EP0807924A2 - Transducteur à son ou ultrason - Google Patents

Transducteur à son ou ultrason Download PDF

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Publication number
EP0807924A2
EP0807924A2 EP97105884A EP97105884A EP0807924A2 EP 0807924 A2 EP0807924 A2 EP 0807924A2 EP 97105884 A EP97105884 A EP 97105884A EP 97105884 A EP97105884 A EP 97105884A EP 0807924 A2 EP0807924 A2 EP 0807924A2
Authority
EP
European Patent Office
Prior art keywords
sound
front surface
webs
membranes
excitation frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP97105884A
Other languages
German (de)
English (en)
Other versions
EP0807924A3 (fr
EP0807924B1 (fr
Inventor
Manfred Eckert
Karl Flögel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Endress and Hauser SE and Co KG
Original Assignee
Endress and Hauser SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress and Hauser SE and Co KG filed Critical Endress and Hauser SE and Co KG
Publication of EP0807924A2 publication Critical patent/EP0807924A2/fr
Publication of EP0807924A3 publication Critical patent/EP0807924A3/fr
Application granted granted Critical
Publication of EP0807924B1 publication Critical patent/EP0807924B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0611—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
    • B06B1/0618—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile of piezo- and non-piezoelectric elements, e.g. 'Tonpilz'
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K13/00—Cones, diaphragms, or the like, for emitting or receiving sound in general

