EP0788857B1 - Wire sawing device - Google Patents
Wire sawing device Download PDFInfo
- Publication number
- EP0788857B1 EP0788857B1 EP19970100580 EP97100580A EP0788857B1 EP 0788857 B1 EP0788857 B1 EP 0788857B1 EP 19970100580 EP19970100580 EP 19970100580 EP 97100580 A EP97100580 A EP 97100580A EP 0788857 B1 EP0788857 B1 EP 0788857B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- wire guide
- guide cylinders
- fact
- segments
- wire
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229920002635 polyurethane Polymers 0.000 claims description 5
- 239000004814 polyurethane Substances 0.000 claims description 5
- 229920002994 synthetic fiber Polymers 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 238000005253 cladding Methods 0.000 claims 1
- 150000002739 metals Chemical class 0.000 claims 1
- 239000011248 coating agent Substances 0.000 description 8
- 238000000576 coating method Methods 0.000 description 8
- 238000005520 cutting process Methods 0.000 description 8
- 230000008929 regeneration Effects 0.000 description 6
- 238000011069 regeneration method Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000011065 in-situ storage Methods 0.000 description 2
- 229910001374 Invar Inorganic materials 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229920000914 Metallic fiber Polymers 0.000 description 1
- 229910000639 Spring steel Inorganic materials 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000002223 garnet Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
- B23D57/003—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts
- B23D57/0053—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts of drives for saw wires; of wheel mountings; of wheels
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T83/00—Cutting
- Y10T83/929—Tool or tool with support
- Y10T83/9292—Wire tool
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T83/00—Cutting
- Y10T83/929—Tool or tool with support
- Y10T83/9309—Anvil
- Y10T83/9312—Rotatable type
Definitions
- the present invention relates to a wire sawing device comprising a frame and a sheet of wires stretched between at least two wire guide cylinders and held in position by grooves provided on the surface of said cylinders thread guides and which define the interval between the threads of said ply which are likely to move in an alternating or continuous movement in support against a workpiece mounted on a support, each wire guide cylinder having an outer covering comprising at least two segments removable which can be fixed to the periphery of a central cylindrical part wire guide cylinders.
- the tensioned wire is both guided and towed by the wire guide cylinders.
- These generally coated cylinders of a layer of synthetic material are engraved with grooves whose geometry and dimensions must be very precise.
- the thread guide cylinders are usually made of a hollow or solid monobloc part coated with a synthetic element in which are engraved the grooves maintaining the spacing son of the sheet and fixed at least at one of its ends by one or more bearings containing the bearings.
- the wire guide cylinder is removable for ability to recondition after wear of its coating.
- Patent 4,134,384 describes such wire guide cylinders comprising a outer tubular member with polyurethane layers and one layer INVAR steel.
- Patent application JP 0,514,696,8 describes a type of cylinder metallic thread guide with guide grooves for the threads and a coating of synthetic material covering this thread guide cylinder.
- Slice precision very important for applications electronic, depends on the position of the wires during sawing as well as the supporting elements of the workpiece, therefore of the position of the wire guide cylinders compared to the workpiece, but also the quality of the geometry of the grooves cut on the surface of the wire guides. Wear of these causes a degradation of the accuracy of the slices obtained. It is clear that stopping the sawing device for reworking grooves is only necessary and therefore we tend to push it to the last end, thereby causing a decrease in the average quality of the slices as well obtained.
- the document DE 2.428.111 A representing the closest state of the art, describes a wire sawing device with wire guide cylinders with two removable segments that can be attached at the periphery of a central cylindrical part of the wire guide cylinder.
- This central part is mounted on one side on the machine frame and includes a free end on which a cover is fixed with a screw Central.
- This cover is provided with a holding part arranged so as to center and maintain the two segments forming a continuous exterior surface. If you want to replace the segments, it is necessary to remove the cover with the holding piece. Then it is possible to remove the segments by releasing them axially to an opposite holding part.
- the machine according to this document therefore allows an exchange of the coating. outside by removing the holding piece at the free end of the wire guide cylinder and by axially disengaging the segments. Since the cylinders wire guides are only held at one of their ends, their parallelism is not not guaranteed due to the high forces exerted by the wires of the layer of wires. The sawed slices can therefore have geometric inaccuracies which prohibit their use for certain applications.
- the object of the present invention is therefore to produce a sawing device ensuring high precision of sawn slices due to the maintenance of wire guide cylinders at both ends, while allowing exchange quick and easy external coating of wire guide cylinders without having to disassemble the wire guide cylinders from the sawing frame.
- the sawing device is characterized for this purpose by the fact that the segments are fixed on said central cylindrical part by fixing members arranged in recesses provided on the cylindrical outer surface of the wire guide cylinder parallel to the axis of the latter, said cylindrical part central being supported at its two ends by the frame.
- a very quick and easy renewal or regeneration is thus obtained wire guide grooves and improved slice accuracy thereby that the regeneration of the surface is facilitated and uncomplicated.
