EP0751972A4 - Oberflächenbehandlung von polymeren mittels korpuskularstrahlpulsen - Google Patents

Oberflächenbehandlung von polymeren mittels korpuskularstrahlpulsen

Info

Publication number
EP0751972A4
EP0751972A4 EP96910295A EP96910295A EP0751972A4 EP 0751972 A4 EP0751972 A4 EP 0751972A4 EP 96910295 A EP96910295 A EP 96910295A EP 96910295 A EP96910295 A EP 96910295A EP 0751972 A4 EP0751972 A4 EP 0751972A4
Authority
EP
European Patent Office
Prior art keywords
surface treatment
particle beams
polymer surface
pulsed particle
pulsed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP96910295A
Other languages
English (en)
French (fr)
Other versions
EP0751972A1 (de
Inventor
Regan W Stinnett
J Pace Vandevender
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Technology and Engineering Solutions of Sandia LLC
Original Assignee
Sandia Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sandia Corp filed Critical Sandia Corp
Publication of EP0751972A1 publication Critical patent/EP0751972A1/de
Publication of EP0751972A4 publication Critical patent/EP0751972A4/de
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/12—Chemical modification
    • C08J7/123—Treatment by wave energy or particle radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/16—Surface shaping of articles, e.g. embossing; Apparatus therefor by wave energy or particle radiation, e.g. infrared heating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/14—Other arc discharge ion sources using an applied magnetic field
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0866—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using particle radiation
    • B29C2035/0872—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using particle radiation using ion-radiation, e.g. alpha-rays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/31—Processing objects on a macro-scale
    • H01J2237/3165—Changing chemical properties
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/31701—Ion implantation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Analytical Chemistry (AREA)
  • Toxicology (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
EP96910295A 1995-01-23 1996-01-23 Oberflächenbehandlung von polymeren mittels korpuskularstrahlpulsen Withdrawn EP0751972A4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US37688395A 1995-01-23 1995-01-23
US376883 1995-01-23
PCT/US1996/000872 WO1996023021A1 (en) 1995-01-23 1996-01-23 Polymer surface treatment with pulsed particle beams

Publications (2)

Publication Number Publication Date
EP0751972A1 EP0751972A1 (de) 1997-01-08
EP0751972A4 true EP0751972A4 (de) 1999-06-16

Family

ID=23486889

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96910295A Withdrawn EP0751972A4 (de) 1995-01-23 1996-01-23 Oberflächenbehandlung von polymeren mittels korpuskularstrahlpulsen

Country Status (7)

Country Link
EP (1) EP0751972A4 (de)
JP (1) JPH09511016A (de)
AU (1) AU5352996A (de)
CA (1) CA2186101A1 (de)
IL (1) IL116877A (de)
RU (1) RU2154654C2 (de)
WO (1) WO1996023021A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6074895A (en) 1997-09-23 2000-06-13 International Business Machines Corporation Method of forming a flip chip assembly
KR100378009B1 (ko) * 1997-11-17 2003-06-09 주식회사 엘지화학 다층구조격리막의제조방법
AUPR179500A0 (en) * 2000-11-30 2000-12-21 Saintech Pty Limited Ion source
SI22288A (sl) * 2006-06-06 2007-12-31 Institut "JoĹľef Stefan" Metoda in naprava za selektivno jedkanje kompozitnih materialov z lasersko ablacijo
US7931784B2 (en) 2008-04-30 2011-04-26 Xyleco, Inc. Processing biomass and petroleum containing materials
US9387454B2 (en) 2008-06-18 2016-07-12 Xyleco, Inc. Processing material with ion beams

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4764394A (en) * 1987-01-20 1988-08-16 Wisconsin Alumni Research Foundation Method and apparatus for plasma source ion implantation
EP0502633A2 (de) * 1991-03-07 1992-09-09 Minnesota Mining And Manufacturing Company Oberflächenmodifizierung mittels beschleunigten Plasmas oder Ionen
WO1995014307A1 (en) * 1993-11-16 1995-05-26 Sandia Corporation Methods and apparatus for altering material using ion beams

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA859121A (en) * 1970-12-22 H. Hoskins Raymond Method for inducing chemical reactions with lasers
US4457817A (en) * 1975-05-12 1984-07-03 Forschungs Institut Fur Textiltechnologie Method of treating high-polymer materials
US4822451A (en) * 1988-04-27 1989-04-18 Minnesota Mining And Manufacturing Company Process for the surface modification of semicrystalline polymers
US4902378A (en) * 1988-04-27 1990-02-20 Minnesota Mining And Manufacturing Company Polymer with reduced internal migration
US5250388A (en) * 1988-05-31 1993-10-05 Westinghouse Electric Corp. Production of highly conductive polymers for electronic circuits
US5178726A (en) * 1991-03-07 1993-01-12 Minnesota Mining And Manufacturing Company Process for producing a patterned metal surface
DE69218820T2 (de) * 1991-03-07 1997-10-02 Minnesota Mining & Mfg Polymer mit vernetztem Flächengebiet

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4764394A (en) * 1987-01-20 1988-08-16 Wisconsin Alumni Research Foundation Method and apparatus for plasma source ion implantation
EP0502633A2 (de) * 1991-03-07 1992-09-09 Minnesota Mining And Manufacturing Company Oberflächenmodifizierung mittels beschleunigten Plasmas oder Ionen
WO1995014307A1 (en) * 1993-11-16 1995-05-26 Sandia Corporation Methods and apparatus for altering material using ion beams

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
FEUER T & ALL: "MODIFICATION OF POLYIMIDE SURFACES USING INTENSE PROTON PULSES", JOURNAL OF APPLIED PHYSICS., vol. 74, no. 5, 1 September 1993 (1993-09-01), NEW YORK US, pages 3523 - 3530, XP002060201 *
See also references of WO9623021A1 *

Also Published As

Publication number Publication date
RU2154654C2 (ru) 2000-08-20
IL116877A0 (en) 1996-07-23
CA2186101A1 (en) 1996-08-01
EP0751972A1 (de) 1997-01-08
WO1996023021A1 (en) 1996-08-01
JPH09511016A (ja) 1997-11-04
AU5352996A (en) 1996-08-14
IL116877A (en) 2000-07-26

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