EP0689213B1 - Production method for a microcoil - Google Patents

Production method for a microcoil Download PDF

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Publication number
EP0689213B1
EP0689213B1 EP95107377A EP95107377A EP0689213B1 EP 0689213 B1 EP0689213 B1 EP 0689213B1 EP 95107377 A EP95107377 A EP 95107377A EP 95107377 A EP95107377 A EP 95107377A EP 0689213 B1 EP0689213 B1 EP 0689213B1
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EP
European Patent Office
Prior art keywords
wire
insulating layer
metal
metal alloy
parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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EP95107377A
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German (de)
French (fr)
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EP0689213A1 (en
Inventor
Barbara Matthis
Alfons Thommes
Rolf Schwarz
Klaus Leyendecker
Monika Saumer
Walter Stark, Sr.
Rupert Laier
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Forschungszentrum Karlsruhe GmbH
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Forschungszentrum Karlsruhe GmbH
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils

Definitions

  • the invention has for its object a further manufacturing process to specify for a microcoil of this type. This manufacturing process is said to enable using coils to produce very fine windings that are not by winding are accessible.
  • the inside diameter is the finished one Coil specified if no additional measures be provided.
  • the invention is particularly advantageous Procedure when very thin wires, e.g. B. with a Diameters from 500 ⁇ m to less than 100 ⁇ m can be used because Micro coils of this size are difficult to wind by winding have it made. Wires with diameters are commercially available of 200 ⁇ m. 125 ⁇ m, 100 ⁇ m and 75 ⁇ m are offered, which are the Production of a micro coil are suitable.
  • the wire together with the not removed parts of the insulating Layer is now placed in a galvanic bath and as Cathode switched.
  • a voltage between the Cut the anode of the bath and the wire connected as the cathode on the parts freed from the insulating layer of the wire metal or a metal alloy By applying a voltage between the Cut the anode of the bath and the wire connected as the cathode on the parts freed from the insulating layer of the wire metal or a metal alloy.
  • the metal or the metal alloy fills the turns of the helix first out until the distant areas of the insulating Layer are replaced by the metal or the metal alloy and the surface of both the remaining parts of the insulating Layer as well as the galvanic deposition Form a smooth surface.
  • the galvanic deposition can be done in this stage will be terminated when the insulating layer has a thickness that is the desired thickness of the coil turns corresponds in the radial direction.
  • the galvanic deposition of the metal or metal alloy takes place more evenly when the wire is in the galvanic bath during the metal deposition in rotation around its longitudinal axis is transferred.
  • a tubular anode can be used that surrounds the wire.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Micromachines (AREA)
  • Saccharide Compounds (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Wire Processing (AREA)

Abstract

Method of producing micro-coils consists of removing part of the insulation around a large coil in the shape of a screw thread, inserting the large coil in an electrolytic bath and depositing a metal or metal alloy onto the areas where the wire of the large coil has been exposed, and then stripping the deposited wire from the large coil.

Description

Die Erfindung betrifft ein Verfahren zur Herstellung einer Mikrospule gemäß dem ersten Patentanspruch.The invention relates to a method for producing a microcoil according to the first claim.

In der Mikrosystemtechnik spielen Mikrospulen, deren Windungen spiralförmig um ihre Längsachse verlaufen, eine wichtige Rolle. Solche Mikrospulen werden z. B. zum Antrieb von Aktoren in Mikroelektromotoren, Mikroventilen, Mikrorelais, Mikrosensoren etc. benötigt.Micro coils, their windings, play in microsystem technology run spirally around its longitudinal axis, an important one Role. Such micro coils are e.g. B. for driving actuators in micro-electric motors, micro-valves, micro-relays, microsensors etc. needed.

Ebene, spiralförmig gewundene Mikrospulen lassen sich in nahezu beliebiger Windungszahl mit Hilfe des bekannten LIGA-(Lithographie und galvanische Abformung)-Verfahrens problemlos herstellen. Spulen mit Windungen, die spiralförmig um ihre Längsachse verlaufen, erfordern bei Anwendung dieses Verfahrens einen hohen Aufwand, da jede Windung einzeln mit Hilfe einer justierten Bestrahlung, Entwicklung und galvanischen Abformung hergestellt werden muß. Solche Spulen lassen sich zwar gemäß dem deutschen Gebrauchsmuster G 93 18 386 durch Wickeln herstellen; der Wicklungstechnik sind jedoch bei sehr dünnen Spulenwindungen Grenzen gesetzt.Flat, spiral-wound micro coils can be almost any number of turns using the well-known LIGA (lithography and electroplating) process without problems produce. Coils with turns that spiral around their Longitudinal axis require using this method a lot of effort because each turn individually with the help adjusted radiation, development and galvanic impression must be manufactured. Such coils can be according to the German utility model G 93 18 386 by winding produce; the winding technology are very thin There are limits to coil turns.

