EP0922293A4 - - Google Patents

Info

Publication number
EP0922293A4
EP0922293A4 EP97927842A EP97927842A EP0922293A4 EP 0922293 A4 EP0922293 A4 EP 0922293A4 EP 97927842 A EP97927842 A EP 97927842A EP 97927842 A EP97927842 A EP 97927842A EP 0922293 A4 EP0922293 A4 EP 0922293A4
Authority
EP
European Patent Office
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP97927842A
Other versions
EP0922293A1 (en
EP0922293B1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Candescent Intellectual Property Services Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/660,538 external-priority patent/US5865659A/en
Priority claimed from US08/660,536 external-priority patent/US6187603B1/en
Application filed filed Critical
Publication of EP0922293A4 publication Critical patent/EP0922293A4/xx
Publication of EP0922293A1 publication Critical patent/EP0922293A1/en
Application granted granted Critical
Publication of EP0922293B1 publication Critical patent/EP0922293B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00—Electron emission display panels, e.g. field emission display panels

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
EP97927842A 1996-06-07 1997-06-05 Fabrication of gated electron-emitting device utilizing distributed particles to define gate openings Expired - Lifetime EP0922293B1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US08/660,538 US5865659A (en) 1996-06-07 1996-06-07 Fabrication of gated electron-emitting device utilizing distributed particles to define gate openings and utilizing spacer material to control spacing between gate layer and electron-emissive elements
US660536 1996-06-07
US660538 1996-06-07
US08/660,536 US6187603B1 (en) 1996-06-07 1996-06-07 Fabrication of gated electron-emitting devices utilizing distributed particles to define gate openings, typically in combination with lift-off of excess emitter material
PCT/US1997/009198 WO1997047021A1 (en) 1996-06-07 1997-06-05 Fabrication of gated electron-emitting device utilizing distributed particles to define gate openings

Publications (3)

Publication Number Publication Date
EP0922293A4 true EP0922293A4 (xx) 1999-06-16
EP0922293A1 EP0922293A1 (en) 1999-06-16
EP0922293B1 EP0922293B1 (en) 2004-08-18

Family

ID=27098119

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97927842A Expired - Lifetime EP0922293B1 (en) 1996-06-07 1997-06-05 Fabrication of gated electron-emitting device utilizing distributed particles to define gate openings

Country Status (6)

Country Link
EP (1) EP0922293B1 (xx)
JP (1) JP4226651B2 (xx)
KR (1) KR100323289B1 (xx)
DE (1) DE69730333T2 (xx)
TW (1) TW389928B (xx)
WO (1) WO1997047021A1 (xx)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6007396A (en) * 1997-04-30 1999-12-28 Candescent Technologies Corporation Field emitter fabrication using megasonic assisted lift off
FR2779243B1 (fr) * 1998-05-26 2000-07-07 Commissariat Energie Atomique Procede de realisation par photolithographie d'ouvertures auto-alignees sur une structure, en particulier pour ecran plat a micropointes
JP2000235832A (ja) * 1998-07-23 2000-08-29 Sony Corp 冷陰極電界電子放出素子、冷陰極電界電子放出型表示装置、及びそれらの製造方法
US6297587B1 (en) 1998-07-23 2001-10-02 Sony Corporation Color cathode field emission device, cold cathode field emission display, and process for the production thereof
GB2349271B (en) * 1998-07-23 2001-08-29 Sony Corp Cold cathode field emission device and cold cathode field emission display
KR100601973B1 (ko) 2004-11-25 2006-07-18 삼성전자주식회사 나노 입자를 이용한 나노 스케일의 반도체 소자의 제조 방법
JP2009170280A (ja) * 2008-01-17 2009-07-30 Sony Corp 冷陰極電界電子放出素子の製造方法及び冷陰極電界電子放出表示装置の製造方法
TWI441237B (zh) * 2012-05-31 2014-06-11 Au Optronics Corp 場發射顯示器之畫素結構的製造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5007873A (en) * 1990-02-09 1991-04-16 Motorola, Inc. Non-planar field emission device having an emitter formed with a substantially normal vapor deposition process
US5249340A (en) * 1991-06-24 1993-10-05 Motorola, Inc. Field emission device employing a selective electrode deposition method
EP0707237A1 (fr) * 1994-10-10 1996-04-17 Commissariat A L'energie Atomique Procédé de formation de trous dans une couche de résine photosensible, application à la fabrication de sources d'électrons à cathodes emissives a micropointes et d'écrans plats de visualisation
WO1997047020A1 (en) * 1996-06-07 1997-12-11 Candescent Technologies Corporation Gated electron emission device and method of fabrication thereof

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4407695A (en) * 1981-12-31 1983-10-04 Exxon Research And Engineering Co. Natural lithographic fabrication of microstructures over large areas
JP2717048B2 (ja) * 1992-11-12 1998-02-18 株式会社日立製作所 磁気ディスク製造方法および製造装置
US5462467A (en) * 1993-09-08 1995-10-31 Silicon Video Corporation Fabrication of filamentary field-emission device, including self-aligned gate
DE4331185C1 (de) * 1993-09-14 1994-12-15 Siemens Ag Verfahren zur Kontaktlochauffüllung in einem Halbleiterschichtaufbau
US5466626A (en) * 1993-12-16 1995-11-14 International Business Machines Corporation Micro mask comprising agglomerated material
US5538450A (en) * 1994-04-29 1996-07-23 Texas Instruments Incorporated Method of forming a size-arrayed emitter matrix for use in a flat panel display
US5608283A (en) * 1994-06-29 1997-03-04 Candescent Technologies Corporation Electron-emitting devices utilizing electron-emissive particles which typically contain carbon
US5509840A (en) * 1994-11-28 1996-04-23 Industrial Technology Research Institute Fabrication of high aspect ratio spacers for field emission display

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5007873A (en) * 1990-02-09 1991-04-16 Motorola, Inc. Non-planar field emission device having an emitter formed with a substantially normal vapor deposition process
US5249340A (en) * 1991-06-24 1993-10-05 Motorola, Inc. Field emission device employing a selective electrode deposition method
EP0707237A1 (fr) * 1994-10-10 1996-04-17 Commissariat A L'energie Atomique Procédé de formation de trous dans une couche de résine photosensible, application à la fabrication de sources d'électrons à cathodes emissives a micropointes et d'écrans plats de visualisation
WO1997047020A1 (en) * 1996-06-07 1997-12-11 Candescent Technologies Corporation Gated electron emission device and method of fabrication thereof

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO9747021A1 *

Also Published As

Publication number Publication date
TW389928B (en) 2000-05-11
DE69730333T2 (de) 2005-09-01
DE69730333D1 (de) 2004-09-23
KR100323289B1 (ko) 2002-03-08
EP0922293A1 (en) 1999-06-16
JP2000512067A (ja) 2000-09-12
EP0922293B1 (en) 2004-08-18
KR20000016555A (ko) 2000-03-25
WO1997047021A1 (en) 1997-12-11
JP4226651B2 (ja) 2009-02-18

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