 schließt sich eine keramische Wärmedämmschicht 7, z.B. aus Yttrium-stabilisiertem Zirkonoxid, an. In der Oxidschicht 5 ist Chromnitrid 6 eingebaut. Das Chromnitrid 6 verringert die Diffusion von Aluminium oder Chrom aus der Schutzschicht 4 in die Oxidschicht 5. Dadurch verlangsamt sich ein Anwachsen der Dicke der Oxidschicht 5. Da eine dicke Oxidschicht 5 zu einer erhöhten Gefahr einer Ablösung der Wärmedämmschicht 7 führt, wird mit dem Verlangsamen des Anwachsens der Oxidschicht 5 die Langzeitbestandigkeit der Beschichtung 3 erhöht.An oxide layer 5 adjoins the protective layer 4. This is shown greatly enlarged. A ceramic thermal barrier layer 7, e.g. made of yttrium-stabilized zirconium oxide. Chromium nitride 6 is built into the oxide layer 5. The chromium nitride 6 reduces the diffusion of aluminum or chromium from the protective layer 4 into the oxide layer 5. This slows down the increase in the thickness of the oxide layer 5. Since a thick oxide layer 5 leads to an increased risk of the thermal insulation layer 7 becoming detached, the slowing down takes place the growth of the oxide layer 5 increases the long-term durability of the coating 3.
Fig. 2 zeigt vergrößert einen Längsschnitt durch eine Oxidschicht 5. Es ist schematisch ein Gitter 8 aus Chromnitrid 6 eingezeichnet, welches aus Gitterzellen 7A aufgebaut ist. Das Innere der Gitterzellen 7A besteht aus Aluminiumoxid und/oder Chromoxid. Das Gitter 8 ist nicht geometrisch perfekt ausgebildet, weist also z.B. Unterbrechungen, wechselnde Dicken und wechselnde Flächengrößen der Gitterzellen 7A auf. Im Mittel ist aber eine ungefähre durchschnittliche Seitenlänge A einer Gitterzelle 7A angebbar, welche vorzugsweise zwischen 0.1 um und 5 μm liegt. Diese durchschnittliche Seitenlänge A ist insbesondere vom Material der Schutzschicht und/oder der Oxidschicht oder auch von Prozeßparametern bei der Bildung des Chromnitrids abhängig. Ein solches Gitter des Chromnitrides 6 verhindert besonders effizient eine Diffusion von Aluminium oder Chrom. 2 shows an enlarged longitudinal section through an oxide layer 5. A grid 8 made of chromium nitride 6 is shown schematically, which grid is made up of grid cells 7A. The interior of the grid cells 7A consists of aluminum oxide and / or chromium oxide. The grid 8 is not geometrically perfect, so it has e.g. Interruptions, changing thicknesses and changing area sizes of the grid cells 7A. On average, however, an approximate average side length A of a grid cell 7A can be specified, which is preferably between 0.1 μm and 5 μm. This average side length A depends in particular on the material of the protective layer and / or the oxide layer or also on process parameters in the formation of the chromium nitride. Such a lattice of the chromium nitride 6 particularly efficiently prevents diffusion of aluminum or chromium.

