EP0805984A4 - Ensemble resonateur-detecteur de vitesse angulaire - Google Patents

Ensemble resonateur-detecteur de vitesse angulaire

Info

Publication number
EP0805984A4
EP0805984A4 EP96908464A EP96908464A EP0805984A4 EP 0805984 A4 EP0805984 A4 EP 0805984A4 EP 96908464 A EP96908464 A EP 96908464A EP 96908464 A EP96908464 A EP 96908464A EP 0805984 A4 EP0805984 A4 EP 0805984A4
Authority
EP
European Patent Office
Prior art keywords
resonator
iars
mechanical
tines
symmetrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP96908464A
Other languages
German (de)
English (en)
Other versions
EP0805984A1 (fr
Inventor
Yishay Netzer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of EP0805984A1 publication Critical patent/EP0805984A1/fr
Publication of EP0805984A4 publication Critical patent/EP0805984A4/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2468—Tuning fork resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2468—Tuning fork resonators
    • H03H9/2494—H-shaped, i.e. two tuning forks with common base

Definitions

  • This invention relates to symmetrical mechanical resonators and in
  • classical tuning fork includes two tines connected to a common stem
  • piezoelectric crystalline quartz They have also been used as angular
  • tines combines with the inertial rotation of the tuning-fork base to induce
  • vibration modes in the conventional tuning fork these being:
  • the second and fourth modes are parasitic and lead to
  • It is a still further object of the invention is to provide a 2-axis rate
  • a symmetrical mechanical resonator is
  • the said mechanical resonator may be, in particular, a tuning fork
  • resonator a frame-type resonator, or any planar resonator.
  • coupling means also comprises means for indirectly exciting said movable masses by applying at least one force that acts on said mechanical coupling
  • a planar symmetrical mechanical resonator in a further embodiment, is provided.
  • inertial angular rare sensor comprises a mechanical resonator
  • Fig. 1 illustrates a prior art tuning fork.
  • Fig. 2 illustrates an H-type conventional tuning fork.
  • Fig. 3 illustrates a conventional frame-type symmetrical resonator.
  • Fig. 4 illustrates a tuning fork according to the present invention.
  • Fig. 5 illustrates an idealized equivalent of a tuning fork according
  • Fig. 6 illustrates an H-type tuning fork according to the present
  • Fig. 7 illustrates a frame-type double tuning fork resonator
  • Fig. 8 illustrates a frame-type symmetrical resonator according to
  • Fig. 9 illustrates another frame-type symmetrical resonator
  • Fig. 10 shows a modified flexible element employed in the gyro
  • Fig. 11 shows a flexible element as in Fig. 10 but including two
  • Fig. 12 illustrates a centrally excited tuning fork according to the
  • Fig. 13 illustrates a centrally excited H-type tuning fork according
  • Fig. 14 illustrates a centrally excited frame-type symmetrical
  • Fig. 15 illustrates a 2-axis rate-sensor according to the present
  • Fig. 16 illustrates a modified 2-axis rate-sensor according to the
  • Fig. 1 illustrates a conventional, prior art, tuning fork mechanism
  • asymmetrical mode is indicated by long arrows.
  • Stem 12 is optional and
  • the tines may be directly connected to the mounting base.
  • Fig. 2 illustrates a two-ended conventional tuning fork, as described
  • a mounting structure 16 is common to all the tines.
  • Fig. 3 illustrates a frame type, double-tuning fork resonator
  • the purpose of the present invention is to provide symmetrical
  • Fig. 4 illustrates a tuning fork according to the present
  • the tuning fork includes tines 20 and 21, a mounting base 61,
  • the purpose of the coupling is to force the two tines to
  • apertures portions will be found in the following embodiments as well.
  • the two tines 20 and 21 are stiff and are
  • the spring 28 represent the equivalent
  • Fig. 6 illustrates an H-type tuning fork according to the present
  • the respective tines are coupled as before and stems 29 and 30 allow torsional motion of the tuning fork around its line of symmetry.
  • Fig. 7 illustrates a frame-type resonator according to the present
  • the structure is essentially two tuning forks with their
  • 64 and 65 indicate two mounting bases.
  • Fig. 8 illustrates another frame-type resonator according to the
  • each mechanism comprising bars 34, 35, 36, 37. 66,
  • mechamcal couplings 37 are coupled on either side by mechamcal couplings 37 (two altogether), as
  • Fig. 9 illustrates a modified frame-type resonator of Fig. 8 where
  • Fig. 10 the modified flexible element is employed in the gyro
  • the flexible element comprises two flexible elements
  • Fig. 12 illustrates an
  • the excitation frequency should be one half the
  • the electrode set could be of the comb type described in "A
  • piezoelectric crystalline sensor is by deflecting element 42 by means of
  • Fig. 13 illustrates the application of the above excitation concept to
  • Fig. 14 illustrates the application of the above excitation method to
  • Fig. 15 illustrates a two-axis vibratory
  • rate-sensor including four vibrating
  • the four tines are linked with mechamcal couplings 49, 50, 51, and 52,
  • Fig. 16 illustrates a modified two-axis angular rate sensor

