EP0829645A3 - Pompe turbo-moléculaire - Google Patents

Pompe turbo-moléculaire Download PDF

Info

Publication number
EP0829645A3
EP0829645A3 EP97306652A EP97306652A EP0829645A3 EP 0829645 A3 EP0829645 A3 EP 0829645A3 EP 97306652 A EP97306652 A EP 97306652A EP 97306652 A EP97306652 A EP 97306652A EP 0829645 A3 EP0829645 A3 EP 0829645A3
Authority
EP
European Patent Office
Prior art keywords
rotor
vane
blades
stage
exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP97306652A
Other languages
German (de)
English (en)
Other versions
EP0829645A2 (fr
Inventor
Yasushi Maejima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Seiki KK
Original Assignee
Seiko Seiki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Seiki KK filed Critical Seiko Seiki KK
Publication of EP0829645A2 publication Critical patent/EP0829645A2/fr
Publication of EP0829645A3 publication Critical patent/EP0829645A3/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP97306652A 1996-09-12 1997-08-29 Pompe turbo-moléculaire Withdrawn EP0829645A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP26352396A JPH1089284A (ja) 1996-09-12 1996-09-12 ターボ分子ポンプ
JP263523/96 1996-09-12

Publications (2)

Publication Number Publication Date
EP0829645A2 EP0829645A2 (fr) 1998-03-18
EP0829645A3 true EP0829645A3 (fr) 1998-11-11

Family

ID=17390728

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97306652A Withdrawn EP0829645A3 (fr) 1996-09-12 1997-08-29 Pompe turbo-moléculaire

Country Status (2)

Country Link
EP (1) EP0829645A3 (fr)
JP (1) JPH1089284A (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3092063B2 (ja) * 1998-06-17 2000-09-25 セイコー精機株式会社 ターボ分子ポンプ
JP3047292B1 (ja) * 1998-11-24 2000-05-29 セイコー精機株式会社 ターボ分子ポンプ及び真空装置
JP4104098B2 (ja) * 1999-03-31 2008-06-18 エドワーズ株式会社 真空ポンプ
DE10103230A1 (de) 2001-01-25 2002-08-01 Leybold Vakuum Gmbh Turbomolekularvakuumpumpe mit Rotor-und Statorschaufeln
WO2008136084A1 (fr) * 2007-04-23 2008-11-13 Shimadzu Corporation Pompe turbomoléculaire
CN102007298B (zh) * 2008-02-15 2014-04-30 株式会社岛津制作所 涡轮分子泵
KR101647879B1 (ko) * 2014-04-15 2016-08-12 한밭대학교 산학협력단 터보분자식 수증기 압축장치
EP3091235B1 (fr) * 2015-05-04 2020-03-11 Pfeiffer Vacuum Gmbh Disque de rotor
JP2020023949A (ja) * 2018-08-08 2020-02-13 エドワーズ株式会社 真空ポンプ、及びこの真空ポンプに用いられる円筒部、並びにベース部
JP7052752B2 (ja) * 2019-01-30 2022-04-12 株式会社島津製作所 ターボ分子ポンプ

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB580806A (en) * 1941-05-21 1946-09-20 Alan Arnold Griffith Improvements in compressor, turbine and like blades
GB1019272A (en) * 1961-08-04 1966-02-02 Snecma Improvements in rotary molecular vacuum pumps
DE7237362U (de) * 1972-10-12 1973-01-11 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe
US3826588A (en) * 1972-06-19 1974-07-30 Leybold Heraeus Verwaltung Turbomolecular vacuum pump
SU1252552A1 (ru) * 1984-06-01 1986-08-23 Научно-исследовательский институт прикладной математики и кибернетики при Горьковском государственном университете им.Н.И.Лобачевского Ротор радиального турбомолекул рного вакуумного насоса
US4770574A (en) * 1985-03-01 1988-09-13 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh Discs with blades
US5528618A (en) * 1992-09-23 1996-06-18 The United States Of America As Represented By The Secretary Of The Air Force Photolytic iodine laser system with turbo-molecular blower

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB580806A (en) * 1941-05-21 1946-09-20 Alan Arnold Griffith Improvements in compressor, turbine and like blades
GB1019272A (en) * 1961-08-04 1966-02-02 Snecma Improvements in rotary molecular vacuum pumps
US3826588A (en) * 1972-06-19 1974-07-30 Leybold Heraeus Verwaltung Turbomolecular vacuum pump
DE7237362U (de) * 1972-10-12 1973-01-11 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe
SU1252552A1 (ru) * 1984-06-01 1986-08-23 Научно-исследовательский институт прикладной математики и кибернетики при Горьковском государственном университете им.Н.И.Лобачевского Ротор радиального турбомолекул рного вакуумного насоса
US4770574A (en) * 1985-03-01 1988-09-13 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh Discs with blades
US5528618A (en) * 1992-09-23 1996-06-18 The United States Of America As Represented By The Secretary Of The Air Force Photolytic iodine laser system with turbo-molecular blower

Also Published As

Publication number Publication date
EP0829645A2 (fr) 1998-03-18
JPH1089284A (ja) 1998-04-07

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