EP0672873A1 - Stossrohrkühler - Google Patents
Stossrohrkühler Download PDFInfo
- Publication number
- EP0672873A1 EP0672873A1 EP95400546A EP95400546A EP0672873A1 EP 0672873 A1 EP0672873 A1 EP 0672873A1 EP 95400546 A EP95400546 A EP 95400546A EP 95400546 A EP95400546 A EP 95400546A EP 0672873 A1 EP0672873 A1 EP 0672873A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- exchanger
- cooler according
- tube
- membrane
- regenerator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
- F25B9/145—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle pulse-tube cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2309/00—Gas cycle refrigeration machines
- F25B2309/14—Compression machines, plants or systems characterised by the cycle used
- F25B2309/1402—Pulse-tube cycles with acoustic driver
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2309/00—Gas cycle refrigeration machines
- F25B2309/14—Compression machines, plants or systems characterised by the cycle used
- F25B2309/1406—Pulse-tube cycles with pulse tube in co-axial or concentric geometrical arrangements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2309/00—Gas cycle refrigeration machines
- F25B2309/14—Compression machines, plants or systems characterised by the cycle used
- F25B2309/1412—Pulse-tube cycles characterised by heat exchanger details
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2309/00—Gas cycle refrigeration machines
- F25B2309/14—Compression machines, plants or systems characterised by the cycle used
- F25B2309/1413—Pulse-tube cycles characterised by performance, geometry or theory
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2309/00—Gas cycle refrigeration machines
- F25B2309/14—Compression machines, plants or systems characterised by the cycle used
- F25B2309/1417—Pulse-tube cycles without any valves in gas supply and return lines
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
- F25B2400/15—Microelectro-mechanical devices
Definitions
- the invention relates to a pulsed gas cooler and more particularly to a tube micro-cooler.
- the most widely used refrigeration devices are based on "Stirling" machines, liquid nitrogen cryostats, Joule-Thomson expansion ports, condensing machines and Peltier elements.
- the remarkable Stirling refrigerator in this area (“Bat”) has a cooling power of 150 mW at 80 K, for an input power of 6 W and a weight of 0.4 kg.
- the principle of the Stirling cycle generates vibrations, and limits the lifespan to 2000 hours (due to cold moving parts).
- Peltier element coolers require a minimum of 3 stages to obtain a power flow at 200 K equal to 50 mW, assuming that the hot radiator is only 300 K. Under these conditions, the electrical power required is around 5 W (or 4 W with 6 stages). Thermoelements making it possible to reach temperature differentials of more than 130 K are rare: they are therefore not efficient enough if the temperature of the radiator is above 60 ° C.
- the first exchanger being intended to be coupled to an element (load) to be cooled.
- the exchanger 2 located on the side of the regenerator 4 yields heat to the gas which cools down on expansion, before being thermalised by regenerator 4: it therefore constitutes the cold point of the cooling system.
- a load shedding circuit 9 can be used to improve the performance of the system by directly diverting part of the flux transmitted to the regenerator 4 to the tube 6.
- such a cooler can be produced in miniature form and can be intended to cool an element of small dimensions.
- microelectronics techniques makes it possible to maintain a low production cost, a reduction in "dead” volumes (thermodynamically, and even from the standpoint of space) and technological compatibility with the majority of electronic circuits (infrared detectors, sensor magnetic field or low noise amplifier).
- FIG. 2 represents a detailed embodiment of such a pulsed tube micro-cooler according to the invention.
- the cooler according to the invention is made compact and can be miniaturized due to the arrangement of its constituent elements in the following manner:
- the tube 1 is attached to the regenerator 4.
- the exchanger 2 is at the upper outlet end of the tube 1 and communicates with a charging device 20 designed to be coupled with a device to be cooled (not shown) and to be capable of capture the heat from this device.
- the upper end of the regenerator 4 communicates with the exchanger 2.
- the opposite end of the regenerator 4 has a cavity 71 closed by a device capable of compressing the air contained in the cavity.
- This device is a membrane 70.
- a device such as a piezoelectric 72 periodically presses on the membrane 70 to compress the gas contained in the cavity 71.
- the production of the membrane can take other embodiments. It can be made of piezoelectric material and carry, on its two faces, electrodes. It will be able to deform and act as a pump.
- the oscillation of the membrane can also be generated by an electrostatic effect.
- the membrane is provided with a voltage control electrode and a second voltage control electrode is provided either inside the cavity (on the face 73 for example) or outside of the cavity on a fixed part not shown.
- the exchanger 3 communicates with a reservoir 5 which is also attached to the tube 1.
- the exchanger 3 is thermally integral with a thermal evacuation device making it possible to evacuate the heat to the outside.
- This thermal evacuation device can consist of a plate 30 and a cooling radiator 8 thermally coupled to the plate 30.
- the plate 30 and the cooler 8 are made of a material which conducts heat well.
- a material with low thermal conduction (for example fused silica or polymer resin) is used to make the tube 1, the regenerator 4 and the reservoir 5.