- the changes in the pitch of the grooves by modifying the thickness of the edges are also greatly facilitated.
- the operation by changing only the surface of the wire guide cylinders by providing them with a fixed removable surface mechanically, with or without bonding.
- the cutting of the grooves can be done in situ in the sawing device by a re-cutting mechanism which allows rework these on the surface of the wire guide cylinders without dismantling them, or before mounting the removable segments on a lathe or a grinding machine digital control for example. This allows regeneration after wear, or changing the pitch of the grooves to change the thickness slices.
- the invention therefore allows the sawing device to by the concept of the interchangeability of the surface of thread guide cylinders and by the use of removable segments meet the new requirements of technology by removing a long and tedious operation which is the complete disassembly of the wire guide cylinders while improving the quality of both geometric performance than productivity.
- the sawing device therefore comprises wire guide cylinders with interchangeable surface advantageously in the form of removable segments held mechanically or by gluing and having their pre-cut surface with grooves or not.
- Wire guide cylinders with interchangeable surface will be in the form of a basic cylinder which can receive on its surface and with an indexed position coated or uncoated segments on which the grooves used for spacing the turns of the saw wire. These grooves can be pre-cut on a external cutting with identical indexing positions to those of the wire guide cylinder, this to guarantee the position of the grooves after mounting on the device wire sawing.
- Figure 1 is a perspective view of a mode execution of the wire sawing device.
- Figure 2 is a perspective view of a cylinder guide-son.
- Figure 3 shows a variant of the cylinder guide-son.
- the wire sawing device of Figure 1 illustrates the principle of the present invention.
- the room saw 1 is pressed against the wire ply 2 supported by the wire guide cylinders 4.
- the support table 3 on which the workpiece 1 is fixed is moved by the engine 15.
- the thread guide cylinders 4 are supported at their ends by bearings 5.
- the removable segments 6 are mechanically fixed on the surface of the cylinders wire guide 4 by screws 7.
- the assembly is mounted in a frame 14.
- the wires of the sheet 2 are likely to be driven by known means so as to be moved according to an alternating or continuous movement.
- the outer surface segments 6 includes etched grooves 9 in which wire and placed. These grooves 9 define the interval between the wires of the sheet 2, so the thickness sawn slices.
- segments 6 are mechanically and / or glued to the surface of the wire guide cylinders 4, it is possible to renew them or to change them after wear or when we want to modify the distance between the grooves 9 without dismantling and put the thread guide cylinders out of the machine 4.
- Figure 2 shows in perspective a cylinder wire guide 4 with fixed axis, with two removable segments 6 coated with a layer of polyurethane 8 pre-cut with grooves 9 and fixed on the wire guide cylinder 4 mechanically by fixing screws 7.
- the segments are positioned on the wire guide cylinder 4 by pins positioning 11.
- the removable segments 6 are made of metal and the latter is preferably chosen with a low coefficient expansion, for example an Fe-Ni alloy.
- Figure 3 shows in perspective a variant of the wire guide cylinder 4 for attachment to cones 12.
- the three removable segments 6 are sheets of material synthetic, advantageously polyurethane, stretched and clamped on the surface by clamping tabs 13 mechanically fixed to the surface by screws 7. Bonding polyurethane sheet 6 associated with a texture the surface of the wire guide cylinder 4 maintains this in position on the surface of the wire guide cylinder 4.
- the saw wire forming the web of wires 2 between the wire guide cylinders 4 consists spring steel with a diameter between 0.1 and 0.2 mm for sawing blocks of hard materials or compositions more specific, such as silicon, ceramic, composed of elements from groups III-V, GGG (Garnet Gadolinium-Gallium), sapphire, etc., in slices of 0.1 to 5mm about thick.
- the abrasive agent is a product of trade and can be diamond, silicon carbide, alumina, etc., in a form attached to the wire or in the form free in slip.
- the sawing device allows by the concept of interchangeability from the surface of the wire guide cylinders 4 by adding removable segments 6, to obtain a maximum performance, productivity and flexibility, without this being to the detriment of the quality of parts produced.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Description
La présente invention concerne un dispositif de sciage par fil comprenant un bâti et une nappe de fils tendue entre au moins deux cylindres guide-fils et maintenue en position par des gorges prévues sur la surface desdits cylindres guide-fils et qui définissent l'intervalle entre les fils de ladite nappe qui sont susceptibles de se déplacer selon un mouvement alternatif ou continu en appui contre une pièce à scier montée sur un support, chaque cylindre guide-fils présentant un revêtement extérieur comportant au moins deux segments amovibles susceptibles d'être fixés à la périphérie d'une partie cylindrique centrale des cylindres guide-fils.The present invention relates to a wire sawing device comprising a frame and a sheet of wires stretched between at least two wire guide cylinders and held in position by grooves provided on the surface of said cylinders thread guides and which define the interval between the threads of said ply which are likely to move in an alternating or continuous movement in support against a workpiece mounted on a support, each wire guide cylinder having an outer covering comprising at least two segments removable which can be fixed to the periphery of a central cylindrical part wire guide cylinders.
