CN108386710B - Refrigerant recycling and utilizing system - Google Patents
Refrigerant recycling and utilizing system Download PDFInfo
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- CN108386710B CN108386710B CN201810516853.9A CN201810516853A CN108386710B CN 108386710 B CN108386710 B CN 108386710B CN 201810516853 A CN201810516853 A CN 201810516853A CN 108386710 B CN108386710 B CN 108386710B
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- storage tank
- liquid refrigerant
- closed cavity
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C5/00—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures
- F17C5/02—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures for filling with liquefied gases
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2260/00—Purposes of gas storage and gas handling
- F17C2260/04—Reducing risks and environmental impact
- F17C2260/046—Enhancing energy recovery
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Separation By Low-Temperature Treatments (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
The invention relates to the field of refrigerant recovery, and discloses a refrigerant recovery and utilization system, which comprises a gas storage tank, a closed cavity and a production device arranged in the closed cavity, wherein the closed cavity can be filled with liquid refrigerant for cooling the production device, the gas storage tank is connected with the closed cavity through a first pipeline for collecting vapor formed by vaporization of the liquid refrigerant, and the gas storage tank is connected with the production device through a second pipeline for filling the collected vapor into the production device so as to extrude materials in the production device. The refrigerant recycling and utilizing system provided by the invention can collect the vapor formed by vaporizing the liquid refrigerant into the gas storage tank, so that the problems of environmental influence and resource waste caused by discharging the vapor into the atmosphere are avoided, the vapor is not required to be additionally introduced when materials in the production device are transferred, the materials in the production device can be extruded by utilizing the vapor collected in the gas storage tank, and the recovery and utilization of the vapor are realized.
Description
Technical Field
The invention relates to the field of refrigerant recovery, in particular to a refrigerant recovery and utilization system.
Background
The MO source (i.e. high-purity metal organic compound) is a supporting material for epitaxial growth by adopting Metal Organic Chemical Vapor Deposition (MOCVD) technology, is one of key materials for developing the photoelectron industry, and is also a necessary raw material for producing high-brightness and ultra-high-brightness luminescent materials and large-scale integrated circuits. The MO source needs to reach the product purity of more than 6N (99.9999 percent) before being qualified, so that the production process of coarse separation and purification, fine separation and purification and superfine separation and purification is needed in the production process. Heat is generated in the operation process of a device used for the separation and purification of an MO source, a large amount of liquid nitrogen (the storage temperature of the liquid nitrogen is minus 196 ℃) is required to be cooled, the temperature of the device is required to be raised when one separation and purification process is completed to transfer a product for the next separation and purification process, the liquid nitrogen is required to be quickly vaporized to heat the device, and the separated and purified product is required to be conveyed in an isolated manner by using the protection of nitrogen with the purity of 99.95%.
The production device for separation and purification in the prior art is generally arranged in a low-temperature vacuum storage tank with an open top, nitrogen (namely, vapor) after the liquid nitrogen (namely, liquid refrigerant) added into the storage tank absorbs heat of the production device and is gasified is directly discharged into the atmosphere, and nitrogen is additionally introduced to isolate and convey when materials in the production device are transferred, and the nitrogen formed by the gasification of the liquid nitrogen is not recycled and utilized, so that resource waste is caused, environmental protection and energy conservation are not facilitated, and production cost is higher.
Therefore, there is a need to design a refrigerant recovery and utilization system capable of recovering and utilizing the vaporized vapor of the liquid refrigerant.
Disclosure of Invention
The invention aims to solve the problem that the vaporized vapor of the liquid refrigerant is not recycled and utilized in the prior art, and provides a refrigerant recycling system which can recycle and utilize the vaporized vapor of the liquid refrigerant.
In order to achieve the above object, according to one aspect of the present invention, there is provided a refrigerant recycling and utilizing system including a gas storage tank, a closed cavity and a production device disposed in the closed cavity, the closed cavity being filled with a liquid refrigerant for cooling the production device, the gas storage tank being connected to the closed cavity through a first pipe for collecting a vapor formed by vaporization of the liquid refrigerant, the gas storage tank being connected to the production device through a second pipe for charging the collected vapor into the production device to press out a material in the production device.