Der Erfindung liegt die Aufgabe zugrunde, ein weiteres Herstellungsverfahren für eine Mikrospule dieser Art anzugeben. Dieses Herstellungsverfahren soll es ermöglichen, Spulen mit sehr feinen Windungen herzustellen, die durch Wicklung nicht zugänglich sind.The invention has for its object a further manufacturing process to specify for a microcoil of this type. This manufacturing process is said to enable using coils to produce very fine windings that are not by winding are accessible.

Die Aufgabe wird erfindungsgemäß durch das im ersten Patentanspuch beschriebene Verfahren gelöst. Die abhängigen Ansprüche geben bevorzugte Ausgestaltungen dieses Verfahrens an.The object is achieved by the first claim described method solved. The dependent claims give preferred embodiments of this method.

Erfindungsgemäß wird ein Draht aus einem elektrisch leitfähigen Material, der mit einer isolierenden Schicht überzogen ist, bereitgestellt. Das elektrisch leitende Material wird so ausgewählt, daß es sich gegenüber dem Material der durch galvanische Abscheidung erzeugten Spule selektiv entfernen läßt. Vorzugsweise wird als elektrisch leitendes Material ein Metall eingesetzt, wobei sich das Metall des Drahtes gegenüber dem in einem späteren Schritt galvanisch abzuscheidenden Metall oder der Metallegierung etwa durch Säuren, Eisen(III)chlorid, Persulfatätzlösungen oder anderen bekannten Ätzmitteln selektiv entfernen läßt. Als elektrisch leitendes Material für den Draht kann prinzipiell auch Kohlenstoff eingesetzt werden, sofern das im späteren Schritt galvanisch abzuscheidene Metall oder die Metallegierung bei einer thermischen Entfernung des Kohlenstoffs ausreichend beständig ist.According to the invention, a wire is made from an electrically conductive Material covered with an insulating layer is provided. The electrically conductive material is so selected to be different from the material by galvanic Deposition generated coil can be selectively removed. A metal is preferably used as the electrically conductive material used, the metal of the wire compared to the in a later step metal or the metal alloy, for example through acids, iron (III) chloride, persulfate etching solutions or other known etchants selectively can be removed. As an electrically conductive material for the In principle, wire can also be used with carbon, provided that the metal to be electroplated in the later step or the metal alloy upon thermal removal of the Carbon is sufficiently stable.

Es lassen sich kommerziell angebotene Drähte einsetzen, die bereits mit einer isolierenden Schicht versehen sind. Zur Herstellung sehr feiner Mikrospulen kann, z. B. auf handelsübliche Drähte aus Silber zurückgegriffen werden, deren isolierende Schicht einige µm (z. B. 2,5 oder 5 µm) dick ist und aus Polytetrafluorethylen (PTFE) oder Polyurethan besteht. Drähte aus anderen Metallen lassen sich durch die üblichen Beschichtungstechniken auf einfache Weise mit einer Isolierung z. B. aus Kunststoffen wie PTFE, Lacken etc. versehen.Commercially available wires can be used that are already provided with an insulating layer. For the production very fine micro-coils can e.g. B. on commercially available Silver wires are used, their insulating Layer is a few microns (e.g. 2.5 or 5 microns) thick and out Polytetrafluoroethylene (PTFE) or polyurethane. Wires from other metals can be made by the usual Coating techniques in a simple way with insulation e.g. B. from plastics such as PTFE, paints, etc. provided.