On connaít des dispositifs de sciage par fil comprenant de manière générale une nappe de fils susceptible de se déplacer selon un mouvement continu ou alternatif en appui contre une pièce à scier définissant ainsi une zone de sciage. La zone de sciage est constituée d'un ensemble de cylindres placés parallèlement. Ces cylindres, appelés guide-fils, sont gravés avec des gorges définissant l'intervalle entre les fils de la nappe, soit l'épaisseur des tranches. La pièce à scier est fixée sur une table support qui se déplace perpendiculairement à la nappe de fils. La vitesse de déplacement définit la vitesse de coupe. Le renouvellement du fil ainsi que le contrôle de sa tension se fait dans une partie appelée zone de gestion du fil située en dehors de la zone de sciage proprement dite. L'agent qui régira la découpe est soit un abrasif fixé sur le fil, soit un abrasif libre amené sous forme de barbotine. Le fil n'agit que comme transporteur.There are known wire sawing devices comprising so general a layer of thread capable of moving in a movement continuous or alternative pressing against a workpiece thus defining an area sawing. The sawing area consists of a set of cylinders placed in parallel. These cylinders, called wire guides, are engraved with grooves defining the interval between the wires of the tablecloth, ie the thickness of the slices. The workpiece is fixed on a support table which moves perpendicular to the layer of threads. The moving speed defines the cutting speed. The renewal of the thread as well as the control of its tension is done in a part called the wire management area outside the actual sawing area called. The agent which will govern the cutting is either an abrasive fixed on the wire, or an abrasive free brought in slip form. The wire acts only as a conveyor.
Lors de la découpe en tranches fines de la pièce à scier, le fil tendu est à la fois guidé et tracté par les cylindres guide-fils. Ces cylindres généralement revêtus d'une couche en matière synthétique sont gravés avec des gorges dont la géométrie et les dimensions doivent être d'une grande précision. Le procédé de découpe qui utilise un abrasif soit fixe, soit libre, entraíne nécessairement une usure du matériau qui constitue la surface des cylindres guide-fils, donc modifie les dimensions et la géométrie desdites gorges. Les cylindres guide-fils sont habituellement constitués d'une partie monobloc creuse ou pleine revêtue par un élément synthétique dans lequel sont gravées les gorges maintenant l'espacement des fils de la nappe et fixées au moins à l'une de ses extrémités par un ou des paliers contenant les roulements. Le cylindre guide-fils est démontable pour pouvoir le reconditionner après usure de son revêtement.When cutting the workpiece into thin slices, the tensioned wire is both guided and towed by the wire guide cylinders. These generally coated cylinders of a layer of synthetic material are engraved with grooves whose geometry and dimensions must be very precise. The process of cutting that uses an abrasive either fixed or free, necessarily results in a wear of the material which constitutes the surface of the thread guide cylinders, therefore modifies the dimensions and the geometry of said grooves. The thread guide cylinders are usually made of a hollow or solid monobloc part coated with a synthetic element in which are engraved the grooves maintaining the spacing son of the sheet and fixed at least at one of its ends by one or more bearings containing the bearings. The wire guide cylinder is removable for ability to recondition after wear of its coating.
Le brevet US 4.134.384 décrit de tels cylindres guide-fils comportant un membre tubulaire extérieur avec des couches en polyuréthane et une couche en acier INVAR. La demande de brevet JP 0,514,696,8 décrit un type de cylindre guide-fils métallique avec des gorges de guidage pour les fils et un revêtement en matière synthétique recouvrant ce cylindre guide-fils.US Patent 4,134,384 describes such wire guide cylinders comprising a outer tubular member with polyurethane layers and one layer INVAR steel. Patent application JP 0,514,696,8 describes a type of cylinder metallic thread guide with guide grooves for the threads and a coating of synthetic material covering this thread guide cylinder.
Ces cylindres guide-fils qui constituent des éléments d'usure ont une durée de vie limitée et les gorges prévues à leur surface doivent être périodiquement retaillées par rectification, ou par tournage. Cette opération se fait en dehors du dispositif de sciage sur une rectifieuse cylindrique ou un tour à commande numérique par exemple. Le nombre de retaillages dépend de l'importance de chaque taillage, de la géométrie des gorges et de l'épaisseur initiale du revêtement. Lorsque le revêtement est complètement utilisé, on procède à la pose d'un nouveau revêtement par moulage, injection ou toute méthode qui s'avère adéquate pour le revêtement choisi. Lorsqu'un retaillage s'avère nécessaire, les cylindres guide-fils doivent être démontés et sortis du dispositif de sciage. Cette opération est généralement lourde en raison de la complexité mécanique des cylindres guide-fils et de leur système d'entraínement. De plus cela nécessite l'assistance de manutention extérieure. On aura donc un arrêt du dispositif de sciage important qui diminuera la productivité globale de l'ensemble. Lors du changement de l'épaisseur des tranches à scier, un changement du pas des gorges taillées sur la surface des guide-fils est obligatoire et nécessite également le changement des cylindres guide-fils, opération longue et complexe donc peu souhaitable.These thread guide cylinders which constitute wear elements have a duration limited life and the grooves provided on their surface must be periodically resized by rectification, or by turning. This operation is done outside the sawing device on a cylindrical grinder or a controlled lathe digital for example. The number of re-cuts depends on the importance of each cut, the geometry of the grooves and the initial thickness of the coating. When the covering is completely used, the installation is carried out a new coating by molding, injection or any method which proves suitable for the chosen coating. When resizing is necessary, the Wire guide cylinders must be removed and removed from the sawing device. This operation is generally cumbersome due to the mechanical complexity of the wire guide cylinders and their drive system. In addition it requires outside handling assistance. We will therefore have a shutdown of the significant sawing which will decrease the overall productivity of the assembly. During the change in the thickness of the slices to be sawn, a change in the pitch of the grooves cut on the surface of the wire guides is compulsory and also requires changing the wire guide cylinders, a long and complex operation so little desirable.
