EP0706226B1 - Moteurs à ultrasons - Google Patents

Moteurs à ultrasons Download PDF

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Publication number
EP0706226B1
EP0706226B1 EP95115300A EP95115300A EP0706226B1 EP 0706226 B1 EP0706226 B1 EP 0706226B1 EP 95115300 A EP95115300 A EP 95115300A EP 95115300 A EP95115300 A EP 95115300A EP 0706226 B1 EP0706226 B1 EP 0706226B1
Authority
EP
European Patent Office
Prior art keywords
actuator
piezoceramic
ultrasonic motor
bending
torsion spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP95115300A
Other languages
German (de)
English (en)
Other versions
EP0706226A1 (fr
Inventor
Rudolf Dr.-Ing. Heinz
Peter Dr.-Ing. Rehbein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP0706226A1 publication Critical patent/EP0706226A1/fr
Application granted granted Critical
Publication of EP0706226B1 publication Critical patent/EP0706226B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/002—Driving devices, e.g. vibrators using only longitudinal or radial modes
    • H02N2/0025—Driving devices, e.g. vibrators using only longitudinal or radial modes using combined longitudinal modes

Definitions

  • the invention relates to an ultrasonic motor according to the preamble of claim 1.
  • Ultrasonic motors are known as traveling wave motors known.
  • a piezoceramic is used a sinusoidal voltage, due to which the piezoceramic undergoes mechanical deformation.
  • This mechanical deformation is exploited a frictional connection between the deformation transmitting means and a movably mounted Body.
  • rotary movements a rotor of an ultrasonic motor as well Linear movements of an actuator of a linear ultrasonic motor can be generated.
  • An ultrasound motor of the generic type emerges from the EP 155 649 A2, in which two at an angle of 90 ° Piezoceramic elements that interact with one another Set the bending oscillator into an elliptical movement.
  • the Piezoceramic elements protrude with the bending oscillator each elastic transmission element in connection, wherein the transmission element with the bending vibrator each Form bending springs.
  • the transmission elements form one in the polarization direction of one piezoceramic element one stiff and in the polarization direction of the other Piezoceramic elements a soft suspension for the respective piezoceramic element.
  • the elliptical movement Executing bending vibrator drives a rotating one Actuator.
  • the Transmission elements with an additional spring element are connected, the transmission elements each being rigid in the direction of polarization of the piezoceramic elements are trained.
  • DE-OS 33 06 755 is a linear ultrasonic motor known in which by means of piezoceramic elements in one elastic body a traveling wave is generated, the one actuator in linear motion with the body in contact.
  • the disadvantage here is that the above Traveling wave principle is not suitable for linear drives.
  • flexural vibrators preferably several bending oscillators arranged symmetrically to the actuator
  • the drive behavior of the entire ultrasonic motor be reassured.
  • several in a suitable distance from each other with a sinusoidal excitation voltage activated out of phase ensures that the actuator can be driven at any time, even if individual Bending vibrators are currently in their dead center.
  • FIG. 1 shows a schematic sectional view an ultrasound motor, generally designated 10.
  • the ultrasonic motor 10 has a linear movable actuator 12, the power transmission members, not shown can work together.
  • the actuator 12 is clamped between bending oscillators 14. in the The example shown is a total of six bending vibrators 14 arranged, always three Bending vibrator 14 arranged symmetrically opposite are.
  • the invention is limited not on the illustrated embodiment, so are in particular the arrangement of less that is called at least one bending vibrator 14 or also several bending vibrators 14 possible.
  • the actuator 12 can be moved linearly by corresponding bearings stored. Due to the symmetrical structure of the Ultrasonic motor 10 and the same configuration the bending vibrator 14 will be used in the further explanation only one bending oscillator 14 at a time Referenced, it is clear that everyone else Bending vibrator 14 are constructed analogously.
  • the bending vibrators 14 have an approximately cuboid shape Shape and are between the actuator 12 and a holding bridge 16 arranged.
  • the bending vibrator 14 have a friction layer 18 with which this the actuator 12.
  • the friction layer 18 is made for example from a polymer, for example one special lubricating varnish or a special thermoplastic.
  • a first piezoceramic element 20 is arranged between the bending transducers 14 and the holding bridge 16.
  • the piezoceramic element 20 lies with its one End face on the holding bridge 16 and with it other end face on the bending vibrator 14.
