EP0711430A4 - Regulateur de flux massique - Google Patents

Regulateur de flux massique

Info

Publication number
EP0711430A4
EP0711430A4 EP19930916478 EP93916478A EP0711430A4 EP 0711430 A4 EP0711430 A4 EP 0711430A4 EP 19930916478 EP19930916478 EP 19930916478 EP 93916478 A EP93916478 A EP 93916478A EP 0711430 A4 EP0711430 A4 EP 0711430A4
Authority
EP
European Patent Office
Prior art keywords
signal
routine
flow
mass flow
tested
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP19930916478
Other languages
German (de)
English (en)
Other versions
EP0711430A1 (fr
Inventor
Michael Dean Upchurch
Richard Lee Donaldson
James H Doyle
Michael J Doyle
Robert Laragione
Kim Ngoc Vu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Unit Instruments Inc
Original Assignee
Unit Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unit Instruments Inc filed Critical Unit Instruments Inc
Publication of EP0711430A4 publication Critical patent/EP0711430A4/fr
Publication of EP0711430A1 publication Critical patent/EP0711430A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
EP93916478A 1992-06-12 1993-06-10 Regulateur de flux massique Withdrawn EP0711430A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US89819592A 1992-06-12 1992-06-12
US898195 1992-06-12
PCT/US1993/005542 WO1993025950A1 (fr) 1992-06-12 1993-06-10 Regulateur de flux massique

Publications (2)

Publication Number Publication Date
EP0711430A4 true EP0711430A4 (fr) 1996-01-04
EP0711430A1 EP0711430A1 (fr) 1996-05-15

Family

ID=25409082

Family Applications (1)

Application Number Title Priority Date Filing Date
EP93916478A Withdrawn EP0711430A1 (fr) 1992-06-12 1993-06-10 Regulateur de flux massique

Country Status (2)

Country Link
EP (1) EP0711430A1 (fr)
WO (1) WO1993025950A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3872776B2 (ja) * 2003-07-16 2007-01-24 東京エレクトロン株式会社 半導体製造装置及び半導体製造方法
FR2864905B1 (fr) 2004-01-09 2006-07-14 Airbus France Dispositif d'extinction de feu
FR2870459B1 (fr) 2004-05-19 2006-08-25 Airbus France Sas Dispositif d'extinction de feu par injection d'un gaz genere par la combustion d'un bloc pyrotechnique
FR2879107B1 (fr) 2004-12-09 2007-04-06 Airbus France Sas Dispositif pour augmenter l'efficacite du gaz de pressurisation dans une bouteille d'extincteur
JP2011500242A (ja) 2007-10-30 2011-01-06 エアバス・オペレーションズ 漏出防止性を強化した流体射出装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03204705A (ja) * 1990-01-08 1991-09-06 Hitachi Metals Ltd マスフローコントローラの制御回路
US5062446A (en) * 1991-01-07 1991-11-05 Sematech, Inc. Intelligent mass flow controller
US5129418A (en) * 1989-11-14 1992-07-14 Stec Inc. Mass flow controller with supplemental condition sensors
WO1992021006A2 (fr) * 1991-05-17 1992-11-26 Unit Instruments, Inc. Procede et appareil de traduction du signal d'un debitmetre massique

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4658855A (en) * 1980-10-03 1987-04-21 Silicon Valley Group Mass flow controller
US4487213A (en) * 1982-09-09 1984-12-11 Omicron Technology Corporation Mass flow controller apparatus
JP2814379B2 (ja) * 1988-06-20 1998-10-22 忠弘 大見 マスフローコントローラ
US4877051A (en) * 1988-11-28 1989-10-31 Mks Instruments, Inc. Flow controller
US5080131A (en) * 1989-09-26 1992-01-14 Lintec Co., Ltd. Mass flow controller
US5100100A (en) * 1990-09-12 1992-03-31 Mks Instruments, Inc. Fluid control and shut off valve
US5141021A (en) * 1991-09-06 1992-08-25 Stec Inc. Mass flow meter and mass flow controller

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5129418A (en) * 1989-11-14 1992-07-14 Stec Inc. Mass flow controller with supplemental condition sensors
JPH03204705A (ja) * 1990-01-08 1991-09-06 Hitachi Metals Ltd マスフローコントローラの制御回路
US5062446A (en) * 1991-01-07 1991-11-05 Sematech, Inc. Intelligent mass flow controller
WO1992021006A2 (fr) * 1991-05-17 1992-11-26 Unit Instruments, Inc. Procede et appareil de traduction du signal d'un debitmetre massique

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 15, no. 477 (P - 1283) 4 December 1991 (1991-12-04) *
See also references of WO9325950A1 *

Also Published As

Publication number Publication date
WO1993025950A1 (fr) 1993-12-23
EP0711430A1 (fr) 1996-05-15

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