EP0932817A1 - Gyroscope a solide a plusieurs degres de liberte - Google Patents

Gyroscope a solide a plusieurs degres de liberte

Info

Publication number
EP0932817A1
EP0932817A1 EP97943997A EP97943997A EP0932817A1 EP 0932817 A1 EP0932817 A1 EP 0932817A1 EP 97943997 A EP97943997 A EP 97943997A EP 97943997 A EP97943997 A EP 97943997A EP 0932817 A1 EP0932817 A1 EP 0932817A1
Authority
EP
European Patent Office
Prior art keywords
gyroscope
vibration
axis
portions
motion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP97943997A
Other languages
German (de)
English (en)
Inventor
George Cooper
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BTG International Ltd
Original Assignee
BTG International Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BTG International Ltd filed Critical BTG International Ltd
Publication of EP0932817A1 publication Critical patent/EP0932817A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
    • G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure

Definitions

  • This invention relates to a gyroscope and more specifically to a solid-state, multi-axis gyroscope.
  • European Patent Application EP-A2-0,427,177 (Murata Manufacturing Co.) describes a vibrating column having an axial bore therethrough and on whose external surface there are piezoelectric drivers. By applying a signal to these drivers the column bends and vibrates. When the column is rotated a Coriolis force is produced between two external electrodes.
  • This type of gyroscope is known as a solid-state gyroscope.
  • a solid-state gyroscope based on a vibrating ring
  • M.W. Putty and K. Najafi in conference proceedings 'A Micromachined Vibrating Ring Gyroscope', Proc. IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, South Carolina, USA, June 13-16, 1994, pp. 213-220.
  • Another example of a solid-state gyroscope is described in UK Patent Applications GB-A- 2,272,054 (GEC Marconi Ltd.) and GB-A-2,272,053 (GEC Marconi Ltd).
  • the gyroscopes described include a resonator bell which is attached to a printed circuit board. One or more electrically conductive tracks on the printed circuit board cause the resonator bell to vibrate and act as a gyroscope.
  • US Patent 5,450,751 discloses a micro-structure for a vibratory gyroscope having a ring portion supported so as to allow substantially undamped vibration.
  • the ring portion is electrically conductive and comprises a charge plate for a plurality of radially disposed charge conductive sites. These sites, being disposed around the perimeter of the ring, sense radial displacements in the ring. These radial displacements are detected and used to provide an indication of the Coriolis force experienced by the gyroscope.
  • gyroscopes have been found to be effective but only in detecting angular rotation about one axis. That is to say all are so called single axis gyroscopes.
  • Optical gyroscopes are also single axis gyroscopes.
  • Flywheel gyroscopes may be configured as single or dual axis gyroscopes, but these are expensive.
  • US-A-5,490,420 discloses a gyroscopic device having a number of seismic masses supported on a system of beams. Between them, these seismic masses are used to detect motion about one or two distinct axes. Detection of rotation about a third distinct axis is disclosed but detection does not involve monitoring movement of the seismic mass itself.
  • the present invention arose in an attempt to overcome this and other problems, by providing a solid-state, multi-axis gyroscope, capable of detecting rotation about at least two and preferably three or more axes, two or more of which may be mutually perpendicular.
  • a gyroscope comprising: a gyro body- portion, having primary and secondary modes of vibration; driving means, for driving said gyro body into said primary mode of vibration; detecting means, for detecting coriolis force induced secondary vibration upon motion of said body about a given axis; characterised in that said body -portion has two or more independent secondary modes of vibration, each being excitable as a result of motion of said body portion about a separate associated axis and in that said detecting means includes means for detecting the vibration of said two or more secondary modes.
  • the gyroscope further includes two or more gyro-body portions, and in which the detector means includes means for detecting secondary vibrations in one or more body- portion.
  • the gyroscope comprises a pair of coupled body-portions in which the driving means drives one body-portion and the detection means detects secondary vibrations in the other body-portion.
  • the detector means includes means for detecting secondary vibrations in both of said body-portions and further includes means for combining the output of said detectors in order to produce a signal indicative of rotation about the associated axis.
  • the gyroscope comprises two or more pairs of said body- portions, each pair being angularly displaced relative to each other pair, thereby to facilitate detection of rotation about different axes.
  • the primary mode of vibration of each body-portion are in a common single plane.
  • the independent secondary modes of vibration of each body-portion are orthogonal to each other, thereby to facilitate detection of rotation about two orthogonal axes.
  • one or more of said one or more body-portions has a third secondary mode of vibration excitable as a result of motion about a third axis and the detecting means includes means for detecting the vibration in said third mode, thereby to detect motion about said third axis.
  • the independent third secondary mode of vibration is orthogonal to one or other of the other two secondary modes of vibration, thereby to facilitate detection of rotation about orthogonal axes.
  • the driving means drives the body-portion at resonance.
  • the secondary vibration is at resonance.