- the exchangers 2 and 3 are made with a material with high thermal conduction and preferably usable by microfabrication technologies (for example silicon, sapphire, beryllium oxide, aluminum nitride, CuW or Mo).
- the reservoir 5 is disposed at the end of the tube 1 and includes the membrane 70.
- the walls of the reservoir 5 are made of a material which is a good thermal conductor and constitutes the cooling surface of the device. to which is optionally attached a cooling radiator such as a finned cooler 8.
- the plate 20 to be cooled to which the component to be cooled is coupled contains in its body the heat exchanger 2. It is this heat exchanger 2 which makes the tube 1 communicate with the regenerator 4. The component to be cooled is placed or fixed on the upper face of the plate 20. This arrangement was applied to the embodiment of FIG. 3 but could also be applied to the embodiment of FIG. 2.
- the exchanger 3 is placed on the face opposite to the exchanger 2 to avoid a thermal short circuit between the two exchangers.
- the means 7 for maintaining pressure oscillations in the tube are, in these examples, also integrated into the cooling system: a membrane is kept in oscillation by electrostatic effect, the control circuit can also be integrated into the structure, in particular if the exchanger 3 is made of silicon.
- V res is the volume of the reservoir
- P0 the average pressure of the gas
- x is the rate of modulation of the pressure
- V res RT b T b is the temperature of the hot exchanger
- R the constant of ideal gases
- R0 is determined by the nature of the gas and the geometry of the exchanger.
- the mass of gas injected into the tube during the compression phase is given by the following approximate relationship: where M is the molar mass of the gas. This makes it possible to express the capacity of the pressure oscillator by the volume flow D V corresponding to the ambient temperature T0:
- the mechanical power to be supplied on the order of P0D V is therefore related to q by the relation.
- the mechanical power of the pressure oscillator necessary to obtain 50 mW at 200 K is of the order of 0.4 W if a pressure modulation rate of 10% is chosen.
- P0 1 Atmosphere
- D v 4 cm3 / s.
- the volume displaced per period at the level of the pressure oscillator, for a frequency of 100 Hz, is therefore 40 mm3. From the compression ratio chosen equal to 10%, it can be deduced that the total volume of gas to be used is of the order of cm3.
- the orifice 6 is integrated into the exchanger 3 by etching slots or holes in the exchanger, these will be sized using suitable formulas of hydrodynamics, so as to obtain the desired impedance R0 . Optimization of this geometry will ensure heat transfer from the gas to the maximum exchanger.
- R0 128 ⁇ I / ⁇ D4N.
- the exchanger 2 As regards the exchanger 2, it must have a lower impedance than that of the exchanger 3. It must therefore have holes of cross-sectional dimensions (diameter) greater than those of the holes of the exchanger 3. Nevertheless , the holes in exchanger 2 will be as small as possible, so they will be very slightly larger than those in exchanger 3.
- This system allows to locally cool any load requiring a low cooling power, with a high efficiency. It will be able to cool electronic circuits where the temperature intervenes either by thermal activation, for example cooling of infrared detector of the diode type; either by thermal noise, for example cooling of amplifier type device, infrared detector of pyroelectric type, or other devices and materials whose characteristics depend on temperature, for example magnetic field detectors (MMM).
- thermal activation for example cooling of infrared detector of the diode type
- thermal noise for example cooling of amplifier type device, infrared detector of pyroelectric type, or other devices and materials whose characteristics depend on temperature, for example magnetic field detectors (MMM).
- MMM magnetic field detectors
- Peltier elements can be mounted in a multi-stage system, and even combined with Peltier elements serving as the first stage.
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9403185A FR2717563B1 (fr) | 1994-03-18 | 1994-03-18 | Refroidisseur à gaz pulsé. |
FR9403185 | 1994-03-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
EP0672873A1 true EP0672873A1 (de) | 1995-09-20 |
Family
ID=9461184
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP95400546A Ceased EP0672873A1 (de) | 1994-03-18 | 1995-03-14 | Stossrohrkühler |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0672873A1 (de) |
