EP0478912A3 - Working disc for lapping, honing and polishing machine - Google Patents

Working disc for lapping, honing and polishing machine Download PDF

Info

Publication number
EP0478912A3
EP0478912A3 EP19910112294 EP91112294A EP0478912A3 EP 0478912 A3 EP0478912 A3 EP 0478912A3 EP 19910112294 EP19910112294 EP 19910112294 EP 91112294 A EP91112294 A EP 91112294A EP 0478912 A3 EP0478912 A3 EP 0478912A3
Authority
EP
European Patent Office
Prior art keywords
honing
lapping
polishing machine
working disc
disc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP19910112294
Other languages
German (de)
Other versions
EP0478912A2 (en
Inventor
Gerhard Wittstock
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Peter Wolters AG
Original Assignee
Peter Wolters AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Peter Wolters AG filed Critical Peter Wolters AG
Publication of EP0478912A2 publication Critical patent/EP0478912A2/en
Publication of EP0478912A3 publication Critical patent/EP0478912A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/06—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with inserted abrasive blocks, e.g. segmental
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/12—Lapping plates for working plane surfaces

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
EP19910112294 1990-08-31 1991-07-23 Working disc for lapping, honing and polishing machine Withdrawn EP0478912A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19904027627 DE4027627A1 (en) 1990-08-31 1990-08-31 WORKING DISC FOR LAEPP, HONING AND POLISHING MACHINES
DE4027627 1990-08-31

Publications (2)

Publication Number Publication Date
EP0478912A2 EP0478912A2 (en) 1992-04-08
EP0478912A3 true EP0478912A3 (en) 1992-06-03

Family

ID=6413339

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19910112294 Withdrawn EP0478912A3 (en) 1990-08-31 1991-07-23 Working disc for lapping, honing and polishing machine

Country Status (2)

Country Link
EP (1) EP0478912A3 (en)
DE (1) DE4027627A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5575707A (en) * 1994-10-11 1996-11-19 Ontrak Systems, Inc. Polishing pad cluster for polishing a semiconductor wafer
DE19939258A1 (en) * 1999-08-19 2001-03-08 Wacker Siltronic Halbleitermat Tool and method for abrasively machining a substantially flat surface
DE10060967B4 (en) * 2000-12-06 2006-05-11 Nagel Maschinen- Und Werkzeugfabrik Gmbh Method and honing device for honing and reference device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3343306A (en) * 1965-01-11 1967-09-26 Engelhard Hanovia Inc Surfacing system
US3369330A (en) * 1965-08-24 1968-02-20 Barnes Drill Co Automatic abrading machine
GB2038214A (en) * 1978-12-21 1980-07-23 Dianite Coatings Ltd Abrasive tool
DE2922776A1 (en) * 1979-06-05 1980-12-11 Walter Hunger Ceramic or plastics honing stone - has metal rib whose one edge forms part of honing surface

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01103267A (en) * 1987-10-15 1989-04-20 Toshiba Ceramics Co Ltd Grinding ceramic tool

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3343306A (en) * 1965-01-11 1967-09-26 Engelhard Hanovia Inc Surfacing system
US3369330A (en) * 1965-08-24 1968-02-20 Barnes Drill Co Automatic abrading machine
GB2038214A (en) * 1978-12-21 1980-07-23 Dianite Coatings Ltd Abrasive tool
DE2922776A1 (en) * 1979-06-05 1980-12-11 Walter Hunger Ceramic or plastics honing stone - has metal rib whose one edge forms part of honing surface

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 13, no. 318 (M-852)19. Juli 1989 & JP-A-1 103 267 ( TOSHIBA CERAMICS CO LTD ) 20. April 1989 *

Also Published As

Publication number Publication date
EP0478912A2 (en) 1992-04-08
DE4027627A1 (en) 1992-03-05

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