CN102109090A - Method for conveying high-flow high-purity liquefied gas - Google Patents
Method for conveying high-flow high-purity liquefied gas Download PDFInfo
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- CN102109090A CN102109090A CN2010105961492A CN201010596149A CN102109090A CN 102109090 A CN102109090 A CN 102109090A CN 2010105961492 A CN2010105961492 A CN 2010105961492A CN 201010596149 A CN201010596149 A CN 201010596149A CN 102109090 A CN102109090 A CN 102109090A
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Abstract
The invention discloses a method for conveying high-flow high-purity liquefied gas. In the invention, a liquefied gas storage module, a supercharged module, a liquefied gas conveying pipeline, an evaporator and a pressure regulating module. The method comprises the following steps: educing the liquefied gas from the liquefied gas storage module, so that the liquefied gas enters the supercharged module; knocking the liquefied gas by the supercharged module, and conveying the liquefied gas into the evaporator through the liquefied gas conveying pipeline; vaporizing and heating the liquefied gas in the evaporator; and conveying the heated liquefied gas to a required machine bench when the heated liquefied gas passes through the pressure regulating module and the pressure of the liquefied gas is reduced to the technology requirement. According to the method for conveying high-flow high-purity liquefied gas provided by the invention, the liquefied gas is knocked out by the supercharged module, the liquefied gas is conveyed to the evaporator through the liquefied gas conveying pipeline, the liquefied gas is gasified and heated out of the liquefied gas storage module by adopting the evaporator, the direct heating of the liquefied gas storage module and the long-distance liquid conveying are avoided, and the gas conveying requirements of high purity and large flow rate are satisfied.
Description
Technical field
The present invention relates to a kind of delivery method of liquid gas, relate in particular to a kind of delivery method of big flow high-purity fluid oxidizing gases.
Background technique
The high-purity fluid oxidizing gases normally is stored in the liquified compressed gas of steel cylinder, is semicon industry important material gas, as liquefied ammonia, liquid chlorine etc.Often have excitant, characteristic such as flammable, its purity is generally greater than 99.999%.The conveying of the big flow of high-purity fluid oxidizing gases (more than 100 liters/minute) typically refers in large special gas supply system (BSGS), the occasion that adopts big packaging container such as Y-steel cylinder, T-steel cylinder and ISO tank car to carry.It is widely used in 8 " above solar cell slice production, the light emitting diode MOCVD epitaxial wafer of above VLSI chip production, 100MW produce and 5 generations industry such as above production of liquid crystal displays.
Conventional mode of movement is by heating fluid oxidizing gases steel cylinder, and the high-purity fluid oxidizing gases is in the inner evaporation of steel cylinder.Steam goes out steel cylinder through pressure regulation, delivers to inside, workshop.Because of being subjected to the restriction of steel cylinder heating-up temperature (＜52 ℃) and heating area, in this case, the temperature distribution of steel cylinder is usually very inhomogeneous, is easy to cause steel cylinder overheated and cause easy thrombolysis to start, thereby causes the leakage of high-purity fluid oxidizing gases.In addition this kind heat transfer efficiency usually＜40%, the steel cylinder residual capacity is more, and 5%-10% is arranged usually.According to the fire codes requirement, high-purity fluid oxidizing gases station is far away apart from manufacturing shop usually, need to use 1 " or the conveying gas of the pipe long-distance of above big caliber, also need pipeline is heated, prevent high-purity gas liquefaction.This delivery method pipeline buying, maintenance cost height, poor operability can't satisfy the requirement of high-purity fluid oxidizing gases, big flow.
Large high-purity fluid oxidizing gases air supply system can fully satisfy big traffic demand, reduces the purchasing of raw materials and field maintenance cost, reduces gas transportation facilities quantity and gross investment, largely reduces container and changes number of times, and promote operating security, reduces possibility of pollution.But large high-purity fluid oxidizing gases supply also faces certain challenge simultaneously, usually place outdoor as large source of the gas, need to consider that temperature, humidity change the influence to flow, quality and stability, need overcome the influence of Joule-Thomson effect, system reliability and Security are all had higher requirement system.
Summary of the invention
Technical problem to be solved by this invention provides a kind of delivery method of big flow high-purity fluid oxidizing gases, realizes the delivery requirements of big flow high-purity fluid oxidizing gases, and guarantees its Security and operability.
