CN108386710A - Refrigerant recovering and utilize system - Google Patents
Refrigerant recovering and utilize system Download PDFInfo
- Publication number
- CN108386710A CN108386710A CN201810516853.9A CN201810516853A CN108386710A CN 108386710 A CN108386710 A CN 108386710A CN 201810516853 A CN201810516853 A CN 201810516853A CN 108386710 A CN108386710 A CN 108386710A
- Authority
- CN
- China
- Prior art keywords
- liquid refrigerants
- storage tank
- vaporizer
- vessel
- refrigerant recovering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C5/00—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures
- F17C5/02—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures for filling with liquefied gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2260/00—Purposes of gas storage and gas handling
- F17C2260/04—Reducing risks and environmental impact
- F17C2260/046—Enhancing energy recovery
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Separation By Low-Temperature Treatments (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
The present invention relates to refrigerant recovering fields, it discloses a kind of refrigerant recovering and utilizes system, including gas reservoir, closing vessel and the process units being arranged in closing vessel, the liquid refrigerants for cooling down process units can be filled in closing vessel, gas reservoir is connected by first pipe with closing vessel is vaporized the vaporizer formed by liquid refrigerants for collecting, and gas reservoir is connected for the vaporizer of collection is filled with process units with process units by second pipe by extrudes the material in process units.Refrigerant recovering provided by the invention and utilize system, liquid refrigerants can be vaporized to the vaporizer to be formed to be collected into gas reservoir, it avoids when vaporizer is discharged into air to environmental effects and the problem of result in waste of resources, and without additionally introducing vaporizer when shifting the material in process units, the material in process units can be extruded using the vaporizer collected in gas reservoir, realizes the recycling and utilization to vaporizer.
Description
Technical field
The present invention relates to refrigerant recovering fields, more particularly to a kind of refrigerant recovering and utilize system.
Background technology
The sources MO (i.e. high-purity metal organic compound) are outer using the progress of metal organic chemical vapor deposition (MOCVD) technology
Backing material when epitaxial growth is to develop one of the critical material of photoelectronic industry, and production high brightness, super brightness shine
The indispensable raw material of material and large scale integrated circuit.The sources MO need the product purity for reaching 6N (99.9999%) or more just qualified,
Therefore it needs to purify by crude separation in process of production, carefully isolate and purify, the ultra-fine production process isolated and purified.In the sources MO point
From will produce heat in the device operational process that uses of purifying, a large amount of liquid nitrogen (liquid nitrogen storage temperature -- 196 DEG C) is needed to carry out
It is cooling, it has often run one and isolates and purifies process needs and heat up to device, to carry out next process separation pure to shift product
Change, this just needs to make liquid nitrogen fast vaporizing, and to heat up to device, and the product isolated and purified need to use 99.95% purity
Nitrogen protection carries out isolation conveying.
The process units for being used to isolate and purify in the prior art is generally located in the open cryogenic vacuum storage tank in top, is added
Enter the nitrogen (i.e. vaporizer) after the heat vaporization of the absorption process units of the liquid nitrogen (i.e. liquid refrigerants) in storage tank to be directly discharged into greatly
Gas, and while shifting the material in process units need to additionally introduce nitrogen conveying, the nitrogen formed by liquid nitrogen vaporization is isolated
It is not recycled and is utilized, resulted in waste of resources, be unfavorable for environmental protection and energy saving, cause production cost higher.
Accordingly, there exist design it is a kind of can recycle and be vaporized using liquid refrigerants after vaporizer refrigerant recovering and utilization
The needs of system.
Invention content
The purpose of the invention is to the vaporizers after overcoming liquid refrigerants of the existing technology to vaporize not to be returned
The problem of receiving and utilizing provides a kind of refrigerant recovering and utilizes system, the refrigerant recovering and can recycle and utilize using system
Vaporizer after liquid refrigerants vaporization.
To achieve the goals above, one aspect of the present invention provides a kind of refrigerant recovering and utilizes system, the refrigerant recovering
With using system include gas reservoir, closing vessel and be arranged it is described closing vessel in process units, the closing vessel
The interior liquid refrigerants that can be filled for cooling down the process units, the gas reservoir are held by first pipe and the closing
Chamber is connected vaporizes the vaporizer formed for collecting by the liquid refrigerants, the gas reservoir by second pipe with it is described
Process units be connected for the vaporizer collected is filled with the process units and by the material in the process units
It extrudes.
In the above-mentioned technical solutions, liquid refrigerants vaporizes the vaporizer to be formed and can be collected into gas reservoir, avoids
To environmental effects and the problem of result in waste of resources when vaporizer is discharged into air, and shift the material in process units
Shi Wuxu additionally introduces vaporizer, can be extruded the material in process units using the vaporizer collected in gas reservoir, real
The recycling and utilization for vaporizing the vaporizer to be formed to liquid refrigerants are showed, cost can be reduced to a certain extent.
