EP0757918A3 - Gas recovery unit - Google Patents

Gas recovery unit Download PDF

Info

Publication number
EP0757918A3
EP0757918A3 EP96401576A EP96401576A EP0757918A3 EP 0757918 A3 EP0757918 A3 EP 0757918A3 EP 96401576 A EP96401576 A EP 96401576A EP 96401576 A EP96401576 A EP 96401576A EP 0757918 A3 EP0757918 A3 EP 0757918A3
Authority
EP
European Patent Office
Prior art keywords
recovery unit
gas recovery
gas
unit
recovery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP96401576A
Other languages
German (de)
French (fr)
Other versions
EP0757918A2 (en
Inventor
Shigeyoshi Nozawa
Shinji Tomita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide Japan GK
Original Assignee
Teisan KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teisan KK filed Critical Teisan KK
Publication of EP0757918A2 publication Critical patent/EP0757918A2/en
Publication of EP0757918A3 publication Critical patent/EP0757918A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/002—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by condensation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D8/00—Cold traps; Cold baffles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
EP96401576A 1995-07-17 1996-07-16 Gas recovery unit Withdrawn EP0757918A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP179923/95 1995-07-17
JP7179923A JPH0929002A (en) 1995-07-17 1995-07-17 Gas recovering device

Publications (2)

Publication Number Publication Date
EP0757918A2 EP0757918A2 (en) 1997-02-12
EP0757918A3 true EP0757918A3 (en) 1997-05-14

Family

ID=16074291

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96401576A Withdrawn EP0757918A3 (en) 1995-07-17 1996-07-16 Gas recovery unit

Country Status (6)

Country Link
US (1) US6224677B1 (en)
EP (1) EP0757918A3 (en)
JP (1) JPH0929002A (en)
KR (1) KR970006542A (en)
CN (1) CN1150240A (en)
TW (1) TW375658B (en)

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JP4112659B2 (en) 1997-12-01 2008-07-02 大陽日酸株式会社 Noble gas recovery method and apparatus
US6395064B1 (en) * 1999-10-26 2002-05-28 American Air Liquide, Inc System and method for purifying and distributing chemical gases
US6383257B1 (en) * 2000-04-04 2002-05-07 Air Products And Chemicals, Inc. Reclamation and separation of perfluorocarbons using condensation
GB2363129A (en) * 2000-05-04 2001-12-12 Boc Group Plc Gas supply method and apparatus
JP3682207B2 (en) * 2000-06-12 2005-08-10 株式会社東芝 Plasma processing method
JP2002147948A (en) * 2000-11-10 2002-05-22 Japan Organo Co Ltd Gas separating device and method therefor
JP3952357B2 (en) * 2001-02-28 2007-08-01 信越半導体株式会社 Method for manufacturing light emitting device
JP2003017416A (en) * 2001-07-03 2003-01-17 Tokyo Electron Ltd Processing system and method
US6712883B2 (en) * 2002-02-25 2004-03-30 Lg.Philips Lcd Co., Ltd. Apparatus and method for deaerating liquid crystal
US6955707B2 (en) * 2002-06-10 2005-10-18 The Boc Group, Inc. Method of recycling fluorine using an adsorption purification process
KR101131531B1 (en) * 2003-02-06 2012-04-04 가부시키가이샤 한도오따이 에네루기 켄큐쇼 Method for manufacturing display
US20040187683A1 (en) * 2003-03-28 2004-09-30 Luping Wang Gas recovery system to improve the efficiency of abatementand/or implement reuse/reclamation
US6669760B1 (en) * 2003-04-08 2003-12-30 Air Products And Chemicals, Inc. Separation of C2F6 from CF4 by adsorption on activated carbon
GB0417936D0 (en) 2004-08-12 2004-09-15 Rolls Royce Plc Method and apparatus for recycling inert gas
KR20080029497A (en) * 2006-09-29 2008-04-03 삼성전자주식회사 Plasma processing equipment and method for processing substrate using the same
KR101514801B1 (en) * 2013-06-25 2015-04-24 (주)파인텍 The separation and recycling system for a perfluoro compounds
US10443127B2 (en) * 2013-11-05 2019-10-15 Taiwan Semiconductor Manufacturing Company Limited System and method for supplying a precursor for an atomic layer deposition (ALD) process
CN108386710B (en) * 2018-05-25 2023-08-01 江西佳因光电材料有限公司 Refrigerant recycling and utilizing system
CN109012092A (en) * 2018-08-09 2018-12-18 全椒南大光电材料有限公司 A kind of high concentration chlorine trifluoride exhaust gas processing device and processing method
CN110732216A (en) * 2019-11-06 2020-01-31 中国原子能科学研究院 chlorine-containing waste gas treatment device
CN112111790B (en) * 2020-09-21 2022-03-29 北京石晶光电科技股份有限公司 Artificial wafer corrosion cleaning process
CN113074320B (en) * 2021-03-19 2022-06-14 国网新疆电力有限公司检修公司 SF (sulfur hexafluoride)6/CF4High-purity separation and recovery device and method for mixed gas

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4551197A (en) * 1984-07-26 1985-11-05 Guilmette Joseph G Method and apparatus for the recovery and recycling of condensable gas reactants
US4975259A (en) * 1987-11-04 1990-12-04 Mitsui Toatsu Chemicals, Inc. Method of liquefying and condensing nitrogen trifluoride and a method of purifying nitrogen trifluoride
EP0636707A2 (en) * 1993-07-26 1995-02-01 Air Products And Chemicals, Inc. Nitrogen trifluoride thermal cleaning apparatus and process
EP0638923A2 (en) * 1993-07-30 1995-02-15 Applied Materials, Inc. Low temperature etching in cold-wall CVD systems

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US4756932A (en) 1987-06-11 1988-07-12 Air Products And Chemicals, Inc. Process for making highly permeable coated composite hollow fiber membranes
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US5182088A (en) 1990-09-07 1993-01-26 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Removal of gaseous hydrides
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JP2814062B2 (en) * 1995-01-09 1998-10-22 忠弘 大見 Nitrogen gas supply equipment
US5785741A (en) * 1995-07-17 1998-07-28 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges, Claude Process and system for separation and recovery of perfluorocompound gases

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4551197A (en) * 1984-07-26 1985-11-05 Guilmette Joseph G Method and apparatus for the recovery and recycling of condensable gas reactants
US4975259A (en) * 1987-11-04 1990-12-04 Mitsui Toatsu Chemicals, Inc. Method of liquefying and condensing nitrogen trifluoride and a method of purifying nitrogen trifluoride
EP0636707A2 (en) * 1993-07-26 1995-02-01 Air Products And Chemicals, Inc. Nitrogen trifluoride thermal cleaning apparatus and process
EP0638923A2 (en) * 1993-07-30 1995-02-15 Applied Materials, Inc. Low temperature etching in cold-wall CVD systems

Also Published As

Publication number Publication date
JPH0929002A (en) 1997-02-04
EP0757918A2 (en) 1997-02-12
TW375658B (en) 1999-12-01
KR970006542A (en) 1997-02-21
CN1150240A (en) 1997-05-21
US6224677B1 (en) 2001-05-01

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