La précision des tranches, très importante pour des applications électroniques, dépend de la position des fils au cours du sciage ainsi que des éléments de support de la pièce à scier, donc de la position des cylindres guide-fils par rapport à la pièce à scier, mais aussi de la qualité de la géométrie des gorges taillées à la surface des guide-fils. Une usure de celles-ci provoque une dégradation de la précision des tranches obtenues. Il est clair que l'arrêt du dispositif de sciage pour le réusinage des gorges ne se fait qu'en toute nécessité et donc que l'on a tendance à repousser celui-ci jusqu'à la dernière extrémité, entraínant par ce fait une baisse de la qualité moyenne des tranches ainsi obtenues.Slice precision, very important for applications electronic, depends on the position of the wires during sawing as well as the supporting elements of the workpiece, therefore of the position of the wire guide cylinders compared to the workpiece, but also the quality of the geometry of the grooves cut on the surface of the wire guides. Wear of these causes a degradation of the accuracy of the slices obtained. It is clear that stopping the sawing device for reworking grooves is only necessary and therefore we tend to push it to the last end, thereby causing a decrease in the average quality of the slices as well obtained.
Le document DE 2.428.111 A représentant l'état de la technique le plus proche, décrit un dispositif de sciage par fil avec des cylindres guide-fils comportant deux segments amovibles susceptibles d'être fixés à la périphérie d'une partie cylindrique centrale du cylindre guide-fils.The document DE 2.428.111 A representing the closest state of the art, describes a wire sawing device with wire guide cylinders with two removable segments that can be attached at the periphery of a central cylindrical part of the wire guide cylinder.
Cette partie centrale est montée d'un côté sur le bâti de la machine et comprend une extrémité libre sur laquelle est fixé un couvercle grâce à une vis centrale. Ce couvercle est muni d'une pièce de maintien agencée de façon à centrer et à maintenir les deux segments formant une surface extérieure continue. Si on désire remplacer les segments, il est nécessaire d'enlever le couvercle avec la pièce de maintien. Ensuite il est possible d'ôter les segments en les dégageant axialement à une pièce de maintien opposée.This central part is mounted on one side on the machine frame and includes a free end on which a cover is fixed with a screw Central. This cover is provided with a holding part arranged so as to center and maintain the two segments forming a continuous exterior surface. If you want to replace the segments, it is necessary to remove the cover with the holding piece. Then it is possible to remove the segments by releasing them axially to an opposite holding part.
La machine selon ce document permet donc un échange du revêtement extérieur en démontant la pièce de maintien à l'extrémité libre du cylindre guide-fils et en dégageant axialement les segments. Etant donné que les cylindres guide-fils ne sont maintenus qu'à une de leurs extrémités, leur parallélisme n'est pas garanti du fait des efforts élevés exercés par les fils de la nappe de fils. Les tranches sciées peuvent de ce fait présenter des imprécisions géométriques qui interdisent leur usage pour certaines applications. The machine according to this document therefore allows an exchange of the coating. outside by removing the holding piece at the free end of the wire guide cylinder and by axially disengaging the segments. Since the cylinders wire guides are only held at one of their ends, their parallelism is not not guaranteed due to the high forces exerted by the wires of the layer of wires. The sawed slices can therefore have geometric inaccuracies which prohibit their use for certain applications.
Lorsqu'on maintient les cylindres guide-fils par les deux extrémités supportées par le bâti, il n'est plus possible de démonter et d'échanger les segments et le revêtement extérieur des cylindres guide-fils sans un démontage complet de ces cylindres guide-fils, ce qui est une opération compliquée nécessitant un arrêt prolongé de la machine.When holding the wire guide cylinders at both ends supported by the frame, it is no longer possible to dismantle and exchange the segments and the outer coating of the wire guide cylinders without disassembly complete with these thread guide cylinders, which is a complicated operation requiring prolonged machine shutdown.