  • the two or more secondary modes of vibration have the same natural frequency, multiple thereof or integer fraction thereof.
  • the detector means further includes means for determining the magnitude of the or each secondary mode of vibration, thereby to facilitate determination of the rate of turn about each of said associated axis.
  • the gyroscope further includes support means for supporting said body-portion whilst allowing said primary and secondary modes of vibration to occur, said support means also acting to locate the body-portion relative to a support boss which, in operation, is subjected to the motion being detected.
  • the two or more body-portions vibrate radially outward of the boss and connected thereto, each by said support means.
  • the two or more body-portions are connected to each other by flexible beams which form part of said support means.
  • Figure 1 is a general view of an automobile and shows three mutually pe ⁇ endicular axis, namely pitch, roll and yaw;
  • Figure 2 is a graph showing three mutually pe ⁇ endicular axis and illustrates the basic theory of how a single axis solid-state gyroscope operates;
  • Figure 3 is a diagrammatical sectional view of a prior known single axis solid-state gyroscope
  • Figures 4 to 9 show different views of a solid-state, multi-axis gyroscope according to the present invention.
  • Figures 10 to 15 show how the multi-axis gyroscope of Figures 4 to 9 behaves
  • Figure 16 shows an example, with dimensions in microns, of a multi-axis solid-state gyroscope having a thickness of 137 microns;
  • Figure 17 shows diagrammatically possible fabrication steps of the gyroscope shown in Figure 16.
  • FIGS 18, 19 illustrate an alternative form of the present invention.
  • Figure 1 shows the three rotation axes of an automobile; roll, where a car with worn shock absorbers leans from side to side after, for instance, going down a deep pothole; pitch, where the front of the car may dive under heavy braking; and yaw, where the front of the car may change direction after suffering a heavy crosswind after passing, for example under a motorway bridge. All these movements can be corrected by appropriate steering, suspension and braking systems.
  • control systems In order to provide a correction signal, for example to an active suspension system for an automobile, control systems need an input signal as to the amount of unwanted motion. As all these motions are rotational about any given axis, what is needed is a rate of turn, or angular velocity measurement.
  • Figure 2 shows when a body 10 of mass m has a linear velocity v along an x-axis, expressed as v sin ( ⁇ t), and a rate of turn ⁇ is applied about the z-axis, the body 10 experiences a force F along the y-axis, in the y-direction.
  • the magnitude of the force F is proportional to the rate of turn ⁇ about the z-axis. Monitoring this force gives a direct measure of the angular velocity ⁇ .
  • Figure 3 is an overall diagrammatical view of a single-axis, solid-state gyroscope 1 1. It is in form of a generally square structure and has portions 14, 16 and 18 which are composed of rectangular, solid beams. The beams are mounted on. for example, a glass substrate 20. Beam 16 has a free end 16a which acts as a cantilever. The velocity in the x-direction is provided by, for example, piezoelectric actuation by energising piezoelectric element 21 at the resonant frequency of the free standing part of beam 16. A rate of turn about the z- axis provides secondary motion in the y-direction. Beam 16a acts as a central electrode between two capacitor plates 14 and 18.
  • FIGs 4 to 15 show a multi-axis gyroscope 36 in isometric view.
  • the central region 38 is connected to corner sections of a generally square gyro-body via four separate struts 40, 42, 44 and 46.
  • the sixteen beams 100-115 are relatively thin compared with their depth so that rectangular gyro-body portions 48, 50, 52 and 54 are able to move or vibrate radially as shown diagrammatically by arrows P in Figure 4, while remaining rigid to flexing out of the plane of the gyroscope.
  • This radial motion is excited, for example, by Lorentz force actuation, and is known as the primary mode.
  • the primary mode of vibration is a resonant one.
  • this primary mode becomes coupled to one or more distinct secondary resonances.
  • Each one of these secondary resonances is excited independently of the other by rotation about an associated axis which may or may not be pe ⁇ endicular to one or more other axis. It is this coupling of the primary with multiple (e.g. x, y and z) secondary modes which has been utilised in the present invention.
  • Figure 5 shows the effect of a rate of turn about the x-axis.
  • the masses of body portions labelled 50 and 54 experience no Coriolis force.
  • Masses of body portions 48 and 52 experience equal and opposite Coriolis force induced motion normal to the plane of the gyroscope.
  • This Coriolis force excites a rocking motion in the direction of arrows Xs about the x-axis and is hereinafter referred to as the X secondary mode. Due to the 90° symmetry of the structure the same is true of a rate of turn about the y-axis, but this time gyro-body portions 50 and 54 experience the Coriolis force such that they rock in the direction of arrows Ys.
  • Figure 6 depicts this and this is hereinafter referred to as the Y secondary mode. If a rate of turn is applied about the z-axis, normal to the gyro-body, then all four of the gyro-body portions 48, 50, 52 and 54 experience a Coriolis force induced motion in the plane of the structure and this is shown in Figure 7. These forces all act together to produce a third rotational motion about the z-axis, this is called the Z secondary mode Zs.
  • gyroscope 36 has one primary and three secondary modes, any two of which may be exploited to provide a multi-axes gyroscope.
  • Two of the secondary modes (X S ,Y S ) are degenerate by virtue of the symmetry of the structure.