In the technical scheme, the vapor formed by the vaporization of the liquid refrigerant can be collected in the gas storage tank, so that the problems of environmental impact and resource waste caused when the vapor is discharged into the atmosphere are avoided, the vapor is not required to be additionally introduced when materials in the production device are transferred, the materials in the production device can be extruded out by utilizing the vapor collected in the gas storage tank, the recovery and utilization of the vapor formed by the vaporization of the liquid refrigerant are realized, and the cost can be reduced to a certain extent.
Preferably, the first pipeline is provided with a check valve and/or a first valve, the refrigerant recycling system comprises a first pressure sensor connected with the closed cavity and used for detecting the pressure in the closed cavity, and a control unit connected with the first pressure sensor, the check valve and/or the first valve, and the control unit is arranged to be capable of controlling the check valve and/or the first valve according to the pressure in the closed cavity detected by the first pressure sensor.
Preferably, a vaporizer and a compressor are sequentially disposed on the first pipe along a flow direction of the vapor in the first pipe; and/or a second valve and/or a first flow regulating valve are/is arranged on the second pipeline.
Preferably, the refrigerant recovery and utilization system includes a purity detection device connected to the gas storage tank for detecting the purity of the vapor in the gas storage tank.
Preferably, a second pressure sensor for detecting the pressure in the gas storage tank is connected to the gas storage tank, and a second flow rate regulating valve for regulating the flow rate of the vaporized material entering the purity detecting apparatus according to the pressure in the gas storage tank detected by the second pressure sensor is provided on a pipe connecting the gas storage tank and the purity detecting apparatus.
Preferably, the refrigerant recycling and utilizing system comprises a liquid refrigerant storage tank capable of being communicated with the closed cavity and a first vacuumizing device connected with the closed cavity for vacuumizing treatment, so that the liquid refrigerant in the liquid refrigerant storage tank can be conveyed into the closed cavity for cooling the production device.
Preferably, the refrigerant recycling and utilizing system comprises a second vacuumizing device which is connected with the liquid refrigerant storage tank to perform vacuumizing treatment so that the liquid refrigerant in the closed accommodating cavity can be recycled to the liquid refrigerant storage tank.
Preferably, the refrigerant recycling and utilizing system comprises a control unit, the closed cavity is connected with a first pressure sensor, the liquid refrigerant storage tank is connected with a third pressure sensor, the first pressure sensor, the third pressure sensor, the first vacuumizing device and the second vacuumizing device are connected with the control unit, and the control unit is arranged to control the first vacuumizing device and the second vacuumizing device according to the pressure in the closed cavity and the pressure in the liquid refrigerant storage tank.
Preferably, the liquid refrigerant storage tank is connected with the closed cavity through a third pipeline for conveying the liquid refrigerant in the liquid refrigerant storage tank into the closed cavity, the liquid refrigerant storage tank is connected with the closed cavity through a fourth pipeline for recycling the liquid refrigerant in the closed cavity to the liquid refrigerant storage tank, and third valves are respectively arranged on the third pipeline and the fourth pipeline.
Preferably, the production device is an MO source separation and purification device, and the liquid refrigerant storage tank is a liquid nitrogen storage tank for containing liquid nitrogen.
Additional features and advantages of the invention will be set forth in the detailed description which follows.
Drawings
Fig. 1 is a schematic view of a refrigerant recovery and utilization system according to a preferred embodiment of the present invention.
Description of the reference numerals
1. Production device 2 seals the appearance chamber
3. Check valve of gas storage tank 4
5. First valve 6 carburetor
7. Compressor 8 purity detection device
9. Second flow rate regulating valve of second pressure sensor 10
11. Second valve 12 first flow regulating valve
13. Fourth valve of first vacuum pumping device 14
15. Liquid refrigerant storage tank with first pressure sensor 16
17. Third valve 18 second vacuum extractor
19. Third pressure sensor of fifth valve 20
21. Control unit of pressure relief valve 22
23. Fourth pressure sensor
P1 first pipeline P2 second pipeline
P3 third pipeline P4 fourth pipeline
Detailed Description
The following describes specific embodiments of the present invention in detail with reference to the drawings. It should be understood that the detailed description and specific examples, while indicating and illustrating the invention, are not intended to limit the invention.
In the present invention, unless otherwise specified, terms such as "upper, lower, left, and right" and "upper, lower, left, and right" are used generically to refer to the upper, lower, left, and right illustrated in the drawings; "inner and outer" means the inner and outer relative to the contour of the respective component itself.