La présente invention a donc pour but de réaliser un dispositif de sciage assurant une grande précision des tranches sciées du fait d'un maintien des cylindres guide-fils par leurs deux extrémités, tout en permettant un échange rapide et aisé du revêtement extérieur des cylindres guide-fils sans devoir démonter les cylindres guide-fils du bâti du dispositif de sciage.The object of the present invention is therefore to produce a sawing device ensuring high precision of sawn slices due to the maintenance of wire guide cylinders at both ends, while allowing exchange quick and easy external coating of wire guide cylinders without having to disassemble the wire guide cylinders from the sawing frame.
Le dispositif sciage est caractérisé à cet effet par le fait que les segments sont fixés sur ladite partie cylindrique centrale par des organes de fixation disposés dans des évidements prévus sur la surface extérieure cylindrique du cylindre guide-fils parallèlement à l'axe de ce dernier, ladite partie cylindrique centrale étant supportée à ses deux extrémités par le bâti.The sawing device is characterized for this purpose by the fact that the segments are fixed on said central cylindrical part by fixing members arranged in recesses provided on the cylindrical outer surface of the wire guide cylinder parallel to the axis of the latter, said cylindrical part central being supported at its two ends by the frame.
On obtient ainsi un renouvellement ou une régénération très rapide et aisée des gorges guide-fils et une amélioration de la précision des tranches par le fait que la régénération de la surface est facilitée et peu compliquée. Les changements du pas des gorges par la modification de l'épaisseur des tranches sont également grandement facilités. A very quick and easy renewal or regeneration is thus obtained wire guide grooves and improved slice accuracy thereby that the regeneration of the surface is facilitated and uncomplicated. The changes in the pitch of the grooves by modifying the thickness of the edges are also greatly facilitated.
Ainsi, pour éviter le démontage de l'ensemble des cylindres guide-fils en vue d'un réusinage des gorges, on peut faire l'opération en changeant uniquement la surface des cylindres guide-fils en leur rapportant une surface amovible fixée mécaniquement, avec ou sans collage. Le taillage des gorges peut se faire in situ dans le dispositif de sciage par un mécanisme de retaillage qui permet de réusiner celles-ci sur la surface des cylindres guide-fils sans démontage de ceux-ci, ou avant montage des segments amovibles sur un tour ou une rectifieuse à commande numérique par exemple. Cela permet ainsi la régénération après usure, ou le changement du pas des gorges pour la modification de l'épaisseur des tranches.Thus, to avoid dismantling all of the wire guide cylinders by view of a re-machining of the grooves, we can do the operation by changing only the surface of the wire guide cylinders by providing them with a fixed removable surface mechanically, with or without bonding. The cutting of the grooves can be done in situ in the sawing device by a re-cutting mechanism which allows rework these on the surface of the wire guide cylinders without dismantling them, or before mounting the removable segments on a lathe or a grinding machine digital control for example. This allows regeneration after wear, or changing the pitch of the grooves to change the thickness slices.
Cette technique de sciage qui requiert une géométrie parfaite des gorges verra la précision des tranches augmenter par le fait que la régénération de la surface est facilitée par l'interchangeabilité rapide des segments amovibles rapportés et que le taillage peut être fait in situ ou avant montage, sur les segments amovibles.This sawing technique which requires perfect groove geometry will see the accuracy of the slices increase by the fact that the regeneration of the surface is facilitated by the rapid interchangeability of the segments removable and that cutting can be done in situ or before mounting, on the removable segments.
Les exigences de productivité et de précision des applications à usage semi-conducteur, liées aux dimensions grandissantes des pièces à scier donc des tranches, nécessitent que, même de petites variations doivent être évitées. L'utilisation de segments rapportés prétaillés ou non, permet la régénération de la surface ou le changement de pas de manière aisée donc plus fréquente. De plus, elle nécessite des investissements supplémentaires faibles puisque seuls les segments sont nécessaires et non la totalité des cylindres guide-fils.Productivity and application precision requirements for semiconductor use, related to dimensions sawing pieces therefore slices, require that even small variations should be avoided. The use of pre-cut inserts or no, allows surface regeneration or change not easily so more frequently. In addition, she requires low additional investment since only the segments are necessary and not the whole wire guide cylinders.
L'invention permet donc au dispositif de sciage de par le concept de l'interchangeabilité de la surface des cylindres guide-fils et par l'utilisation de segments amovibles de répondre aux nouvelles exigences de la technologie en supprimant une opération longue et fastidieuse qui est le démontage complet des cylindres guide-fils tout en améliorant la qualité des performances tant géométriques que de productivité. Le dispositif de sciage comprend donc des cylindres guide-fils avec surface interchangeable avantageusement sous forme de segments amovibles tenus mécaniquement ou par collage et ayant leur surface prétaillée avec des gorges ou non.The invention therefore allows the sawing device to by the concept of the interchangeability of the surface of thread guide cylinders and by the use of removable segments meet the new requirements of technology by removing a long and tedious operation which is the complete disassembly of the wire guide cylinders while improving the quality of both geometric performance than productivity. The sawing device therefore comprises wire guide cylinders with interchangeable surface advantageously in the form of removable segments held mechanically or by gluing and having their pre-cut surface with grooves or not.
