EP1014142A4 - Herstellungsverfahren einer lichtmodulationsvorrichtung und projektor - Google Patents

Herstellungsverfahren einer lichtmodulationsvorrichtung und projektor

Info

Publication number
EP1014142A4
EP1014142A4 EP98914087A EP98914087A EP1014142A4 EP 1014142 A4 EP1014142 A4 EP 1014142A4 EP 98914087 A EP98914087 A EP 98914087A EP 98914087 A EP98914087 A EP 98914087A EP 1014142 A4 EP1014142 A4 EP 1014142A4
Authority
EP
European Patent Office
Prior art keywords
projector
light modulation
modulation device
producing light
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP98914087A
Other languages
English (en)
French (fr)
Other versions
EP1014142A1 (de
EP1014142B1 (de
Inventor
Osamu Yokoyama
Tatsuya Shimoda
Satoru Miyashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP30221596A external-priority patent/JP3695494B2/ja
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of EP1014142A1 publication Critical patent/EP1014142A1/de
Publication of EP1014142A4 publication Critical patent/EP1014142A4/de
Application granted granted Critical
Publication of EP1014142B1 publication Critical patent/EP1014142B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F19/00—Advertising or display means not otherwise provided for
    • G09F19/22—Advertising or display means on roads, walls or similar surfaces, e.g. illuminated
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor
    • H04N5/7416—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal
    • H04N5/7458—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal the modulator being an array of deformable mirrors, e.g. digital micromirror device [DMD]

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Business, Economics & Management (AREA)
  • Accounting & Taxation (AREA)
  • Marketing (AREA)
  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
EP98914087A 1996-11-13 1998-04-17 Herstellungsverfahren einer lichtmodulationsvorrichtung und projektor Expired - Lifetime EP1014142B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP30221596A JP3695494B2 (ja) 1996-11-13 1996-11-13 光変調デバイス、その製造方法および表示装置
PCT/JP1998/001787 WO1999054775A1 (fr) 1996-11-13 1998-04-17 Procede de production d'un dispositif de modulation de lumiere et d'un projecteur

Publications (3)

Publication Number Publication Date
EP1014142A1 EP1014142A1 (de) 2000-06-28
EP1014142A4 true EP1014142A4 (de) 2001-09-26
EP1014142B1 EP1014142B1 (de) 2002-09-25

Family

ID=26439167

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98914087A Expired - Lifetime EP1014142B1 (de) 1996-11-13 1998-04-17 Herstellungsverfahren einer lichtmodulationsvorrichtung und projektor

Country Status (3)

Country Link
US (1) US6375329B1 (de)
EP (1) EP1014142B1 (de)
WO (1) WO1999054775A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6627998B1 (en) * 2000-07-27 2003-09-30 International Business Machines Corporation Wafer scale thin film package
US7468825B2 (en) * 2005-11-01 2008-12-23 Samsung Electro-Mechanics Co., Ltd. Spatial optical modulator with passivation layer
KR100811032B1 (ko) * 2006-10-17 2008-03-06 삼성전기주식회사 모노리틱 조명장치
KR20160086525A (ko) * 2015-01-09 2016-07-20 삼성디스플레이 주식회사 액정 표시 장치

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3701586A (en) * 1971-04-21 1972-10-31 George G Goetz Light modulating deflectable membrane
US4441791A (en) * 1980-09-02 1984-04-10 Texas Instruments Incorporated Deformable mirror light modulator
EP0743541A1 (de) * 1996-02-12 1996-11-20 Yalestown Corporation N.V. Deformierbarer bimorpher piezoelektrischer vielschichtspiegel
US5579179A (en) * 1994-06-22 1996-11-26 Daewoo Electronics Co., Ltd. Method for manufacturing an array of thin film actuated mirrors
US5581393A (en) * 1993-03-23 1996-12-03 Daewoo Electronics Co., Ltd. Mirror array and method for the manufacture thereof

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5258236A (en) * 1991-05-03 1993-11-02 Ibm Corporation Multi-layer thin film structure and parallel processing method for fabricating same
JPH07508856A (ja) * 1992-04-08 1995-09-28 ジョージア テック リサーチ コーポレイション 成長基板から薄膜材料をリフトオフするためのプロセス
JPH0689473A (ja) 1992-09-10 1994-03-29 Matsushita Electric Ind Co Ltd 光磁気記録媒体
US5435876A (en) * 1993-03-29 1995-07-25 Texas Instruments Incorporated Grid array masking tape process
CN1065967C (zh) * 1994-05-04 2001-05-16 大宇电子株式会社 制造薄膜可驱动反射镜阵列的方法
JP3512963B2 (ja) * 1995-12-15 2004-03-31 テキサス インスツルメンツ インコーポレイテツド マイクロメカニカルデバイス