In one aspect, the present invention provides a refrigerant recycling system, which includes a gas storage tank 3, a closed cavity 2, and a production device 1 disposed in the closed cavity 2, wherein the closed cavity 2 can be filled with a liquid refrigerant for cooling the production device 1, the gas storage tank 3 is connected with the closed cavity 2 through a first pipeline P1 for collecting a vapor formed by vaporization of the liquid refrigerant, and the gas storage tank 3 is connected with the production device 1 through a second pipeline P2 for filling the collected vapor into the production device 1 to press out materials in the production device 1.
In the above technical scheme, as shown in fig. 1, the vapor formed by vaporizing the liquid refrigerant can be collected in the gas storage tank 3, so that the problems of environmental impact and resource waste caused by discharging the vapor into the atmosphere are avoided, and the vapor is not required to be additionally introduced when transferring the materials in the production device 1, so that the materials in the production device 1 can be extruded by utilizing the vapor collected in the gas storage tank 3, the recovery and utilization of the vapor formed by vaporizing the liquid refrigerant are realized, and the cost can be reduced to a certain extent.
In a specific embodiment of the present technical solution, liquid nitrogen is generally used as the liquid refrigerant, and the production device 1 is a MO source separation and purification device. In the separation and purification process, nitrogen formed after the vaporization of the liquid nitrogen in the closed cavity 2 can be collected into the gas storage tank 3 from the first pipeline P1, and after the separation and purification of the MO source is completed, materials in the separation and purification device can be pressed out through the nitrogen in the gas storage tank 3. It should be understood that the refrigerant recycling system is not limited to the separation and purification of MO source in this embodiment, and any other production process that can utilize the refrigerant recycling system may be used. When the production device 1 is a device for producing other materials, the liquid refrigerant may be other liquid materials, or the liquid refrigerant may be replaced by a solid material capable of being cooled, such as solid carbon dioxide.
For facilitating automatic control, preferably, the first pipe P1 is provided with a check valve 4 and/or a first valve 5, the refrigerant recycling system includes a first pressure sensor 15 connected to the closed cavity 2 for detecting the pressure in the closed cavity 2, and a control unit 22 connected to the first pressure sensor 15, the check valve 4 and/or the first valve 5, and the control unit 22 is configured to control the check valve 4 and the first valve 5 according to the pressure in the closed cavity 2 detected by the first pressure sensor 15. Specifically, when the production device 1 is in operation, the liquid refrigerant (such as liquid nitrogen) filled in the closed cavity 2 for cooling the production device 1 is continuously vaporized into vapor (such as nitrogen) due to heating, the check valve 4 and/or the first valve 5 can not be opened at first due to the low concentration of the vapor at the beginning, when the yield of the vapor is gradually increased, the pressure in the closed cavity 2 is increased, at the moment, the first pressure sensor 15 senses that the pressure in the closed cavity 2 reaches a set value (such as 0.2 mpa), and then the pressure sensor feeds back to the control unit 22, and the control unit 22 controls the check valve 4 and the first valve 5 to be opened so that the vapor is collected in the gas storage tank 3.
And preferably a vaporizer 6 and a compressor 7 are provided in this order in the first pipe P1 in the flow direction of the vapor in the first pipe P1, wherein the vaporizer 6 may enable the vapor in the first pipe P1 to be further vaporized and the compressor 7 may compress the vapor so as to enable the gas storage tank 3 to accommodate more vapor. In addition, in order to enable the vapours in the gas tank 3 to enter the production device 1 to press out the material in the production device 1 when required, the second pipe P2 is provided with a second valve 11 and/or a first flow regulating valve 12.
Since the vapor in the gas tank 3 can be charged into the production device 1 to press out the material in the production device 1 while the properties of the different materials are different, in order to prevent the material from being affected when the purity of the vapor is too low, it is preferable that the refrigerant recovery and utilization system includes a purity detecting device 8 connected to the gas tank 3 for detecting the purity of the vapor in the gas tank 3.
And in order to ensure the accuracy of the purity detection device 8 detecting the purity of the vapor in the gas tank 3, it is preferable that a second pressure sensor 9 for detecting the pressure in the gas tank 3 is connected to the gas tank 3, and a second flow rate adjustment valve 10 for adjusting the flow rate of the vapor into the purity detection device 8 according to the pressure in the gas tank 3 detected by the second pressure sensor 9 is provided to a pipe connecting the gas tank 3 and the purity detection device 8. Specifically, after the vapor enters the gas tank 3, the control unit 22 may maintain the flow rate of the vapor entering the purity detection device 8 to be stable by controlling the second flow rate adjustment valve 10 according to the value of the second pressure sensor 9, thereby ensuring the accuracy of the detection result of the purity detection device 8.