Les cylindres guide-fils avec surface interchangeable se présenteront sous la forme d'un cylindre de base pouvant recevoir sur sa surface et avec une position indexée des segments revêtus ou non sur lesquels sont gravées les gorges servant à l'espacement des spires du fil de sciage. Ces gorges peuvent être prétaillées sur une machine de taillage extérieure ayant des positions d'indexation identiques à celles du cylindre guide-fils, ceci pour garantir la position des gorges après montage sur le dispositif de sciage par fils.Wire guide cylinders with interchangeable surface will be in the form of a basic cylinder which can receive on its surface and with an indexed position coated or uncoated segments on which the grooves used for spacing the turns of the saw wire. These grooves can be pre-cut on a external cutting with identical indexing positions to those of the wire guide cylinder, this to guarantee the position of the grooves after mounting on the device wire sawing.
L'utilisation du concept de l'interchangeabilité de la surface permet donc de réaliser un dispositif de sciage performant ayant une productivité élevée, une précision moyenne accrue et permettant aisément de modifier l'épaisseur des tranches produites.The use of the concept of interchangeability the surface therefore makes it possible to produce a sawing device efficient with high productivity, precision increased average and easily changes the thickness slices produced.
D'autres avantages ressortent des caractéristiques exprimées dans les revendications dépendantes et de la description exposant ci-après l'invention plus en détail à l'aide de dessins qui représentent schématiquement et à titre d'exemple un mode d'exécution et une variante.Other advantages emerge from the characteristics expressed in the dependent claims and the description setting out the invention below in more detail at using drawings which represent schematically and at As an example, an embodiment and a variant.
La figure 1 est une vue en perspective d'un mode d'exécution du dispositif de sciage par fil.Figure 1 is a perspective view of a mode execution of the wire sawing device.
La figure 2 est une vue en perspective d'un cylindre guide-fils.Figure 2 is a perspective view of a cylinder guide-son.
La figure 3 représente une variante du cylindre guide-fils.Figure 3 shows a variant of the cylinder guide-son.
Le dispositif de sciage par fil de la figure 1 illustre
le principe de la présente invention. La pièce à
scier 1 est mise en appui contre la nappe de fils 2 supportée
par les cylindres guide-fils 4. La table-support 3
sur laquelle est fixée la pièce à scier 1 est mue par le
moteur 15. Les cylindres guide-fils 4 sont supportés à
leurs extrémités par des paliers 5. Les segments amovibles
6 sont fixés mécaniquement sur la surface des cylindres
guide-fils 4 par des vis 7. L'ensemble est monté dans un
bâti 14. Les fils de la nappe 2 sont susceptibles d'être
entraínés par des moyens connus de façon à être déplacés
selon un mouvement alternatif ou continu. La surface extérieure
des segments 6 comprend des gorges gravées 9 dans
lesquelles le fil et placé. Ces gorges 9 définissent l'intervalle
entre les fils de la nappe 2, donc l'épaisseur
des tranches sciées. Etant donné que les segments 6 sont
fixés mécaniquement et/ou par collage sur la surface des
cylindres guide-fils 4, il est possible de les renouveler
ou de les changer après usure ou lorsqu'on désire modifier
la distance séparant les gorges 9 sans pour autant démonter
et mettre hors machine les cylindres guide-fils 4.The wire sawing device of Figure 1 illustrates
the principle of the present invention. The room
saw 1 is pressed against the wire ply 2 supported
by the
La figure 2 représente en perspective un cylindre
guide-fils 4 à axe fixe, avec deux segments amovibles 6
revêtus d'une couche de polyuréthane 8 prétaillée avec des
gorges 9 et fixées sur le cylindre guide-fils 4 mécaniquement
par des vis de fixation 7. Les segments sont positionnés
sur le cylindre guide-fils 4 par des goupilles de
positionnement 11. Les segments amovibles 6 sont en métal
et ce dernier est choisi de préférence à faible coefficient
de dilatation, par exemple un alliage Fe-Ni.Figure 2 shows in perspective a
La figure 3 représente en perspective une variante du
cylindre guide-fils 4 pour fixation sur des cônes 12. Les
trois segments amovibles 6 sont des feuilles de matière
synthétique, avantageusement du polyuréthane, tendues et
serrées sur la surface par des languettes de bridage 13
fixées mécaniquement sur la surface par des vis 7. Un collage
de la feuille polyuréthane 6 associé à une texture
adéquate de la surface du cylindre guide-fils 4 maintient
celle-ci en position sur la surface du cylindre guide-fils
4. Figure 3 shows in perspective a variant of the
De façon générale, le fil de sciage formant la nappe
de fils 2 entre les cylindres guide-fils 4 est constitué
d'acier à ressort d'un diamètre compris entre 0.1 et 0.2
mm afin de scier des blocs de matériaux durs ou de compositions
plus particulières, tels que silicium, céramique,
composés des éléments des groupes III-V, GGG (Grenat
Gadolinium-Gallium), saphir, etc, en tranches de 0.1 à 5mm
d'épaisseur environ. L'agent abrasif est un produit du
commerce et peut être du diamant, du carbure de silicium,
de l'alumine, etc, sous forme fixée au fil ou sous forme
libre en barbotine.Generally, the saw wire forming the web
of wires 2 between the
Le dispositif de sciage permet par le concept d'interchangeabilité
de la surface des cylindres guide-fils 4
par l'adjonction de segments amovibles 6, d'obtenir un
maximum de performances, de productivité et de flexibilité,
sans que cela soit au détriment de la qualité des
pièces produites.The sawing device allows by the concept of interchangeability
from the surface of the
Il est bien entendu que les modes de réalisation décrits ci-dessus ne présentent aucun caractère limitatif et qu'ils peuvent recevoir toutes modifications désirables à l'intérieur du cadre tel que défini par la revendication 1.It is understood that the embodiments described above are in no way limiting and that they can receive any desirable changes to inside the frame as defined by claim 1.