Preferably, it is provided with check-valves and/or the first valve in the first pipe, the refrigerant recovering and utilizes system
Include with it is described closing vessel connect for detect it is described close vessel in pressure first pressure sensor and with institute
The connected control unit of first pressure sensor, the check-valves and/or first valve is stated, described control unit is set as
The check-valves and/or described the can be controlled according to the pressure in the closing vessel that the first pressure sensor detects
One valve.
Preferably, the flow direction along the vaporizer in the first pipe is set gradually in the first pipe
There are vaporizer and compressor；And/or the second valve and/or first flow regulating valve are provided on the second pipe.
Preferably, the refrigerant recovering and include being connected for detection gas storage tank with the gas reservoir using system
The purity detecting device of the interior vaporizer purity.
Preferably, the second pressure for detecting the pressure in the gas reservoir is connected in the gas reservoir to sense
Device, and be provided with according to the second pressure sensor on the pipeline for connecting the gas reservoir and the purity detecting device
Pressure in the gas reservoir of detection adjusts the second of the flow for entering the vaporizer in the purity detecting device
Flow control valve.
Preferably, the refrigerant recovering and include using system can be with the liquid refrigerants storage tank that be connected to of closing vessel
Enable the liquid refrigerants in the liquid refrigerants storage tank with being connected to carry out vacuumize process with the closing vessel
It is delivered to the first vacuum extractor for the cooling process units in the closing vessel.
Preferably, the refrigerant recovering and include being connected with the liquid refrigerants storage tank to carry out vacuumizing place using system
The second vacuum extractor managed and the liquid refrigerants in the closing vessel is enable to be recycled to the liquid refrigerants storage tank.
Preferably, the refrigerant recovering and include control unit using system, the closing vessel is connected with first pressure
Sensor, the liquid refrigerants storage tank are connected with third pressure sensor, and the first pressure sensor, the third pressure pass
Sensor, first vacuum extractor and second vacuum extractor are connected with described control unit, and described control unit is set
Be set to can according in the closing vessel that the first pressure sensor is fed back pressure and the third pressure sensor
Pressure in the liquid refrigerants storage tank of feedback controls the first vacuum extractor and second vacuum extractor.
Preferably, the liquid refrigerants storage tank is connected by third pipeline with the closing vessel for by the liquid
The liquid refrigerants in coolant storage tank is delivered in the closing vessel, and the liquid refrigerants storage tank passes through the 4th pipeline and institute
Closing vessel is stated to be connected for the liquid refrigerants in the closing vessel is recycled to the liquid refrigerants storage tank, it is described
It is respectively arranged with third valve on third pipeline and the 4th pipeline.
Preferably, the process units is that the sources MO isolate and purify device, and the liquid refrigerants storage tank is for holding liquid nitrogen
Liquid nitrogen storage tank.
Other features and advantages of the present invention will be described in detail in subsequent specific embodiment part.
Description of the drawings
Fig. 1 is the refrigerant recovering of the preferred embodiment for the present invention and the structural schematic diagram using system.
Reference sign
1 process units 2 closes vessel
3 gas reservoir, 4 check-valves
5 first valve, 6 vaporizer
7 compressor, 8 purity detecting device
9 second pressure sensor, 10 second flow regulating valve
11 second valve, 12 first flow regulating valve
The 4th valve of 13 first vacuum extractor 14
15 first pressure sensor, 16 liquid refrigerants storage tank
17 third valve, 18 second vacuum extractor
19 the 5th valve, 20 third pressure sensor
21 pressure relief valve, 22 control unit
23 the 4th pressure sensors
P1 first pipe P2 second pipes
The 4th pipelines of P3 third pipelines P4
Specific implementation mode
The specific implementation mode of the present invention is described in detail below in conjunction with attached drawing.It should be understood that this place is retouched
The specific implementation mode stated is merely to illustrate and explain the present invention, and is not intended to restrict the invention.
In the present invention, in the absence of explanation to the contrary, the noun of locality used such as " upper and lower, left and right " typically refers to
Upper and lower, left and right shown in refer to the attached drawing；" inside and outside " refers to inside and outside the profile relative to each component itself.
One aspect of the present invention provides a kind of refrigerant recovering and utilizes system, the refrigerant recovering and include gas using system
Storage tank 3, closing vessel 2 and the process units 1 being arranged in the closing vessel 2, can fill in the closing vessel 2 and be used for
The liquid refrigerants of the cooling process units 1, the gas reservoir 3 be connected with the closing vessel 2 by first pipe P1 with
The vaporizer formed is vaporized by the liquid refrigerants for collecting, the gas reservoir 3 passes through second pipe P2 and the production
Device 1 be connected for the vaporizer collected is filled with the process units 1 and by the material pressure in the process units 1
Go out.