The present invention solves the problems of the technologies described above the delivery method that the technological scheme that adopts provides a kind of big flow high-purity fluid oxidizing gases, comprise liquid gas storage module, supercharging module, liquid gas conveyance conduit, vaporizer and voltage regulating module, wherein, described method in turn includes the following steps: draw liquid gas from the liquid gas storage module, make it enter the supercharging module; Get liquid gas by the supercharging module, and be transported to vaporizer by the liquid gas conveyance conduit; In vaporizer, liquified gas vaporization is heated; Overheated liquid gas after the heating is through voltage regulating module, is delivered to required board after making its pressure be reduced to process requirements.
The delivery method of above-mentioned big flow high-purity fluid oxidizing gases, wherein, described liquid gas storage module is steel cylinder, storage tank or tank car.
The delivery method of above-mentioned big flow high-purity fluid oxidizing gases, wherein, described supercharging module adopts the supercharging of liquid pump mode of movement, perhaps adopts the self-supercharging device with heating function, by the heating supercharging liquid gas is exported.
The delivery method of above-mentioned big flow high-purity fluid oxidizing gases, wherein, described liquid gas conveyance conduit is 1/4 " or 3/8 " small-caliber pipeline.
The delivery method of above-mentioned big flow high-purity fluid oxidizing gases, wherein, described vaporizer is the pressurized container that disposes heating equipment, temperature controlling device, safety valve, described pressurized container bottom is provided with the residual liquid discharge mouth.
The delivery method of above-mentioned big flow high-purity fluid oxidizing gases, wherein, described voltage regulating module is the pressure regulator valve group, perhaps has the damping device of voltage regulation function.
The delivery method of above-mentioned big flow high-purity fluid oxidizing gases wherein, uses switching purging module that the liquid gas pipeline is purged before the liquid gas storage module is drawn liquid gas.
The delivery method of above-mentioned big flow high-purity fluid oxidizing gases, wherein, described switching purges module and adopts electronic scale automatic switchover steel cylinder, adopts the venturi vacuum generator to finish the purging of changing the steel cylinder front and back.
The delivery method of above-mentioned big flow high-purity fluid oxidizing gases, wherein, described liquid gas storage module, supercharging module, liquid gas conveyance conduit, vaporizer and voltage regulating module all adopt stainless steel 316L material, through electropolishing, adopt welding automatically or metal covering sealing means to link to each other.
The present invention contrasts prior art following beneficial effect: the delivery method of big flow high-purity fluid oxidizing gases provided by the invention, the liquid gas of getting by the supercharging module, be transported to vaporizer by the liquid gas conveyance conduit, adopt vaporizer outside the liquid gas storage module, liquified gas vaporization to be heated, avoid direct heating fluid oxidizing gases storage module, and saved the gas delivery of long distance, and corresponding tracing system cost.Whole system is followed the essential safety designing requirement, makes the high-purity fluid oxidizing gases in the steel cylinder external evaporation, fully satisfies the delivery requirements of big flow high-purity fluid oxidizing gases, and guarantees its Security and operability.
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Description of drawings
Fig. 1 is the delivery method schematic representation of the big flow high-purity fluid of the present invention oxidizing gases.
Among the figure:
1 liquid gas storage module 2 switches purging module 3 supercharging modules
4 liquid gas conveyance conduits, 5 vaporizers, 6 voltage regulating modules
Embodiment
The invention will be further described below in conjunction with drawings and Examples.
Fig. 1 is the delivery method schematic representation of the big flow high-purity fluid of the present invention oxidizing gases.
See also Fig. 1, the delivery method of big flow high-purity fluid oxidizing gases provided by the invention, comprise liquid gas storage module 1, supercharging module 3, liquid gas conveyance conduit 4, vaporizer 5 and voltage regulating module 6, wherein, described method in turn includes the following steps: draw liquid gas from liquid gas storage module 1, make it enter supercharging module 3; Get liquid gas by supercharging module 3, and be transported to vaporizer 5 by liquid gas conveyance conduit 4; The heating fluid oxidizing gases makes its vaporization in vaporizer 5; Overheated liquid gas after the heating is through voltage regulating module 6, is delivered to required board after making its pressure be reduced to process requirements.
Above-mentioned liquid gas storage module 1, supercharging module 3, liquid gas conveyance conduit 4, vaporizer 5 and voltage regulating module 6 all adopt stainless steel 316L material, through electropolishing, adopt welding automatically or metal covering sealing means (VCR) to link to each other.Liquid gas storage module 1 is steel cylinder, storage tank or tank car; Supercharging module 3 adopts the supercharging of liquid pump mode of movement, perhaps adopts the self-supercharging device with heating function, by the heating supercharging liquid gas is exported; Vaporizer 5 is for disposing the pressurized container of heating equipment, temperature controlling device, safety valve, and described pressurized container bottom is provided with the residual liquid discharge mouth; Voltage regulating module 6 is the pressure regulator valve group, perhaps has the damping device of voltage regulation function, as knock out drum.