Considering that the manual work is easy to cause personnel frostbite and the efficiency is low when filling the liquid refrigerant into the closed cavity 2, in order to avoid personnel frostbite and realize automatic production in the process of adding the liquid refrigerant, preferably, the refrigerant recycling and utilizing system comprises a liquid refrigerant storage tank 16 capable of being communicated with the closed cavity 2 and a first vacuumizing device 13 connected with the closed cavity 2 for vacuumizing treatment, so that the liquid refrigerant in the liquid refrigerant storage tank 16 can be conveyed into the closed cavity 2 for cooling the production device 1. As shown in fig. 1, the number of the first vacuumizing means 13 may be two in order to increase the speed of vacuumizing the closed cavity 2 when needed, or when one of the first vacuumizing means 13 is damaged, the other one may work normally. And, a fourth valve 14 may be disposed on a pipe connecting the first vacuumizing device 13 and the closed cavity 2, when a liquid refrigerant needs to be added into the closed cavity 2, the closed cavity 2 is communicated with the liquid refrigerant storage tank 16 (for example, a third valve 17 on a third pipe P3 connecting the liquid refrigerant storage tank 16 and the closed cavity 2, which will be described below, is opened by a control unit 22), then the fourth valve 14 is opened by the control unit 22 and the first vacuumizing device 13 is controlled to vacuumize the closed cavity 2, the pressure in the closed cavity 2 is gradually reduced, and when the pressure in the closed cavity 2 is smaller than the pressure in the liquid refrigerant storage tank 16, a pressure difference exists between the closed cavity 2 and the liquid refrigerant storage tank 16, and the liquid refrigerant in the liquid refrigerant storage tank 16 can be conveyed to the closed cavity 2 under the action of the pressure difference, thereby realizing automatic addition of the liquid refrigerant. Also, as shown in fig. 1, the control unit 22 may cooperate with the first pressure sensor 15 connected to the closed cavity 2 as described above to control the first vacuumizing device 13 to perform vacuumizing operation.
After the production apparatus 1 is completed, the liquid nitrogen refrigerant filled in the closed chamber 2 may not be completely vaporized, so that the remaining liquid refrigerant may be recovered. Preferably, the refrigerant recycling system includes a second vacuumizing device 18 connected to the liquid refrigerant storage tank 16 for vacuumizing, so that the liquid refrigerant in the closed cavity 2 can be recycled to the liquid refrigerant storage tank 16. As shown in fig. 1, a fifth valve 19 may be disposed on a pipe connecting the second vacuumizing device 18 and the closed cavity 2, when the liquid refrigerant in the closed cavity 2 needs to be recovered to the liquid refrigerant storage tank 16, the closed cavity 2 is communicated with the liquid refrigerant storage tank 16 (for example, the third valve 17 on a fourth pipe P4 connecting the liquid refrigerant storage tank 16 and the closed cavity 2, which will be described later, is opened by the control unit 22), then the fifth valve 19 is opened by the control unit 22 and the second vacuumizing device 18 is controlled to vacuumize the liquid refrigerant storage tank 16, the pressure in the liquid refrigerant storage tank 16 is gradually reduced, the pressure difference existing between the closed cavity 2 and the liquid refrigerant storage tank 16 is generated, and the liquid refrigerant in the closed cavity 2 can be recovered to the liquid refrigerant storage tank 16 under the action of the pressure difference, so as to realize automatic recovery of the liquid refrigerant, avoid the influence on the environment and the resource waste caused when the residual liquid refrigerant is discharged into the atmosphere after being heated and gasified, and the cost is reduced to a certain extent.
In order to improve the degree of automation control, preferably, the refrigerant recycling system includes a control unit 22, the closed cavity 2 is connected with a first pressure sensor 15, the liquid refrigerant storage tank 16 is connected with a third pressure sensor 20, the first pressure sensor 15, the third pressure sensor 20, the first vacuumizing device 13 and the second vacuumizing device 18 are connected with the control unit 22, and the control unit 22 is configured to control the first vacuumizing device 13 and the second vacuumizing device 18 according to the pressure in the closed cavity 2 fed back by the first pressure sensor 15 and the pressure in the liquid refrigerant storage tank 16 fed back by the third pressure sensor 20. Specifically, when the liquid refrigerant needs to be added from the liquid refrigerant storage tank 16 to the closed cavity 2 or the liquid refrigerant in the closed cavity 2 is recovered to the liquid refrigerant storage tank 16, the control unit 22 may calculate the working time of the first vacuum pumping device 13 or the second vacuum pumping device 18 according to the pressure values fed back by the first pressure sensor 15 and the third pressure sensor 20 respectively and the required amount of the liquid refrigerant to be added or recovered, so as to realize precise control, thereby helping to reduce energy consumption and save cost.