In the above-mentioned technical solutions, as shown in Figure 1, liquid refrigerants, which vaporizes the vaporizer to be formed, can be collected into gas reservoir
It in 3, avoids to environmental effects and the problem of result in waste of resources when vaporizer is discharged into air, and shifts production dress
It, can will be in process units 1 using the vaporizer collected in gas reservoir 3 without additionally introducing vaporizer when setting the material in 1
Material extrude, realize the recycling and utilization for vaporizing the vaporizer to be formed to liquid refrigerants, can reduce into a certain extent
This.
In the specific implementation mode of the technical program, using liquid nitrogen, the process units 1 is the usual liquid refrigerants
The sources MO isolate and purify device.During isolating and purifying, closing the nitrogen formed after the liquid nitrogen vaporization in vessel 2 can be from first
Pipeline P1 is collected into gas reservoir 3, and after the completion of the sources MO isolate and purify, gas can be passed through by isolating and purifying the material in device
Nitrogen in body storage tank 3 extrudes.Herein it is understood that the refrigerant recovering and being not limited to using system specific real for this
Apply isolating and purifying for sources MO in mode, it is other any to utilize the refrigerant recovering and all may be used using the production process of system.Its
In, when process units 1 is to produce the device of unclassified stores, liquid refrigerants is alternatively other liquids or liquid refrigerants
Also the solid matter that can be cooled down, such as solid carbon dioxide etc. be can be replaced.
In order to facilitate automation control, it is preferable that be provided with check-valves 4 and/or the first valve on the first pipe P1
5, the refrigerant recovering and using system include with it is described closing vessel 2 connect for detect it is described close vessel 2 in pressure
The first pressure sensor 15 of power and with the first pressure sensor 15, the check-valves 4 and/or first valve 5
Connected control unit 22, described control unit 22 are configured to the envelope detected according to the first pressure sensor 15
The pressure closed in vessel 2 controls the check-valves 4 and first valve 5.Specifically, when process units 1 works, filling exists
The liquid refrigerants (such as liquid nitrogen) for cooling down process units 1 in closing vessel 2 can constantly be vaporized into vaporizer (example because heated
Such as nitrogen), the concentration of vaporizer is relatively low when due to just starting can first be not turned on check-valves 4 and/or the first valve 5, work as vaporizer
Yield gradually increase after, close vessel 2 in pressure increase therewith, first pressure sensor 15 senses closing vessel at this time
After pressure in 2 can feed back to control unit 22 when reaching setting value (such as 0.2 megapascal), non-return is opened in the control of control unit 22
Valve 4 and the first valve 5, so that vaporizer is collected into gas reservoir 3.
And preferably, the flow direction along the vaporizer in the first pipe P1 the first pipe P1 according to
It is secondary to be provided with vaporizer 6 and compressor 7, wherein vaporizer 6 can enable the vaporizer in first pipe P1 further vaporize,
And compressor 7 can compress vaporizer to enable gas reservoir 3 to accommodate more vaporizer.In addition, in order to when needed
Can make the vaporizer in gas reservoir 3 enter process units 1 with by process units 1 material extrude, the second pipe
The second valve 11 and/or first flow regulating valve 12 are provided on P2.
Due to the vaporizer in gas reservoir 3 can be filled with process units 1 with by process units 1 material extrude, without
It is different with the property of material, material is had an impact when the purity of vaporizer is too low in order to prevent, it is preferable that the refrigerant recovering
With include the purity being connected with the gas reservoir 3 for the vaporizer purity in detection gas storage tank 3 using system
Detection device 8.
And in order to ensure the vaporizer in 8 detection gas storage tank 3 of purity detecting device purity accuracy, preferably
Ground is connected with the second pressure sensor 9 for detecting the pressure in the gas reservoir 3 in the gas reservoir 3, and even
It connects and is provided on the pipeline of the gas reservoir 3 and purity detecting device 8 for being detected according to the second pressure sensor 9
Pressure in the gas reservoir 3 adjusts the second flow for the flow for entering the vaporizer in the purity detecting device 8
Regulating valve 10.Specifically, after vaporizer enters gas reservoir 3, control unit 22 can be according to the numerical value of second pressure sensor 9
By controlling second flow regulating valve 10 so that the flow into the vaporizer in purity detecting device 8 keeps stablizing, to protect
Demonstrate,prove the accuracy of the testing result of purity detecting device 8.
