EP0465212A2 - Têtes d'imprimante à jet d'encre - Google Patents

Têtes d'imprimante à jet d'encre Download PDF

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Publication number
EP0465212A2
EP0465212A2 EP91305984A EP91305984A EP0465212A2 EP 0465212 A2 EP0465212 A2 EP 0465212A2 EP 91305984 A EP91305984 A EP 91305984A EP 91305984 A EP91305984 A EP 91305984A EP 0465212 A2 EP0465212 A2 EP 0465212A2
Authority
EP
European Patent Office
Prior art keywords
layer
resistor
resistors
ink
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP91305984A
Other languages
German (de)
English (en)
Other versions
EP0465212A3 (en
Inventor
Abdul M. Elhatem
Steven A. Buhler
Mohammed M. Mojaradi
Putul D. Patel
Parviz P. Mazdiyazni
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Publication of EP0465212A2 publication Critical patent/EP0465212A2/fr
Publication of EP0465212A3 publication Critical patent/EP0465212A3/en
Withdrawn legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/13—Heads having an integrated circuit

Definitions

  • heater board 20 includes an electrically-insulated silicon substrate 27 with a major surface 28 on which there is patterned CMOS drive circuitry 16 and channel stops 30.
  • drive circuitry 16 could be fabricated using other fabrication techniques.
  • Major surface 28, drive circuitry 16, and channel stops 30 are covered by a passivation layer 32, which consists of a 1 f..lm thick layer of silicon dioxide.
  • passivation layer 32 On the top surface of passivation layer 32 there are patterned heater resistors 14, addressing electrodes 18, a power bus 34 for supplying power to resistors 14, and terminals 36 connected to addressing electrodes 18 and power bus 34, and aluminum interconnects 38.
  • Aluminum interconnects 38 connect heating resistors 14 to power bus 34, and connect drive circuitry 16 to respective addressing electrodes 18 and respective heating resistors 14.
  • each resistor 14 has ends 56 that abut its respective contact regions 54, and ends 56 lie beneath and approximately coincident with edges 58 of the portion of the top surface of tantalum regions 46 not covered by passivation layer 48. In this manner, resistors 14 are separated from the ink only by silicon oxide regions 42, silicon nitride regions 44 and tantalum regions 46.
  • Field oxide regions 60 are constructed in the same steps used to fabricate channel stops 30. In this manner, field oxide regions 60 are constructed without adding any steps to the conventional CMOS fabrication process, or other conventional fabrication process used to fabricate drive circuitry 16.
  • Passivation layer 32 includes three separate layers, a middle layer 62 doped with phosphorus, a non-doped underglaze 64, and non-doped overglaze mesas 66.
  • Middle layer 62 is doped with phosphorus to facilitate reflow of middle layer 62.
  • Underglaze 64 is positioned below, in contact and coextensive with, middle layer 62, and above drive circuitry 16 and field oxide regions 60. Underglaze 64 prevents phosphorus from middle doped layer 62 from diffusing to drive circuitry 16 and altering the electrical characteristics, particularly the electrical characteristics in the drift regions (not shown).
  • One overglaze mesa 66 is positioned between middle layer 62 and resistors 14. Overglaze mesas 66 prevent phosphorus from middle layer 62 from diffusing to resistors 14 and altering their electrical characteristics.
  • middle layer 62, underglaze 64 and mesas 66 could be used by themselves to provide a reliable printhead 10.
EP19910305984 1990-07-02 1991-07-02 Ink jet printheads Withdrawn EP0465212A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US54756790A 1990-07-02 1990-07-02
US547567 2000-04-12

Publications (2)

Publication Number Publication Date
EP0465212A2 true EP0465212A2 (fr) 1992-01-08
EP0465212A3 EP0465212A3 (en) 1992-11-25

Family

ID=24185172

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19910305984 Withdrawn EP0465212A3 (en) 1990-07-02 1991-07-02 Ink jet printheads

Country Status (3)

Country Link
EP (1) EP0465212A3 (fr)
JP (1) JPH04232751A (fr)
CA (1) CA2044402A1 (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4532530A (en) * 1984-03-09 1985-07-30 Xerox Corporation Bubble jet printing device
US4719477A (en) * 1986-01-17 1988-01-12 Hewlett-Packard Company Integrated thermal ink jet printhead and method of manufacture
US4935752A (en) * 1989-03-30 1990-06-19 Xerox Corporation Thermal ink jet device with improved heating elements
EP0396315A1 (fr) * 1989-05-01 1990-11-07 Xerox Corporation Tête d'impression thermique à jet d'encre avec des éléments chauffants générant des bulles

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4532530A (en) * 1984-03-09 1985-07-30 Xerox Corporation Bubble jet printing device
US4719477A (en) * 1986-01-17 1988-01-12 Hewlett-Packard Company Integrated thermal ink jet printhead and method of manufacture
US4935752A (en) * 1989-03-30 1990-06-19 Xerox Corporation Thermal ink jet device with improved heating elements
EP0396315A1 (fr) * 1989-05-01 1990-11-07 Xerox Corporation Tête d'impression thermique à jet d'encre avec des éléments chauffants générant des bulles

Also Published As

Publication number Publication date
EP0465212A3 (en) 1992-11-25
CA2044402A1 (fr) 1992-01-03
JPH04232751A (ja) 1992-08-21

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