Ainsi, d'autres types de surfaces interchangeables
peuvent être envisagés qui par leur concept ont également
la fonction de régénération et/ou de renouvellement de la
surface sans démontage des cylindres guide-fils 4. Par
exemple, l'enroulement jointif d'une corde profilée ou
d'une bande sur la surface peut être envisagé. Un rechargement
par pulvérisation dans le dispositif de sciage par
exemple, peut également satisfaire au concept d'interchangeabilité
de la surface et à l'objet de la présente invention
pour autant qu'elle n'exige pas le démontage complet
du cylindre guide-fils 4.So other types of interchangeable surfaces
can be considered which by their concept also have
the regeneration and / or renewal function of the
surface without disassembly of the
Claims (7)
- Wire sawing device comprising a frame (14) and a layer of wires (2) stretched between at least two wire guide cylinders (4) and maintained in position by grooves (9) provided on the surface of said wire guide cylinders (4) and which define the interval between the wires of said layer (2) which are adapted to be displaced with an alternating or continuous movement whilst bearing against a piece (1) to be sawed mounted on a support (3), each wire guide cylinder (4) having an external cladding (8) comprising at least two removable segments (6) adapted to be fixed on the periphery of a central cylindrical portion of the wire guide cylinders, characterised by the fact that the segments are fixed on said central cylindrical portion by means of fixing members (7,13) disposed in hollows provided on the external cylindrical surface of the wire guide cylinders (4) parallely to the axes of the latter, said central cylindrical portion being supported by the frame (14) on its two extremities.
- Device according to claim 1, characterised by the fact that the removable segments (6) on the wire guide cylinders (4) are of metal clad with a synthetic material (8) in which the grooves (9) are incised.
- Device according to claim 2, characterised by the fact that the synthetic material is polyurethane.
- Device according to claim 2, characterised by the fact that said metal is selected from metals with low coefficient of thermal expansion.
- Device according to claim 1, characterised by the fact that the fixing members are constituted by screws (7) placed in the hollows located on the opposing extremities of the segments.
- Device according to claim 1, characterised by the fact that the guide cylinders (4) comprise positioning pins (11) ensuring the positioning of the removable segments (6) on the central cylindrical portion.
- Device according to claim 1, characterised by the fact that the removable segments (6) are constituted by sheets of synthetic material fixed and/or cemented on the surface of the central cylindrical portion, the fixing members being constituted by securement strips (13) fixed by screws (7) on the central cylindrical portion in longitudinal hollows of the external surface of the wire guide cylinders.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH303/96 | 1996-02-06 | ||
CH00303/96A CH691038A5 (en) | 1996-02-06 | 1996-02-06 | Wire sawing device for cutting thin slices. |
CH30396 | 1996-02-06 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0788857A1 EP0788857A1 (en) | 1997-08-13 |
EP0788857B1 true EP0788857B1 (en) | 2002-09-04 |
Family
ID=4183931
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19970100580 Expired - Lifetime EP0788857B1 (en) | 1996-02-06 | 1997-01-16 | Wire sawing device |
Country Status (5)
Country | Link |
---|---|
US (1) | US5910203A (en) |
EP (1) | EP0788857B1 (en) |
JP (1) | JP4140987B2 (en) |
CH (1) | CH691038A5 (en) |
DE (1) | DE69715060T2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102013206520A1 (en) * | 2013-04-12 | 2014-10-16 | Deutsche Solar Gmbh | wire saw |
Families Citing this family (19)
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TW383249B (en) | 1998-09-01 | 2000-03-01 | Sumitomo Spec Metals | Cutting method for rare earth alloy by annular saw and manufacturing for rare earth alloy board |
