EP0682230B1 - Apparat zur Verschiebungsmessung eines Gegenstandes unter Verwendung eines Beugungsgitters - Google Patents

Apparat zur Verschiebungsmessung eines Gegenstandes unter Verwendung eines Beugungsgitters Download PDF

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Publication number
EP0682230B1
EP0682230B1 EP95107140A EP95107140A EP0682230B1 EP 0682230 B1 EP0682230 B1 EP 0682230B1 EP 95107140 A EP95107140 A EP 95107140A EP 95107140 A EP95107140 A EP 95107140A EP 0682230 B1 EP0682230 B1 EP 0682230B1
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EP
European Patent Office
Prior art keywords
light
diffraction grating
diffracted
interference
grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP95107140A
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English (en)
French (fr)
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EP0682230A3 (de
EP0682230A2 (de
Inventor
Hiroshi C/O Canon Kabushiki Kaisha Watanabe
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Canon Inc
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Canon Inc
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Publication of EP0682230A3 publication Critical patent/EP0682230A3/de
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Definitions

  • the present invention relates to an encoder for measuring the displacement of an object. More specifically, the present invention can be suitably applied to an encoder such as a rotary encoder, a linear encoder, or the like, which measures movement information, e.g., the moving amount, moving direction, acceleration, angular acceleration, or the like, of a diffraction grating in such a manner that interference fringes are formed by irradiating a coherent light beam such as a laser beam onto a micro-grating array such as a diffraction grating attached to a movable object (scale) and causing diffracted light components of predetermined orders from the diffraction grating to interfere with each other, and the number of dark and light fringes of the interference fringes is counted.
  • an encoder such as a rotary encoder, a linear encoder, or the like, which measures movement information, e.g., the moving amount, moving direction, acceleration, angular acceleration, or the like, of a diffraction
  • rotary encoders are known as measuring apparatuses which can measure rotation information such as the rotating amount, rotating direction, or the like, of a rotary object with high precision (e.g., on the submicron order) in, e.g., an NC working machine, and such rotary encoders have been used in various fields.
  • a diffracted light interference type rotary encoder detects the moving state such as the moving amount, moving direction, or the like of a movable object in such a manner that a coherent light beam such as a laser beam is incident on a diffraction grating arranged on a movable object, diffracted light components of predetermined orders diffracted by the diffraction grating are caused to interfere with each other to form interference fringes, and the number of dark and light fringes of the interference fringes is counted.
  • Japanese Laid-Open Patent Application No. 4-264264 proposed an accelerometer for detecting an acceleration by measuring the elastic deformation of an elastic member.
  • an accelerometer which aims at high-precision detection of an acceleration an acceleration detector utilizing a diffracted light interference type encoder has been proposed.
  • an angular accelerometer for detecting an angular acceleration an angular accelerometer such as a piezoelectric vibrator type or an optical fiber type gyroscope has been proposed.
  • Fig. 1 is a partial schematic view showing principal part of a conventional diffracted light interference type encoder.
  • the +1 and -1 order diffracted light components are caused to interfere with each other by overlapping their optical paths using mirrors 109a and 109b and a beam splitter 103, since the phases of these diffracted light components shift from each other by 4 ⁇ while the scale 105a rotates by one pitch (360/N deg) of the micro-grating array, a change in amount of light of a density pattern for two cycles occurs. Therefore, by detecting the change in amount of light of the density pattern, the rotating amount of the scale 105a can be obtained.
  • Fig. 2 is a partial schematic view showing the principal part of a conventional diffracted light interference type rotary encoder which detects not only the rotating amount but also the rotating direction of the scale 105a.
  • n and m order diffracted light components diffracted by a micro-grating array 105 are caused to overlap each other, these light components are converted into light beams of linear polarization, whose planes of polarization extend perpendicularly to each other, by utilizing analyzers 108a and 108b, and the like.
  • the optical paths of these two light components are caused to overlap each other via mirrors 109a and 109b and a beam splitter 103a, and these light components are then passed through a quarter-wave plate 107a to be converted into a light beam of linear polarization having a plane of polarization whose direction is determined by the phase difference between the two light beams.
  • the light beam is split into two light beams by a non-polarization beam splitter 103b, and these light beams are passed through analyzers 108c and 108d which are arranged to have different detecting directions (directions in which light beams of linear polarization can pass therethrough). Then, two different density signals having different density change timings upon interference of the two light beams are detected by detectors 110a and 110b.
  • the density change timings shift by 90° ( ⁇ /2) in phase.
  • the rotary encoder shown in Fig. 2 detects the rotation information including the rotating direction of the scale 105a using the signals output from the two detects 110a and 110b at this time.
  • EP-A-0,426,125 discloses an apparatus for measuring a displacement of an object, comprising a diffraction grating arranged on the object, light source means for irradiating coherent light onto the grating, and detecting means for detecting resulting interference light.
  • the apparatus is capable of measuring either a radial motion or a linear motion of the object.
  • an apparatus for measuring a displacement of an object is provided as defined in claim 1.
  • Fig. 3 is a schematic view showing principal part of the first embodiment of the present invention.