In view of manually be easy to causeing personnel's frostbite and less efficient when filling liquid refrigerant into closing vessel 2, in order to
Can be avoided during adding liquid refrigerants personnel's frostbite and realize automated production, it is preferable that the refrigerant recovering and
Using system include the liquid refrigerants storage tank 16 that can be connected to the closing vessel 2 and be connected with the closing vessel 2 with into
Row vacuumize process and so that the liquid refrigerants in the liquid refrigerants storage tank 16 is delivered in the closing vessel 2 for
First vacuum extractor 13 of the cooling process units 1.As shown in Figure 1, the quantity of the first vacuum extractor 13 can be two,
To accelerate the speed vacuumized to closing vessel 2, or the first vacuum extractor 13 damage wherein when needed
Bad when, another can be worked normally.Also, the first vacuum extractor of connection 13 can be arranged the 4th on the pipeline of closing vessel 2
Valve 14, when need to closing vessel 2 in add liquid refrigerants when, make closing vessel 2 be connected to liquid refrigerants storage tank 16 (such as
Third valve 17 on the third pipeline P3 of the connection liquid refrigerants storage tank 16 being explained below and closing vessel 2 is passed through into control
Unit 22 is opened), the 4th valve 14 is then opened by control unit 22 and controls the first vacuum extractor 13 to closing vessel 2
Vacuumize process is carried out, the pressure closed in vessel 2 is gradually reduced, when the pressure in closing vessel 2 is less than liquid refrigerants storage tank
When pressure in 16, existing pressure difference between vessel 2 and liquid refrigerants storage tank 16, the liquid in liquid refrigerants storage tank 16 are closed
Refrigerant is can transport under the action of the pressure difference to closing vessel 2, to realize automatic liquid feeding state refrigerant.Also, such as Fig. 1 institutes
Show, control unit 22 can coordinate the first pressure sensor 15 presented hereinbefore being connect with the closing vessel 2 to control first
Vacuum extractor 13 carries out vacuum pumping.
Also, after the completion of process units 1 works, the liquid nitrogen refrigerant being filled in closing vessel 2 may be without complete vapour
Change, in order to recycle remaining liquid refrigerants.Preferably, the refrigerant recovering and using system include and the liquid
State coolant storage tank 16 is connected enables the liquid refrigerants in the closing vessel 2 be recycled to institute to carry out vacuumize process
State the second vacuum extractor 18 of liquid refrigerants storage tank 16.As shown in Figure 1, the second vacuum extractor of connection 18 and closing vessel 2
Pipeline on the 5th valve 19 can be set, when need by close vessel 2 in liquid refrigerants be recycled to liquid refrigerants storage tank 16 when,
Make closing vessel 2 be connected to liquid refrigerants storage tank 16 (such as by the connection liquid refrigerants storage tank 16 being explained below and closing hold
Third valve 17 on 4th pipeline P4 of chamber 2 is opened by control unit 22), the 5th valve is then opened by control unit 22
Door 19 simultaneously controls the second vacuum extractor 18 and carries out vacuumize process to liquid refrigerants storage tank 16, the pressure in liquid refrigerants storage tank 16
Power is gradually reduced, and closes existing pressure difference between vessel 2 and liquid refrigerants storage tank 16, and the liquid refrigerants closed in vessel 2 exists
Recyclable to liquid refrigerants storage tank 16 under the action of the pressure difference, to realize automatic recovering liquid refrigerant, avoiding will be remaining
The wasting of resources is impacted and caused to environment when being discharged into air after liquid refrigerants heating vaporization, is reduced into a certain extent
This.
In order to improve the degree of automation control, it is preferable that the refrigerant recovering and include control unit 22 using system,
The closing vessel 2 is connected with first pressure sensor 15, and the liquid refrigerants storage tank 16 is connected with third pressure sensor 20,
The first pressure sensor 15, the third pressure sensor 20, first vacuum extractor 13 and described second are taken out true
Empty device 18 is connected with described control unit 22, and described control unit 22 is configured to according to the first pressure sensor 15
In the liquid refrigerants storage tank 16 that pressure and the third pressure sensor 20 in the closing vessel 2 of feedback are fed back
Pressure controls the first vacuum extractor 13 and second vacuum extractor 18.Specifically, when needing from liquid refrigerants storage tank
16, to when closing addition liquid refrigerants in vessel 2 or the liquid refrigerants closed in vessel 2 being recycled to liquid refrigerants storage tank 16, control
The pressure value and need to add that unit 22 processed can respectively be fed back according to first pressure sensor 15 and third pressure sensor 20
Or the gauge of the liquid refrigerants of recycling calculates the time of first vacuum extractor, 13 or second vacuum extractor 18 work, with
Just it realizes precision control, help to reduce energy consumption and saves cost.