In order to satisfy the electron trade process requirements, change before and after the steel cylinder, system uses switching to purge 2 pairs of liquid gas pipelines of module earlier and purges.Switch purging module 2 and comprise automatic switchover system and purge system two-part, automatic switchover system is mainly realized by electronic scale, can reduce by the excessive steel cylinder temperature and pressure that causes of the amount of avoiding evaporating.Purge nitrogen by the venturi vacuum generator,, both prevented systemic contamination, avoid personnel to come to harm again to finish the purging of changing the steel cylinder front and back.After purging was finished, liquid gas was drawn by liquid gas storage module 1 by system, made it enter supercharging module 3, adopted the supercharging of liquid pump mode of movement, to avoid heating container; The liquid gas of being got by supercharging module 3 enters vaporizer 5 in the workshop to finish vaporescence by liquid gas conveyance conduit 4.This method in the steel cylinder external evaporation can be avoided the overheated leakage that causes of steel cylinder, and avoid long apart from conveying gas, and corresponding tracing system cost.Vaporizer 5 disposes safety valve, and has heating-up temperature height (100 ℃), the advantage that heat transfer efficiency is high according to design of pressure vessels; Simultaneously, vaporizer 5 possesses the distillation function, can regularly get rid of bottom liquid phases impurity, guarantees high-purity fluid oxidizing gases purity; The saturated solution oxidizing gases of vaporizer 5 outlets is heated to overheated liquid gas by vaporizer 5, and this process can prevent the high-purity gas liquefaction that Joule-Thomson effect causes, the parts damages that preventing effectively lowers the temperature causes.Overheated liquid gas after the heating makes its pressure be reduced to process requirements through voltage regulating module 6, has guaranteed under stable discharge pressure liquid gas is delivered to required board.
In addition, vaporizer 5 is placed in the workshop, and liquid gas is got by supercharging module 3 in the liquid gas station, and by liquid gas conveyance conduit 4 liquid gas is transported to the workshop and vaporizes.With feed flow is that 2000 liters/minute ammonia is an example, apart from 100m, under the situation of uniform pressure loss 0.3bar, adopts gaseous state to carry, and needs 1 " pipeline of diameter, and pipeline need accompany heat to more than 20 ℃.And adopt the liquefied ammonia line transportation, only need 1/4 " (1/4 inch=0.8333 centimetre) or 3/8 " pipeline of (1.25 centimetres) diameter, and do not need companion's heat.Both did like this and can reduce pipe diameter greatly, and do not need again pipeline is heated, saved construction investment.Whole system guarantees that by omnidistance control of programmable controller and supervision the safety and stability of whole system is implemented.
Liquid gas external heat reaction velocity is fast, steel cylinder residual volume few (being less than 2%), efficiency of heating surface height (electrothermal efficiency is more than 95%).A whole set of big flow high-purity fluid oxidizing gases transporting system has not only fully satisfied big traffic demand, reduce simultaneously purchasing of raw materials cost per unit greatly, reduce gas transportation facilities quantity and gross investment, reduce container and change number of times, promote operating security, reduce possibility of pollution, and reduce container and change the quality fluctuation that produces, guaranteed 1000 liters/minute of big flows (〉) security and stability of liquid gas in course of conveying, improved operability.
Though the present invention discloses as above with preferred embodiment; right its is not in order to qualification the present invention, any those skilled in the art, without departing from the spirit and scope of the present invention; when can doing a little modification and perfect, so protection scope of the present invention is when with being as the criterion that claims were defined.
Claims (9)
1. the delivery method of one kind big flow high-purity fluid oxidizing gases, comprise liquid gas storage module (1), supercharging module (3), liquid gas conveyance conduit (4), vaporizer (5) and voltage regulating module (6), it is characterized in that described method in turn includes the following steps:
Draw liquid gas from liquid gas storage module (1), make it enter supercharging module (3);
Get liquid gas by supercharging module (3), and be transported to vaporizer (5) by liquid gas conveyance conduit (4);
In vaporizer (5), liquified gas vaporization is heated;
Overheated liquid gas after the heating is through voltage regulating module (6), is delivered to required board after making its pressure be reduced to process requirements.
2. the delivery method of big flow high-purity fluid oxidizing gases as claimed in claim 1 is characterized in that, described liquid gas storage module (1) is steel cylinder, storage tank or tank car.