  • the Piezoceramic element 20 has one in the direction of Bending vibrator 14 directional polarization.
  • the Holding bridge 16 go in the direction of the drive Actuator 12 from projections 22 whose length so is chosen that this the bending vibrator 14 to about overlap in half.
  • On the projections 22 is a Arranged second piezoceramic element 24, which over a support area 26 and a spiral spring 28 with the bending vibrator 14 is connected.
  • the support area 26 and the spiral spring 28 are preferred integrally formed with the bending vibrator 14.
  • the piezoceramic element 24 has one of the Projection 22 in the direction of the support area 26 directional polarization.
  • the spiral spring 28 is like this dimensioned that they in the polarization direction of Piezoceramic element 24 is rigid and in the direction the polarization of the piezoceramic element 20 soft is hung.
  • the piezoceramic elements 20 and 24 are accordingly arranged to the bending vibrator 14 that the piezoceramic element 20 in the longitudinal direction of the Bending vibrator 14 and the piezoceramic element 24 in Transverse direction to the bending vibrator 14 acts.
  • the Bending vibrator 14 has one in a head region 30 Recess 32, the transverse vibrator to the Polarization direction of the piezoceramic element 24 penetrates.
  • the recess 32 has the bending oscillator 14 in its head region 30 formed as spiral springs 34, extending longitudinally Get on.
  • a spanning the spiral springs 34 Head web 36 also forms a support area for the piezoceramic element 20.
  • the essentially vertical spiral springs 34 have this in the polarization direction of the piezoceramic element 20 a stiffness and are in Polarization direction of the piezoceramic element 24 gently hung.
  • the holding bridge 16 is in accordance with the number of existing bending oscillator 14 with the projections 22 fitted.
  • the holding bridge 16 is over membranes 38 stored on retaining webs 40.
  • the holding bars 40 collar from a functional block 42 of the ultrasonic motor 10 from.
  • the membranes 38 can also be used the holding webs 40 form a coherent unit, that acts like a leaf spring.
  • the ultrasonic motor 10 still does not have here in detail Connection lines shown, with which the piezoceramic elements 20 and 24 to a voltage source, in particular connectable to a sine voltage source are.
  • the ultrasonic motor 10 shown in Figure 1 does the following Function off:
  • the piezoceramic elements 20 and 24 When a sine voltage is applied, the piezoceramic elements 20 and 24 also excited sinusoidally. This excitation occurs in the piezoceramic elements 20 and 24 - in a known manner - to mechanical deformations on the bending vibrator 14 are transmitted.
  • the piezoceramic element 20 directs the flexural vibrator 14 in it Longitudinal direction, that is, towards the Actuator 12 off, while the piezoceramic element 24 den Bending vibrator 14 deflects transversely to its longitudinal direction. By overlaying the two of the Piezoceramic elements 20 and 24 outgoing vibrations this is experienced in the bending oscillator 14 elliptical movement.
  • the amount of eccentricity of the elliptical Movement of the bending vibrator 14 is over the the excitation of the piezoceramic elements 20 and 24 Adjustable tension.
  • the piezoceramic element acts 20 with its mechanical deformation on the Head bridge 36, which makes this movement over the spiral springs 34 transmits to the bending vibrator 14. Because the spiral springs 34 in the longitudinal direction of the bending oscillator 14 or in the polarization direction of the piezoceramic element 20 are stiff, this movement will transferred to the bending vibrator 14.
  • the spiral spring 28 is in the direction of polarization of the piezoceramic element 20 softly hung, so that it is like a swivel joint for the from the piezoceramic element 20 outgoing movement works. That of the piezoceramic element 24 on the other hand, outgoing deformation acts the receiving area 26 on the spiral spring 28, which in Direction of polarization of the piezoceramic element 24 is stiff, so that this movement as a transverse force the bending vibrator 14 is transmitted. For those of the outgoing movement of the piezoceramic element 24 the spiral springs 34 which in the polarization direction of the Piezoceramic element 24 are suspended softly Pivot points.
  • the Piezoceramic elements 20 and 24 outgoing Forces the elliptical movement of the bending vibrator 14 generated.
  • the elliptical movements generating forces can be set.
  • the piezoceramic elements 20 and Piezoceramic elements 24 from separate voltage sources with different frequency and different Voltage level are applied, so that there are other variants of the adjustment of the elliptical Movement of the bending vibrator 14 result.
