EP0927987A2 - Dispositif transducteur sonore - Google Patents

Dispositif transducteur sonore Download PDF

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Publication number
EP0927987A2
EP0927987A2 EP98124257A EP98124257A EP0927987A2 EP 0927987 A2 EP0927987 A2 EP 0927987A2 EP 98124257 A EP98124257 A EP 98124257A EP 98124257 A EP98124257 A EP 98124257A EP 0927987 A2 EP0927987 A2 EP 0927987A2
Authority
EP
European Patent Office
Prior art keywords
bending
plate
sound
transducer
transducer system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP98124257A
Other languages
German (de)
English (en)
Other versions
EP0927987A3 (fr
EP0927987B1 (fr
Inventor
Helmut Pfeiffer
Karl Flögel
Gerold Dr. Klotz-Engmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Endress and Hauser SE and Co KG
Original Assignee
Endress and Hauser SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress and Hauser SE and Co KG filed Critical Endress and Hauser SE and Co KG
Publication of EP0927987A2 publication Critical patent/EP0927987A2/fr
Publication of EP0927987A3 publication Critical patent/EP0927987A3/fr
Application granted granted Critical
Publication of EP0927987B1 publication Critical patent/EP0927987B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/18—Methods or devices for transmitting, conducting or directing sound
    • G10K11/26—Sound-focusing or directing, e.g. scanning
    • G10K11/35—Sound-focusing or directing, e.g. scanning using mechanical steering of transducers or their beams
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K13/00—Cones, diaphragms, or the like, for emitting or receiving sound in general
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K9/00—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
    • G10K9/12—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated
    • G10K9/13—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using electromagnetic driving means