In order to control the addition and recovery of the liquid refrigerant, preferably, the liquid refrigerant storage tank 16 is connected to the closed cavity 2 through a third pipe P3 for conveying the liquid refrigerant in the liquid refrigerant storage tank 16 into the closed cavity 2, and the liquid refrigerant storage tank 16 is connected to the closed cavity 2 through a fourth pipe P4 for recovering the liquid refrigerant in the closed cavity 2 to the liquid refrigerant storage tank 16. Thus, after one of the third pipeline P3 and the fourth pipeline P4 has a problem, the liquid refrigerant can be added and recovered through the other one of the third pipeline P3 and the fourth pipeline P4, and normal operation is not affected. Of course, the same pipe may be used for filling the liquid refrigerant from the liquid refrigerant storage tank 16 into the closed cavity 2 and recovering the liquid refrigerant in the closed cavity 2 to the liquid refrigerant storage tank 16, that is, only one of the third pipe P3 and the fourth pipe P4 may be provided. Further, in order to enable communication between the closed cavity 2 and the liquid refrigerant storage tank 16 through the third pipe P3 when adding the liquid refrigerant into the closed cavity 2, and enable communication between the closed cavity 2 and the liquid refrigerant storage tank 16 through the fourth pipe P4 when recycling the liquid refrigerant in the closed cavity 2 to the liquid refrigerant storage tank 16, and enable a non-communication state between the closed cavity 2 and the liquid refrigerant storage tank 16 when needed (for example, when collecting the vapor in the gas storage tank 3), the third pipe P3 and the fourth pipe P4 are respectively provided with a third valve 17.
Preferably, the production device 1 is an MO source separation and purification device, and the liquid refrigerant storage tank 16 is a liquid nitrogen storage tank for containing liquid nitrogen.
The first valve 5, the second valve 11, the third valve 17, the fourth valve 14 and the fifth valve 19 may be electromagnetic pneumatic valves and may be connected with the control unit 22 to facilitate control of the control unit 22. In addition, the liquid refrigerant storage tank 16 and the gas storage tank 3 may be provided with a pressure release valve 21, and the pressure release valve 21 may also be connected with the control unit 22 to facilitate control by the control unit 22. When the pressure in the liquid refrigerant storage tank 16 and the gas storage tank 3 exceeds a set value (for example, 4.5 megapascals), the pressure release valve 21 can automatically release pressure, so that the safety use performance of the equipment is improved, and the risk of injuring personnel is reduced.
Referring to fig. 1, the refrigerant recovery and utilization system according to the preferred embodiment of the present invention can be roughly divided into the following four stages:
(1) The first stage: liquid nitrogen (i.e. liquid refrigerant) is added into the closed cavity 2
Before the production device 1 (such as an MO separation and purification device) operates, the third valve 17 and the fourth valve 14 on the third pipeline P3 are opened in advance by the control unit 22 (such as a DCS system), the first vacuumizing device 13 is controlled by the control unit 22 to vacuumize the closed cavity 2, so that the pressure in the closed cavity 2 is gradually reduced, when the pressure in the closed cavity 2 is smaller than the pressure in the liquid refrigerant storage tank 16, the pressure difference exists between the liquid refrigerant storage tank 16 and the closed cavity 2, and the liquid nitrogen in the liquid refrigerant storage tank 16 can be conveyed into the closed cavity 2 through the third pipeline P3 under the action of the pressure difference, so that the operation of adding the liquid nitrogen into the closed cavity 2 is completed, and then the control unit 22 controls the fourth valve 14, the first vacuumizing device 13 and the third valve 17 on the third pipeline P3 to be closed.