In order to control the addition and recycling of liquid refrigerants respectively, it is preferable that the liquid refrigerants storage tank 16 passes through third pipe
Road P3 is connected the liquid refrigerants in the liquid refrigerants storage tank 16 being delivered to the envelope with the closing vessel 2
It closes in vessel 2, the liquid refrigerants storage tank 16 is connected by the 4th pipeline P4 with the closing vessel 2 for by the closing
The liquid refrigerants in vessel 2 is recycled to the liquid refrigerants storage tank 16.In this way in third pipeline P3 and the 4th pipeline P4
One go wrong after, can by another in third pipeline P3 and the 4th pipeline P4 carry out liquid refrigerants addition and return
It receives, does not interfere with normal work.Certainly, hold from liquid refrigerants storage tank 16 to closing 2 filling liquid refrigerant of vessel and by closing
Liquid refrigerants in chamber 2 is recycled to liquid refrigerants storage tank 16 and identical pipeline, i.e. third pipeline P3 and the 4th pipeline can also be used
P4 can only be arranged one.Further, for closing vessel 2 and liquid refrigerants when adding liquid refrigerants into closing vessel 2
By third pipeline P3 connections and the liquid refrigerants closed in vessel 2 can be recycled to liquid refrigerants storage between storage tank 16
Closed when tank 16 can be connected to by the 4th pipeline P4 between vessel 2 and liquid refrigerants storage tank 16 and when needed (such as
When collecting vaporizer into gas reservoir 3) it can keep disconnected state, institute between closing vessel 2 and liquid refrigerants storage tank 16
It states and is respectively arranged with third valve 17 on third pipeline P3 and the 4th pipeline P4.
Preferably, the process units 1 is that the sources MO isolate and purify device, and the liquid refrigerants storage tank 16 is for holding liquid
The liquid nitrogen storage tank of nitrogen.
Wherein, the first valve 5, the second valve 11, third valve 17, the 4th valve 14 and the 5th valve 19 can be electromagnetism gas
Movable valve and can be connect with control unit 22 with facilitate control unit 22 control.In addition, liquid refrigerants storage tank 16 and gas reservoir 3
On pressure relief valve 21 can be set, pressure relief valve 21 can be also connect with control unit 22 to facilitate control unit 22 to control.In liquid
When pressure in coolant storage tank 16 and gas reservoir 3 is more than setting value (such as 4.5 megapascal), pressure relief valve 21 being capable of automatic leakage
Pressure, to improve the safe application performance of equipment, reduces the risk of damage personnel.
With reference to figure 1, the refrigerant recovering of the preferred embodiment for the present invention and it is broadly divided into the following four stage using system：
(1) first stage：The addition liquid nitrogen (i.e. liquid refrigerants) into closing vessel 2
Before process units 1 (such as MO isolates and purifies device) operation, in advance by control unit 22 (such as DCS system)
It opens the third valve 17 and the 4th valve 14 on third pipeline P3 and the first vacuum extractor is controlled by control unit 22
13 pairs of closing vessels 2 carry out vacuumize process, and the pressure in closing vessel 2 is made to be gradually reduced, when the pressure in closing vessel 2 is small
When pressure in liquid refrigerants storage tank 16, there are pressure difference, liquid refrigerants storage tanks in liquid refrigerants storage tank 16 and closing vessel 2
Liquid nitrogen in 16 can transport by third pipeline P3 in closing vessel 2 under the action of the pressure difference, to complete to closing
The 4th valve 14, the first vacuum extractor 13 and third are closed in the operation of addition liquid nitrogen in vessel 2, the then control of control unit 22
Third valve 17 on pipeline P3.
(2) second stage：The nitrogen (i.e. vaporizer) formed by liquid nitrogen vaporization closed in vessel 2 is collected to gas and is stored up
In tank 3
When process units 1 works, the liquid nitrogen filled in closing vessel 2 can constantly be vaporized into nitrogen because heated, seal
The first pressure sensor 15 closed on vessel 2 senses meeting when the pressure in closing vessel 2 reaches setting value (such as 0.2 megapascal)
Control unit 22 is fed back to, control unit 22 can control 5 (this of check-valves 4 and the first valve opened on first pipe P1 at this time
When the second valve 11 of second pipe P2, the third valve 17 on third valve 17 and the 4th pipeline P4 on third pipeline P3 it is equal
Close), the nitrogen for closing liquid nitrogen vaporization formation in vessel 2 is further vaporized through vaporizer 6 by first pipe P1 and compressor 7
Further enter gas reservoir 3 after compression, being collected to gas by the nitrogen that liquid nitrogen vaporization is formed in vessel 2 will be closed by, which completing, stores up
Operation in tank 3.