Durch die Dicke des Drahtes ist der Innendurchmesser der fertiggestellten Spule vorgegeben, sofern keine zusätzlichen Maßnahmen vorgesehen werden. Besonders vorteilhaft ist das erfindungsgemäße Verfahren, wenn sehr dünne Drähte, z. B. mit einem Durchmesser von 500 µm bis unter 100 µm eingesetzt werden, da sich Mikrospulen einer solchen Größe durch Wickeln nur schwer herstellen lassen. Im Handel werden Drähte mit Durchmessern von 200 µm. 125 µm, 100 µm und 75 µm angeboten, die sich zur Herstellung einer Mikrospule eignen.Due to the thickness of the wire, the inside diameter is the finished one Coil specified if no additional measures be provided. The invention is particularly advantageous Procedure when very thin wires, e.g. B. with a Diameters from 500 µm to less than 100 µm can be used because Micro coils of this size are difficult to wind by winding have it made. Wires with diameters are commercially available of 200 µm. 125 µm, 100 µm and 75 µm are offered, which are the Production of a micro coil are suitable.

Nunmehr werden diejenigen Teile der isolierenden Schicht entfernt, die auf einer Schraubenlinie liegen, so daß an diesen Stellen das elektrisch leitende Material des Drahtes freiliegt. Dies kann z. B. dadurch geschehen, daß der Draht mit seiner Isolierung unter Rotation um die Längsachse und konstantem Vorschub an einem Schneidwerkzeug vorbeigeführt wird. Die Gestalt der Schraubenlinie bestimmt im wesentlichen die Gestalt der späteren Spule. Durch den Abstand der Windungen der Schraubenlinie zueinander wird in der fertiggestellten Spule die Breite der Wicklungen in ihrer Längsrichtung begrenzt.Now those parts of the insulating layer are removed which lie on a helix, so that on this Make the electrically conductive material of the wire exposed. This can e.g. B. happen that the wire with its insulation with rotation around the longitudinal axis and constant Feed past a cutting tool. The shape of the helix essentially determines that Shape of the later coil. By the distance of the turns the helix to each other is completed in the Coil limits the width of the windings in their longitudinal direction.

Der Draht mitsamt den nicht entfernten Teilen der isolierenden Schicht wird nun in ein galvanisches Bad gebracht und als Kathode geschaltet. Durch Anlegen einer Spannung zwischen der Anode des Bades und dem als Kathode geschalteten Draht scheiden sich auf den von der isolierenden Schicht befreiten Teilen des Drahtes Metall oder eine Metallegierung ab. Das Metall oder die Metallegierung füllt zuerst die Windungen der Schraubenlinie aus, bis die entfernten Bereiche der isolierenden Schicht durch das Metall oder die Metallegierung ersetzt sind und die Oberfläche sowohl der verbliebenen Teile der isolierenden Schicht als auch der galvanischen Abscheidung eine glatte Fläche ausbilden. Die galvanische Abscheidung kann in diesem Stadium beendet werden, wenn die isolierende Schicht eine Dicke aufweist, die der gewünschten Dicke der Spulenwindungen in radialer Richtung entspricht.The wire together with the not removed parts of the insulating Layer is now placed in a galvanic bath and as Cathode switched. By applying a voltage between the Cut the anode of the bath and the wire connected as the cathode on the parts freed from the insulating layer of the wire metal or a metal alloy. The metal or the metal alloy fills the turns of the helix first out until the distant areas of the insulating Layer are replaced by the metal or the metal alloy and the surface of both the remaining parts of the insulating Layer as well as the galvanic deposition Form a smooth surface. The galvanic deposition can be done in this stage will be terminated when the insulating layer has a thickness that is the desired thickness of the coil turns corresponds in the radial direction.

Wird die galvanische Abscheidung fortgesetzt, überwächst das galvanisch abgeschiedene Metall oder die Metallegierung Teile der verbliebenen isolierenden Schicht und bildet dadurch einen im Querschnitt halbkreisförmigen Überstand über den ausgefüllten Windungen der Schraubenlinie. Hierdurch können Mikrospulen hergestellt werden, deren Wicklungen in radialer Richtung dicker sind als die Dicke der isolierenden Schicht. Um einen Kurzschluß in der Mikrospule zu vermeiden, muß die galvanische Abscheidung beendet werden, bevor das galvanische Seitenwachstum so weit fortgeschritten ist, daß die galvanische Abscheidung über einer Windung die galvanische Abscheidung über den benachbarten Windungen der Schraubenlinie berührt. Der Abstand der Windungen der Schraubenlinie begrenzt deshalb die erreichbare Dicke der Wicklungen der fertiggestellten Mikrospule.If the galvanic deposition continues, this will overgrow electrodeposited metal or metal alloy parts the remaining insulating layer and thereby forms one in cross-section semicircular protrusion over the filled Spiral turns. This allows micro coils are produced, whose windings in the radial direction are thicker than the thickness of the insulating layer. To one To avoid short circuit in the micro coil, the galvanic Deposition should be stopped before the galvanic side growth has progressed so far that galvanic deposition the galvanic deposition over a turn touches adjacent turns of the helix. The distance the turns of the helix therefore limits the achievable Thickness of the windings of the finished micro coil.