Definitions

  • the invention relates to a sound transducer system an electromechanical transducer, a circular vibrating plate, the one with the electromechanical transducer coupled and designed to be at the system operating frequency excited to higher order bending vibrations will, which is on the vibrating plate Form node lines, between which alternate in phase vibrating first and second antinode zones lie so that the bending vibrator plate sound waves in one adjoining one side of the bending transducer plate Transmission medium emits or through the transmission medium incoming sound waves to bending vibrations is stimulated, and with means to influence the Sound radiation from the bending transducer plate
  • Sound transducer systems of this type are used in particular as Sound transmitter and / or sound receiver for distance measurement used according to the sonar principle.
  • the transit time is a measure of the distance to be measured.
  • the Frequency of the sound wave can be in the audible range or Ultrasound range. In most cases, this is done Distance measurement according to the pulse transit time method in which a short sound pulse is emitted and that is reflected on the object Echo pulse is received. In this case the same sound transducer system alternately as a sound transmitter and be used as a sound receiver.
  • a common application of this distance measurement with sound waves is the level measurement.
  • the Sound transducer system above the product to be measured above of the highest occurring level so that it emits a sound wave down onto the product and that reflected upwards on the surface of the filling material Echo wave receives.
  • the measured duration of the Sound wave then gives the distance between the product surface from the transducer system, and with a known installation height of the The level to be measured can be derived from the sound transducer system be calculated.
  • the used in the known transducer systems Bending transducer plates are used for impedance matching.
  • the transmission medium for the sound waves gaseous e.g. Air
  • the usual electromechanical Transducers such as piezoelectric transducers, magnetostrictive Transducers, etc., usually have an acoustic Impedance by the acoustic impedance of air or other gaseous transmission media is very different. They are therefore used in the known sound transducer systems only to excite the large-area bending vibrator plates, which are the actual sound emitters or sound receivers form and a good impedance matching to air or others result in gaseous transmission media.
  • the large-area bending transducer plates also an advantage, since it is known that the bundling of a radiation lobe is all the more is narrower, the greater the extent of the radiation area in the Ratio to wavelength. But that stands with the Sound transducer systems with a higher in bending vibrations Bending vibratory plate placed order the problem contrary to that the alternating oscillating in phase Radiate antinode waves emitting anti-phase sound waves, that come into interference with each other.
  • a sound transducer system known from EP-PS 0 039 986 are the alternating antinode zones corresponding areas of the bending vibrating plate also formed so that that of every second antinode zone generated sound waves a phase rotation of 180 ° is issued, so that of all vibration antinodes radiated sound waves essentially in phase are.
  • the relevant areas of Radiation surface of the bending vibratory plate is a low-loss acoustic propagation material of such thickness applied, that the desired phase shift is achieved low loss acoustic propagation material for this Purpose are closed-cell foam plastics or unfoamed elastomers proposed.
  • the impermeable to sound waves Has sound wave barriers that are spaced from the Bending transducer plate and acoustically decoupled from it in each case oscillating antinode zones oscillating in phase with one another lie, while in front of the others, to these Vibration antinodes in opposite phase vibrating antinodes areas permeable to sound waves.
  • the sound beam former gives the effect that of the Bending vibrating plate only emits in-phase sound waves while the sound waves are in phase opposition to it are suppressed by the sound wave barriers.
  • the object of the invention is to create a sound transducer system of the type specified at the beginning, which is a good directivity and at the same time very insensitive to noise, Pollution, build-up and exposure aggressive media.
  • this object is achieved in that in phase with each other and with the first Vibration antinodes vibrating in opposite phase to the second Vibration antinodes on the transmission medium facing away from the back of the bending transducer plate Massering ring concentric to the center of the vibrating plate is appropriate.
  • the result in the in-phase vibrating second antinode zones attached earth rings the effect that these anti-vibration zones swing with reduced amplitude while at the same time the vibration amplitude of the second one Vibration antinodes vibrating in opposite phases first Vibration belly zones is enlarged. That of alternating Vibration antinodes emitted sound waves that are related to each other are out of phase and with each other for interference come, therefore have very different amplitudes, so that the weaker sound waves are suppressed and only still in-phase sound waves of considerable intensity the main radiation direction perpendicular to the bending vibrating plate spread. This results in a radiation diagram with pronounced directivity in the main radiation direction.
  • the sound transducer system 10 shown in FIG. 1 has one Housing 11 with a tubular portion 12, the one End is closed by a bottom 13 and on the opposite open end in an expanded section 14 which changes to the shape of a flat bowl with an edge 15 has.
  • a cable bushing is in an opening in the base 13 16 attached.
  • the entire housing 11 is rotationally symmetrical to its axis A-A, so that the edge 15 of the extended section 14 is circular.