  • the four diagonal support struts 40, 42, 44 and 46 in the centre of the gyroscope 36 experience only tensile and compressive forces along their length during motion in the primary mode P.
  • the primary mode In the primary mode all the struts are relatively stiff and as a result little energy is dissipated. For this reason it is believed that the primary motion has a high Q value.
  • the primary motion of gyroscope 36 is particularly suited to Lorentz actuation, although other types of actuation may be employed. If Lorentz actuation is employed, a conductive track 56 may be deposited on the surface of gyroscope 36 as shown in Figure 8. A sinusoidal current (I sin ⁇ t) in the presence of magnetic field (not shown), normal to the plane of the gyro-body, is passed along track 56, such that the radial motion of the primary mode P is generated. Strut 46 carrying the drive current (top left) has zero net current flowing along it. Current carrying wires 56a and 56b therefore do not cause any forces to be developed on the strut.
  • Secondary sensing may be performed by positioning one or more motion sensors 61-68 beneath respective gyro-body portions 48, 50, 52 and 54 on the substrate. Additional sensors 70-77 may be provided at the corners.
  • the substrate itself may be a glass disc or a second silicon wafer.
  • Figure 9 shows diagrammatical ly one possible arrangement of electrodes 61 to 77 which can sense the amplitudes of the primary and three secondary modes. Electrodes 61 to 68 are positioned beneath the moving masses of gyro-body portions 48 to 54 and sense the primary motion and the X and Y secondary motions. Electrodes 70-77 beneath the corners 69a-69d of the gyro-body and can sense all three of the secondary motions.
  • the modelling of the design of this specific example of the present invention has been carried out using the properties of single crystal silicon.
  • the gyroscope is substantially square symmetric and is manufactured on ⁇ 100 ⁇ silicon with one of the sides of the structure parallel to the ⁇ 1 10 ⁇ direction. Orientation at 45 degrees to the ⁇ 1 10 ⁇ direction also preserves elastic symmetries of gyroscope 36.
  • the X and Y secondary modes are automatically matched by the symmetry of the multi-axis gyroscope leaving only three independent modes to match.
  • the gyroscope is uniform throughout its thickness (in the Z direction). This means that any resonance whose motion is purely in the plane of the multi- axis gyroscope body 38. that is whose motion is confined to the X and Y directions only, will be independent of the thickness of the structure.
  • Both the primary P and the Z secondary modes Zs meet this criterion and therefore have resonant frequencies which are independent of the gyroscope thickness.
  • the shape of the design is first adjusted so as to match the primary P and secondary Z mode Zs. That is the two modes that are entirely in the plane of the gyroscope body 38. This was done in a model having a constant thickness. The dimensions of the structure are then varied. Once the "in plane modes" are matched the thickness of the gyroscope is adjusted, while keeping all other dimensions fixed, so as to bring the secondary X and Y modes Xs, Ys into line with the primary P and secondary Z mode Zs.
  • FIG. 10 shows the structure of the gyroscope.
  • Figure 11 shows the restraints that were imposed on the structure. An ideal mechanical earth was assumed on one face of the central square gyro-body region 38, the restrained freedoms are marked with arrows. Many modes of resonance occur with this device, but only the ones of relevance to this structure are shown.
  • Figure 12 shows the first mode of interest, the primary mode.
  • the plot shows the masses 50-54 at their furthest point from the central region of gyro-body 36.
  • the motion is entirely in the X-Y plane.
  • Figure 13 shows the X secondary motion.
  • the square ring is depicted as rocking about the X-axis: this motion would be excited by a rate of turn about the X- axis.
  • This motion is also showing in Figure 14 viewed along the Y-axis. Similar plots can be obtained for the Y secondary' motion.
  • the X and Y secondary motions are the same, just rotated 90° with respect to one another, about an axis which passes through the centroid of the gyroscope.
  • Figure 15 shows the last mode of interest, the Z secondary motion.
  • This mode is a torsional resonance of the structure about the Z-axis and is excited by a rate of turn about the Z-axis.
  • the dimensions of a preferred embodiment of a multi-axis gyroscope, with the four matched modes are shown in Figure 16.
  • the dimensions may need to be adjusted to minimise any stiffness of the gyroscope. That is by making the masses larger and the beams and/or the struts thinner.
  • the device may be manufactured from a material other than silicon such as, for example, metal.
  • displacement actuators drives
  • displacement sensors detectors
  • piezoelectric drive and/or detector devices magneto-strictive drive and/ detection
  • capacitive drive and/or detection devices may be used.
  • the present invention may be configured in any one of a number of ways.
  • the triangular arrangement of body portions facilitates detection about non-orthogonal X.
  • the present invention may employ one, two or more body-portions to facilitate detection and/or measurement of rotation about one, two or more orthogonal or non-orthogonal axis.
  • sensors 161 to 166 similar to those discussed with reference to figure 9 and some form of signal processing means shown schematically at 250 in figure 19.
  • Such a device would be configured in a manner well known to those skilled in the art to process the signals from each detector and provide an output indicative of rotation about any one or more specific axis.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