Claims

Patentansprüche Claims
1. Für eine Heißgasbeaufschlagung ausgelegtes Erzeugnis (1) aus einem Grundwerkstoff (2) auf dem eine Beschichtung (3) aufgebracht ist, umfassend: a) eine Schutzschicht (4) aus MCrAlY, die1. A product (1) made of a base material (2) on which a coating (3) is applied, which is designed for hot gas application, comprising: a) a protective layer (4) made of MCrAlY, the
• mindestens ein Metall aus der Gruppe (Eisen, Kobalt, Nikkei) , abgekürzt mit M,At least one metal from the group (iron, cobalt, Nikkei), abbreviated to M,
• Chrom (Cr) mit einem Gehalt von mindestens 15 wt%, insbe- sondere mindestens 20 wt%,Chromium (Cr) with a content of at least 15 wt%, in particular at least 20 wt%,
• Aluminium (AI) und• Aluminum (AI) and
• Yttrium (Y) und/oder Hafnium und/oder ein Metall aus der Gruppe der Seltenen Erden, insbesondere Scandium, Lanthan oder Cer enthält; b) eine Oxidschicht (5) , insbesondere mit Aluminiumoxid und/oder Chromoxid; c) Chromnitrid (6) .• contains yttrium (Y) and / or hafnium and / or a metal from the group of rare earths, in particular scandium, lanthanum or cerium; b) an oxide layer (5), in particular with aluminum oxide and / or chromium oxide; c) Chromium nitride (6).
2. Erzeugnis (1) nach Anspruch 1, wobei die Schutzschicht (4) Rhenium, insbesondere mit einem Anteil von 1 wt% bis 15 wt%, enthält .2. Product (1) according to claim 1, wherein the protective layer (4) contains rhenium, in particular with a proportion of 1 wt% to 15 wt%.
3. Erzeugnis (1) nach Anspruch 1 oder 2, wobei das Chromni- trid (6) in der Oxidschicht (5) enthalten ist.3. Product (1) according to claim 1 or 2, wherein the chromium nitride (6) is contained in the oxide layer (5).
4. Erzeugnis (1) nach einem der vorhergehenden Ansprüche, bei dem das Chromnitrid (6) zwischen der Schutzschicht (4) und der Oxidschicht (5) vorhanden ist.4. Product (1) according to one of the preceding claims, in which the chromium nitride (6) is present between the protective layer (4) and the oxide layer (5).
5. Erzeugnis (1) nach einem der vorhergehenden Ansprüche, bei dem das Chromnitrid (6) in einer Konzentration zwischen 10 at % und 60 at %, insbesondere etwa 50 at %, enthalten ist.5. Product (1) according to one of the preceding claims, in which the chromium nitride (6) is contained in a concentration between 10 at% and 60 at%, in particular about 50 at%.
6. Erzeugnis (1) nach einem der vorhergehenden Ansprüche, bei dem das Chromnitrid (6) ein Gitter (8) bildet, insbesondere ein etwa rechteckiges oder quadratisches Gitter (8) mit einer Seitenlange (A) zwischen 0,1 μm. und 5 μm.6. Product (1) according to one of the preceding claims, in which the chromium nitride (6) forms a grid (8), in particular an approximately rectangular or square grid (8) with a side length (A) between 0.1 μm. and 5 μm.
7. Erzeugnis (1) nach einem der vorhergehenden Ansprüche, welches als Turbinenschaufel, insbesondere als Gasturbinen¬ schaufel, ausgeführt ist.7. Product (1) according to one of the preceding claims, which is designed as a turbine blade, in particular as a gas turbine ¬ blade.
8. Erzeugnis (1) nach einem der vorhergehenden Ansprüche, welches als Hitzeschildelement einer thermischen Maschine, insbesondere für eine Brennkammer, ausgeführt ist.8. Product (1) according to one of the preceding claims, which is designed as a heat shield element of a thermal machine, in particular for a combustion chamber.
9. Erzeugnis (1) nach einem der vorhergehenden Ansprüche, bei dem auf die Oxidschicht (5) eine keramische Wärmedämmschicht9. Product (1) according to one of the preceding claims, in which on the oxide layer (5) a ceramic thermal barrier coating
(7) aufgebracht ist, insbesondere eine Wärmedämmschicht (7) auf Zirkonoxid-Basis .(7) is applied, in particular a heat insulation layer (7) based on zirconium oxide.
10. Verfahren zur Herstellung einer Beschichtung (3) für ein heißgasfestes Erzeugnis (1), wobei a) eine Schutzschicht (4) aus MCrAlY, die • mindestens ein Metall aus der Gruppe (Eisen, Kobalt, Nik¬ kei) , abgekürzt mit M,10. A method for producing a coating (3) for a hot gas-resistant product (1), wherein a) a protective layer (4) made of MCrAlY, which • at least one metal from the group (iron, cobalt, Nik ¬ kei), abbreviated with M ,
• Chrom (Cr) mit einem Gehalt von mindestens 15 wt%, insbe¬ sondere mindestens 20 wt%,• chromium (Cr) WT provided with a content of at least 15%, in particular at least 20 wt% ¬ sondere,
• Aluminium (AI) und • Yttrium (Y) und/oder Hafnium und/oder ein Metall aus der Gruppe der Seltenen Erden, insbesondere Scandium, Lanthan oder Cer enthalt, auf das Erzeugnis aufgebracht, b) eine Oxidschicht (5) , insbesondere mit Aluminiumoxid und/oder Chromoxid auf der Schutzschicht (4) gebildet und c) Chromnitrid (6) über eine Stickstoffzufuhr m der Be¬ schichtung (3) erzeugt wird.• aluminum (Al) and • yttrium (Y) and / or hafnium and / or a metal from the group of rare earths, in particular scandium, lanthanum or cerium, applied to the product, b) an oxide layer (5), in particular with Aluminum oxide and / or chromium oxide are formed on the protective layer (4) and c) chromium nitride (6) is produced via a nitrogen supply in the coating (3).
11. Verfahren nach Anspruch 10, bei dem die Stickstoffzufuhr über eine Stickstoffplasmabehandlung erfolgt. 11. The method of claim 10, wherein the nitrogen supply is carried out via a nitrogen plasma treatment.
12. Verfahren nach Anspruch 10, bei dem aus einer Stickstoff¬ plasmaquelle ein Stickstoffplasma der Beschichtung (3) zuge¬ führt wird, welches als Sauerstoffgetter zusätzlich Wasser¬ stoff enthält.12. The method of claim 10, wherein from a nitrogen plasma source ¬ a nitrogen plasma of the coating (3) applied ¬ leads, is additionally water ¬ material contains as oxygen getters.
13. Verfahren nach Anspruch 10 oder 11, bei dem an das Erzeugnis gegenüber der Stickstoffplasmaquelle eine Gleichspan¬ nung (BIAS) , insbesondere zwischen 50 V und 600 V, angelegt wird. 13. The method according to claim 10 or 11, in which a direct voltage (BIAS), in particular between 50 V and 600 V, is applied to the product relative to the nitrogen plasma source.
EP98961039A 1997-11-03 1998-10-21 Product designed to be subjected to the effects of hot gas and method for producing a coating for this product Expired - Lifetime EP1029114B1 (en)

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