  • an electromechanical Transducer 20 arranged in the illustrated embodiment is a piezoelectric transducer. It exists of two piezo elements 21 and 22, which sandwich like under Insertion of a center electrode 23 between two outer electrodes 24, 25 are arranged. The one from the piezo elements 21, 22 and the electrodes 23, 24, 25 existing Sandwich block is between a support mass 26 and one Coupling mass 27 clamped. The two outer electrodes 24 and 25 are electrical with a common lead 28 connected. The center electrode 23 has a second one Connection conductor 29 connected. Thus, the two piezo elements 21, 22 electrically connected in parallel while they mechanically in series.
  • a thin one circular bending vibrating plate 30 arranged by a rod 31 with the electromechanical transducer 20 is mechanically connected.
  • the rod 31 protrudes into the axial Drilling one in the middle of the flexural vibration plate 30 attached socket 32, with which they are suitably fixed is connected, for example by screwing in, pressing in, Welding or soldering.
  • the bending transducer plate 30 is spaced from the bottom of the extended Housing section 14. Their diameter is slightly larger than the inner diameter of the rim 15 and slightly smaller than that Inner diameter of one at the front end of the rim 15 formed recess 33, in the edge of the flexural plate 30 by means of a retaining ring 34 between two O-rings 35 and 36 is clamped.
  • the retaining ring can be in attached to the rim 15 in any suitable manner be, for example by means of screws or welding, Soldering or gluing.
  • the O-rings 35 and 36 serve to isolate structure-borne noise between the flexure plate 30 and the housing 11, and they also prevent intrusion of undesirable foreign substances into the interior of the housing 11 all around the edge of the flexural vibration plate 30.
  • the front 30a of the flexural vibrating plate 30, which with the Transmission medium (e.g. air) is in contact in which Sound waves emitted or from which sound waves are received should be completely smooth and even.
  • the Transmission medium e.g. air
  • Bending vibrating plate 30, which is inside the extended Housing section 14 is circular concentric earth rings 40 attached, in Fig. 1 in section and in Fig. 2nd in plan view on the back 30b of the bending vibrating plate 30 can be seen.
  • the ground rings 40 can be on any suitably connected to the flexure plate 30 be. You can, as in the embodiment of Fig. 1st is shown, as is the central socket 32 in one Be made with the bending plate 30, for example in that it consists of a solid metal plate are milled out.
  • the earth rings 40 also exist in this case preferably made of metal.
  • the not from the socket 32 and the Masseringen 40 occupied portions of the back 30b of the Bending vibrating plate 30 are made with a foam 41 covered, the thickness of which is smaller than the height of the earth rings 40 is.
  • the entire remaining interior of the housing 11 is with a potting compound 42 made of a plastic with high damping filled into which also protruding from the foam 41 Portions of the earth rings 40 are embedded. Of the Foam 41 prevents the potting compound 42 with the Bending vibrating plate 30 comes into contact.
  • the foam 41 can consist of polyethylene or polybutadiene, for example.
  • the sealing compound 42 this can be done under the brand "Nafturan” well-known 2-component casting resin based on polyurethane or the silicone rubber known under the "Eccosil” brand be used.
  • the sound transducer system 10 shown in Fig. 1 serves the Purpose of converting electrical vibrations into sound waves, that in the direction of the axis A-A, i.e. perpendicular to the plane the bending vibrating plate 30 are emitted, or sound waves, that come from this direction, in electrical Implement vibrations.
  • the send and receive direction is perpendicular to the transducer system in Fig. 1 what the usual installation method if the sound transducer system like an echo sounder for measuring a level is used. In this use case it is Sound transducer system above the highest level mounted, and the sound waves run through the air down until they hit the surface of the product and be reflected there so that they become echo signals too return to the transducer system.
  • the distance between the product surface results from sound waves and the transducer system, and from this The fill level can be calculated at a distance.
  • the sound waves are usually in the form of short pulses are sent out, and there will be a time interval up to measured for the arrival of the echo pulses.
  • the sound transducer system shown alternately as a sound transmitter and be used as a sound receiver.
  • the flexible vibration plate is used to meet the first requirement 30 used as a sound radiator.
  • the piezo elements 21, 22 thickness vibrations that correspond to the elements 26, 27 tuned coupling vibrators for longitudinal resonance vibrations excite that transmit to the rod 31 be so that these in longitudinal vibrations in the Direction of the axis A-A is offset.
  • the system operating frequency i.e. the frequency of the alternating electrical voltage and thus the frequency of that from the piezoelectric transducer generated mechanical vibration, is much higher than the bending vibration natural resonance frequency of the bending vibrating plate 30, so that the bending vibratory plate 30 from the rod 31 excited to higher order bending vibrations becomes.
  • the placed in higher order bending vibrations large-area bending vibrating plate 30 results in a good one Impedance matching to the transmission medium air or a other gaseous transmission medium.
  • Fig. 3 shows schematically the vibration behavior of a Section of a higher order bending vibrations excited vibratory plate of conventional type that made a thin, flat metal plate on both sides uniform thickness.
  • the straight line M denotes the middle plane of the bending vibratory plate in the rest position. in the excited state form on the bending vibratory plate concentric node lines K made during the vibrations remain in the rest position on the middle plane M.
  • the Distances of the node lines K are due to the system operating frequency certainly; all node lines have the same distance ⁇ / 2, which is half the wavelength of the standing bending wave that corresponds to the system operating frequency forms on the bending vibratory plate 30.
  • All first Vibration belly zones B1 swing in phase with each other.