(3) phase III：The liquid nitrogen closed in vessel 2 is recycled to liquid refrigerants storage tank 16 (such as liquid nitrogen storage tank)
When process units 1 after reaction, control unit 22 control close check-valves 4, the first valve 5, vaporizer 6, pressure
Contracting machine 7.Close at this time in vessel 2 can also the remaining liquid nitrogen for not being vaporized into nitrogen very much, pass through control unit 22 and open the 4th
Third valve 17 and the 5th valve 19 and the second vacuum extractor 18 of control on pipeline P4 carry out liquid refrigerants storage tank 16
Vacuumize process, the pressure in liquid refrigerants storage tank 16 reduce, when the pressure in liquid refrigerants storage tank 16 is less than in closing vessel 2
Pressure when, there are pressure difference in liquid refrigerants storage tank 16 and closing vessel 2, close the liquid refrigerants in vessel 2 in the pressure
It is recyclable in liquid refrigerants storage tank 16 under the action of difference, to complete the liquid nitrogen closed in vessel 2 being recycled to liquid refrigerants
Then the third valve 17 on the 4th pipeline P4 is closed in the operation of storage tank 16 by control unit 22.
(4) fourth stage：Nitrogen in gas reservoir 3 is filled in process units 1 with by the material pressure in process units
Go out
After 1 end of run of process units, need the material in process units 1 being transported to next work by material pipe
Sequence, wherein the 4th pressure sensor 23 can be set on process units 1, control unit 22 can be first passed through at this time and control second pipe
The second valve 11 on P2 is opened, and then control unit 22 can be adjusted from gas reservoir 3 by first flow regulating valve 12 and is filled with
To the nitrogen flow in process units 1 so that the pressure in the process units 1 of the 4th pressure sensor 23 feedback is maintained at setting
It is worth (such as 1 megapascal), so as to extrude material according to required speed from process units 1.
Wherein, when process units 1 is that the sources MO isolate and purify device, the product after being isolated and purified due to it need to use higher
When the nitrogen protection of purity (such as 99.95%) carries out isolation conveying, therefore the nitrogen in gas reservoir 3 is being filled with production dress
The purity of the nitrogen in 8 detection gas storage tank 3 of purity detecting device can be first passed through by setting before 1, specifically, when nitrogen enters gas
After storage tank 3, so that second flow regulating valve 10 is opened by control unit 22 and make the work of purity detecting device 8 with to nitrogen gas purity
It is detected, pressure passes through second flow regulating valve in the gas reservoir 3 that control unit 22 is detected according to second pressure sensor 9
10 adjust nitrogen flow so as to keep stablizing into the nitrogen flow in purity detecting device 8, are detected according to purity detecting device 8
Nitrogen gas purity, judge whether nitrogen gas purity qualified, such as it is unqualified, control unit 22 will stop all devices work, so as to work
It is overhauled as personnel.If qualified, can carry out above-mentioned nitrogen being filled in process units 1 with by the material in process units 1
The operation of extrusion.
The preferred embodiment of the present invention is described in detail above in association with attached drawing, still, the present invention is not limited thereto.At this
In the range of the technology design of invention, a variety of simple variants, including each particular technique can be carried out to technical scheme of the present invention
Feature is combined in any suitable manner.In order to avoid unnecessary repetition, the present invention is to various combinations of possible ways
No longer separately illustrate.But it should also be regarded as the disclosure of the present invention for these simple variants and combination, belongs to the present invention
Protection domain.
Claims (10)
1. a kind of refrigerant recovering and utilizing system, which is characterized in that the refrigerant recovering and include gas reservoir using system
(3), the process units (1) of closing vessel (2) and setting in the closing vessel (2), the closing vessel (2) is interior to fill out
The liquid refrigerants for cooling down the process units (1) is filled, the gas reservoir (3) passes through first pipe (P1) and the closing
Vessel (2) is connected vaporizes the vaporizer formed for collecting by the liquid refrigerants, and the gas reservoir (3) passes through the second pipe
Road (P2) be connected with the process units (1) for the vaporizer collected is filled with the process units (1) and by institute
The material stated in process units (1) extrudes.
2. refrigerant recovering according to claim 1 and utilize system, which is characterized in that be arranged on the first pipe (P1)
Have check-valves (4) and/or the first valve (5), the refrigerant recovering and using system include connect with the closing vessel (2) with
First pressure sensor (15) for detecting the pressure in closing vessel (2) and with the first pressure sensor
(15), the control unit (22) that the check-valves (4) and/or first valve (5) are connected, described control unit (22) setting
For the check-valves can be controlled according to the pressure in the closing vessel (2) that the first pressure sensor (15) detects
(4) and/or first valve (5).
