EP0750795A1 - Dispositifs comportant des films minces - Google Patents
Dispositifs comportant des films mincesInfo
- Publication number
- EP0750795A1 EP0750795A1 EP96901090A EP96901090A EP0750795A1 EP 0750795 A1 EP0750795 A1 EP 0750795A1 EP 96901090 A EP96901090 A EP 96901090A EP 96901090 A EP96901090 A EP 96901090A EP 0750795 A1 EP0750795 A1 EP 0750795A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- film according
- thin film
- particles
- tip
- cds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000010409 thin film Substances 0.000 title claims description 14
- 239000002245 particle Substances 0.000 claims abstract description 40
- 230000000694 effects Effects 0.000 claims abstract 2
- 230000001747 exhibiting effect Effects 0.000 claims abstract 2
- 239000010408 film Substances 0.000 claims description 28
- 229910002804 graphite Inorganic materials 0.000 claims description 7
- 239000010439 graphite Substances 0.000 claims description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 5
- 229910052793 cadmium Inorganic materials 0.000 claims description 3
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 239000010937 tungsten Substances 0.000 claims description 2
- 229910001385 heavy metal Inorganic materials 0.000 claims 4
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 claims 2
- 239000004020 conductor Substances 0.000 claims 2
- BMQVRJOWNGSIEG-UHFFFAOYSA-L calcium;icosanoate Chemical compound [Ca+2].CCCCCCCCCCCCCCCCCCCC([O-])=O.CCCCCCCCCCCCCCCCCCCC([O-])=O BMQVRJOWNGSIEG-UHFFFAOYSA-L 0.000 claims 1
- 238000005459 micromachining Methods 0.000 claims 1
- RBHNZROBARWZDN-UHFFFAOYSA-L cadmium(2+);icosanoate Chemical compound [Cd+2].CCCCCCCCCCCCCCCCCCCC([O-])=O.CCCCCCCCCCCCCCCCCCCC([O-])=O RBHNZROBARWZDN-UHFFFAOYSA-L 0.000 abstract description 12
- 229910052751 metal Inorganic materials 0.000 abstract description 3
- 239000002184 metal Substances 0.000 abstract description 3
- 239000008187 granular material Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 9
- 238000005259 measurement Methods 0.000 description 8
- 239000002096 quantum dot Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 235000014113 dietary fatty acids Nutrition 0.000 description 2
- 238000002003 electron diffraction Methods 0.000 description 2
- 229930195729 fatty acid Natural products 0.000 description 2
- 239000000194 fatty acid Substances 0.000 description 2
- VKOBVWXKNCXXDE-UHFFFAOYSA-N icosanoic acid Chemical compound CCCCCCCCCCCCCCCCCCCC(O)=O VKOBVWXKNCXXDE-UHFFFAOYSA-N 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical group [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 238000002835 absorbance Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000002524 electron diffraction data Methods 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- -1 fatty acids salts Chemical class 0.000 description 1
- 125000001183 hydrocarbyl group Chemical group 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/18—Processes for applying liquids or other fluent materials performed by dipping
- B05D1/20—Processes for applying liquids or other fluent materials performed by dipping substances to be applied floating on a fluid
- B05D1/202—Langmuir Blodgett films (LB films)
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/7613—Single electron transistors; Coulomb blockade devices
Abstract
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9500669.8A GB9500669D0 (en) | 1994-02-23 | 1995-01-13 | Thin film devices |
GB9500669 | 1995-01-13 | ||
PCT/IB1996/000106 WO1996021952A1 (fr) | 1995-01-13 | 1996-01-15 | Dispositifs comportant des films minces |
Publications (1)
Publication Number | Publication Date |
---|---|
EP0750795A1 true EP0750795A1 (fr) | 1997-01-02 |
Family
ID=10767996
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP96901090A Withdrawn EP0750795A1 (fr) | 1995-01-13 | 1996-01-15 | Dispositifs comportant des films minces |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0750795A1 (fr) |
AU (1) | AU4495196A (fr) |
WO (1) | WO1996021952A1 (fr) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0865078A1 (fr) * | 1997-03-13 | 1998-09-16 | Hitachi Europe Limited | Méthode de dépÔt de particules nanométriques |
KR100434553B1 (ko) * | 1997-08-27 | 2004-09-18 | 삼성전자주식회사 | 단일전자트랜지스터및그제조방법 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1993010564A1 (fr) * | 1991-11-22 | 1993-05-27 | The Regents Of The University Of California | Nanocristaux semi-conducteurs lies de maniere covalente a des surfaces solides inorganiques, a l'aide de monocouches auto-assemblees |
GB9213423D0 (en) * | 1992-06-24 | 1992-08-05 | Hitachi Europ Ltd | Nanofabricated structures |
-
1996
- 1996-01-15 AU AU44951/96A patent/AU4495196A/en not_active Abandoned
- 1996-01-15 EP EP96901090A patent/EP0750795A1/fr not_active Withdrawn
- 1996-01-15 WO PCT/IB1996/000106 patent/WO1996021952A1/fr not_active Application Discontinuation
Non-Patent Citations (1)
Title |
---|
See references of WO9621952A1 * |
Also Published As
Publication number | Publication date |
---|---|
WO1996021952A1 (fr) | 1996-07-18 |
AU4495196A (en) | 1996-07-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 19961004 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE CH DE DK ES FR GB GR IE IT LI LU MC NL PT SE |
|
RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: NICOLINI, CLAUDIO, INSTITUTE OF BIOPHYSICS Inventor name: FACCI, PAOLO, INSTITUTE OF BIOPHYSICS Inventor name: EROKHIN, VICTOR, INSTITUTE OF BIOPHYSICS |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 19980801 |