Definitions

  • the invention relates to a sound or ultrasound sensor for transmitting and / or receiving sound or ultrasound.
  • Ultrasonic sensors are e.g. used as a transmitter and / or receiver for distance measurement according to the sounder principle, especially for measuring a level, e.g. in a container, or to measure a level, e.g. in a channel or on a conveyor belt.
  • a pulse emitted by the sound or ultrasonic sensor is reflected on the surface of the product.
  • the transit time of the pulse from the sensor to the surface and back is determined and from this the level or level is determined.
  • Such sound or ultrasonic sensors are used in many branches of industry, e.g. used in the food industry, the water and wastewater industry and in chemistry.
  • sound or ultrasonic sensors of high chemical resistance are required, which can be used in a wide temperature range.
  • it is additionally required that such a sensor is preferably flush with the front and thus easy to clean.
  • the sensors In all of the application areas mentioned, it is necessary for the sensors to have an emission characteristic with a have a small opening angle or a large main sound lobe and low secondary sound lobes.
  • the sensor here comprises a conical, metallic radiation element and a base body.
  • a piezoelectric element which is clamped between the radiation element and the base body and serves to excite thickness oscillations, serves as the transducer element.
  • the emission characteristics of the sensor are essentially determined by the diameter of the front surface and the frequency.
  • the sine of the opening angle of the emitted sound beam behaves like the quotient of the wavelength of the emitted sound or ultrasound wave and the diameter of the front surface of the radiation element.
  • a large diameter must therefore be used.
  • the possible size of the diameter is limited, however, by the fact that the front surface also carries out bending vibrations above a certain diameter.
  • the opening angle of the sound lobe is therefore always of a minimum size.
  • the Radiating element Since the acoustic impedance of the medium in which the sound or ultrasound is to be emitted, for example air, and that of the radiating element differ very greatly, the Radiating element a matching layer made of an elastomer.
  • a disadvantage of such a sound or ultrasonic sensor is that the temperature range in which the sensor can be used is restricted by the use of the elastomer matching layer.
  • elastomers can only be used in a lower temperature range than metals, on the other hand, the speed of sound in elastomers is strongly temperature-dependent. Outside of a temperature range predetermined by the elastomer, the matching layer is therefore ineffective.
  • a metallic radiating element has a higher mechanical resistance than the matching layer and can be used in a larger temperature range.
  • the transducer element consists of two piezoelectric elements through which the sensor is excited to vibrate axially. With a suitable choice of the excitation frequency, the membrane is set in resonance.
  • the amplitude of the vibration of the membrane is maximum in the center of the membrane and decreases towards the edge.
  • the diameter of the membrane cannot be increased arbitrarily, since the membrane executes higher-order bending waves for a given thickness and a given excitation frequency above a certain diameter. This can e.g. can be avoided by using a stiffer membrane.
  • a stiffer membrane greatly reduces the sensitivity of the sound or ultrasonic sensor when it is received.
  • the invention consists in a sound or ultrasonic sensor for transmitting and / or receiving sound or ultrasound with a radiating element that has a flat front surface, and with a transducer element, the transducer element causing the front surface to vibrate due to an excitation frequency such that the entire front surface carries out almost in-phase deflections with an almost equal amplitude parallel to the surface normal of the front surface, which is characterized in that concentric webs are arranged on the front surface, that there is a concentric gap between each two adjacent webs and that a disk, especially made of metal , the sound or ultrasound sensor is flush with the front, which is firmly connected to the webs and which has segments which are not connected to the webs and serve as membranes.
  • the membranes execute bending vibrations whose resonance frequencies are greater than or equal to the excitation frequency.
  • the resonance frequency of the bending vibration of the central circular membrane is greater than or equal to the excitation frequency and the resonance frequencies of the other membranes 51 increase from the inside to the outside.
  • the resonance frequencies of the bending vibration of the membranes are identical to one another and significantly greater than the excitation frequency and each membrane and the regions of the disc 5 connected to the webs oscillate in phase.
  • a damping material in particular a foam, is introduced into the column.
  • the gaps have a depth that is slightly greater than a maximum deflection of the membranes closing the gaps.
  • Such a sound or ultrasonic sensor has a smooth surface and is therefore particularly easy to clean, that it has a metallic, that is to say chemically very stable and mechanically robust, radiation surface that it is at temperatures of up to 150 ° C can be used and that its directional characteristic is adjustable.
  • FIG. 1 shows an exemplary embodiment of a sound or ultrasound sensor according to the invention for transmitting and / or receiving sound or ultrasound.
  • This consists of a base body 2, a radiation element 3 and a cylindrical transducer element 1 clamped between the base body 2 and the radiation element 3.