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

Système IARS (détecteur de vitesse angulaire intertiel) comprenant un résonateur mécanique symétrique. Le détecteur de vitesse comprend une ou plusieurs paires de masses en vibration (20, 21). Le détecteur comprend également un accouplement mécanique (24), qui contraint les masses à conserver un mouvement symétrique malgré les tolérances mécaniques.
EP96908464A 1995-02-23 1996-02-08 Ensemble resonateur-detecteur de vitesse angulaire Withdrawn EP0805984A4 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
IL11277095 1995-02-23
IL11277095A IL112770A0 (en) 1995-02-23 1995-02-23 Coupled resonator vibratory rate sensor
PCT/US1996/001716 WO1996026445A1 (fr) 1995-02-23 1996-02-08 Ensemble resonateur-detecteur de vitesse angulaire

Publications (2)

Publication Number Publication Date
EP0805984A1 EP0805984A1 (fr) 1997-11-12
EP0805984A4 true EP0805984A4 (fr) 1999-04-28

Family

ID=11067127

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96908464A Withdrawn EP0805984A4 (fr) 1995-02-23 1996-02-08 Ensemble resonateur-detecteur de vitesse angulaire

Country Status (4)

Country Link
EP (1) EP0805984A4 (fr)
AU (1) AU5169796A (fr)
IL (1) IL112770A0 (fr)
WO (1) WO1996026445A1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6018212A (en) 1996-11-26 2000-01-25 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
US5998911A (en) * 1996-11-26 1999-12-07 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
US6747393B2 (en) 1996-11-26 2004-06-08 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
US6437483B2 (en) 1996-11-26 2002-08-20 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
US6262520B1 (en) * 1999-09-15 2001-07-17 Bei Technologies, Inc. Inertial rate sensor tuning fork
US6858972B2 (en) 2002-06-21 2005-02-22 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
EP1641118B1 (fr) * 2004-09-24 2010-04-21 Seiko Epson Corporation Elément résonateur piezoélectrique et composant piezoélectrique
JP4709260B2 (ja) * 2008-10-16 2011-06-22 日本電波工業株式会社 圧電振動片および圧電デバイス

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4958519A (en) * 1982-01-25 1990-09-25 The Board Of Regents Of The University Of Nebraska Velocimeter
US5367217A (en) * 1992-11-18 1994-11-22 Alliedsignal Inc. Four bar resonating force transducer

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
No further relevant documents disclosed *

Also Published As

Publication number Publication date
IL112770A0 (en) 1996-06-18
WO1996026445A1 (fr) 1996-08-29
EP0805984A1 (fr) 1997-11-12
AU5169796A (en) 1996-09-11

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