  • the Bending vibrator 14 itself consist of a good vibratable material, ideally low-contamination Metals (for example copper alloys, Aluminum alloys, spring steels, stainless steel, Silicon, ...), but steel is also possible.
  • the holding bridge 16 is on the membranes 38 on the Support webs 40 are mounted so that the flexural vibrator 14 are biased towards the actuator 12.
  • This pre-tensioning can be done by means of the bending vibrator 14 larger tangential during operation of the ultrasonic motor 10 Frictional forces are transmitted to the actuator 12.
  • This also ensures that in an ultrasonic motor that is not in operation 10 the actuator 12 held by the bending vibrators 14 by being clamped between them.
  • the additional arrangement of bearing elements not necessary to guide the actuator 12.
  • By the mounting of the holding bridge 16 over the membranes 38 is further achieved that in one System located vibration the retaining bridge 16 a natural vibration lying in another frequency range has than the bending vibrator 14.
  • the mass of the holding bridge 16 compared to the mass of the Bending vibrator 14 is relatively large, compliance of these different natural vibrations supported with different natural frequencies.
  • Piezoceramic elements can be arranged on the Actuator 12 synchronizes with the bending vibrators 14 Act. These additional piezoceramic elements can especially when the ultrasonic motor is retired 10 improve the position fixation of the actuator 14.
  • FIG. 2 shows a further design variant the suspension of the bending vibrator 14 between the holding bridge 16 and the actuator 12 shown.
  • the same parts as in Figure 1 are the same Provide reference numerals and not again here explained.
  • Figure 2 is only shown another example with which the bending vibrator 14 in an elliptical movement can be offset, the piezoceramic elements 20 and 24 the bending vibrator 14 each with one apply linear force.
  • the implementation of the linear Allow force to be applied in an elliptical movement are any other suspension of the bending vibrators 14 possible, the implementation of the linear Allow force to be applied in an elliptical movement.
  • the head area 30 of the bending vibrator 14 according to FIG. 2 already has this Bending springs 34 mentioned in FIG. 1, which in Longitudinal direction of the bending vibrator 14 suspended stiffly are.
  • the spiral spring 28 in turn engages the Reason 52 of the incision 54.
  • the incision 54 can be the one shown in FIG rectangular shape or a have a trapezoidal shape or be curved.
  • Of the Base 52 is approximately symmetrical to the spiral springs 34 arranged.
  • FIG 3 shows a schematic cross section by an ultrasonic motor 10 a further embodiment.
  • the actuator 12 to be driven is cut here by a cylindrical body 58 formed.
  • the Gate 60 of the body 58 is placed so that these the friction layers 18 of the flexural vibrator 14 come to lie.
  • actuator 12 preferably at least one but several bending vibrators 14 accordingly the structure shown in Figures 1 and 2.
  • roller bearings 61 arranged below the actuator 12, which are rotatably mounted on an axis of rotation 62 and have a conical incision 64 which for Recording the actuator 12 is used.
  • the actuator 12th corresponding to the direction of the arrow indicated in FIG. 1 44 moves linearly, so that this over the Roller bearing 61 moves.
  • the roller bearings 61 rotate its axis of rotation 62, so that a movable guide for the actuator 12 is given.
  • FIG. 4 is a partial perspective view of the ultrasonic motor 10 shown in Figure 1. Based on the perspective view the structure of the ultrasonic motor 10 clarifies again be, here only a bending vibrator 14 is located. In Figure 5 in particular clearly that the actuator 12 has a cylindrical May have base body 66, the bending vibrator 14 associated nightmares 68. Using the perspective view, too the cuboid shape of the bending vibrator 14 clearly, which are penetrated by the recess 32.
  • the function block 42 can be used to guide the actuator 12 have an opening 69, the shape of which Actuator 12 is adapted. In a remaining gap 70 between the function block 42 and the actuator 12 can the additional already mentioned to Figure 1 Piezoceramic elements can be arranged which have a holding function for the actuator 12 when not in operation Take over ultrasonic motor 10.
  • actuators for generating the elliptical movement of the Bending vibrator 14 the piezoceramic elements 20 respectively 24 arranged. These can, for example also through Terfenol actuators or multilayer piezo actuators (Stacks) to be replaced. This too are generally known vibration elements to generate the elliptical movement of the bending vibrators 14 particularly suitable with large amplitudes.