MY126994A (en) | 1999-12-14 | 2006-11-30 | Hitachi Metals Ltd | Method and apparatus for cutting a rare earth alloy |
US6357433B1 (en) * | 2000-06-01 | 2002-03-19 | Motorola, Inc. | Machine for cutting brittle materials |
US6352071B1 (en) | 2000-06-20 | 2002-03-05 | Seh America, Inc. | Apparatus and method for reducing bow and warp in silicon wafers sliced by a wire saw |
US6575065B2 (en) * | 2000-12-18 | 2003-06-10 | Western Printing Machinery Company | Rotary bridge assembly |
ATE355942T1 (en) * | 2004-05-26 | 2007-03-15 | Bhs Corr Masch & Anlagenbau | BRUSH ROLLER |
DE102007019566B4 (en) * | 2007-04-25 | 2012-11-29 | Siltronic Ag | Wire guide roller for wire saw |
ITMO20080039A1 (en) * | 2007-09-28 | 2009-03-29 | Luigi Pedrini | SUPPORT, GUIDE AND / OR TRANSMISSION OF THE MOTORCYCLE TO THE DIAMOND STONE CUTTING WIRE |
WO2011032603A1 (en) * | 2009-09-18 | 2011-03-24 | Applied Materials, Inc. | Wire saw device and method for operating same |
CN102328350A (en) * | 2011-06-20 | 2012-01-25 | 镇江市港南电子有限公司 | Main roller for cutting silicon chip |
ITMO20120060A1 (en) * | 2012-03-09 | 2013-09-10 | Luigi Pedrini | ROLLER FOR DIAMOND WIRES IN MULTIPLE CUTTING MACHINES, CIRCUMFERENTIAL COATING AND ITS APPLICATION PROCEDURE |
KR101289185B1 (en) | 2013-03-04 | 2013-08-07 | 백무윤 | Work roller of wire saw |
US10478989B2 (en) * | 2014-08-28 | 2019-11-19 | Dicar, Inc. | Anvil cover installation |
BR112017008917B1 (en) * | 2014-11-03 | 2022-12-06 | Pedrini Spa Ad Unico Socio | MULTI-STRIP MACHINE FOR CUTTING STONE BLOCKS |
JP6371681B2 (en) * | 2014-11-10 | 2018-08-08 | トーヨーエイテック株式会社 | Method for regenerating resin layer of guide roller for wire saw |
JP6462321B2 (en) * | 2014-11-10 | 2019-01-30 | トーヨーエイテック株式会社 | Wire saw guide roller, wire saw equipped with the same, method for manufacturing the guide roller, and outer layer recycling method |
CN107405780B (en) * | 2015-02-12 | 2020-09-01 | 迪卡尔公司 | Rotary cylindrical sleeve, cylindrical sleeve attached to cylindrical table base of die cutting machine, and die cutting machine |
DE102015115820A1 (en) * | 2015-09-18 | 2017-03-23 | Keuro Besitz Gmbh & Co. Edv-Dienstleistungs Kg | Band saw and method for sawing a metal pipe |
CN105619493B (en) * | 2015-12-29 | 2017-10-13 | 上海伦恩通用技术有限公司 | Circular filter paper cutting means |
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FR1512501A (en) * | 1966-12-27 | 1968-02-09 | Electronique & Automatisme Sa | Improvements to machines for sawing elements made from fragile materials, especially crystalline |
NL7308102A (en) * | 1973-06-12 | 1974-12-16 | ||
US4134384A (en) * | 1977-09-16 | 1979-01-16 | Motorola, Inc. | Wire saw with rotatable guide sleeve |
US4187752A (en) * | 1977-12-15 | 1980-02-12 | W. R. Chesnut Engineering, Inc. | Rotary die lock structure |
US4982639A (en) * | 1988-10-31 | 1991-01-08 | Robud Company | Die cutting anvil system |
JP2840491B2 (en) * | 1991-11-29 | 1998-12-24 | 信越半導体株式会社 | Roller with groove for wire saw and its replacement method |
JP2516717B2 (en) * | 1991-11-29 | 1996-07-24 | 信越半導体株式会社 | Wire saw and its cutting method |
-
1996
- 1996-02-06 CH CH00303/96A patent/CH691038A5/en not_active IP Right Cessation
-
1997
- 1997-01-16 DE DE1997615060 patent/DE69715060T2/en not_active Expired - Lifetime
- 1997-01-16 EP EP19970100580 patent/EP0788857B1/en not_active Expired - Lifetime
- 1997-02-05 US US08/796,108 patent/US5910203A/en not_active Expired - Lifetime
- 1997-02-06 JP JP03694997A patent/JP4140987B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102013206520A1 (en) * | 2013-04-12 | 2014-10-16 | Deutsche Solar Gmbh | wire saw |
Also Published As
Publication number | Publication date |
---|---|
US5910203A (en) | 1999-06-08 |
JP4140987B2 (en) | 2008-08-27 |
EP0788857A1 (en) | 1997-08-13 |
JPH09216222A (en) | 1997-08-19 |
CH691038A5 (en) | 2001-04-12 |
DE69715060D1 (en) | 2002-10-10 |
DE69715060T2 (en) | 2003-04-17 |
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