Die galvanische Abscheidung des Metalls oder der Metallegierung erfolgt gleichmäßiger, wenn der Draht im galvanischen Bad während der Metallabscheidung in Rotation um seine Längsachse versetzt wird. Alternativ kann eine rohrförmige Anode eingesetzt werden, die den Draht umgibt.The galvanic deposition of the metal or metal alloy takes place more evenly when the wire is in the galvanic bath during the metal deposition in rotation around its longitudinal axis is transferred. Alternatively, a tubular anode can be used that surrounds the wire.

Spulen mit besonders kleinem Innendurchmesser und vergrößerter Dicke der Wicklungen in radialer Richtung können hergestellt werden, wenn der mit der schraubenlinienartig bearbeiteten isolierenden Schicht versehene Draht vor dem Galvanikschritt angeätzt wird. Hierdurch entstehen an den freiliegenden Stellen des Drahtes vertiefte Gräben. Als Ätzmittel werden bei metallischen Drähten die bekannten Reagenzien eingesetzt. Das verwendete Ätzmittel darf die isolierende Schicht nicht angreifen. Auf diese Weise kann der Durchmesser des Drahtes an den geätzten Stellen ohne Schwierigkeiten um 20 bis 30 % reduziert werden. Bei der nachfolgenden galvanischen Abscheidung werden die vertieften Gräben ausgefüllt, wodurch der Innendurchmesser der fertigen Spule gegenüber dem Durchmesser des verwendeten Drahtes um denselben Betrag reduziert wird.Coils with a particularly small inner diameter and enlarged Thickness of the windings in the radial direction can be made if the one with the helical machined insulating layer provided wire before the electroplating step is etched. This creates the exposed areas deepened trenches of the wire. As an etchant in metallic Wires the known reagents used. The The etchant used must not attack the insulating layer. In this way the diameter of the wire can increase the etched areas easily reduced by 20 to 30% will. In the subsequent galvanic deposition the recessed trenches are filled, creating the inner diameter of the finished coil compared to the diameter of the wire used is reduced by the same amount.

Nach der galvanischen Abscheidung des Metalls oder der Metallegierung empfiehlt es sich besonders bei sehr kleinen Spulen, das galvanisch abgeschiedene Metall und die verbleibende Isolierung mit einem chemisch beständigen Kunststoff oder Lack zu überziehen. Hierfür eignet sich z. B. PTFE, Polyimid oder andere gegen Ätzmittel beständige Kunststoffe oder Lacke. Der Überzug darf bei der nachfolgenden selektiven Entfernung des Drahtes nicht angegriffen werden. Mit dieser Maßnahme werden besonders feine Mikrospulen mechanisch stabilisiert. Der Überzug verhindert zugleich, daß die Spulenwindungen miteinander in Kontakt kommen. After electrodeposition of the metal or Metal alloy is particularly recommended for very small ones Coils, the electrodeposited metal and the remaining Insulation with a chemically resistant plastic or paint. For this, z. B. PTFE, polyimide or other plastics resistant to caustic agents or Paints. The coating may be removed at the subsequent selective removal of the wire cannot be attacked. With this measure fine micro coils are mechanically stabilized. The coating also prevents the coil turns come into contact with each other.

Im letzten Schritt wird der Draht selektiv gegenüber dem galvanisch abgeschiedenen Metall oder der Metallegierung sowie gegebenenfalls selektiv gegenüber dem Überzug entfernt. Die selektive Entfernung erfolgt bevorzugt mit einem Ätzmittel. Besteht der Draht aus einem niedrig schmelzenden Metall, kann die selektive Entfernung auch durch Anwendung von Temperaturen oberhalb dessen Schmelzpunktes erreicht werden.In the last step, the wire becomes selective compared to the galvanic deposited metal or metal alloy as well optionally selectively removed from the coating. The selective removal is preferably carried out with an etchant. If the wire consists of a low-melting metal, can selective removal also by using temperatures above its melting point.