  • All second antinode zones B2 also vibrate in phase with each other, but in phase with the first Vibration belly zones B1.
  • 3 is the vibration state the antinode zones B1 and B2 at a time, that of the maximum deflection in one direction corresponds, represented by a full line, and the Vibration condition at a time that is the maximum Deflection in the opposite direction, i.e. after corresponds to a phase change of 180 ° is indicated by a dashed line shown.
  • the amplitudes of the excursions are for the antinode zones B1 and B2 same size; they are exaggerated for clarity shown.
  • Each antinode zone creates a sound wave that is itself spreads in the adjacent transmission medium.
  • the desired directionality exists Problem that that of neighboring anti-vibration zones generated sound waves are in phase opposition to each other, these alternating phase waves in the 3 is more conventional Kind of the same amplitudes, so that they are in the desired Direction of propagation perpendicular to the plane M of the Mutually compensate the vibrating plate.
  • Such Sound wave distribution does not produce a pronounced directivity in the direction of the axis perpendicular to the vibrating plate; rather, the directional diagram has strong radiation side lobes, which are concentric to this axis direction, and other weaker side lobes.
  • This bad Directionality is particularly important at longer measuring distances most of the transmitted sound energy lost without returning to the transducer system.
  • the sound transducer system has the same directional diagram when received like when sending.
  • FIG. 4 shows the vibration behavior of the flexural vibrating plate 30 of FIG. 1 provided with the mass rings 40.
  • the mass rings 40 are arranged in such a way that in the case of vibrations with the system operating frequency, a mass ring 40 lies in the middle of every second antinode zone B2, while the first antinode zones B1 are free of Masseringen 40.
  • the second antinode zones B2 vibrate with reduced amplitude about the central plane M of the flexible oscillator plate 30.
  • the consequence of this is that the first antinode zones B1 vibrate with a substantially greater amplitude than the second antinode zones B2 and accordingly the sound waves generated by the first antinode zones B1 have a substantially greater amplitude than the sound waves generated by the second antinode zones B2.
  • the mutually parallel antiphase sound waves can therefore no longer completely compensate each other; rather, the sound waves originating from the first antinode zones B1 are attenuated only slightly, while the sound waves originating from the second antinode zones B2 are completely suppressed.
  • the earth rings 40 must be arranged at equal intervals so that the intermediate annular membrane sections the first vibration antinodes B1 on the same Resonance frequency and swing in phase.
  • the resonance frequency can by the ring spacing and the plate thickness can be varied. It is also important to ensure that the Center distance of the antinode zones smaller than that Sound wave length in air is otherwise due to constructive Interference of the individual antinode zones originating sound waves additional secondary maxima in the Directional characteristics arise.
  • Membrane sections can the radial amplitude distribution and thus the directional characteristic to given requirements be adjusted.
  • the distribution for example to a Gaussian distribution or adapted to an Kaiser-Bessel distribution become.
  • the transducer system For distance measurement using the pulse echo sounder method becomes the transducer system, as previously explained alternately used as a transmitter and a receiver. As a result the ringing after the emission of each sound pulse the transducer cannot immediately work as a receiver, so that there is a dead time in which echo pulses from short-range targets cannot be received.
  • the shortest measurable Distance is called the block distance. To this block distance to shorten, it is necessary to reduce the ringing to keep it as short as possible, what by an appropriate Attenuation can be achieved. In the illustrated in Fig. 1 Sound transducer system, this damping is advantageous Way achieved that the on the back 30b of Bending vibrating plate 30 attached earth rings 40 partially are embedded in the potting compound 42 high damping. Thereby becomes the impulse behavior of the sound transducer system significantly improved and the ringing significantly reduced.
  • FIG. 5 is a modified embodiment of the sound transducer system shown by Fig. 1.
  • the electromechanical transducer 20 with the flexure plate 30 do not have one in the middle of the flexure plate 30 attached socket is coupled, but via the innermost massering 40.
  • the Rod 31 attached a coupling member 48 which with the Bending transducer plate 30 facing away from the innermost Masserings 40 is connected.
  • FIG Fig. 1 Another difference from the embodiment of FIG Fig. 1 in the embodiment of Fig. 5 is that on the back 30b of the flexure plate 30 in each A mass ring 50 is also attached to the first antinode zone is that in the central antinode zone too a ground disk 51 has shrunk.
  • the earth rings 50 and the mass disk 51 have a much smaller mass than each mass ring 40.
  • the sound transducer system stands out in that the exposed to the environmental influences Front of the sound transducer system only through the smooth and flat front side of the vibrating plate 30 is formed while all influencing devices the sound radiation on the against the environmental influences protected rear side of the bending transducer plate are.
  • the sound transducer system is therefore very insensitive against pollution, build-up and exposure aggressive media.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Electromagnetism (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Audible-Bandwidth Dynamoelectric Transducers Other Than Pickups (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
EP98124257A 1997-12-30 1998-12-18 Dispositif transducteur sonore Expired - Lifetime EP0927987B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19758243A DE19758243A1 (de) 1997-12-30 1997-12-30 Schallwandlersystem
DE19758243 1997-12-30