3. refrigerant recovering according to claim 1 and utilize system, it is characterised in that：
It is disposed in the first pipe (P1) along flow direction of the vaporizer in the first pipe (P1)
Vaporizer (6) and compressor (7)；And/or
The second valve (11) and/or first flow regulating valve (12) are provided on the second pipe (P2).
4. refrigerant recovering according to claim 1 and utilize system, which is characterized in that the refrigerant recovering and utilize system
It include the purity detecting dress being connected with the gas reservoir (3) for the vaporizer purity in detection gas storage tank (3)
It sets (8).
5. refrigerant recovering according to claim 4 and utilize system, which is characterized in that connected on the gas reservoir (3)
It is useful for detecting the second pressure sensor (9) of the pressure in the gas reservoir (3), and is connecting the gas reservoir (3)
With the gas for being detected according to the second pressure sensor (9) is provided on the pipeline of the purity detecting device (8)
Pressure in body storage tank (3) adjusts the second flow tune for the flow for entering the vaporizer in the purity detecting device (8)
Save valve (10).
6. refrigerant recovering according to claim 1 and utilize system, which is characterized in that the refrigerant recovering and utilize system
It is connected to carry out including the liquid refrigerants storage tank (16) that can be connected to the closing vessel (2) and with the closing vessel (2)
Vacuumize process and so that the liquid refrigerants in the liquid refrigerants storage tank (16) is delivered in the closing vessel (2)
For the first vacuum extractor (13) of the cooling process units (1).
7. refrigerant recovering according to claim 6 and utilizing system, which is characterized in that refrigerant vaporizer recycling and profit
Include being connected with the liquid refrigerants storage tank (16) to carry out vacuumize process and making the institute in the closing vessel (2) with system
The second vacuum extractor (18) of the liquid refrigerants storage tank (16) can be recycled to by stating liquid refrigerants.
8. refrigerant recovering according to claim 7 and utilize system, which is characterized in that the refrigerant recovering and utilize system
Including control unit (22), the closing vessel (2) is connected with first pressure sensor (15), the liquid refrigerants storage tank (16)
It is connected with third pressure sensor (20), the first pressure sensor (15), the third pressure sensor (20), described
One vacuum extractor (13) and second vacuum extractor (18) are connected with described control unit (22), described control unit
(22) pressure being configured in the closing vessel (2) fed back according to the first pressure sensor (15) and described
Three pressure sensors (20) feedback the liquid refrigerants storage tank (16) in pressure come control the first vacuum extractor (13) and
Second vacuum extractor (18).
9. refrigerant recovering according to claim 7 and utilizing system, which is characterized in that the liquid refrigerants storage tank (16) is logical
Third pipeline (P3) is crossed with the closing vessel (2) to be connected for the liquid in the liquid refrigerants storage tank (16) is cold
Matchmaker is delivered in the closing vessel (2), and the liquid refrigerants storage tank (16) passes through the 4th pipeline (P4) and the closing vessel
(2) it is connected for the liquid refrigerants in the closing vessel (2) is recycled to the liquid refrigerants storage tank (16), it is described
It is respectively arranged with third valve (17) on third pipeline (P3) and the 4th pipeline (P4).
10. refrigerant recovering according to any one of claim 1-9 and utilizing system, which is characterized in that the production fills
It is that the sources MO isolate and purify device to set (1), and the liquid refrigerants storage tank (16) is the liquid nitrogen storage tank for holding liquid nitrogen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810516853.9A CN108386710B (en) | 2018-05-25 | 2018-05-25 | Refrigerant recycling and utilizing system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810516853.9A CN108386710B (en) | 2018-05-25 | 2018-05-25 | Refrigerant recycling and utilizing system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108386710A true CN108386710A (en) | 2018-08-10 |
| CN108386710B CN108386710B (en) | 2023-08-01 |
Family
ID=63072063
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810516853.9A Active CN108386710B (en) | 2018-05-25 | 2018-05-25 | Refrigerant recycling and utilizing system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108386710B (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1150240A (en) * | 1995-07-17 | 1997-05-21 | 缔酸株式会社 | Gas recovery unit |