  • the transducer element 1 executes thickness vibrations in the axial direction and thus excites the sound or ultrasonic sensor to produce axial vibrations.
  • the transducer element 1 consists of two ring disk-shaped piezoelectric elements 1a, 1b arranged one on top of the other, which have an opposite polarization in the axial direction, symbolically represented by arrows. Between the two piezoelectric elements 1a, 1b, an annular disk-shaped electrode 11 common to both elements 1a, 1b is arranged. On the side facing away from the common electrode 11, each element 1a, 1b has a further counter-electrode 12a, 12b, likewise in the form of an annular disk.
  • the electrode 11 and the two counter electrodes 12a, 12b are connected to an AC voltage source, also not shown, via connecting lines, not shown.
  • the counter electrodes 12a are, 12b at the same potential U 1 and the electrode 11 on a relative to the potential U 1 180 ° phase-shifted potential U. 2
  • the transducer element 1 constructed in this way has two circular end faces 13 and 14.
  • the base body 2 adjoins the end face 13. This is a cylinder with a central, axial, continuous inner bore 21.
  • the base body 2 consists of a material of high density, for. B. made of steel and causes a reduction of the sound energy emitted in the direction facing away from the radiation element.
  • the radiating element 3 adjoins the end face 14. This is a truncated cone-shaped component, e.g. made of aluminium.
  • the circular surface of the truncated cone which has the larger diameter, faces away from the transducer element 1 and forms a flat front surface 34.
  • the radiating element 3 has a central axial bore 31 with an internal thread 311 on the side facing the transducer element, which extends a bit into extends axially into the truncated cone.
  • a clamping device 4 is provided, by means of which the transducer element 1 is clamped between the base body 2 and the radiation element 3 in the axial direction, that is to say perpendicular to its end faces 13, 14.
  • the clamping device 4 is a clamping bolt which is inserted into the central inner bore 4 of the base body 2 from the side facing away from the transducer element, completely penetrates the transducer element 1 and is screwed into the internal thread 311 of the bore 31 of the radiating element 3, so that the transducer element 1 is biased.
  • Concentric annular webs 32 are arranged on a front surface of the radiation element 3 facing away from the converter element. There is an annular disk-shaped gap 33 between each two adjacent webs 32.
  • This special geometry is produced, for example, by initially creating the annular disk-shaped gap 32 be frusto-conical radiating element 3. Since the radiating element 3 preferably consists of a metal, in particular aluminum, this is a very inexpensive and simple manufacturing process.
  • the sound or ultrasonic sensor is flush with the front by a preferably metallic disc 5, e.g. made of aluminum or stainless steel, which is firmly connected to the webs 32, in particular welded.
  • the exposed segments of the disk 5 thus form circular or annular disk-shaped membranes 51, which are firmly clamped at the edge thereof by the non-positive connection with the webs 32.
  • the sound or ultrasonic sensor is arranged, for example, in a cylindrical housing (not shown in FIG. 1) that is open at one end, the cavities existing between the housing and the sound or ultrasonic sensor being filled with an electrically non-conductive elastomer.
  • the piezoelectric elements 1a, 1b are set into thickness vibrations by the alternating voltage to be applied to the electrode 11 and the counterelectrodes 12a, 12b. Since the transducer element 1 is firmly connected to the base body 2 and the radiating element 3 via the clamping device 4, the composite oscillator formed from the transducer element 1, the base body 2 and the radiating element 3 executes axial vibrations.
  • the flat front surface 34 of the radiating element 3 is thus set in motion by the excitation frequency of the alternating voltage in such a way that the entire front surface 34 executes almost in-phase deflections with an almost equal amplitude on the front surface 34 parallel to the surface normal.
  • the transducer element 1 is preferably driven with an excitation frequency that corresponds to the resonance frequency of the composite oscillator.
  • the length L of the composite oscillator in the axial direction corresponds to an integral multiple of half a wavelength, that fictitious wavelength to be determined by weighted averaging, which has sound or ultrasound of the excitation frequency in the composite oscillator.
  • this vibration is transmitted to the membranes 51.
  • the membranes 51 perform bending vibrations since they are firmly connected to the webs 32 at the edge. These bending vibrations mean that the ultrasonic sensor is well adapted to air.
  • the amplitude increase is at a maximum if the excitation frequency coincides with the resonance frequency of the respective membrane 51.
  • the bending vibration of the respective membrane 51 is 180 ° out of phase with respect to the excitation frequency.
  • the deflection of the respective membrane 51 is opposite to that of the webs 32 adjoining it.
  • the resonance frequency of the respective membrane 51 is largely determined by its average radius and its rigidity. With equidistant spacing of webs 32 of equal width in the radial direction, the resonance frequency of the outer membranes 51 would consequently be lower than that of the inner ones. By reducing the distance between two adjacent webs 32 in the radial direction, the resonance frequency of the membrane 51 arranged between the webs increases.
  • the resonance frequency of all membranes 51 is preferably above the excitation frequency. This rules out the occurrence of higher order bending waves.
