EP0998689A1 - Optical near-field microscope - Google Patents
Optical near-field microscopeInfo
- Publication number
- EP0998689A1 EP0998689A1 EP99925007A EP99925007A EP0998689A1 EP 0998689 A1 EP0998689 A1 EP 0998689A1 EP 99925007 A EP99925007 A EP 99925007A EP 99925007 A EP99925007 A EP 99925007A EP 0998689 A1 EP0998689 A1 EP 0998689A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- probe
- optical near
- field microscope
- microscope according
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 25
- 239000000523 sample Substances 0.000 claims abstract description 51
- 238000001514 detection method Methods 0.000 claims abstract description 16
- 238000005286 illumination Methods 0.000 claims abstract description 11
- 230000033001 locomotion Effects 0.000 claims abstract description 11
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 230000001360 synchronised effect Effects 0.000 claims 4
- 238000011144 upstream manufacturing Methods 0.000 claims 3
- 230000006978 adaptation Effects 0.000 claims 1
- 238000010226 confocal imaging Methods 0.000 claims 1
- 238000003384 imaging method Methods 0.000 description 3
- 238000004651 near-field scanning optical microscopy Methods 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 102100025292 Stress-induced-phosphoprotein 1 Human genes 0.000 description 2
- 101710140918 Stress-induced-phosphoprotein 1 Proteins 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 101000658644 Homo sapiens Tetratricopeptide repeat protein 21A Proteins 0.000 description 1
- 102100034913 Tetratricopeptide repeat protein 21A Human genes 0.000 description 1
- 239000008186 active pharmaceutical agent Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000005562 fading Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q20/00—Monitoring the movement or position of the probe
- G01Q20/02—Monitoring the movement or position of the probe by optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
- G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
Definitions
- a near-field probe shaped as a tip SP is located at a distance smaller than the light wavelength above the surface of a transparent sample P.
- the sample is held on a scanning table STI which can be moved in the X ⁇ 7z direction, so that the sample can be scanned line by line via the tip SP.
- the scanning table STI is controlled via a control unit AE.
- the non-absorbed light is collected by means of an objective O 1 and by means of a detector arranged behind a pinhole PH for suppression of stray light
- DT for example an avalanche diode or a PMT
- measured its intensity From this, an image of the surface of the sample is put together.
- Illuminate sample the transmitted light is collected through the tip SP.
- a scanning movement of the tip stands in opposition to the probe and the optical
- the second arrangement prevents fading
- the object of the invention is to avoid these disadvantages.
- Fig. 2 A first optical arrangement with the probe as a light source.
- Fig. 3 Another embodiment
- Fig. 5 The moving probe tip in an inverse microscopic beam path of a laser scanning microscope
- Fig. 2 shows an arrangement according to the invention, in which the probe SP in a
- Scan unit STI1 for example a piezo scanner, and a
- the instantaneous position of the probe SP is detected via a displacement measuring system WM and the pinhole PH is correspondingly tracked by means of a scanning unit STI 2.
- the detector DT has a sufficiently large sensitive area, it does not have to be moved, otherwise it can be moved together with the pinhole PH by STI2.
- the WM measuring system and the STI 2 scan unit are with the control unit
- Objective 01 downstream scanning mirror SM which is controlled via the control unit AE in accordance with the movement of the tip SP so that the tip of the
- Probe SP is always mapped onto the pinhole PH.
- the light path can be reversed.
- the probe tip is illuminated confocally by the
- a structure is realized which does not require any moving parts on the detection side.
- the individual pixels of a CCD camera take on the function of the confocal pinhole.
- the measuring system WM and the control unit AE ensure that only the confocally illuminated pixels are active.
- the scanning module S of a confocal laser is located on this light microscope -
- a laser module LM contains laser L for illuminating the sample P.
- the lasers are brought together via splitter mirrors TS and are coupled into the optical fibers LF1, 2 via an AOTF and a coupling unit EO.
- the scan head S can be attached to the phototube of an upright microscope as well as to a side exit of an inverted microscope M, as shown.
- the microscopic beam path in the microscope unit M consists of
- Light source LQ lighting optics 02, beam splitter ST1, lens 03, sample P, in
- Beam splitter ST for coupling the scan beam in and out.
- the light from the lasers L is coupled into the tip SP of the SNOM in FIG.
- the actual scanning unit S consists of a scanning lens SL, scanner SC with scanning mirrors (not shown), deflecting mirror SP and a common one
- Imaging optics 04 for the detection channels are Imaging optics 04 for the detection channels.
- the deflecting mirror SP after the imaging optics 04 reflects the radiation coming from the sample P in the direction of the dichroic beam splitter DS 1-3 in the convergent beam path of the imaging optics 04, the diameter of which can be adjusted in the direction and perpendicular to the optical axis
- Pinholes PH 1-4 individually for each detection channel as well as emission filters and suitable receiver elements.
- the current position of the tip SP is determined via the displacement measuring system WM and the scanning mirror SC of the LSM is controlled via the control unit AE.
- Scan module S controlled so that the tip SP is imaged on the pinholes PH 1-4.
- the transmitted light is detected by the tip SP and a detector DT.
- the optical fibers LF1, LF2 are coupled in by means of a movable one
- FIG. 1 A monitoring beam path is shown in FIG.