(2) And a second stage: collecting nitrogen (i.e. vapor) formed by vaporization of liquid nitrogen in the closed cavity 2 into the gas storage tank 3
When the production device 1 works, liquid nitrogen filled in the closed cavity 2 is continuously vaporized into nitrogen due to heating, when the first pressure sensor 15 on the closed cavity 2 senses that the pressure in the closed cavity 2 reaches a set value (for example, 0.2 megapascal), the pressure is fed back to the control unit 22, at the moment, the control unit 22 can control and open the check valve 4 and the first valve 5 on the first pipeline P1 (at the moment, the second valve 11 on the second pipeline P2, the third valve 17 on the third pipeline P3 and the third valve 17 on the fourth pipeline P4 are all closed), and nitrogen formed by vaporization of the liquid nitrogen in the closed cavity 2 enters the gas storage tank 3 after being further vaporized by the vaporizer 6 through the first pipeline P1 and further compressed by the compressor 7, so that the operation of collecting the nitrogen formed by vaporization of the liquid nitrogen in the closed cavity 2 into the gas storage tank 3 is completed.
(3) And a third stage: liquid nitrogen in the closed cavity 2 is recycled to a liquid refrigerant storage tank 16 (for example, a liquid nitrogen storage tank)
When the reaction of the production apparatus 1 is completed, the control unit 22 controls to close the check valve 4, the first valve 5, the carburetor 6, and the compressor 7. At this time, a lot of liquid nitrogen which is not vaporized into nitrogen still remains in the closed cavity 2, the third valve 17 and the fifth valve 19 on the fourth pipeline P4 are opened by the control unit 22, the second vacuumizing device 18 is controlled to vacuumize the liquid refrigerant storage tank 16, the pressure in the liquid refrigerant storage tank 16 is reduced, when the pressure in the liquid refrigerant storage tank 16 is smaller than the pressure in the closed cavity 2, the pressure difference exists between the liquid refrigerant storage tank 16 and the closed cavity 2, the liquid refrigerant in the closed cavity 2 can be recycled into the liquid refrigerant storage tank 16 under the action of the pressure difference, and then the operation of recycling the liquid nitrogen in the closed cavity 2 into the liquid refrigerant storage tank 16 is completed, and the third valve 17 on the fourth pipeline P4 is closed by the control unit 22.
(4) Fourth stage: nitrogen in the gas tank 3 is filled into the production device 1 to press out the materials in the production device
After the production device 1 is operated, the material in the production device 1 needs to be conveyed to the next process through a material pipeline, wherein a fourth pressure sensor 23 can be arranged on the production device 1, at this time, the second valve 11 on the second pipeline P2 can be controlled to be opened by the control unit 22, then the control unit 22 can adjust the flow of nitrogen gas which is filled into the production device 1 from the gas storage tank 3 through the first flow adjusting valve 12 so that the pressure in the production device 1 fed back by the fourth pressure sensor 23 is kept at a set value (for example, 1 mpa), and the material can be extruded from the production device 1 according to the required speed.
When the production device 1 is an MO source separation and purification device, since the separated and purified product needs to be protected by nitrogen with higher purity (e.g. 99.95%) for isolation and transportation, the purity of the nitrogen in the gas storage tank 3 can be detected by the purity detection device 8 before the nitrogen in the gas storage tank 3 is filled into the production device 1, specifically, when the nitrogen enters the gas storage tank 3, the second flow control valve 10 is opened by the control unit 22 and the purity detection device 8 is operated to detect the purity of the nitrogen, the control unit 22 adjusts the flow of the nitrogen through the second flow control valve 10 according to the pressure in the gas storage tank 3 detected by the second pressure sensor 9 so that the flow of the nitrogen entering the purity detection device 8 is kept stable, and according to the purity of the nitrogen detected by the purity detection device 8, whether the purity of the nitrogen is qualified or not is judged, if not qualified, the control unit 22 stops all equipment operation so that the staff can overhaul. If it is acceptable, the above-described operation of charging nitrogen gas into the production apparatus 1 to press out the material in the production apparatus 1 may be performed.
The preferred embodiments of the present invention have been described in detail above with reference to the accompanying drawings, but the present invention is not limited thereto. Within the scope of the technical idea of the invention, a number of simple variants of the technical solution of the invention are possible, including combinations of individual specific technical features in any suitable way. The various possible combinations of the invention are not described in detail in order to avoid unnecessary repetition. Such simple variations and combinations are likewise to be regarded as being within the scope of the present disclosure.