Wird kein Überzug angebracht, können ggf. die verbliebenen Teile der isolierenden Schicht zuvor thermisch oder durch andere Verfahren entfernt werden. Hierdurch verläuft die selektive Entfernung des Drahtes schneller, weil das Ätzmittel den Draht nicht nur an den Enden, sondern auch zwischen den Spulenwicklungen angreifen kann.If no cover is applied, the remaining ones can be used Parts of the insulating layer previously thermally or by others Procedures are removed. As a result, the selective runs Removal of the wire faster because the etchant Wire not only at the ends, but also between the coil windings can attack.

Die durch dieses Verfahren hergestellten Spulen können auch mit einem Kern versehen werden. Als Kern eignen sich feine Drähte aus den üblichen für Spulenkerne eingesetzten Metallen, die ihrerseits mit einer Isolation versehen sind. Das Anschließen der elektrischen Zuführungen für die Mikrospule und ggf. das Fixieren des Spulenkerns kann durch Bonden oder durch Anwendung leitfähiger Kleber erfolgen.The coils produced by this method can also be provided with a core. Fine are suitable as the core Wires from the usual metals used for coil cores, which in turn are provided with insulation. The connecting the electrical feeds for the microcoil and if necessary, the coil core can be fixed by bonding or by Apply conductive glue.

Claims (6)

  1. Method of producing a microcoil, wherein
    a) a wire is prepared from an electrically conductive material, which is coated with an insulating layer,
    b) parts of the insulating layer are removed in such a manner that the filament formed from the electrically conductive material is stripped of the insulating layer in a continuous region, which has the configuration of a helix around the wire,
    c) the wire with the remaining insulating layer is introduced into an electroplating bath and incorporated as the cathode,
    c) a metal or a metal alloy is deposited in the form of the helix on the regions of the wire which have been stripped of the insulating layer, and
    e) the wire is selectively removed with respect to the metal or the metal alloy.
  2. Method according to claim 1, wherein the parts of the insulating layer are removed by means of a cutting tool, past which the wire, which is provided with the insulating layer, is guided during rotation about the longitudinal axis and constant advance.
  3. Method according to claim 1, wherein the wire, which is incorporated as the cathode, in the electroplating bath is set in rotation about its longitudinal axis.
  4. Method according to claim 1, wherein the wire, which is incorporated as the cathode, in the electroplating bath is inserted into a tubular anode.
  5. Method according to claim 1, wherein, prior to the selective removal of the wire, the electrodeposited metal or the electrodeposited metal alloy and the remaining insulating layer are coated with a chemically stable plastics material or lacquer.
  6. Method according to claim 1, wherein, subsequent to the removal of the parts of the insulating layer, the wire is etched in the continuous region.
EP95107377A 1994-06-20 1995-05-16 Production method for a microcoil Expired - Lifetime EP0689213B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4421494A DE4421494C1 (en) 1994-06-20 1994-06-20 Production of micro-coils
DE4421494 1994-06-20

Publications (2)

Publication Number Publication Date
EP0689213A1 EP0689213A1 (en) 1995-12-27
EP0689213B1 true EP0689213B1 (en) 1998-05-20

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Application Number Title Priority Date Filing Date
EP95107377A Expired - Lifetime EP0689213B1 (en) 1994-06-20 1995-05-16 Production method for a microcoil

Country Status (3)

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EP (1) EP0689213B1 (en)
AT (1) ATE166489T1 (en)
DE (2) DE4421494C1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015223461A1 (en) 2015-11-26 2017-06-01 Robert Bosch Gmbh Method for producing an inductive element and inductive component

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3561111A (en) * 1968-08-07 1971-02-09 Trw Inc Method for making precision, square-wire air core coils
JPS55130121A (en) * 1979-03-30 1980-10-08 Mitsubishi Electric Corp Manufacturing method of coil
JPS60144922A (en) * 1984-01-07 1985-07-31 Fuji Elelctrochem Co Ltd Manufacture of small size inductor
JPS60167307A (en) * 1984-02-09 1985-08-30 Matsushita Electric Ind Co Ltd Manufacture of printed coil
DE3817057A1 (en) * 1988-05-19 1989-05-24 Bosch Gmbh Robert Method for the manufacture of a single-layer sensor coil
DE9318386U1 (en) * 1993-12-01 1994-03-17 Kernforschungsz Karlsruhe Micro coil

Also Published As

Publication number Publication date
DE59502222D1 (en) 1998-06-25
EP0689213A1 (en) 1995-12-27
DE4421494C1 (en) 1995-06-14
ATE166489T1 (en) 1998-06-15

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