Publications (3)

Publication Number Publication Date
EP0927987A2 true EP0927987A2 (fr) 1999-07-07
EP0927987A3 EP0927987A3 (fr) 2001-10-04
EP0927987B1 EP0927987B1 (fr) 2004-02-04

Family

ID=7853589

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98124257A Expired - Lifetime EP0927987B1 (fr) 1997-12-30 1998-12-18 Dispositif transducteur sonore

Country Status (5)

Country Link
US (1) US6081064A (fr)
EP (1) EP0927987B1 (fr)
JP (1) JP3062170B2 (fr)
CA (1) CA2257584C (fr)
DE (2) DE19758243A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008071563A2 (fr) * 2006-12-12 2008-06-19 Endress+Hauser Gmbh+Co.Kg Dispositif de détermination et/ou de surveillance d'une grandeur de processus
EP1914717A4 (fr) * 2005-07-27 2017-01-18 Gallego Juarez, Juan A. Generateur de sons et d'ultrasons haute intensite, destine au demoussage industriel de liquides par voie aerienne

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6682214B1 (en) * 1999-09-21 2004-01-27 University Of Hawaii Acoustic wave micromixer using fresnel annular sector actuators
ES2187382B1 (es) * 2001-11-23 2004-08-16 Consejo Sup. Investigaciones Cientificas Emisor macrosonico de placa vibrante, con reflectores y separadores de las zonas internodales para obtener radiacion directiva en fluidos.
US6984923B1 (en) * 2003-12-24 2006-01-10 The United States Of America As Represented By The Secretary Of The Navy Broadband and wide field of view composite transducer array
US9903971B2 (en) * 2010-03-23 2018-02-27 Baker Hughes, A Ge Company, Llc Apparatus and method for generating broad bandwidth acoustic energy
DE102012200757B4 (de) * 2012-01-05 2022-01-05 Vitesco Technologies GmbH Füllstandsgeber
DE102013211606A1 (de) * 2013-06-20 2014-12-24 Robert Bosch Gmbh Umfeldsensiereinrichtung mit Ultraschallwandler, und Kraftfahrzeug mit einer derartigen Umfeldsensiereinrichtung
DE102013211619A1 (de) * 2013-06-20 2014-12-24 Robert Bosch Gmbh Umfeldsensiereinrichtung mit Ultraschallwandler, und Kraftfahrzeug mit einer derartigen Umfeldsensiereinrichtung
DE102017209823A1 (de) * 2017-06-09 2018-12-13 Robert Bosch Gmbh Ultraschallsensor
DE102020100162B4 (de) * 2020-01-07 2023-01-12 Umfotec Gmbh Vorrichtung zur Absenkung von Luft- und Körperschall