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3701586A (en) * 1971-04-21 1972-10-31 George G Goetz Light modulating deflectable membrane
US4441791A (en) * 1980-09-02 1984-04-10 Texas Instruments Incorporated Deformable mirror light modulator
US5581393A (en) * 1993-03-23 1996-12-03 Daewoo Electronics Co., Ltd. Mirror array and method for the manufacture thereof
US5579179A (en) * 1994-06-22 1996-11-26 Daewoo Electronics Co., Ltd. Method for manufacturing an array of thin film actuated mirrors
EP0743541A1 (de) * 1996-02-12 1996-11-20 Yalestown Corporation N.V. Deformierbarer bimorpher piezoelektrischer vielschichtspiegel

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
FORBES F ET AL: "SEGMENTED BIMORPH DEFORMABLE MIRROR", JOURNAL OF PHYSICS E. SCIENTIFIC INSTRUMENTS,GB,IOP PUBLISHING, BRISTOL, vol. 22, no. 6, 1 June 1989 (1989-06-01), pages 402 - 405, XP000066440, ISSN: 0022-3735 *
See also references of WO9954775A1 *

Also Published As

Publication number Publication date
EP1014142A1 (de) 2000-06-28
EP1014142B1 (de) 2002-09-25
US6375329B1 (en) 2002-04-23
WO1999054775A1 (fr) 1999-10-28

Similar Documents

Publication Publication Date Title
GB2316821B (en) Optical modulating device and optical modulating method
GB9902610D0 (en) Method and device for the modulation of the intensity of fluorescent lamps
EP0830633A4 (de) Gerät und verfahren zur reduzierung der lichtintensität
EP1030619A4 (de) Gerät und verfahren zur aushärtung mit stroboskoplicht
GB9517804D0 (en) External modulator and method for externally modulating light
EP1089117A4 (de) Ortsauflösender lichtmodulator und verfahren zur ortsauflösenden lichtmodulation
AU2381797A (en) Method and apparatus for controlling light
AU6854196A (en) Lighting apparatus and method
AU1415300A (en) Spatial light modulation apparatus and spatial light modulation method
EP0867697A4 (de) Lichtquelle und messmethode
HUP9603510A3 (en) Lamp reflector and method for making thereof
EP0788614A4 (de) Beleuchtungssystem mit zentraler maske und verfahren
GB2321316B (en) Light exposure method and light exposure device
EP1014142A4 (de) Herstellungsverfahren einer lichtmodulationsvorrichtung und projektor
EP0882998A4 (de) Herstellungverfahren für blattförmige linse und projektionsschirm
GB2292228B (en) Projector and focusing method therein
KR0185798B1 (en) Illumination device and exposure method using the same
PL323715A1 (en) Light modulating apparatus and method
HU9701110D0 (en) Quartz projection lamp and method for making thereof
EP0726695A3 (de) Beleuchtungsverfahren und beipassendes Gerät
HK1024752A1 (en) Photographic apparatus and method
EP0931275A4 (de) Optisches projektionsgerät und projektionsverfahren
AU1209200A (en) System and method for modulating light intensity
EP0519418A3 (en) Light modulation device and image recognition method
AU6930798A (en) Illumination apparatus and a method of providing illumination

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 19981214

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): DE FR GB NL

A4 Supplementary search report drawn up and despatched

Effective date: 20010813

AK Designated contracting states

Kind code of ref document: A4

Designated state(s): DE FR GB NL

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

17Q First examination report despatched

Effective date: 20011217

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): DE FR GB NL

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

REF Corresponds to:

Ref document number: 69808318

Country of ref document: DE

Date of ref document: 20021031

ET Fr: translation filed
PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20030626

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 19

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: NL

Payment date: 20160310

Year of fee payment: 19

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20160309

Year of fee payment: 19

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20160413

Year of fee payment: 19

Ref country code: DE

Payment date: 20160412

Year of fee payment: 19

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 69808318

Country of ref document: DE

REG Reference to a national code

Ref country code: NL

Ref legal event code: MM

Effective date: 20170501

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20170417

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20171229

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20171103

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170502

Ref country code: NL

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170501

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170417