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Claims (6)

  1. Moteur à ultrasons pour déplacer un actionneur (12), comprenant un oscillateur de flexion (14) mu dans un mouvement elliptique par deux éléments piézocéramiques (20, 24) agissant essentiellement de manière perpendiculaire l'un par rapport à l'autre, et en contact de frottement avec l'actionneur (12),
    l'action des éléments piézocéramiques (20, 24) sur l'oscillateurs de flexion (14) se faisant par l'intermédiaire d'un premier ressort de flexion (34) et d'un second ressort de flexion (24), ces deux ressorts élastiques étant perpendiculaires à la direction de polarisation de l'élément piézocéramique correspondant (20, 24) et,
    le premier ressort de flexion (34) ayant une suspension rigide dans la direction de polarisation du premier élément piézocéramique (20) et une suspension souple dans la direction de polarisation du second élément piézocéramique (24),
    le second ressort de flexion (28) ayant une suspension rigide dans la direction de polarisation du second élément piézocéramique (24) et une suspension souple dans la direction de polarisation du premier élément piézocéramique (20),
    caractérisé en ce que
    l'oscillateur de flexion (14) comporte une tête (34) sur laquelle agit au moins le premier élément piézocéramique (20),
    la tête (30) de l'oscillateur de flexion (14) possède une découpe essentiellement rectangulaire pour former le premier ressort de flexion (34), pour obtenir un double ressort de flexion (34) en forme de ressort lame dans la zone de la tête (30), pour que l'actionneur exécute un mouvement linéaire,
    dans la direction longitudinale des ressorts de flexion (34) en forme de ressorts lames agit le premier élément piézocéramique (20) dont la direction de polarisation est perpendiculaire à la direction de mouvement linéaire de l'actionneur et,
    dans la direction transversale des ressorts de flexion (34) en forme de ressorts lames agit le second élément piézocéramique (24) dont la direction de polarisation agit dans la direction de mouvement linéaire de l'actionneur.
  2. Moteur à ultrasons selon la revendication 1,
    caractérisé en ce que
    les éléments piézocéramiques (20, 24) sont montés sur un pont de support (16) dont l'oscillation propre est située dans une autre plage de fréquences que l'oscillation propre de l'oscillateur de flexion (14).
  3. Moteur à ultrasons selon l'une des revendications précédentes,
    caractérisé en ce que
    le pont de support (16) est monté de manière flottante par une membrane (38).
  4. Moteur à ultrasons selon l'une quelconque des revendications précédentes,
    caractérisé en ce que
    l'amplitude d'oscillation et/ou l'excentricité et/ou le point de rotation de l'oscillateur de flexion (14) sont réglés par le point d'action des ressorts lames (34, 28, 48, 56) en plus d'une variation de la tension d'excitation des éléments piézocéramiques (20, 24).
  5. Moteur à ultrasons selon l'une des revendications précédentes,
    caractérisé en ce que
    les oscillateurs de flexion (14) entraínés en synchronisme sont associés de manière symétrique à l'actionneur (12).
  6. Moteur à ultrasons selon l'une quelconque des revendications précédentes,
    caractérisé en ce que
    les éléments piézocéramiques (20, 24) reçoivent une tension d'activation déphasée pour les oscillateurs de flexion (14) distants les uns des autres pour le mouvement linéaire (44) pour permettre un entraínement régulier.
EP95115300A 1994-10-07 1995-09-28 Moteurs à ultrasons Expired - Lifetime EP0706226B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4435882 1994-10-07
DE4435882A DE4435882C2 (de) 1994-10-07 1994-10-07 Ultraschallmotor

Publications (2)

Publication Number Publication Date
EP0706226A1 EP0706226A1 (fr) 1996-04-10
EP0706226B1 true EP0706226B1 (fr) 1999-04-21

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP95115300A Expired - Lifetime EP0706226B1 (fr) 1994-10-07 1995-09-28 Moteurs à ultrasons

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EP (1) EP0706226B1 (fr)
DE (2) DE4435882C2 (fr)
ES (1) ES2132488T3 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007068441A1 (fr) * 2005-12-12 2007-06-21 Richter, Berta Moteur piézoélectrique utilisé comme système de propulsion de véhicule, servomoteur et analogue

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19648726C2 (de) * 1996-11-12 2003-03-27 Piezosystem Jena Gmbh Piezoelektrisches Antriebselement
DE69900855T2 (de) * 1999-11-25 2002-09-05 Fiat Ricerche Hakenförmiger piezoelektrischer Antrieb
DE10117465A1 (de) * 2001-04-06 2002-10-10 Hans Richter Piezoelektrischer Antrieb
DE10210257B4 (de) * 2002-01-14 2011-02-17 Physik Instrumente (Pi) Gmbh & Co. Kg Piezoelektrischer Aktor
DE102008026770A1 (de) 2008-06-04 2009-12-10 Robert Bosch Gmbh Linearbewegungsvorrichtung mit Piezoaktuator
JP6439466B2 (ja) * 2015-01-30 2018-12-19 セイコーエプソン株式会社 圧電駆動装置、ロボット及びロボットの駆動方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1208269A (fr) * 1982-02-25 1986-07-22 Toshiiku Sashida Dispositif moteur a oscillation ultrasonique
US4613782A (en) * 1984-03-23 1986-09-23 Hitachi, Ltd. Actuator
FR2685955A1 (fr) * 1992-01-03 1993-07-09 Jaeger Actionneur actionne par un moteur a vibration ultrasonore de type elliptique.

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007068441A1 (fr) * 2005-12-12 2007-06-21 Richter, Berta Moteur piézoélectrique utilisé comme système de propulsion de véhicule, servomoteur et analogue
KR101374645B1 (ko) * 2005-12-12 2014-03-19 베르타 리히터 차량 구동 시스템, 액추에이터 등으로 이용되는 압전 모터

Also Published As

Publication number Publication date
DE4435882A1 (de) 1996-04-11
EP0706226A1 (fr) 1996-04-10
ES2132488T3 (es) 1999-08-16
DE59505696D1 (de) 1999-05-27
DE4435882C2 (de) 1996-10-02

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