Citations (4)

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Publication number Priority date Publication date Assignee Title
US4333028A (en) * 1980-04-21 1982-06-01 Milltronics Ltd. Damped acoustic transducers with piezoelectric drivers
US4768615A (en) * 1986-01-27 1988-09-06 Endress U. Hauser Gmbh U. Co. Acoustic transducer system
US5299175A (en) * 1989-10-06 1994-03-29 Consejo Superior De Investigaciones Cientificas Electroacoustic unit for generating high sonic and ultra-sonic intensities in gases and interphases
US5452267A (en) * 1994-01-27 1995-09-19 Magnetrol International, Inc. Midrange ultrasonic transducer

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US3525071A (en) * 1968-04-10 1970-08-18 Dynamics Corp America Electroacoustic transducer
CA1136257A (fr) * 1980-04-21 1982-11-23 Stanley Panton Transducteur directionnel a bande passante large
JPS5778299A (en) * 1980-10-31 1982-05-15 Houyuu Gomme Kk Diaphragm for speaker
US5191796A (en) * 1990-08-10 1993-03-09 Sekisui Kaseihin Koygo Kabushiki Kaisha Acoustic-emission sensor
US5218575A (en) * 1992-09-04 1993-06-08 Milltronics Ltd. Acoustic transducer
DE4230773C2 (de) * 1992-09-15 2000-05-04 Endress Hauser Gmbh Co Ultraschallwandler
US5309411A (en) * 1992-12-08 1994-05-03 Dehua Huang Transducer
JPH06219900A (ja) * 1993-01-28 1994-08-09 Dowa Mining Co Ltd Ｓｉドープｎ型ガリウム砒素単結晶の製造方法
JPH08289397A (ja) * 1995-04-14 1996-11-01 Olympus Optical Co Ltd 超音波探触子用の圧電素子
DE19620133C2 (de) * 1996-05-18 2001-09-13 Endress Hauser Gmbh Co Schall- oder Ultraschallsensor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4333028A (en) * 1980-04-21 1982-06-01 Milltronics Ltd. Damped acoustic transducers with piezoelectric drivers
US4768615A (en) * 1986-01-27 1988-09-06 Endress U. Hauser Gmbh U. Co. Acoustic transducer system
US5299175A (en) * 1989-10-06 1994-03-29 Consejo Superior De Investigaciones Cientificas Electroacoustic unit for generating high sonic and ultra-sonic intensities in gases and interphases
US5452267A (en) * 1994-01-27 1995-09-19 Magnetrol International, Inc. Midrange ultrasonic transducer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1914717A4 (fr) * 2005-07-27 2017-01-18 Gallego Juarez, Juan A. Generateur de sons et d'ultrasons haute intensite, destine au demoussage industriel de liquides par voie aerienne
WO2008071563A2 (fr) * 2006-12-12 2008-06-19 Endress+Hauser Gmbh+Co.Kg Dispositif de détermination et/ou de surveillance d'une grandeur de processus
WO2008071563A3 (fr) * 2006-12-12 2009-05-14 Endress & Hauser Gmbh & Co Kg Dispositif de détermination et/ou de surveillance d'une grandeur de processus

Also Published As

Publication number Publication date
US6081064A (en) 2000-06-27
DE19758243A1 (de) 1999-07-15
EP0927987A3 (fr) 2001-10-04
JPH11262087A (ja) 1999-09-24
JP3062170B2 (ja) 2000-07-10
DE59810709D1 (de) 2004-03-11
CA2257584C (fr) 2001-07-24
EP0927987B1 (fr) 2004-02-04
CA2257584A1 (fr) 1999-06-30

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