Claims (4)
1. A refrigerant recycling and utilizing system, characterized in that the refrigerant recycling and utilizing system comprises a gas storage tank (3), a closed containing cavity (2) and a production device (1) arranged in the closed containing cavity (2), wherein the closed containing cavity (2) can be filled with liquid refrigerant for cooling the production device (1), the gas storage tank (3) is connected with the closed containing cavity (2) through a first pipeline (P1) for collecting vapor formed by vaporization of the liquid refrigerant, and the gas storage tank (3) is connected with the production device (1) through a second pipeline (P2) for filling the collected vapor into the production device (1) so as to extrude materials in the production device (1);
the first pipeline (P1) is provided with a check valve (4) and/or a first valve (5), the refrigerant recycling system comprises a first pressure sensor (15) connected with the closed cavity (2) and used for detecting the pressure in the closed cavity (2), and a control unit (22) connected with the first pressure sensor (15), the check valve (4) and/or the first valve (5), and the control unit (22) is arranged to control the check valve (4) and/or the first valve (5) according to the pressure in the closed cavity (2) detected by the first pressure sensor (15);
a vaporizer (6) and a compressor (7) are sequentially arranged on the first pipeline (P1) along the flowing direction of the vaporizer in the first pipeline (P1);
the second pipeline (P2) is provided with a second valve (11) and/or a first flow regulating valve (12);
the refrigerant recycling system comprises a purity detection device (8) connected with the gas storage tank (3) for detecting the purity of the vapor in the gas storage tank (3); a second pressure sensor (9) for detecting the pressure in the gas storage tank (3) is connected to the gas storage tank (3), and a second flow rate regulating valve (10) for regulating the flow rate of the vapor entering the purity detection device (8) according to the pressure in the gas storage tank (3) detected by the second pressure sensor (9) is arranged on a pipeline connecting the gas storage tank (3) and the purity detection device (8); the refrigerant recycling and utilizing system comprises a liquid refrigerant storage tank (16) capable of being communicated with the closed cavity (2) and a first vacuumizing device (13) connected with the closed cavity (2) for vacuumizing treatment, so that the liquid refrigerant in the liquid refrigerant storage tank (16) can be conveyed into the closed cavity (2) for cooling the production device (1); the refrigerant recycling and utilizing system comprises a second vacuumizing device (18) which is connected with the liquid refrigerant storage tank (16) to perform vacuumizing treatment so that the liquid refrigerant in the closed accommodating cavity (2) can be recycled to the liquid refrigerant storage tank (16).
2. Refrigerant recycling system according to claim 1, characterized in that the liquid refrigerant storage tank (16) is connected with a third pressure sensor (20), the first pressure sensor (15), the third pressure sensor (20), the first vacuumizing device (13) and the second vacuumizing device (18) are connected with the control unit (22), and the control unit (22) is configured to control the first vacuumizing device (13) and the second vacuumizing device (18) according to the pressure in the closed cavity (2) fed back by the first pressure sensor (15) and the pressure in the liquid refrigerant storage tank (16) fed back by the third pressure sensor (20).
3. Refrigerant recycling system according to claim 1, characterized in that the liquid refrigerant storage tank (16) is connected with the closed cavity (2) through a third pipeline (P3) for conveying the liquid refrigerant in the liquid refrigerant storage tank (16) into the closed cavity (2), the liquid refrigerant storage tank (16) is connected with the closed cavity (2) through a fourth pipeline (P4) for recycling the liquid refrigerant in the closed cavity (2) to the liquid refrigerant storage tank (16), and third valves (17) are respectively arranged on the third pipeline (P3) and the fourth pipeline (P4).
4. A refrigerant recovery and utilization system according to any one of claims 1-3, characterized in that the production device (1) is an MO source separation and purification device, and the liquid refrigerant storage tank (16) is a liquid nitrogen storage tank for containing liquid nitrogen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810516853.9A CN108386710B (en) | 2018-05-25 | 2018-05-25 | Refrigerant recycling and utilizing system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810516853.9A CN108386710B (en) | 2018-05-25 | 2018-05-25 | Refrigerant recycling and utilizing system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108386710A CN108386710A (en) | 2018-08-10 |
| CN108386710B true CN108386710B (en) | 2023-08-01 |
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| CN203150595U (en) * | 2012-11-09 | 2013-08-21 | 吴纳新 | Tail gas treatment, recovery and recycling apparatus of MOCVD grown gallium nitride wafer |
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| CN108386710A (en) | 2018-08-10 |
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