  • This embodiment exemplifies a case wherein two reflection type diffraction gratings 5a, 5b are arranged on an object to be measured (rigid body; to be also referred to as a scale) 5, and movement information and rotation information of the object to be measured are detected.
  • object to be measured rigid body; to be also referred to as a scale
  • a light source e.g., a semiconductor laser whose plane of polarization is inclined through 45°
  • a light beam emitted by the light source 1 is shaped by a collimator lens 2, and is split into S and P polarized light components LS and LP by a first polarization beam splitter 3a whose plane of polarization is inclined through 45° from the optical axis.
  • the polarization beam splitter 3a transmits the P polarized light therethrough, and reflects the S polarized light.
  • the P polarized light is reflected by a mirror 4b and is incident on a diffraction grating (first diffraction grating) 5a.
  • the S polarized light is reflected by a mirror 4a, and is incident on the diffraction grating 5a.
  • the two light components are obliquely incident on a single point from two directions, so that the incident angles of the two light components are equal to the 1 order diffraction angle.
  • the +1 order diffracted light S+ of S-polarization and -1 order diffracted light P- of P-polarization are reflected and diffracted in a single direction perpendicular to the surface of the diffraction grating 5a.
  • the +1 order diffracted light S+ and -1 order diffracted light P- are perpendicularly incident on a diffraction grating (second diffraction grating) 5b, which is arranged at a symmetrical position about a rotation axis (shaft) 10 of torsion of the object to be measured (elastic member) with respect to the first diffraction grating 5a, using deflection means 6a and 6b such as mirrors.
  • P polarized light P-- and S polarized light S+- which are -1-order-diffracted by the second diffraction grating 5b are reflected by a mirror 7b and are guided toward a polarization beam splitter 3b.
  • P polarized light P-+ and S polarized light S++ which are +1-order-diffracted by the second diffraction grating 5b are reflected by a mirror 7a and are guided toward the polarization beam splitter 3b.
  • the polarization beam splitter 3b superposes these polarized light components.
  • the photodetector 9a detects movement information, but the photodetector 9b does not detect any movement information.
  • Fig. 5 is a schematic view when the scale 5 moves in directions B in Fig. 3
  • Fig. 7 is a block diagram for explaining the components in Fig. 5.
  • P polarized light P-- and S polarized light S+- which are -1-order-diffracted by the second diffraction grating 5b are reflected by the mirror 7a and are guided toward the polarization beam splitter 3b.
  • P polarized light P-+ and S polarized light S++ which are +1-order-diffracted by the second diffraction grating 5b are reflected by the mirror 7b and are guided toward the polarization beam splitter 3b.
  • the polarization beam splitter 3b superposes these polarized light components.
  • the photodetector 9b detects movement information, but the photodetector 9a does not detect any movement information.
  • a signal processing system (not shown) detects the movement information of a movable object using signals output from the photodetectors 9a and 9b.
  • the detection principle of the movement information of a movable object in this embodiment will be described below with reference to Figs. 6 and 7.
  • Fig. 8 is an explanatory view showing the relationship between the moving direction of the grating and the diffraction orders.
  • m order diffracted light which is diffracted in the moving direction of the diffraction grating
  • m order diffracted light which is diffracted in a direction opposite to the moving direction
  • a diffracted light interference type encoder In a diffracted light interference type encoder, light which is +1-order-diffracted twice and light which are -1-order-diffracted twice by a diffraction grating arranged on a scale are caused to overlap each other, so that the phases of the two light components relatively shift by 8 ⁇ per pitch of the grating. Therefore, upon movement of the scale by one pitch of the grating, a change in phase for four cycles is generated.
  • the +m order diffracted light diffracted by the diffraction grating is a light component, which is diffracted in the moving direction of the diffraction grating, of the m order diffracted light
  • the -m order diffracted light is a light component, which is diffracted in the direction opposite to the moving direction of the diffraction grating, of the m order diffracted light.
  • the m order diffracted light is considered in a state wherein two parallel diffraction gratings on a scale move by the same amount in a direction perpendicular to the grating.
  • a light beam from a coherence light source is caused to become incident on a first diffraction grating, +m diffracted light Lm and -m diffracted light L-m from the first diffraction grating are transmitted using light transmission means such as a lens, prism, mirror, optical fiber, and the like, and are caused to become incident on a second diffraction grating.
  • light components which are transmitted through the polarization beam splitter 3b, and reach the photodetector 9a (first detecting system) via the analyzer 13a are P polarized light P-- which is -1-order-diffracted twice, and S polarized light S++ which is +1-order-diffracted twice, and the relative phase difference between these light components is 8 ⁇ upon displacement of the grating by one pitch.
  • light components which are reflected by the polarization beam splitter 3b and reach the photodetector 9b (second detecting system) via the analyzer 13b are P polarized light P-+ which is -1-order-diffracted and +1-order-diffracted, and S polarized light S+- which is +1-order-diffracted and -1-order-diffracted.
  • P polarized light P-+ which is -1-order-diffracted and +1-order-diffracted
  • S polarized light S+- which is +1-order-diffracted and -1-order-diffracted.
  • the photodetectors 9c and 9d detect density patterns of two phase light components which have a 90° phase difference therebetween, thereby obtaining the information of the moving direction of the object to be measured.
  • the object to be measured is simultaneously displaced in both the direction A and directions B in Fig. 3, different kinds of movement information are respectively obtained from the photodetectors 9a and 9b.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Claims (6)