  • the radiation characteristic of the sound or ultrasound sensor can be set in the radial direction by the distances between the webs 32, that is to say by coordinating the resonance frequencies of the bending vibrations of the individual membranes 51 with one another and with the drive frequency. Two examples of this are given below.
  • a sound or ultrasonic sensor with a radiation characteristic suitable for the distance measurement according to the echo sounder principle is achieved by setting the dimensions so that the resonance frequency of the circular central membrane 51 is equal to or greater than the drive frequency and the resonance frequencies of the other annular disk-shaped membranes 51 are coordinated such that a membrane 51 with a smaller outer radius has a lower resonance frequency than a membrane 51 with a larger outer radius.
  • the circular central membrane 51 has the lowest resonance frequency.
  • the increase in amplitude and thus the radiated sound energy thus decreases along the pane 5 from the inside to the outside.
  • the amplitude distribution along a diagonal of the disk 5 approximately corresponds to a Gaussian curve.
  • the sound energy emitted by side lobes is considerably lower than in a pure piston oscillator without webs 32 and without disk 5.
  • the sound or ultrasound sensor is used to emit sound or ultrasound pulses of a certain duration, care must be taken to ensure that the sound or ultrasound sensor does not reverberate after the end of the excitation by the transducer element 1.
  • the distance between the membranes 51 and the front surface 34 of the radiating element 3, ie the depth of the column 33, is preferably such that it is slightly larger than the maximum deflection of the membranes 51 closing the column 33.
  • the compression of the columns 33 contained air by the bending vibrations of the membranes 51 causes a damping, through which the ringing of the sensor is significantly reduced.
  • a reduction in the reverberation is also achieved by a damping material 6, for example a, in the column 33 Foam, is introduced.
  • a damping material 6 for example a
  • Such a foam can, for example, be glued to the radiation element 3. Esp. the formation of annular waves in the gaps 33 through the damping material 6 is excluded.
  • the stem of the composite oscillator which is formed by the webs 32 and the disk 5, brings about an adaptation of the acoustic impedance of the sound or ultrasonic sensor to the acoustic impedance of the medium into which the sound energy is to be emitted.
  • a sound or ultrasound wave impinging on the pane 5 sets the pane 5, in particular the membranes 51, in bending vibrations which are transmitted to the transducer element 1 by the radiating element. This causes the piezoelectric elements 1a and 1b to vibrate. A piezoelectric voltage is generated which is accessible for further processing via the electrodes 11, 12a and 12b.
  • the sound or ultrasound sensor is closed off by the preferably metallic disk 5. It can therefore be used at high temperatures up to approx. 150 ° C.
  • the temperature range is only limited by the temperature range in which the converter element 1 can be used. By extending the distance between the transducer element 1 and the disk 5, even larger temperature ranges can be achieved.
  • the length L of the composite oscillator in the axial direction is an integral multiple of half a wavelength, that which is to be determined by weighted averaging fictitious wavelength, the sound or ultrasound of the excitation frequency in the composite oscillator corresponds.
  • the radiation element, the webs 32 and the disk 5 are preferably made of metal, there are only slight temperature-related frequency deviations.
  • the sound or ultrasonic sensor is chemically very stable and mechanically very robust. It is particularly well suited for applications in the food industry, since the medium-contacted disc 5 is flat and therefore easy to clean.
  • the invention is not limited to use with the sensor described, but rather can be used with all sound or ultrasonic sensors that have a radiation element with a flat front surface that is set in motion by the transducer element 1 due to an excitation frequency such that the entire Execute front surfaces of almost in-phase deflections with almost the same amplitude parallel to the surface normal of the front surface.
  • FIG. 2 shows a further exemplary embodiment for such a sound or ultrasonic sensor.
  • the transducer element 1 has only a single disk-shaped piezoelectric element. With this transducer element 1, a likewise disk-shaped cover plate 7 with the same diameter is firmly connected.
  • the cover plate 7, like the radiation element 3 of the exemplary embodiment shown in FIG. 1, is excited to vibrate in such a way that its entire circular front surface facing away from the transducer has almost in-phase deflections with almost executes the same amplitude parallel to the surface normal of the front surface.
  • the sound or ultrasonic sensor is arranged, for example, in a cylindrical housing (not shown in FIG. 2) that is open at one end, the cavities between the housing and the sound or ultrasonic sensor being filled with an electrically non-conductive elastomer.
  • FIG. 2 offers the advantage over the embodiment shown in FIG. 1 that it has a very low overall height and that a single piezoelectric element is sufficient to excite the sound or ultrasound transducer.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Thermotherapy And Cooling Therapy Devices (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
EP97105884A 1996-05-18 1997-04-10 Transducteur à son ou ultrason Expired - Lifetime EP0807924B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19620133 1996-05-18
DE19620133A DE19620133C2 (de) 1996-05-18 1996-05-18 Schall- oder Ultraschallsensor