La présente invention concerne un gyroscope (36), lequel comprend une partie (48, 50, 52 ou 54) corps de gyroscope qui est entraînée en une oscillation vibratoire primaire P et qui est soumise, lorsqu'elle tourne autour d'un axe X, Y ou Z, à une vibration induite par une force de Coriolis. En faisant correspondre le mode d'oscillation primaire et le mode d'oscillation secondaire, il est possible de détecter avec précision le mouvement autour d'un, de deux ou de trois axes.
EP97943997A 1996-10-21 1997-10-02 Gyroscope a solide a plusieurs degres de liberte Withdrawn EP0932817A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB9621873 1996-10-21
GBGB9621873.0A GB9621873D0 (en) 1996-10-21 1996-10-21 A solid state,multi-axis gyroscope
PCT/GB1997/002713 WO1998017973A1 (fr) 1996-10-21 1997-10-02 Gyroscope a solide a plusieurs degres de liberte

Publications (1)

Publication Number Publication Date
EP0932817A1 true EP0932817A1 (fr) 1999-08-04

Family

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Application Number Title Priority Date Filing Date
EP97943997A Withdrawn EP0932817A1 (fr) 1996-10-21 1997-10-02 Gyroscope a solide a plusieurs degres de liberte

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EP (1) EP0932817A1 (fr)
JP (1) JP2001508537A (fr)
GB (1) GB9621873D0 (fr)
WO (1) WO1998017973A1 (fr)

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JP2000009473A (ja) * 1998-06-22 2000-01-14 Tokai Rika Co Ltd ２軸ヨーレートセンサ及びその製造方法
JP3428458B2 (ja) * 1998-10-01 2003-07-22 株式会社村田製作所 角速度センサ
JP2005233711A (ja) * 2004-02-18 2005-09-02 Star Micronics Co Ltd 電磁駆動型角速度センサ
JP2006064539A (ja) * 2004-08-26 2006-03-09 Matsushita Electric Works Ltd ジャイロセンサおよび角速度検出方法
US7205867B2 (en) * 2005-05-19 2007-04-17 Robert Bosch Gmbh Microelectromechanical resonator structure, and method of designing, operating and using same
US7227432B2 (en) * 2005-06-30 2007-06-05 Robert Bosch Gmbh MEMS resonator array structure and method of operating and using same
EP1832841B1 (fr) * 2006-03-10 2015-12-30 STMicroelectronics Srl Structure de capteur intégré microélectromécanique avec déplacement de commande rotative
DE102008002748A1 (de) * 2008-06-27 2009-12-31 Sensordynamics Ag Mikro-Gyroskop
CN102246003B (zh) * 2008-12-09 2015-09-09 株式会社村田制作所 振动陀螺仪元件及其制造方法
US9074890B2 (en) 2009-09-09 2015-07-07 Continental Teves Ag & Co Ohg Double-axle, shock-resistant rotation rate sensor with linear and rotary seismic elements
EP2392897B1 (fr) * 2010-01-12 2014-06-11 Sony Corporation Capteur de vitesse angulaire, dispositif électronique et procédé pour détecter une vitesse angulaire
FR2969278B1 (fr) * 2010-12-20 2013-07-05 Onera (Off Nat Aerospatiale) Structure planaire pour gyrometre tri-axe
JP5790915B2 (ja) * 2011-01-13 2015-10-07 セイコーエプソン株式会社 物理量センサー及び電子機器
CN102116622B (zh) * 2011-02-14 2012-09-26 孙博华 心跳型单结构三轴微机电陀螺仪

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US5203208A (en) * 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
GB9111316D0 (en) * 1991-05-24 1991-07-17 Burdess James S Improvements in or relating to gyroscopic devices
US5313835A (en) * 1991-12-19 1994-05-24 Motorola, Inc. Integrated monolithic gyroscopes/accelerometers with logic circuits

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Also Published As

Publication number Publication date
GB9621873D0 (en) 1996-12-11
WO1998017973A1 (fr) 1998-04-30
JP2001508537A (ja) 2001-06-26

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