FR (1) | FR2717563B1 (de) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0860667A1 (de) * | 1997-02-21 | 1998-08-26 | Cryotechnologies S.A. | Konditionierungsanordnung von bei Tiefsttemperatur arbeitenden Bauteilen |
FR2760076A1 (fr) * | 1997-02-21 | 1998-08-28 | Cryotechnologies | Dispositif de refroidissement cryogenique a oscillateur de pression a double effet |
EP1072851A1 (de) * | 1999-07-29 | 2001-01-31 | CSP Cryogenic Spectrometers GmbH | Kühlvorrichtung |
WO2001031987A1 (en) * | 1999-10-27 | 2001-05-03 | Abb Research Ltd. | An arrangement at an electronical or electrical apparatus |
WO2002046665A1 (de) * | 2000-12-09 | 2002-06-13 | Forschungszentrum Karlsruhe Gmbh | Expander in einer pulsrohrkühlerstufe |
EP1431682A1 (de) * | 2001-08-30 | 2004-06-23 | Aisin Seiki Kabushiki Kaisha | Pulsationsrohrkühlmaschine |
EP2239590A1 (de) * | 2009-04-08 | 2010-10-13 | Société Française de Détecteurs Infrarouges - SOFRADIR | Vorrichtung zur Erkennung der elektro-optischen Leistungsmerkmale einer Halbleiterkomponente |
CN103808057A (zh) * | 2014-01-23 | 2014-05-21 | 浙江大学 | 一种回收声功的级联型脉管制冷机 |
CN104613664A (zh) * | 2015-02-10 | 2015-05-13 | 浙江大学 | 一种可达卡诺效率的多级级联型脉管制冷机及制冷方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1511438A (fr) * | 1966-02-21 | 1968-01-26 | British Oxygen Co Ltd | Procédé de réfrigération des gaz par tube à impulsions |
US4722201A (en) * | 1986-02-13 | 1988-02-02 | The United States Of America As Represented By The United States Department Of Energy | Acoustic cooling engine |
-
1994
- 1994-03-18 FR FR9403185A patent/FR2717563B1/fr not_active Expired - Lifetime
-
1995
- 1995-03-14 EP EP95400546A patent/EP0672873A1/de not_active Ceased
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1511438A (fr) * | 1966-02-21 | 1968-01-26 | British Oxygen Co Ltd | Procédé de réfrigération des gaz par tube à impulsions |
US4722201A (en) * | 1986-02-13 | 1988-02-02 | The United States Of America As Represented By The United States Department Of Energy | Acoustic cooling engine |
Non-Patent Citations (3)
Title |
---|
C. WANG, P. WU AND Z. CHEN: "MODIFIED ORIFICE PULSE TUBE REFRIGERATOR WITHOUT A RESERVOIR", CRYOGENICS, vol. 34, no. 1, pages 31 - 36, XP000426909 * |
CHAO WANG, PEIYI WU AND ZHONGQI CHEN: "NUMERICAL MODELLING OF AN ORIFICE PULSE TUBE REFRIGERATOR.", CRYOGENICS, vol. 32, no. 9, pages 785 - 790, XP000316594 * |
ZHU SHAOWEI, WU PEIYI AND CHEN ZHONGQI: "DOUBLE INLET PULSE TUBE REFRIGERATORS: AN IMPORTANT IMPROVEMENT.", CRYOGENICS, vol. 30, no. 6, pages 514 - 520, XP000127929 * |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0860667A1 (de) * | 1997-02-21 | 1998-08-26 | Cryotechnologies S.A. | Konditionierungsanordnung von bei Tiefsttemperatur arbeitenden Bauteilen |
FR2760076A1 (fr) * | 1997-02-21 | 1998-08-28 | Cryotechnologies | Dispositif de refroidissement cryogenique a oscillateur de pression a double effet |
FR2760075A1 (fr) * | 1997-02-21 | 1998-08-28 | Cryotechnologies | Systeme de conditionnement de composants fonctionnant a temperature cryogenique |
EP1072851A1 (de) * | 1999-07-29 | 2001-01-31 | CSP Cryogenic Spectrometers GmbH | Kühlvorrichtung |
WO2001031987A1 (en) * | 1999-10-27 | 2001-05-03 | Abb Research Ltd. | An arrangement at an electronical or electrical apparatus |
WO2002046665A1 (de) * | 2000-12-09 | 2002-06-13 | Forschungszentrum Karlsruhe Gmbh | Expander in einer pulsrohrkühlerstufe |
EP1431682A1 (de) * | 2001-08-30 | 2004-06-23 | Aisin Seiki Kabushiki Kaisha | Pulsationsrohrkühlmaschine |
EP1431682A4 (de) * | 2001-08-30 | 2009-02-25 | Aisin Seiki | Pulsationsrohrkühlmaschine |
EP2239590A1 (de) * | 2009-04-08 | 2010-10-13 | Société Française de Détecteurs Infrarouges - SOFRADIR | Vorrichtung zur Erkennung der elektro-optischen Leistungsmerkmale einer Halbleiterkomponente |
FR2944357A1 (fr) * | 2009-04-08 | 2010-10-15 | Fr De Detecteurs Infrarouges S | Dispositif pour realiser la caracterisation des performances electro-optiques d'un composant semi-conducteur |
US8310266B2 (en) | 2009-04-08 | 2012-11-13 | Societe Francaise De Detecteurs Infrarouges-Sofradir | Device for characterizing the electro-optical performance of a semiconductor component |
CN103808057A (zh) * | 2014-01-23 | 2014-05-21 | 浙江大学 | 一种回收声功的级联型脉管制冷机 |
CN103808057B (zh) * | 2014-01-23 | 2016-01-20 | 浙江大学 | 一种回收声功的级联型脉管制冷机 |
CN104613664A (zh) * | 2015-02-10 | 2015-05-13 | 浙江大学 | 一种可达卡诺效率的多级级联型脉管制冷机及制冷方法 |
Also Published As
Publication number | Publication date |
---|---|
FR2717563B1 (fr) | 1996-04-19 |
FR2717563A1 (fr) | 1995-09-22 |
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