| CN102951684A (en) * | 2012-11-26 | 2013-03-06 | 厦门钨业股份有限公司 | Preparation method for tungsten hexafluoride gas |
| CN103105027A (en) * | 2013-02-20 | 2013-05-15 | 中国科学院理化技术研究所 | Cryogenic treatment equipment with cold energy recovery device |
| CN203150595U (en) * | 2012-11-09 | 2013-08-21 | 吴纳新 | Tail gas treatment, recovery and recycling apparatus of MOCVD grown gallium nitride wafer |
| US20140322124A1 (en) * | 2013-04-26 | 2014-10-30 | Japan Pionics Co., Ltd. | Method of processing discharge gas discharged from production process of gallium nitride compound semiconductor |
| EP2876674A1 (en) * | 2013-11-25 | 2015-05-27 | Roth & Rau AG | Apparatus for the recovery of inert gas from lock chambers |
| CN104973629A (en) * | 2015-06-25 | 2015-10-14 | 厦门钨业股份有限公司 | Purification method of tungsten hexafluoride gas |
| CN205035309U (en) * | 2015-09-28 | 2016-02-17 | 江西佳因光电材料有限公司 | Trimethyl -gallium tail gas processing apparatus and preparation system |
| CN205616575U (en) * | 2016-04-21 | 2016-10-05 | 江西省金锂科技股份有限公司 | Lithium iron phosphate material finished product is nitrogen gas recovery system of recycling for drying |
-
2018
- 2018-05-25 CN CN201810516853.9A patent/CN108386710B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1150240A (en) * | 1995-07-17 | 1997-05-21 | 缔酸株式会社 | Gas recovery unit |
| CN203150595U (en) * | 2012-11-09 | 2013-08-21 | 吴纳新 | Tail gas treatment, recovery and recycling apparatus of MOCVD grown gallium nitride wafer |
| CN102951684A (en) * | 2012-11-26 | 2013-03-06 | 厦门钨业股份有限公司 | Preparation method for tungsten hexafluoride gas |
| CN103105027A (en) * | 2013-02-20 | 2013-05-15 | 中国科学院理化技术研究所 | Cryogenic treatment equipment with cold energy recovery device |
| US20140322124A1 (en) * | 2013-04-26 | 2014-10-30 | Japan Pionics Co., Ltd. | Method of processing discharge gas discharged from production process of gallium nitride compound semiconductor |
| EP2876674A1 (en) * | 2013-11-25 | 2015-05-27 | Roth & Rau AG | Apparatus for the recovery of inert gas from lock chambers |
| CN104973629A (en) * | 2015-06-25 | 2015-10-14 | 厦门钨业股份有限公司 | Purification method of tungsten hexafluoride gas |
| CN205035309U (en) * | 2015-09-28 | 2016-02-17 | 江西佳因光电材料有限公司 | Trimethyl -gallium tail gas processing apparatus and preparation system |
| CN205616575U (en) * | 2016-04-21 | 2016-10-05 | 江西省金锂科技股份有限公司 | Lithium iron phosphate material finished product is nitrogen gas recovery system of recycling for drying |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108386710B (en) | 2023-08-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102698451A (en) | Heat pump type low-temperature evaporating device and method | |
| CN107575731B (en) | Automatic filling system for producing high-purity tungsten hexafluoride and application method thereof | |
| CN209934121U (en) | Volatile substance condensation and recovery device capable of defrosting by utilizing self heat of gas and continuously operating | |
| CN103663384A (en) | Method for separating mixed gas of oxygen and ozone and ozone generating system using method | |
| CN105506309B (en) | A kind of three-stage distillation device and method for alkali metal purification | |
| CN111269200B (en) | Recovery and purification system and method of gas sterilizing agent | |
| CN105179929A (en) | Material filling device and material filling method | |
| CN208751092U (en) | Refrigerant recovery system | |
| CN104110574A (en) | Cryogenic gas condensing and recycling system and method | |
| CN208566173U (en) | Refrigerant recovering and utilize system | |
| CN108386710A (en) | Refrigerant recovering and utilize system | |
| CN205035461U (en) | Residual material recovery unit | |
| CN201297491Y (en) | Argon recovery and purification device | |
| CN204852919U (en) | A BOG condensate recovery system for LNG gas station | |
| CN207349787U (en) | A kind of automatic filling system for high-purity tungsten hexafluoride production | |
| CN107120525A (en) | A kind of liquid argon volatilization condensate recycling device and its argon gas condensation recycling method | |
| CN101430046A (en) | Liquid gas supply device and method | |
| CN202030538U (en) | Integrated system for vaporizing and purifying industrial liquid ammonia | |
| CN106166397A (en) | A kind of raw material evaporation concentration device | |
| CN208652131U (en) | A kind of germane fills air distribution system | |
| CN109107204B (en) | System and method capable of improving concentration degree of mechanical vapor recompression system | |
| CN102109090A (en) | Method for conveying high-flow high-purity liquefied gas | |
| EP2568243B1 (en) | Vapour phase drying apparatus | |
| CN206206997U (en) | Vehicular liquefied natural air-box type differential pressure filling apparatus | |
| CN105135211A (en) | BOG condensation recycling system and method for LNG station |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |