EP0978486A1 - Verfahren und Brenner zum Bilden von Siliciumdioxid enthaltenden Russ - Google Patents

Verfahren und Brenner zum Bilden von Siliciumdioxid enthaltenden Russ Download PDF

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Publication number
EP0978486A1
EP0978486A1 EP99112247A EP99112247A EP0978486A1 EP 0978486 A1 EP0978486 A1 EP 0978486A1 EP 99112247 A EP99112247 A EP 99112247A EP 99112247 A EP99112247 A EP 99112247A EP 0978486 A1 EP0978486 A1 EP 0978486A1
Authority
EP
European Patent Office
Prior art keywords
liquid
silica
gas
burner
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP99112247A
Other languages
English (en)
French (fr)
Other versions
EP0978486B1 (de
Inventor
Daniel Raymond Corning Incorporated Sempolinski
Michael Henry Corning Incorporated Wasilewski
Charles C. Corning Incorporated Yu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of EP0978486A1 publication Critical patent/EP0978486A1/de
Application granted granted Critical
Publication of EP0978486B1 publication Critical patent/EP0978486B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C03B37/0142—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/10—Forming beads
    • C03B19/1005—Forming solid beads
    • C03B19/106—Forming solid beads by chemical vapour deposition; by liquid phase reaction
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C03B19/1423—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
    • C03B2201/28—Doped silica-based glasses doped with non-metals other than boron or fluorine doped with phosphorus
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/34—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with rare earth metals, i.e. with Sc, Y or lanthanides, e.g. for laser-amplifiers
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/32—Non-halide
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/34—Liquid, e.g. mist or aerosol
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/40—Mechanical flame shields
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/46—Comprising performance enhancing means, e.g. electrostatic charge or built-in heater
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S65/00—Glass manufacturing
    • Y10S65/08—Quartz

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Spray-Type Burners (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
EP99112247A 1998-08-07 1999-06-25 Verfahren und Brenner zum Bilden von Siliciumdioxid enthaltenden Russ Expired - Lifetime EP0978486B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US9574298P 1998-08-07 1998-08-07
US95742P 1998-08-07

Publications (2)

Publication Number Publication Date
EP0978486A1 true EP0978486A1 (de) 2000-02-09
EP0978486B1 EP0978486B1 (de) 2004-12-08

Family

ID=22253390

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99112247A Expired - Lifetime EP0978486B1 (de) 1998-08-07 1999-06-25 Verfahren und Brenner zum Bilden von Siliciumdioxid enthaltenden Russ

Country Status (4)

Country Link
US (1) US6260385B1 (de)
EP (1) EP0978486B1 (de)
JP (1) JP2000063126A (de)
DE (1) DE69922452T2 (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000046162A1 (en) * 1999-02-05 2000-08-10 The University Court Of The University Of Glasgow Burner for fabricating aerosol doped waveguides
EP1106582A2 (de) * 1999-12-10 2001-06-13 Corning Incorporated Siliciumdioxid-Russ und Verfahren zu seiner Herstellung
US6800574B2 (en) 2001-10-24 2004-10-05 3M Innovative Properties Company Glass beads and uses thereof
WO2008094228A1 (en) 2007-01-29 2008-08-07 Brown David P Method and apparatus for continuous or batch optical fiber preform and optical fiber production
US11345606B2 (en) 2017-02-17 2022-05-31 David Brown Deposition particles and a method and apparatus for producing the same

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ID25479A (id) * 1997-12-19 2000-10-05 Corning Inc Pembakar dan metoda untuk memproduksi arang oksida logam
US6546757B1 (en) * 1998-07-28 2003-04-15 Brown University Research Foundation Liquid spray pyrolysis method for the fabrication of optical fiber preforms, with reactant mixing
US6672106B1 (en) * 1998-08-07 2004-01-06 Corning Incorporated Method and apparatus for forming soot for the manufacture of glass
US20020174684A1 (en) * 2001-05-23 2002-11-28 Danielson Paul S. Fused silica furnace and method
US6910352B2 (en) * 2002-04-24 2005-06-28 Corning Incorporated Deposition of high fluorine content silica soot
US20040250767A1 (en) * 2003-04-21 2004-12-16 Rohm And Haas Electronic Materials, L.L.C. Method and apparatus for coating a substrate using combustion chemical vapor deposition
JP2005029448A (ja) * 2003-07-10 2005-02-03 Shin Etsu Chem Co Ltd 光ファイバ母材の製造方法
FI116619B (fi) * 2004-07-02 2006-01-13 Liekki Oy Menetelmä ja laite optisen materiaalin tuottamiseksi sekä optinen aaltojohde
US20060162382A1 (en) * 2004-12-30 2006-07-27 Hrdina Kenneth E Method and apparatus for producing oxide particles via flame
US7361207B1 (en) 2007-02-28 2008-04-22 Corning Incorporated System and method for electrostatically depositing aerosol particles
US7393385B1 (en) 2007-02-28 2008-07-01 Corning Incorporated Apparatus and method for electrostatically depositing aerosol particles
CZ2007210A3 (cs) * 2007-03-20 2008-02-27 Vysoké ucení technické v Brne Dvoumédiová effervescent tryska
US20080268165A1 (en) * 2007-04-26 2008-10-30 Curtis Robert Fekety Process for making a porous substrate of glass powder formed through flame spray pyrolysis
US20090029064A1 (en) * 2007-07-25 2009-01-29 Carlton Maurice Truesdale Apparatus and method for making nanoparticles using a hot wall reactor
US20100126227A1 (en) * 2008-11-24 2010-05-27 Curtis Robert Fekety Electrostatically depositing conductive films during glass draw
GB2478307A (en) 2010-03-02 2011-09-07 Heraeus Quartz Uk Ltd Manufacture of silica glass
DE102011121190A1 (de) * 2011-12-16 2013-06-20 Heraeus Quarzglas Gmbh & Co. Kg OMCTS-Verdampfungsverfahren
JP2017036172A (ja) 2015-08-07 2017-02-16 株式会社フジクラ 光ファイバ母材の製造方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS565337A (en) * 1979-06-20 1981-01-20 Hitachi Ltd Manufacture of optical fiber mother material
JPS5614438A (en) * 1979-07-18 1981-02-12 Hitachi Ltd Manufacture of optical fiber base material
JPS56155034A (en) * 1980-04-26 1981-12-01 Nippon Telegr & Teleph Corp <Ntt> Synthetic torch for fine glassy particle
JPH0421536A (ja) * 1990-05-16 1992-01-24 Hitachi Cable Ltd 希土類元素ドープガラスの製造方法
US5110335A (en) * 1990-06-25 1992-05-05 At&T Bell Laboratories Method of glass soot deposition using ultrasonic nozzle
WO1997022553A1 (en) * 1995-12-19 1997-06-26 Corning Incorporated Method and apparatus for forming fused silica by combustion of liquid reactants

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4165223A (en) 1978-03-06 1979-08-21 Corning Glass Works Method of making dry optical waveguides
US4173305A (en) 1978-03-10 1979-11-06 Corning Glass Works System for delivering materials to deposition site on optical waveguide blank
US4230744A (en) 1979-02-21 1980-10-28 Corning Glass Works System for delivering materials to deposition site on optical waveguide blank
US5152819A (en) 1990-08-16 1992-10-06 Corning Incorporated Method of making fused silica
US5043002A (en) 1990-08-16 1991-08-27 Corning Incorporated Method of making fused silica by decomposing siloxanes
US5622750A (en) * 1994-10-31 1997-04-22 Lucent Technologies Inc. Aerosol process for the manufacture of planar waveguides
DE19527451C2 (de) * 1995-07-27 1998-06-04 Heraeus Quarzglas Verfahren zur Herstellung eines Quarzglasrohlings und dafür geeigneter Brenner
US6075101A (en) * 1997-02-19 2000-06-13 Union Carbide Chemicals & Plastics Technology Corporation Control of solution catalyst droplet size with a perpendicular spray nozzle
DE19725955C1 (de) * 1997-06-19 1999-01-21 Heraeus Quarzglas Verfahren zur Herstellung eines Quarzglasrohlings und dafür geeignete Vorrichtung
US5979185A (en) * 1997-07-16 1999-11-09 Corning Incorporated Method and apparatus for forming silica by combustion of liquid reactants using a heater

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS565337A (en) * 1979-06-20 1981-01-20 Hitachi Ltd Manufacture of optical fiber mother material
JPS5614438A (en) * 1979-07-18 1981-02-12 Hitachi Ltd Manufacture of optical fiber base material
JPS56155034A (en) * 1980-04-26 1981-12-01 Nippon Telegr & Teleph Corp <Ntt> Synthetic torch for fine glassy particle
JPH0421536A (ja) * 1990-05-16 1992-01-24 Hitachi Cable Ltd 希土類元素ドープガラスの製造方法
US5110335A (en) * 1990-06-25 1992-05-05 At&T Bell Laboratories Method of glass soot deposition using ultrasonic nozzle
WO1997022553A1 (en) * 1995-12-19 1997-06-26 Corning Incorporated Method and apparatus for forming fused silica by combustion of liquid reactants

Non-Patent Citations (5)

* Cited by examiner, † Cited by third party
Title
MORSE T.F. ET AL.: "AEROSOL TECHNIQUES FOR FIBER CORE DOPING", PROCEEDINGS OF THE OPTICAL FIBER COMMUNICATION CONFERENCE,US,NEW YORK, IEEE, vol. CONF. 14, pages 63, XP000270360, ISBN: 1-55752-166-2 *
PATENT ABSTRACTS OF JAPAN vol. 16, no. 176 27 April 1992 (1992-04-27) *
PATENT ABSTRACTS OF JAPAN vol. 5, no. 54 15 April 1981 (1981-04-15) *
PATENT ABSTRACTS OF JAPAN vol. 5, no. 62 25 April 1981 (1981-04-25) *
PATENT ABSTRACTS OF JAPAN vol. 6, no. 35 3 March 1982 (1982-03-03) *

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000046162A1 (en) * 1999-02-05 2000-08-10 The University Court Of The University Of Glasgow Burner for fabricating aerosol doped waveguides
GB2363637A (en) * 1999-02-05 2002-01-02 Univ Glasgow Burner for fabricating aerosol doped waveguides
GB2363637B (en) * 1999-02-05 2003-09-24 Univ Glasgow Burner for fabricating aerosol doped waveguides
EP1106582A2 (de) * 1999-12-10 2001-06-13 Corning Incorporated Siliciumdioxid-Russ und Verfahren zu seiner Herstellung
EP1106582A3 (de) * 1999-12-10 2001-10-24 Corning Incorporated Siliciumdioxid-Russ und Verfahren zu seiner Herstellung
US6800574B2 (en) 2001-10-24 2004-10-05 3M Innovative Properties Company Glass beads and uses thereof
US6914024B2 (en) 2001-10-24 2005-07-05 3M Innovative Properties Company Glass beads and uses thereof
US7312168B2 (en) 2001-10-24 2007-12-25 3M Innovative Properties Company Glass beads and uses thereof
WO2008094228A1 (en) 2007-01-29 2008-08-07 Brown David P Method and apparatus for continuous or batch optical fiber preform and optical fiber production
EP2158169A1 (de) * 2007-01-29 2010-03-03 David P. Brown Verfahren und vorrichtung zur kontinuierlichen oder diskontinuierlichen herstellung von lichtleitfaservorformen und lichtleitfasern
EP2158169A4 (de) * 2007-01-29 2013-08-28 David P Brown Verfahren und vorrichtung zur kontinuierlichen oder diskontinuierlichen herstellung von lichtleitfaservorformen und lichtleitfasern
US11345606B2 (en) 2017-02-17 2022-05-31 David Brown Deposition particles and a method and apparatus for producing the same

Also Published As

Publication number Publication date
DE69922452T2 (de) 2005-12-15
EP0978486B1 (de) 2004-12-08
JP2000063126A (ja) 2000-02-29
DE69922452D1 (de) 2005-01-13
US6260385B1 (en) 2001-07-17

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