Publications (3)

Publication Number Publication Date
EP0807924A2 true EP0807924A2 (fr) 1997-11-19
EP0807924A3 EP0807924A3 (fr) 1999-06-02
EP0807924B1 EP0807924B1 (fr) 2002-12-11

Family

ID=7794713

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97105884A Expired - Lifetime EP0807924B1 (fr) 1996-05-18 1997-04-10 Transducteur à son ou ultrason

Country Status (5)

Country Link
US (1) US5726952A (fr)
EP (1) EP0807924B1 (fr)
CA (1) CA2203583C (fr)
DE (2) DE19620133C2 (fr)
HU (1) HU216670B (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008071563A3 (fr) * 2006-12-12 2009-05-14 Endress & Hauser Gmbh & Co Kg Dispositif de détermination et/ou de surveillance d'une grandeur de processus

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* Cited by examiner, † Cited by third party
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DE19758243A1 (de) * 1997-12-30 1999-07-15 Endress Hauser Gmbh Co Schallwandlersystem
DE10156259A1 (de) * 2001-11-09 2003-05-22 Valeo Schalter & Sensoren Gmbh Ultraschallsensor und Verfahren zur Herstellung eines Ultraschallsensors
US7117738B2 (en) * 2003-10-02 2006-10-10 Denso Corporation Liquid level detecting apparatus
AT413890B (de) * 2004-02-27 2006-07-15 Univ Wien Tech Verfahren und sensorvorrichtung zur gewinnung von informationen über die position eines objekts mit einem ultraschallsensor
DE102004020895B4 (de) * 2004-04-28 2012-05-24 Endress + Hauser Gmbh + Co. Kg Vorrichtung zur Bestimmung und/oder Überwachung des Füllstandes eines Mediums
RU2273967C1 (ru) * 2005-04-22 2006-04-10 Закрытое акционерное общество "Взлет" Электроакустический преобразователь для работы в газовой среде
DE102005056895A1 (de) * 2005-11-28 2007-05-31 Endress + Hauser Gmbh + Co. Kg Vorrichtung zur Ermittlung und Überwachung des Füllstands eines Füllguts in einem Behälter gemäß der Laufzeitmessmethode
RU2419388C2 (ru) * 2006-01-31 2011-05-27 Панасоник Корпорэйшн Ультразвуковой зонд
FR2931016B1 (fr) * 2008-05-07 2010-08-13 Ixsea Antenne acoustique a circuits imprimes integres
KR101593994B1 (ko) * 2009-09-04 2016-02-16 삼성전자주식회사 고출력 초음파 트랜스듀서
US8797830B2 (en) * 2011-02-02 2014-08-05 General Monitors, Inc. Explosion-proof acoustic source for hazardous locations
DE102012201884A1 (de) 2012-02-09 2013-08-14 Robert Bosch Gmbh Schallwandler
US9506833B2 (en) 2014-03-26 2016-11-29 General Monitors, Inc. Ultrasonic gas leak detectors and testing methods
TWI487886B (zh) * 2014-03-26 2015-06-11 Univ Nat Kaohsiung Applied Sci Integrated Sensing Device with Ultrasonic Transducer and Microphone and Its Method
GB201408833D0 (en) * 2014-05-19 2014-07-02 Skoogmusic Ltd Control apparatus
DE102015113561A1 (de) 2015-08-17 2017-02-23 Endress + Hauser Flowtec Ag Ultraschallwandler zum Einsatz in Ultraschall- Durchflussmessgeräten zur Messung der Durchflussgeschwindigkeit oder dem Volumendurchfluss von Medien in einer Rohrleitung sowie ein Verfahren zur Herstellung eines solchen Ultraschallwandlers
US10632499B2 (en) * 2016-12-09 2020-04-28 Sensus USA, Inc. Thickness mode transducers and related devices and methods
DE102018200324A1 (de) * 2018-01-11 2019-07-11 Robert Bosch Gmbh Ultraschallsensor und Fluidtank mit Ultraschallsensor

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008071563A3 (fr) * 2006-12-12 2009-05-14 Endress & Hauser Gmbh & Co Kg Dispositif de détermination et/ou de surveillance d'une grandeur de processus

Also Published As

Publication number Publication date
US5726952A (en) 1998-03-10
EP0807924A3 (fr) 1999-06-02
CA2203583C (fr) 2000-02-08
HU9700904D0 (en) 1997-07-28
DE19620133C2 (de) 2001-09-13
HUP9700904A2 (hu) 1998-04-28
EP0807924B1 (fr) 2002-12-11
HUP9700904A3 (en) 1998-12-28
CA2203583A1 (fr) 1997-11-18
DE59708924D1 (de) 2003-01-23
HU216670B (hu) 1999-08-30
DE19620133A1 (de) 1997-11-27

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