3. the delivery method of big flow high-purity fluid oxidizing gases as claimed in claim 1, it is characterized in that, described supercharging module (3) adopts the supercharging of liquid pump mode of movement, perhaps adopts the self-supercharging device with heating function, by the heating supercharging liquid gas is exported.
4. the delivery method of big flow high-purity fluid oxidizing gases as claimed in claim 1 is characterized in that, described liquid gas conveyance conduit (4) is 1/4 " or 3/8 " small-caliber pipeline.
5. the delivery method of big flow high-purity fluid oxidizing gases as claimed in claim 1 is characterized in that, described vaporizer (5) is for disposing the pressurized container of heating equipment, temperature controlling device, safety valve, and described pressurized container bottom is provided with the residual liquid discharge mouth.
6. the delivery method of big flow high-purity fluid oxidizing gases as claimed in claim 1 is characterized in that, described voltage regulating module (6) is the pressure regulator valve group, perhaps has the damping device of voltage regulation function.
7. the delivery method of big flow high-purity fluid oxidizing gases as claimed in claim 1 is characterized in that, uses switching purging module (2) that the liquid gas pipeline is purged before liquid gas storage module (1) is drawn liquid gas.
8. the delivery method of big flow high-purity fluid oxidizing gases as claimed in claim 6 is characterized in that, described switching purges module (2) and adopts electronic scale automatic switchover steel cylinder, adopts the venturi vacuum generator to finish the purging of changing the steel cylinder front and back.
9. as the delivery method of each described big flow high-purity fluid oxidizing gases of claim 1～7, it is characterized in that, described liquid gas storage module (1), supercharging module (3), liquid gas conveyance conduit (4), evaporation mold device (5) and voltage regulating module (6) all adopt stainless steel 316L material, through electropolishing, adopt welding automatically or metal covering sealing means to link to each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105961492A CN102109090A (en) | 2010-12-20 | 2010-12-20 | Method for conveying high-flow high-purity liquefied gas |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2010105961492A CN102109090A (en) | 2010-12-20 | 2010-12-20 | Method for conveying high-flow high-purity liquefied gas |
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| CN102109090A true CN102109090A (en) | 2011-06-29 |
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| CN2010105961492A Pending CN102109090A (en) | 2010-12-20 | 2010-12-20 | Method for conveying high-flow high-purity liquefied gas |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102588740A (en) * | 2012-02-17 | 2012-07-18 | 北京航空航天大学 | High-pressure and high-purity nitrogen distribution device for plume test platform and application method for device |
| CN110792925A (en) * | 2019-11-15 | 2020-02-14 | 辽宁忠旺集团有限公司 | Self-pressurization gas supply system and gas supply method |
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| CN2294370Y (en) * | 1997-01-08 | 1998-10-14 | 李深福 | Energy-saving steel cylinder for LPG |
| CN2630666Y (en) * | 2003-06-10 | 2004-08-04 | 河南中原绿能高科有限责任公司 | Prizing liquefied natural gas vaporizing apparatus |
| US20050188841A1 (en) * | 2004-02-26 | 2005-09-01 | Rashid Khan | Enhanced hydrogen recovery for hydroprocessing units |
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2010
- 2010-12-20 CN CN2010105961492A patent/CN102109090A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN2279535Y (en) * | 1996-11-09 | 1998-04-22 | 钟荣飞 | High-combustion energy-saving light oil type fuel range carburettor |
| CN2294370Y (en) * | 1997-01-08 | 1998-10-14 | 李深福 | Energy-saving steel cylinder for LPG |
| CN2630666Y (en) * | 2003-06-10 | 2004-08-04 | 河南中原绿能高科有限责任公司 | Prizing liquefied natural gas vaporizing apparatus |
| US20050188841A1 (en) * | 2004-02-26 | 2005-09-01 | Rashid Khan | Enhanced hydrogen recovery for hydroprocessing units |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102588740A (en) * | 2012-02-17 | 2012-07-18 | 北京航空航天大学 | High-pressure and high-purity nitrogen distribution device for plume test platform and application method for device |
| CN102588740B (en) * | 2012-02-17 | 2013-11-27 | 北京航空航天大学 | High-pressure and high-purity nitrogen distribution device for plume test platform and application method for device |
| CN110792925A (en) * | 2019-11-15 | 2020-02-14 | 辽宁忠旺集团有限公司 | Self-pressurization gas supply system and gas supply method |
| CN110792925B (en) * | 2019-11-15 | 2022-01-28 | 辽宁忠旺集团有限公司 | Self-pressurization gas supply system and gas supply method |
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Application publication date: 20110629 |