- the illumination spot is tracked by means of the scanning mirror SC, the WM measuring system and the control unit AE of the movement of the tip via STI1.
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biophysics (AREA)
- Optics & Photonics (AREA)
- Analytical Chemistry (AREA)
- Microscoopes, Condenser (AREA)
Abstract
Description
Claims
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19822869 | 1998-05-22 | ||
DE19822869A DE19822869C2 (en) | 1998-05-22 | 1998-05-22 | Optical near-field microscope |
PCT/EP1999/003425 WO1999061949A1 (en) | 1998-05-22 | 1999-05-19 | Optical near-field microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
EP0998689A1 true EP0998689A1 (en) | 2000-05-10 |
Family
ID=7868559
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP99925007A Withdrawn EP0998689A1 (en) | 1998-05-22 | 1999-05-19 | Optical near-field microscope |
Country Status (6)
Country | Link |
---|---|
US (1) | US6674057B1 (en) |
EP (1) | EP0998689A1 (en) |
JP (1) | JP2002517003A (en) |
DE (1) | DE19822869C2 (en) |
IL (1) | IL134095A (en) |
WO (1) | WO1999061949A1 (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4555511B2 (en) * | 2001-01-11 | 2010-10-06 | エスアイアイ・ナノテクノロジー株式会社 | Optical probe microscope |
DE10107210C1 (en) * | 2001-02-16 | 2002-10-10 | Evotec Ag | microscope |
DE10217544A1 (en) | 2002-04-17 | 2003-11-06 | Zeiss Carl Jena Gmbh | Laser scanning microscope with collimator and / or pinhole optics |
DE10393608B4 (en) | 2002-10-30 | 2022-06-09 | Optiscan Pty Ltd. | Scanning method and device, confocal fiber optic endoscope, microscope or endomicroscope with a scanning device, and fiber optic endoscope, microscope or endomicroscope with a scanning device |
DE10307358B3 (en) * | 2003-02-21 | 2004-10-07 | Leica Microsystems Semiconductor Gmbh | Semiconductor wafer scanning method in which camera and wafer relative movement and acceleration in both the scanning direction and the direction perpendicular take place simultaneously |
US8027083B2 (en) * | 2007-04-20 | 2011-09-27 | International Business Machines Corporation | Contact microscope using point source illumination |
KR100978600B1 (en) * | 2007-10-23 | 2010-08-27 | 연세대학교 산학협력단 | Scanning optical measurement apparatus having super resolution |
CN101881786B (en) * | 2010-05-26 | 2012-11-14 | 中国科学院半导体研究所 | Scanning near-field optical microscopy system based on micro-hole laser |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69131528T2 (en) * | 1990-05-30 | 2000-05-04 | Hitachi, Ltd. | Method and device for treating a very small area of a sample |
JPH0477605A (en) * | 1990-07-20 | 1992-03-11 | Olympus Optical Co Ltd | Scanning type tunnel microscope and probe used therein |
JP2744339B2 (en) * | 1990-08-03 | 1998-04-28 | キヤノン株式会社 | Information processing apparatus and information processing method |
JP2823970B2 (en) * | 1991-04-05 | 1998-11-11 | 浜松ホトニクス株式会社 | Near-field scanning optical microscope |
JP3074357B2 (en) * | 1991-10-03 | 2000-08-07 | セイコーインスツルメンツ株式会社 | Micro surface observation device |
US5361314A (en) * | 1992-09-04 | 1994-11-01 | The Regents Of The University Of Michigan | Micro optical fiber light source and sensor and method of fabrication thereof |
JP2704601B2 (en) * | 1993-04-12 | 1998-01-26 | セイコーインスツルメンツ株式会社 | Scanning near-field atomic force microscope, probe used in the microscope, and method of manufacturing the probe |
US5463897A (en) * | 1993-08-17 | 1995-11-07 | Digital Instruments, Inc. | Scanning stylus atomic force microscope with cantilever tracking and optical access |
US5796909A (en) * | 1996-02-14 | 1998-08-18 | Islam; Mohammed N. | All-fiber, high-sensitivity, near-field optical microscopy instrument employing guided wave light collector and specimen support |
-
1998
- 1998-05-22 DE DE19822869A patent/DE19822869C2/en not_active Expired - Fee Related
-
1999
- 1999-05-19 WO PCT/EP1999/003425 patent/WO1999061949A1/en not_active Application Discontinuation
- 1999-05-19 EP EP99925007A patent/EP0998689A1/en not_active Withdrawn
- 1999-05-19 US US09/463,202 patent/US6674057B1/en not_active Expired - Fee Related
- 1999-05-19 JP JP2000551288A patent/JP2002517003A/en active Pending
- 1999-05-19 IL IL13409599A patent/IL134095A/en not_active IP Right Cessation
Non-Patent Citations (1)
Title |
---|
See references of WO9961949A1 * |
Also Published As
Publication number | Publication date |
---|---|
DE19822869A1 (en) | 1999-11-25 |
IL134095A (en) | 2004-03-28 |
US6674057B1 (en) | 2004-01-06 |
DE19822869C2 (en) | 2001-05-10 |
IL134095A0 (en) | 2001-04-30 |
WO1999061949A1 (en) | 1999-12-02 |
JP2002517003A (en) | 2002-06-11 |
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