  1. Apparat zur Verschiebungsmessung eines Gegenstands (5), der aufweist:
    ein Beugungsgitter (5a, 5b), das auf dem Gegenstand angeordnet ist,
    eine Lichtquellenvorrichtung (1) zum Einstrahlen von kohärentem Licht auf das Beugungsgitter und
    eine Detektionsvorrichtung zum Detektieren von Interferenzlicht, das sich aus einer Interferenz von Lichtstrahlen ergibt, die durch das Beugungsgitter gebeugt sind,
       dadurch gekennzeichnet, daß
       die Detektionsvorrichtung aufweist:
    eine erste Detektionseinrichtung (9a) zum Detektieren eines Interferenzlichtstrahls, der sich aus einer Interferenz von Beugungslichtstrahlen ergibt, deren Phasen sich bei Linearbewegung (A) des Gegenstands relativ verschieben, und
    eine zweite Detektionseinrichtung (9b) zum Detektieren des Interferenzlichtstrahls, der sich aus einer Interferenz von Beugungslichtstrahlen ergibt, deren Phasen sich bei Rotationsbewegung (B) des Gegenstands relativ verschieben.
  2. Apparat gemäß Anspruch 1, wobei der Gegenstand (5) ein Rotationsobjekt mit einer Drehachse (10) ist und das Beugungsgitter (5a, 5b) ein Radialgitter aufweist, welches die Drehachse als einen Mittelpunkt aufweist.
  3. Apparat gemäß Anspruch 1, wobei der Gegenstand (5) ein Rotationsobjekt mit einer Drehachse (10) ist und das Beugungsgitter (5a, 5b) ein Lineargitter aufweist, das in einer Ebene rechtwinklig zu der Drehachse angeordnet ist.
  4. Apparat gemäß Anspruch 2 oder 3, wobei das Beugungsgitter in ein erstes Beugungsgitter (5a) und ein zweites Beugungsgitter (5b) unterteilt ist, die in zu der Drehachse (10) symmetrischen Positionen angeordnet sind.
  5. Apparat gemäß Anspruch 4, wobei
    das kohärente Licht auf das erste Beugungsgitter (5a) und das zweite Beugungsgitter (5b) einstrahlt und
    der Interferenzlichtstrahl, der durch die erste Detektionseinrichtung (9a) detektiert wird, und der Interferenzlichtstrahl, der durch die zweite Detektionseinrichtung (9b) detektiert wird, jeweils aus einer Interferenz eines Lichtstrahls, der durch das erste Beugungsgitter (5a) gebeugt ist, und eines Lichtstrahls, der durch das zweite Beugungsgitter (5b) gebeugt ist, resultieren.
  6. Apparat gemäß Anspruch 4, wobei
    das kohärente Licht auf das erste Beugungsgitter (5a) einstrahlt,
    Lichtleitvorrichtungen (6a, 6b; 6a, 6b, 6c, 6d) eine Vielzahl von gebeugten Lichtkomponenten einer vorbestimmten Ordnung, die durch das erste Beugungsgitter (5a) gebeugt sind, zu dem zweiten Beugungsgitter (5b) leiten und
    der Interferenzlichtstrahl, der durch die erste Detektionseinrichtung (9a) detektiert ist, und der Interferenzlichtstrahl, der durch die zweite Detektionseinrichtung (9b) detektiert ist, jeweils aus einer Interferenz von zwei Lichtstrahlen resultieren, die durch das zweite Beugungsgitter (5b) gebeugt sind.
EP95107140A 1994-05-13 1995-05-11 Apparat zur Verschiebungsmessung eines Gegenstandes unter Verwendung eines Beugungsgitters Expired - Lifetime EP0682230B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP12452794 1994-05-13
JP12452794A JP3495783B2 (ja) 1994-05-13 1994-05-13 エンコーダ
JP124527/94 1994-05-13

Publications (3)

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EP0682230A2 EP0682230A2 (de) 1995-11-15
EP0682230A3 EP0682230A3 (de) 1996-09-04
EP0682230B1 true EP0682230B1 (de) 2001-09-26

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EP95107140A Expired - Lifetime EP0682230B1 (de) 1994-05-13 1995-05-11 Apparat zur Verschiebungsmessung eines Gegenstandes unter Verwendung eines Beugungsgitters

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US (1) US5717488A (de)
EP (1) EP0682230B1 (de)
JP (1) JP3495783B2 (de)
DE (1) DE69522850T2 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10303038B4 (de) * 2003-01-26 2006-11-30 Samland, Thomas, Dipl.-Math. Positionsmesseinrichtung
DE10349128B4 (de) * 2002-10-23 2008-04-10 Sony Manufacturing Systems Corp. Verschiebungsgeber

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Publication number Priority date Publication date Assignee Title
DE19527421A1 (de) * 1995-07-27 1997-01-30 Bosch Gmbh Robert Vorrichtung zur absoluten Positionsmessung
JP4365927B2 (ja) * 1999-03-12 2009-11-18 キヤノン株式会社 干渉計測装置及び格子干渉式エンコーダ
DE10025461A1 (de) * 2000-05-23 2001-12-06 Mahr Gmbh Messeinrichtung nach dem Interferenzprinzip
US6879405B2 (en) * 2002-11-18 2005-04-12 Sony Precision Technology, Inc. Displacement pickup
US7158690B2 (en) * 2002-12-20 2007-01-02 Texas Instruments Incorporated Enhancing the resolution of measurement systems employing image capturing systems to measure lengths
CN101116086A (zh) * 2004-11-16 2008-01-30 伊路敏纳公司 读取编码微珠的方法和设备
JP4852318B2 (ja) * 2006-02-20 2012-01-11 株式会社マグネスケール 変位検出装置、偏光ビームスプリッタ及び回折格子
ES2377748T3 (es) 2007-11-20 2012-03-30 The Modal Shop, Inc. Sistema de calibración de sensor de movimiento dinámico y procedimiento para calibrar un sensor de movimiento dinámico
JP5602420B2 (ja) * 2009-12-10 2014-10-08 キヤノン株式会社 変位測定装置、露光装置、及び精密加工機器
CN108413875B (zh) * 2018-01-23 2020-01-17 王勇 一种刻度可调的非接触式高精度长度测量系统
JP7141313B2 (ja) * 2018-11-06 2022-09-22 Dmg森精機株式会社 変位検出装置
TWI721719B (zh) * 2019-12-19 2021-03-11 財團法人工業技術研究院 量測裝置
CN114353671B (zh) * 2022-01-14 2022-11-01 西安交通大学 实现位移和角度同步测量的双波长衍射干涉系统及方法

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DE2209667C3 (de) * 1972-03-01 1980-09-04 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Einrichtung zur beruhrungslosen Messung
JPH0778433B2 (ja) * 1988-07-19 1995-08-23 キヤノン株式会社 ロータリーエンコーダ
JP2586122B2 (ja) * 1988-11-18 1997-02-26 キヤノン株式会社 ロータリーエンコーダ
JP2683117B2 (ja) * 1989-10-31 1997-11-26 キヤノン株式会社 エンコーダー
JPH0447222A (ja) * 1990-06-13 1992-02-17 Olympus Optical Co Ltd 高精度位置比較装置
JPH04264264A (ja) * 1991-02-18 1992-09-21 Mitsubishi Electric Corp 半導体加速度検出装置
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10349128B4 (de) * 2002-10-23 2008-04-10 Sony Manufacturing Systems Corp. Verschiebungsgeber
DE10303038B4 (de) * 2003-01-26 2006-11-30 Samland, Thomas, Dipl.-Math. Positionsmesseinrichtung

Also Published As

Publication number Publication date
US5717488A (en) 1998-02-10
EP0682230A3 (de) 1996-09-04
EP0682230A2 (de) 1995-11-15
JP3495783B2 (ja) 2004-02-09
DE69522850D1 (de) 2001-10-31
JPH07306060A (ja) 1995-11-21
DE69522850T2 (de) 2002-04-11

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